CN219829248U - Sealing mechanism of vacuum drying groove - Google Patents

Abstract

The utility model discloses a sealing mechanism of a vacuum drying groove, which belongs to the technical field of silicon wafer drying equipment and comprises a groove body provided with a notch; one surface is in seamless connection with the notch, and the other surface is provided with a sealing strip pressing plate of a lip-shaped sealing ring; the groove cover is covered with a groove opening to form a groove inner cover of the inner cavity by matching with the groove body, and the periphery of the groove inner cover is provided with a groove cover sealing plate matched with a sealing strip pressing plate to seal the inner cavity; a slot cover bracket; a power assembly for driving the slot cover bracket to pull the slot cover to move along the vertical direction and the horizontal direction relative to the slot opening; and one end of the elastic pre-pressing assembly is connected with the groove cover bracket, and the other end of the elastic pre-pressing assembly is connected with the groove cover sealing plate. According to the technical scheme, the sealing performance of the drying groove is improved, and the drying efficiency of the silicon wafer is further improved.

Description

A sealing mechanism for a vacuum drying tank

Technical field

The utility model belongs to the technical field of silicon wafer drying equipment, and specifically relates to a sealing mechanism of a vacuum drying tank.

Background technique

In the silicon wafer drying process, the rotating basket containing silicon material needs to be placed into the drying tank, the drying tank is covered with a lid, and then the cavity in the drying tank is evacuated for drying. Specifically, when the slot cover is larger than or equal to the slot diameter, the robot arm is used to move it to or out of the slot. After the robot arm moves, the probability of deviation in the slot cover that closes the slot body again increases. , as the number of movements increases, the slot cover and the tank body will have gaps due to inaccurate alignment when closing each other. Moreover, when the slot cover and the tank body are closed, they need to move slowly until they are closed. If they move to close quickly, the two will There is a collision between them, and the tank cover will be deformed due to the impact, and a gap will also occur. The above two situations will reduce the sealing effect of the drying tank, reduce the vacuuming efficiency of the cavity in the tank, the vacuum cannot be maintained, and the silicon material in the tank cannot be Until it is fully dried, the problem of secondary drying will occur.

Utility model content

In order to solve the above technical problems, the technical solution of the present invention is: a sealing mechanism of a vacuum drying tank, including a tank body with a slot;

One side is seamlessly connected to the notch, and the other side is equipped with a sealing strip pressure plate with a lip seal ring;

The inner tank cover is used to cover the slot opening to cooperate with the tank body to form the inner cavity. The outer periphery of the inner tank cover is provided with a slot cover sealing plate that cooperates with the sealing strip pressure plate to seal the inner cavity;

slot cover bracket;

A power component that drives the slot inner cover bracket to pull the slot cover to move vertically and horizontally relative to the slot opening;

And one end is connected to the slot cover bracket, and the other end is connected to a number of elastic preloading components of the slot cover sealing plate.

Specifically, it also includes a vacuum device communicating with the inner cavity.

Specifically, the slot cover bracket includes an outer bracket fixed relative to the tank body, an inner bracket connected to a number of elastic preloading components, and a number of lifting cylinders that drive the outer bracket and the inner bracket to move relative. The inner bracket includes a number of crisscrossed support frames.

Specifically, the support frame includes a first crossbeam, a second crossbeam, and first, second, third and fourth longitudinal beams arranged perpendicularly to the first and second crossbeams. The second longitudinal beam A lifting cylinder is provided on the third longitudinal beam, and an elastic preload assembly is provided on the first crossbeam, the second crossbeam, the first longitudinal beam and the fourth longitudinal beam.

Specifically, the outer bracket includes a first support beam with guide rails, a second support beam disposed between two adjacent first support beams, a support column supporting the first support beam and the second support beam, and a driving beam. A traverse cylinder that lifts the cylinder and moves along the guide rail.

Specifically, the guide rail is a round guide rail, and the bottom of the lifting cylinder is provided with a through hole for the round guide rail to pass through.

Specifically, the inner bracket is provided with a slot outer cover fixed on the support frame on the side facing away from the slot inner cover.

Specifically, the tank cover sealing plate is welded to a reinforced steel pipe, and the middle surface of the tank inner cover on the side facing away from the tank cover bracket is welded to the reinforced steel pipe.

