CN219829248U - Sealing mechanism of vacuum drying groove - Google Patents
Sealing mechanism of vacuum drying groove Download PDFInfo
- Publication number
- CN219829248U CN219829248U CN202321139712.2U CN202321139712U CN219829248U CN 219829248 U CN219829248 U CN 219829248U CN 202321139712 U CN202321139712 U CN 202321139712U CN 219829248 U CN219829248 U CN 219829248U
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- CN
- China
- Prior art keywords
- groove
- cover
- support
- sealing
- vacuum drying
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- 238000007789 sealing Methods 0.000 title claims abstract description 64
- 238000001291 vacuum drying Methods 0.000 title claims abstract description 17
- 230000006835 compression Effects 0.000 claims description 16
- 238000007906 compression Methods 0.000 claims description 16
- 230000000712 assembly Effects 0.000 claims description 6
- 238000000429 assembly Methods 0.000 claims description 6
- 229910001294 Reinforcing steel Inorganic materials 0.000 claims description 4
- 238000001035 drying Methods 0.000 abstract description 14
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 4
- 229910052710 silicon Inorganic materials 0.000 abstract description 4
- 239000010703 silicon Substances 0.000 abstract description 4
- 238000010586 diagram Methods 0.000 description 7
- 229910000831 Steel Inorganic materials 0.000 description 4
- 238000005086 pumping Methods 0.000 description 4
- 239000010959 steel Substances 0.000 description 4
- 239000002210 silicon-based material Substances 0.000 description 3
- 125000006850 spacer group Chemical group 0.000 description 3
- 238000005056 compaction Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000003139 buffering effect Effects 0.000 description 1
- 210000005056 cell body Anatomy 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000013011 mating Effects 0.000 description 1
- 230000003014 reinforcing effect Effects 0.000 description 1
- 238000003466 welding Methods 0.000 description 1
Landscapes
- Drying Of Solid Materials (AREA)
Abstract
The utility model discloses a sealing mechanism of a vacuum drying groove, which belongs to the technical field of silicon wafer drying equipment and comprises a groove body provided with a notch; one surface is in seamless connection with the notch, and the other surface is provided with a sealing strip pressing plate of a lip-shaped sealing ring; the groove cover is covered with a groove opening to form a groove inner cover of the inner cavity by matching with the groove body, and the periphery of the groove inner cover is provided with a groove cover sealing plate matched with a sealing strip pressing plate to seal the inner cavity; a slot cover bracket; a power assembly for driving the slot cover bracket to pull the slot cover to move along the vertical direction and the horizontal direction relative to the slot opening; and one end of the elastic pre-pressing assembly is connected with the groove cover bracket, and the other end of the elastic pre-pressing assembly is connected with the groove cover sealing plate. According to the technical scheme, the sealing performance of the drying groove is improved, and the drying efficiency of the silicon wafer is further improved.
Description
Technical Field
The utility model belongs to the technical field of silicon wafer drying equipment, and particularly relates to a sealing mechanism of a vacuum drying groove.
Background
In the silicon wafer drying process, a rotary basket cylinder filled with silicon materials is required to be placed into a drying groove, the drying groove is covered with a groove cover, and then a cavity in the drying groove is vacuumized to be dried. Specifically, the cover body with the size larger than or equal to the caliber of the notch is covered by the notch, the mechanical arm is utilized to move the cover body to the notch or move out of the notch, the probability of deviation of the groove cover of the groove body is increased when the mechanical arm moves and covers the groove body again, along with the increase of the moving times, the groove cover and the groove body are mutually closed to generate gaps due to inaccurate alignment, the cover between the groove cover and the groove body needs to be slowly moved until the cover body is closed, if the cover body is quickly moved to be closed, the cover body is impacted, the groove cover is deformed due to the impact and also generates the gaps, the sealing effect of the drying groove is reduced under the two conditions, the vacuumizing efficiency of the inner cavity of the groove is reduced, the vacuum degree cannot be kept, the silicon material in the groove cannot be sufficiently dried, and the problem of secondary drying can be caused.
Disclosure of Invention
In order to solve the technical problems, the technical scheme of the utility model is as follows: a sealing mechanism of a vacuum drying groove comprises a groove body provided with a notch;
one surface is in seamless connection with the notch, and the other surface is provided with a sealing strip pressing plate of a lip-shaped sealing ring;
the groove cover is covered with a groove opening to form a groove inner cover of the inner cavity by matching with the groove body, and the periphery of the groove inner cover is provided with a groove cover sealing plate matched with a sealing strip pressing plate to seal the inner cavity;
a slot cover bracket;
a power assembly for driving the slot cover bracket to pull the slot cover to move along the vertical direction and the horizontal direction relative to the slot opening;
and one end of the elastic pre-pressing assembly is connected with the groove cover bracket, and the other end of the elastic pre-pressing assembly is connected with the groove cover sealing plate.
