CN219824425U

CN219824425U - Clamp type clamp for electrolytic polishing of aluminum alloy disc workpiece without conductive point

Info

Publication number: CN219824425U
Application number: CN202321299547.7U
Authority: CN
Inventors: 安朋娜; 潘虹
Original assignee: Shenyang Fortune Precision Equipment Co Ltd
Current assignee: Shenyang Fortune Precision Equipment Co Ltd
Priority date: 2023-05-26
Filing date: 2023-05-26
Publication date: 2023-10-13
Anticipated expiration: 2033-05-26

Abstract

The utility model relates to the technical field of semiconductor surface treatment processing, in particular to a clamp type clamp for electrolytic polishing of an aluminum alloy disc workpiece without conductive points, which comprises two semicircular clamp bodies, wherein two ends of each clamp body respectively extend outwards to form a square locking end, the locking end is positioned in the radial direction, and a lock hole is formed in the center of the locking end; the two clamp bodies are combined into a circular shape and clamp the side wall of the disc workpiece; the lock holes at the two ends are aligned and then locked by a group of locking screws and locking nuts respectively. The utility model is suitable for the electrolytic polishing of round aluminum alloy workpieces without conductive holes or with poor conductive holes in the IC equipment manufacturing industry, can avoid the appearance defects of clamping damage and the like caused to the workpieces by a chuck mode, and has simple disassembly and assembly and strong operability.

Description

Clamp type clamp for electrolytic polishing of aluminum alloy disc workpiece without conductive point

Technical Field

The utility model relates to the technical field of semiconductor surface treatment processing, in particular to a clamp type clamp for electrolytic polishing of an aluminum alloy disc workpiece without conductive points.

Background

Currently, in the IC equipment manufacturing industry, small hole aluminum alloy workpieces like showerhead, diffuser and faceplates often require an electropolishing process to remove some microscopic burrs from the edges of the small hole. However, such circular regular workpieces often do not have any through-hole or threaded hole stations available for use as electrically conductive points for electropolishing. At present, for the workpieces, a mode of a titanium disc chuck is often adopted in the industry, a plurality of clamping jaws of the titanium disc clamp the side wall of the disc from top to bottom, and contact points of the chuck and the side wall are used as conducting points, but the hanging mode is poor in conducting state and can damage the side wall of the workpiece by 100%. Therefore, in view of the above-mentioned circumstances, it is necessary to design a special hanger to solve the problem of poor conduction between the workpiece and the hanger, and to avoid damage to the workpiece caused by the chuck method.

Disclosure of Invention

In order to solve the technical problems, the utility model discloses a clamp type clamp for electrolytic polishing of an aluminum alloy disc workpiece without conductive points.

The specific technical scheme is as follows:

the clamp type clamp for the electrolytic polishing of the aluminum alloy disc workpiece without the conductive point comprises two semicircular clamp bodies, wherein two ends of each clamp body respectively extend outwards to form a square locking end, and the locking ends are positioned in the radial direction and are provided with locking holes in the center; the two clamp bodies are combined into a circular shape and clamp the side wall of the disc workpiece; the lock holes at the two ends are aligned and then locked by a group of locking screws and locking nuts respectively.

The inner diameter of the circular shape synthesized by the two clamp bodies is the same as the outer diameter of the disc workpiece.

The clamp body is characterized in that a hanging lug extends outwards from the middle of the clamp body, and a hanging hole is formed in the hanging lug and used for connecting a clamp for clamping a disc workpiece and an upper hanging jig.

When the two clamp bodies are combined together, the distance between the locking ends is about 10-20 mm.

The clamp body and the disc workpiece are in contact conduction.

The roughness of the inner wall of the clamp body is less than 1.6 mu m.

The clamp body is made of aluminum alloy.

Compared with the prior art, the utility model has the following beneficial technical effects:

the utility model is suitable for the electrolytic polishing of round aluminum alloy workpieces without conductive holes or with poor conductive holes in the manufacturing industry of IC equipment (special production equipment of semiconductor devices, integrated circuit chips and flat panel displays), can avoid the appearance defects of clamping damage and the like caused by a chuck mode on the workpieces, and has simple disassembly and assembly and strong operability.

Drawings

FIG. 1 is an assembly schematic of a clip-on clamp of the present utility model;

FIG. 2 is a schematic view of the structure of a clamp body of the clamp-on clamp of the present utility model;

FIG. 3 is a left side view of FIG. 2;

in the figure, 1, a clamp body; 2. a locking end; 3. hanging lugs; 4. a lock hole; 5. a hanging hole; 6. a disc workpiece; 7. locking a screw; 8. and (5) locking the nut.