Specifically, the elastic preload assembly includes a screw connected to the groove cover sealing plate through an upper fixed plate, an adjusting nut screwed to the screw, and a compression elastic member that is sleeved on the outer periphery of the screw and has one end connected to the adjusting nut and the other end connected to the upper fixed plate. .

Compared with the existing technology, the technical solution provided by the utility model has the following advantages:

1. Set up a slot cover bracket and a power assembly that move the slot cover vertically and laterally in sequence. The slot cover can be closed quickly and accurately, with high efficiency and increased fault tolerance. It can also reduce the position deviation of the tank body and the slot cover, which can effectively Ensure the sealing performance of the tank cover and tank body, so that the tank body can quickly reach and maintain the specified vacuum degree during vacuuming, thereby improving drying efficiency and improving the overall machine yield. The silicon material in the tank can be fully dried at one time. Drying efficiency is improved.

2. Set the sealing strip pressure plate to cooperate with the tank cover sealing plate to increase the area between the cover plates and improve the tightness of the connection. At the same time, it cooperates with the elastic preloading component to buffer the closing impact of the tank body and the tank cover to ensure the rapid closing of the drying tank. And prevent its deformation, improve the sealing, thereby improving the efficiency of vacuuming the drying tank.

Description of the drawings

Figure 1 is an overall structural diagram of the sealing mechanism of the vacuum drying tank in the embodiment of the present utility model;

Figure 2 is a structural diagram of the mating surface of the sealing strip pressure plate and the groove cover in the embodiment of the present utility model;

Figure 3 is a connection diagram of the slot cover in the embodiment of the present utility model;

Figure 4 is a top view of the groove cover in the embodiment of the present utility model;

Figure 5 is a bottom view of the groove cover in the embodiment of the present utility model;

Figure 6 is a structural diagram of the tank outer cover in the embodiment of the present utility model;

Figure 7 is a structural diagram of the outer bracket in the embodiment of the present utility model.

Figure 8 is a connection diagram of the traverse cylinder in the embodiment of the present utility model;

Figure 9 is a structural diagram of the elastic preloading component in the embodiment of the present invention.

Shown in the picture: 10. Tank body; 11. Sealing strip pressure plate; 20. Tank cover; 21. Tank inner cover; 22. Tank outer cover; 23. Tank cover sealing plate; 24. Reinforced steel pipe; 30. Tank cover bracket ; 31. External bracket; 311. First support beam; 312. Second support beam; 313. Support column; 314. Circular guide rail; 32. Inner bracket; 321. First beam; 322. Second beam; 323. One longitudinal beam; 324, second longitudinal beam; 325, third longitudinal beam; 326, fourth longitudinal beam; 33, lifting cylinder; 34, mounting plate; 35, slider; 36, traverse cylinder; 40, vacuuming Device; 50. Elastic preloading component; 51. Screw; 52. Adjusting nut; 53. Gasket; 54. Compression spring; 55. Spring compression cap; 56. Upper fixed plate; 57. Lower fixed plate.

Detailed ways

For ease of understanding, the sealing mechanism of the vacuum drying tank is described below with reference to embodiments. It should be understood that these embodiments are only used to illustrate the present invention and are not intended to limit the scope of the present invention.

In the description of the present utility model, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner" and "outer" The indicated orientations or positional relationships are based on the orientations and positional relationships shown in the drawings. They are only for the convenience of describing the present invention and simplifying the description. They are not intended to indicate or imply that the device or element referred to must have a specific orientation or a specific orientation. The orientation structure and operation of the invention cannot be construed as limitations of the present invention. Furthermore, the terms “first”, “second” and “third” are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the present utility model, it should be noted that, unless otherwise clearly stated and limited, the terms "installation", "connection" and "connection" should be understood in a broad sense. For example, it can be a fixed connection or a removable connection. Detachable connection or integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium; it can be an internal connection between two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood in specific situations.

As shown in Figures 1 to 2, a sealing mechanism of a vacuum drying tank includes a tank body 10 with a slot, a tank cover 20 that covers the slot to cooperate with the tank body 10 to form an inner cavity, and a connecting tank cover 20 The slot cover bracket 30 and the vacuum device 40 connected to the inner cavity; the sealing mechanism in this embodiment can avoid the poor vacuuming effect of the tank body 10 due to poor sealing of the slot cover 20, resulting in low drying efficiency and low drying efficiency of the materials. It solves the problem of poor performance, has simple structure, low cost and reliable operation.