Specifically, the vacuum-pumping device communicated with the inner cavity is also included.
Specifically, the groove cover support comprises an outer support fixed relative to the groove body, an inner support connected with a plurality of elastic pre-pressing assemblies and a plurality of lifting cylinders for driving the outer support and the inner support to move relatively, wherein the inner support comprises a plurality of criss-cross support frames.
Specifically, the support frame includes first crossbeam, second crossbeam and perpendicular first crossbeam and the first longeron, second longeron, third longeron and the fourth longeron that second longeron set up, is provided with the lift cylinder on second longeron and the third longeron, is provided with elastic pre-compaction subassembly on first crossbeam, second crossbeam, first longeron and the fourth longeron.
Specifically, the outer support comprises first support beams paved with guide rails, second support beams arranged between two adjacent first support beams, support columns for supporting the first support beams and the second support beams, and a transverse moving cylinder for driving the lifting cylinder to move along the guide rails.
Specifically, the guide rail is a round guide rail, and a through hole for the round guide rail to pass through is formed in the bottom of the lifting cylinder.
Specifically, the side of the inner bracket, which is away from the inner cover of the groove, is provided with an outer cover of the groove, which is fixed on the supporting frame.
Specifically, the groove cover sealing plate is welded with a reinforced steel pipe, and the middle surface of the side of the groove cover, which faces away from the groove cover bracket, is welded with the reinforced steel pipe.
Specifically, the elastic pre-pressing assembly comprises a screw rod connected with the slot cover sealing plate through an upper fixing plate, an adjusting nut screwed with the screw rod, and a compression elastic piece sleeved on the periphery of the screw rod, wherein one end of the compression elastic piece is connected with the adjusting nut, and the other end of the compression elastic piece is connected with the upper fixing plate.
Compared with the prior art, the technical scheme provided by the utility model has the following advantages:
1. the groove cover support and the power assembly of the groove cover are arranged vertically and transversely, the groove opening is covered fast and accurately, the cover closing efficiency is high, the fault tolerance rate is increased, the deviation of the closing positions of the groove body and the groove cover is reduced, the sealing performance of the groove cover and the groove body can be effectively guaranteed, the groove body can reach and maintain the specified vacuum degree rapidly when vacuumized, the drying efficiency is improved, the yield of the whole machine is improved, the silicon material in the groove can be dried fully once, and the drying efficiency is improved.
2. Set up sealing strip clamp plate and capping closing plate cooperation, increase the area between the apron, improve and connect the compactness, cooperation elasticity pre-compaction subassembly buffering cell body and capping's closed striking simultaneously ensures the quick closure of stoving groove and prevents its deformation, improves the leakproofness, and then carries the efficiency of stoving groove evacuation.
Drawings
FIG. 1 is a block diagram of a sealing mechanism of a vacuum drying tank in an embodiment of the present utility model;
FIG. 2 is a diagram showing the mating surfaces of the seal strip pressing plate and the groove cover in the embodiment of the utility model;
FIG. 3 is a diagram of a slot cover attachment in an embodiment of the utility model;
FIG. 4 is a top view of a slot cover in an embodiment of the utility model;
FIG. 5 is a bottom view of the slot cover in an embodiment of the utility model;
FIG. 6 is a block diagram of the outside of the tank in an embodiment of the present utility model;
FIG. 7 is a diagram of the external stent structure in an embodiment of the present utility model
FIG. 8 is a cross cylinder connection diagram in an embodiment of the present utility model;
FIG. 9 is a block diagram of an elastomeric precompression assembly in an embodiment of the present utility model.
The figure shows: 10. a tank body; 11. sealing strip pressing plates; 20. a slot cover; 21. a tank inner cover; 22. a slot cover; 23. a slot cover sealing plate; 24. reinforcing the steel pipe; 30. a slot cover bracket; 31. an outer bracket; 311. a first support beam; 312. a second support beam; 313. a support column; 314. a circular guide rail; 32. an inner bracket; 321. a first cross beam; 322. a second cross beam; 323. a first stringer; 324. a second stringer; 325. a third stringer; 326. a fourth stringer; 33. a lifting cylinder; 34. a mounting plate; 35. a slide block; 36. a traversing cylinder; 40. a vacuum pumping device; 50. an elastic pre-pressing assembly; 51. a screw; 52. an adjusting nut; 53. a gasket; 54. a compression spring; 55. a spring compression cap; 56. an upper fixing plate; 57. and a lower fixing plate.
Detailed Description
For ease of understanding, the sealing mechanism of the vacuum drying tunnel is described below in connection with the embodiments, which are to be understood as merely illustrative of the present utility model and not limiting the scope of the utility model.
In the description of the present utility model, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions and positional relationships shown in the drawings, are merely for convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.