Description of the embodiments

The utility model will be further described with reference to the accompanying drawings, but the scope of the utility model is not limited to the accompanying drawings.

Fig. 1 is an assembly schematic view of a clip type aluminum alloy clip according to the present utility model, fig. 2 is a structural schematic view of a clip body of the clip type aluminum alloy clip according to the present utility model, and fig. 3 is a left side view of fig. 2, as shown in the following:

the clamp type clamp is used for clamping an aluminum alloy disc workpiece without a conductive point and comprises two semicircular aluminum alloy clamp bodies 1, two ends of each clamp body 1 respectively extend outwards to form a square locking end 2, and the locking ends 2 are positioned in the radial direction and are provided with a locking hole 4 in the center; the inner diameter size of the combined circle of the two clamp bodies 1 is the same as the outer diameter of the disc workpiece 6, the two clamp bodies 1 are combined into the circle, the side wall of the disc workpiece 6 is clamped, and the roughness of the inner wall of the clamp body 1 is less than 1.6 mu m. The lock holes 4 at the two ends of the clamp body 1 are aligned and then locked by a group of locking screws 7 and locking nuts 8. The clamp body 1 and the disc workpiece 6 are in contact conduction, and no damage is caused to the disc workpiece 6.

The middle of the clamp body 1 outwards extends to form a hanging lug 3, and a hanging hole 5 is formed in the hanging lug 3 and used for connecting a clamp for clamping a disc workpiece 6 and an upper hanging fixture.

When the two clamp bodies 1 are combined together, the distance between the locking ends 2 is about 10-20 mm, so that the inner side wall of the clamp is ensured to be in good contact with the outer side wall of the workpiece, and conductivity is facilitated.

When the clamp is used, the inner walls of the two parts of clamp bodies 1 are respectively attached to the outer walls of the disc workpieces 6, and after the lock holes 4 at the two ends of the clamp bodies 1 are aligned, the clamp bodies are respectively locked by a group of locking screws 7 and locking nuts 8. And simultaneously, the hanging hole 5 and the hanger rod are locked by using an upper hanging screw through a gasket and a nut. The clamp body 1 is made of aluminum alloy, and is in contact with the disc workpiece 6 to conduct electricity, so that electrolytic polishing is realized.

Claims

1. A clamp formula anchor clamps that is used for non-conductive point aluminum alloy disc work piece electropolishing which characterized in that: the clamping device is used for clamping an aluminum alloy disc workpiece (6) without a conductive point and comprises two semicircular clamp bodies (1), wherein two ends of each clamp body (1) respectively extend outwards to form a square locking end (2), and the locking ends (2) are positioned in the radial direction and are provided with locking holes (4) in the center; the two clamp bodies (1) are combined into a round shape and clamp the side wall of the disc workpiece (6); the lock holes (4) at the two ends are aligned and then locked by a group of locking screws (7) and locking nuts (8).

2. The clamp type clamp for electropolishing of aluminum alloy disc workpieces without conductive spots according to claim 1, wherein: the two clamp bodies (1) have the same inner diameter size as the outer diameter of the disc workpiece (6) in a synthetic circular shape.

3. The clamp type clamp for electropolishing of aluminum alloy disc workpieces without conductive spots according to claim 1, wherein: the clamp is characterized in that a hanging lug (3) extends outwards from the middle of the clamp body (1), and a hanging hole (5) is formed in the hanging lug (3) and used for connecting a clamp clamping a disc workpiece (6) and an upper hanging jig.

4. The clamp type clamp for electropolishing of aluminum alloy disc workpieces without conductive spots according to claim 1, wherein: when the two clamp bodies (1) are combined together, the distance between the locking ends (2) is about 10-20 mm.

5. The clamp type clamp for electropolishing of aluminum alloy disc workpieces without conductive spots according to claim 1, wherein: the clamp body (1) and the disc workpiece (6) are in contact conduction.

6. The clamp type clamp for electropolishing of aluminum alloy disc workpieces without conductive spots according to claim 1, wherein: the roughness of the inner wall of the clamp body (1) is less than 1.6 mu m.

7. The clamp type clamp for electropolishing of aluminum alloy disc workpieces without conductive spots according to claim 1, wherein: the clamp body (1) is made of aluminum alloy.