A sealing strip pressure plate 11 is provided at the notch of the tank body 10 for sealing between the tank cover 20 and the tank body 10. The sealing strip pressure plate 11 has a smooth and flat first surface and a second surface arranged opposite to the first surface. One side is installed in a sealed and seamless fit with the slot of the tank body 10, and the second side is installed with two identical lip-shaped sealing structures, thereby forming a lip-shaped sealing ring with a sealing groove, which cooperates with the tank cover sealing plate 23 during operation. to seal the inner cavity;

As shown in Figures 3 to 6, the slot cover 20 includes an inner slot cover 21 covering the slot opening, an outer slot cover 22 disposed above the inner slot cover 21, and a slot cover sealing plate 23 welded to the outer periphery of the inner slot cover 21. The cover sealing plate 23 is welded with a reinforced steel pipe 24, and the middle surface of the tank inner cover 21 facing away from the tank cover bracket 30 is welded to the reinforced steel pipe 24 to increase the strength. The tank outer cover 22 is arranged on the side of the inner bracket 32 facing away from the tank inner cover 21. And securely connect both ends of the support frame.

As shown in Figure 1, the slot cover bracket 30 includes an outer bracket 31 fixed relative to the tank body 10, an inner bracket 32 connected to a number of elastic preloading components 50, and a number of lifting cylinders 33 that drive the outer bracket 31 and the inner bracket 32 to move relative to each other. The bracket 32 includes a number of crisscrossed support frames, in which the lifting cylinder 33 drives the slot cover 20 to open and close; a number of elastic preloading components 50 are distributed around the slot cover sealing plate 23 and the lower fixed plate 57 at the bottom is welded to the slot cover. On the sealing plate 23, this welding arrangement, as well as the arrangement of the groove inner cover 21 and the reinforced steel pipe 24, not only ensure the sealing performance of the groove cover sealing plate 23 and the sealing strip pressure plate 11, but also strengthen the strength of the groove cover sealing plate 23, making it difficult to deformation; the lower end of the lifting cylinder 33 is provided with a mounting plate 34, and the mounting plate 34 is connected to a slider 35 that slides and fits the circular guide rail 314; the cross section of the circular guide rail is circular, and each spring preload assembly is connected to the groove cover sealing plate 23 Constituting the overall structure of the tank cover 20, under the telescopic control of the lifting cylinder 33, the tank cover sealing plate 23 contacts, preloads and compresses the sealing strip pressure plate 11 to achieve good sealing.

As shown in Figure 3, the support frame includes a first crossbeam 321, a second crossbeam 322, and a first longitudinal beam 323, a second longitudinal beam 324, a third longitudinal beam 325 and a third longitudinal beam arranged perpendicularly to the first crossbeam 321 and the second crossbeam 322. The four longitudinal beams 326, the second longitudinal beam 324 and the third longitudinal beam 325 are provided with a lifting cylinder 33. The bottom of the lifting cylinder 33 is provided with a through hole for the circular guide rail 314 to pass through. The outer sides of the first longitudinal beam 323 and the fourth longitudinal beam 326 are fixedly connected with the upper fixing plate 56 of the elastic preloading assembly 50, which is used to install the elastic preloading assembly 50. Therefore, the outer bracket 31 is used to install the traverse cylinder 36 and the circular cylinder. The guide rail 314 also bears the force and load of the entire slot cover 20 .

As shown in FIGS. 7 and 8 , the outer bracket 31 includes four first support beams 311 with circular guide rails 314 , two second support beams 312 disposed between two adjacent first support beams 311 , and a support beam 312 . There are six support columns 313 below the first support beam 311 and the second support beam 312 and a traverse cylinder 36 that drives the lifting cylinder 33 to move along the circular guide rail 314. The two second support beams 312 are respectively connected to the first support beam 311 and close to the slot. At one end and in the middle of the body 10, six support columns 313 are respectively connected to the first support beam 311 and are 90° with the second support beam 312 for supporting the first support beam 311. A traverse cylinder 36 is installed on the first support beam 311 for For the lateral transplantation of the groove cover 20, the lateral movement cylinder 36 and the lifting cylinder 33 are provided with gas from an air source, and the air source can be provided by a high-pressure blower.