As shown in fig. 1 to 2, a sealing mechanism of a vacuum drying tank comprises a tank body 10 provided with a notch, a tank cover 20 covering the notch to be matched with the tank body 10 to form an inner cavity, a tank cover bracket 30 connected with the tank cover 20, and a vacuum pumping device 40 communicated with the inner cavity; the sealing mechanism in this embodiment can avoid the problem that the vacuum pumping effect of the tank body 10 is poor due to poor sealing of the tank cover 20, resulting in low drying efficiency and poor drying of the material, and has simple structure, low cost and reliable operation.
The groove opening of the groove body 10 is provided with a sealing strip pressing plate 11 for sealing between the groove cover 20 and the groove body 10, the sealing strip pressing plate 11 is provided with a smooth and flat first surface and a second surface opposite to the first surface, the first surface and the groove opening of the groove body 10 are installed in a sealing and seamless fit manner, and the second surface is provided with two identical lip sealing structures, so that a lip sealing ring with a sealing groove is formed, and the lip sealing ring is matched with the groove cover sealing plate 23 to seal an inner cavity in operation;
as shown in fig. 3 to 6, the tank cover 20 includes a tank inner cover 21 covering the notch, a tank outer cover 22 provided above the tank inner cover 21, and a tank cover sealing plate 23 welded to the outer periphery of the tank inner cover 21, the tank cover sealing plate 23 being welded with a reinforcing steel pipe 24, and an intermediate face of the side of the tank inner cover 21 facing away from the tank cover bracket 30 being welded with the reinforcing steel pipe 24, the strength being increased, the tank outer cover 22 being provided on the side of the inner bracket 32 facing away from the tank inner cover 21 and fixedly connecting both ends of the bracket.
As shown in fig. 1, the tank cover bracket 30 includes an outer bracket 31 fixed relative to the tank body 10, an inner bracket 32 connected with a plurality of elastic pre-pressing assemblies 50, and a plurality of lifting cylinders 33 for driving the outer bracket 31 and the inner bracket 32 to move relatively, wherein the inner bracket 32 includes a plurality of crisscrossed supporting frames, and the lifting cylinders 33 drive the tank cover 20 to open and close; the plurality of elastic pre-pressing assemblies 50 are annularly distributed on the groove cover sealing plate 23, and the lower fixing plate 57 at the bottom of the elastic pre-pressing assemblies is welded on the groove cover sealing plate 23, and the welding arrangement and the arrangement of the groove inner cover 21 and the reinforced steel pipe 24 ensure the tightness of the groove cover sealing plate 23 and the sealing strip pressing plate 11 and strengthen the strength of the groove cover sealing plate 23 so that the groove cover sealing plate is not easy to deform; the lower end of the lifting cylinder 33 is provided with a mounting plate 34, and the mounting plate 34 is connected with a sliding block 35 which is in sliding fit with a circular guide rail 314; the cross section of the round guide rail is round, each spring pre-pressing component is connected with the groove cover sealing plate 23 to form the overall structure of the groove cover 20, and the groove cover sealing plate 23 is contacted with the sealing strip pressing plate 11 under the telescopic control of the lifting cylinder 33, pre-pressed and pressed to achieve good tightness.
As shown in fig. 3, the support frame includes a first cross beam 321, a second cross beam 322, and a first longitudinal beam 323, a second longitudinal beam 324, a third longitudinal beam 325, and a fourth longitudinal beam 326 that are perpendicular to the first cross beam 321 and the second cross beam 322, lifting cylinders 33 are disposed on the second longitudinal beam 324 and the third longitudinal beam 325, through holes for the circular guide rails 314 to pass through are disposed at the bottom of the lifting cylinders 33, and the outer sides of the first cross beam 321, the second cross beam 322, the first longitudinal beam 323, and the fourth longitudinal beam 326 are fixedly connected with an upper fixing plate 56 of the elastic pre-compression assembly 50, so that the outer bracket 31 is used for mounting the traversing cylinders 36, the circular guide rails 314, and bearing the overall stress of the slot cover 20.
As shown in fig. 7 to 8, the outer bracket 31 includes four first support beams 311 laid with circular guide rails 314, two second support beams 312 provided between adjacent two first support beams 311, six support beams 313 supported below the first support beams 311 and the second support beams 312, and a traversing cylinder 36 driving the lifting cylinder 33 to move along the circular guide rails 314, the two second support beams 312 are respectively connected with one end and the middle of the first support beams 311 near the tank body 10, the six support beams 313 are respectively connected with the first support beams 311 and form 90 ° with the second support beams 312 for supporting the first support beams 311, the traversing cylinder 36 is installed on the first support beams 311 for transverse transplanting of the tank cover 20, the traversing cylinder 36 and the lifting cylinder 33 are supplied with gas by a gas source, and the gas source can be specifically supplied by a high-pressure fan.
As shown in fig. 9, the elastic pre-pressing assembly 50 includes a screw rod 51, an adjusting nut 52, a spacer 53, a compression spring 54, a spring compression cap 55, an upper fixing plate 56 and a lower fixing plate 57, wherein the upper end of the screw rod 51 passes through a through hole in the middle of the upper fixing, the lower end is screwed with the adjusting nut 52 through threads, the upper fixing plate 56 is fixedly connected with a groove cover sealing plate 23, the adjusting nut 52 can rotate relative to the lower fixing plate 57, the lower fixing plate 57 is fixedly connected with a Cao Gai sealing plate, the lower part of the upper fixing plate 56 is fixedly connected with the spring compression cap 55, the spacer 53 is fixedly connected with the upper part of the adjusting nut 52, a compression spring 54 is connected between the spacer 53 and the top wall of the spring compression cap 55, the compression spring 54 is sleeved outside the screw rod 51, and the pre-pressing force of the compression spring 54 is adjusted through tightening and loosening of the adjusting nut 52, so that the periphery of the groove cover 20 is uniformly pressed on the sealing strip pressing plate 11.
Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present utility model, and are not limiting. Although the utility model has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments may be modified or some or all of the technical features may be replaced with other technical features, which do not depart from the scope of the technical scheme of the embodiments of the present utility model.
Claims (9)
1. The sealing mechanism of the vacuum drying groove is characterized by comprising a groove body provided with a notch;
one surface is in seamless connection with the notch, and the other surface is provided with a sealing strip pressing plate of a lip-shaped sealing ring;
the groove cover is covered with a groove opening to form a groove inner cover of the inner cavity by matching with the groove body, and the periphery of the groove inner cover is provided with a groove cover sealing plate matched with a sealing strip pressing plate to seal the inner cavity;
a slot cover bracket;
a power assembly for driving the slot cover bracket to pull the slot cover to move along the vertical direction and the horizontal direction relative to the slot opening;
and one end of the elastic pre-pressing assembly is connected with the groove cover bracket, and the other end of the elastic pre-pressing assembly is connected with the groove cover sealing plate.
2. The vacuum drying chamber seal of claim 1 further comprising a vacuum means for communicating with the interior chamber.
3. The vacuum drying oven of claim 1, wherein the cover support comprises an outer support fixed relative to the tank body, an inner support connected to the plurality of elastic pre-compression assemblies, and a plurality of lifting cylinders for driving the outer support and the inner support to move relative to each other, the inner support comprising a plurality of crisscrossed support frames.
4. The vacuum drying oven of claim 3, wherein the support comprises a first beam, a second beam, and first, second, third and fourth stringers perpendicular to the first and second beams, lifting cylinders are provided on the second and third stringers, and elastic pre-compression assemblies are provided on the first, second, first and fourth stringers.
5. The sealing mechanism of a vacuum drying duct according to claim 3, wherein the outer bracket comprises first support beams laid with guide rails, second support beams disposed between adjacent two of the first support beams, support columns supporting the first support beams and the second support beams, and a traversing cylinder driving the lifting cylinder to move along the guide rails.
6. The sealing mechanism of vacuum drying groove of claim 5, wherein the guide rail is a circular guide rail with circular cross section, and the bottom of the lifting cylinder is provided with a through hole for the circular guide rail to pass through.
7. A sealing mechanism for a vacuum drying oven as claimed in claim 3, wherein said inner frame is provided with a tank outer cover secured to the support frame on a side facing away from the tank inner cover.
8. The sealing mechanism of a vacuum drying oven according to claim 1, wherein the lid sealing plate is welded with a reinforcing steel pipe, and an intermediate surface of the lid facing away from the lid support side is welded with the reinforcing steel pipe.
9. The sealing mechanism of vacuum drying tank as claimed in claim 1, wherein the elastic pre-pressing assembly comprises a screw rod connected with the tank cover sealing plate through an upper fixing plate, an adjusting nut screwed with the screw rod, and a compression elastic member sleeved on the periphery of the screw rod and having one end connected with the adjusting nut and the other end connected with the upper fixing plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321139712.2U CN219829248U (en) | 2023-05-12 | 2023-05-12 | Sealing mechanism of vacuum drying groove |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321139712.2U CN219829248U (en) | 2023-05-12 | 2023-05-12 | Sealing mechanism of vacuum drying groove |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219829248U true CN219829248U (en) | 2023-10-13 |
Family
ID=88273487
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321139712.2U Active CN219829248U (en) | 2023-05-12 | 2023-05-12 | Sealing mechanism of vacuum drying groove |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219829248U (en) |
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2023
- 2023-05-12 CN CN202321139712.2U patent/CN219829248U/en active Active
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