As shown in Figure 9, the elastic preload assembly 50 includes a screw 51, an adjusting nut 52, a washer 53, a compression spring 54, a spring compression cap 55, an upper fixed plate 56 and a lower fixed plate 57. The upper end of the screw 51 passes through the upper fixed middle. Through hole, the lower end is threaded to adjust the nut 52, the upper fixed plate 56 is fixedly connected to the groove cover sealing plate 23, the adjusting nut 52 can rotate relative to the lower fixed plate 57, the lower fixed plate 57 is fixedly connected to the cao cover sealing plate, and the upper fixed plate A spring compression cap 55 is fixedly connected below 56, a gasket 53 is fixedly connected above the adjusting nut 52, a compression spring 54 is connected between the gasket 53 and the top wall of the spring compression cap 55, and the compression spring 54 is sleeved on the outside of the screw rod 51 , adjust the pre-pressure of the compression spring 54 by tightening and loosening the adjusting nut 52, so that the surrounding area of the groove cover 20 is evenly pressed on the sealing strip pressure plate 11.

Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the present invention, but not to limit it. Although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions recorded in the foregoing embodiments, or make equivalent substitutions for some or all of the technical features. However, these modifications or substitutions do not cause the essence of the corresponding technical solution to deviate from the scope of the technical solution of each embodiment of the present invention.

Claims (9)

1. A sealing mechanism for a vacuum drying tank, which is characterized in that it includes a tank body with a notch; One side is seamlessly connected to the notch, and the other side is equipped with a sealing strip pressure plate with a lip seal ring; The inner tank cover is used to cover the slot opening to cooperate with the tank body to form the inner cavity. The outer periphery of the inner tank cover is provided with a slot cover sealing plate that cooperates with the sealing strip pressure plate to seal the inner cavity; slot cover bracket; A power component that drives the slot inner cover bracket to pull the slot cover to move vertically and horizontally relative to the slot; And one end is connected to the slot cover bracket, and the other end is connected to a number of elastic preloading components of the slot cover sealing plate. 2. The sealing mechanism of the vacuum drying tank according to claim 1, further comprising a vacuum device communicating with the inner cavity. 3. The sealing mechanism of the vacuum drying tank according to claim 1, wherein the tank cover bracket includes an outer bracket fixed relative to the tank body, an inner bracket connected to a plurality of elastic pre-pressure components, and a plurality of driving outer brackets. The inner bracket is a lifting cylinder that moves relatively. The inner bracket includes a number of crisscrossed support frames. 4. The sealing mechanism of the vacuum drying tank according to claim 3, wherein the support frame includes a first beam, a second beam, a first longitudinal beam and a third longitudinal beam arranged perpendicularly to the first beam and the second beam. The second longitudinal beam, the third longitudinal beam and the fourth longitudinal beam are provided with lifting cylinders, and the first beam, the second beam, the first longitudinal beam and the fourth longitudinal beam are provided with elastic cylinders. Preloaded components. 5. The sealing mechanism of the vacuum drying tank according to claim 3, wherein the outer bracket includes a first support beam with guide rails and a second support beam arranged between two adjacent first support beams. A support beam, a support column that supports the first support beam and the second support beam, and a traverse cylinder that drives the lifting cylinder to move along the guide rail. 6. The sealing mechanism of the vacuum drying tank according to claim 5, wherein the guide rail is a circular guide rail with a circular cross-section, and a through hole is provided at the bottom of the lifting cylinder for the circular guide rail to pass through. 7. The sealing mechanism of the vacuum drying tank according to claim 3, wherein the inner bracket is provided with an outer tank cover fixed on the support frame on the side facing away from the inner tank cover. 8. The sealing mechanism of the vacuum drying tank according to claim 1, characterized in that the tank cover sealing plate is welded to a reinforced steel pipe, and the middle surface of the tank inner cover away from the tank cover bracket is welded to the reinforced steel pipe. . 9. The sealing mechanism of the vacuum drying tank according to claim 1, characterized in that the elastic pre-pressure component includes a screw connected to the tank cover sealing plate through an upper fixed plate, an adjusting nut screwed to the screw, and an adjusting nut sleeved on the tank cover. The outer periphery of the screw rod is connected to an adjusting nut at one end, and the compression elastic member of the fixing plate is connected at the other end.