CN219824343U - Substrate clamp and vacuum evaporation system - Google Patents

Abstract

The utility model discloses a substrate clamp and a vacuum evaporation system. The substrate clamp comprises a plurality of sliding supports, wherein the sliding supports are radially extended at a preset center point in a direction away from the preset center point; the clamping jaw is arranged on the sliding support piece in a sliding manner, a compression block is arranged on one side, close to a preset center point, of the clamping jaw, and an accommodating space capable of accommodating the edge of the substrate is formed between the compression block and the sliding support piece; and the fastener is arranged on the compression block and is used for compressing the edge of the substrate on the sliding support piece. The substrate clamp provided by the utility model can clamp substrates in different shapes by adjusting the positions of the clamping jaws on the sliding support, so that the substrate clamp can be compatible with substrates in various shapes and specifications, and the universality of the substrate clamp is improved.

Description

Substrate clamp and vacuum evaporation system

Technical Field

The utility model relates to the technical field of substrate clamps, in particular to a substrate clamp and a vacuum evaporation system.

Background

The existing substrate clamp can only clamp the substrate with regular shape, cannot adapt to the clamping requirement of the special-shaped substrate, has poor compatibility to the substrate, and reduces the universality of the substrate clamp.

Therefore, how to improve the versatility of the substrate fixture is a technical problem that needs to be solved by those skilled in the art.

Disclosure of Invention

In view of the above, an object of the present utility model is to provide a substrate holder for improving versatility of the substrate holder.

In order to achieve the above object, the present utility model provides the following technical solutions:

a substrate holder, comprising:

the sliding support pieces are multiple in number and extend in a radiation mode at a preset center point in a direction away from the preset center point;

the clamping jaw is arranged on the sliding support piece in a sliding manner, a compression block is arranged on one side, close to the preset center point, of the clamping jaw, and an accommodating space capable of accommodating the edge of the substrate is formed between the compression block and the sliding support piece;

and the fastener is arranged on the compression block and is used for compressing the edge of the substrate on the sliding support piece.

Optionally, in the substrate fixture, the fastening member is a fastening bolt, a threaded connection hole is formed in the pressing block, and the fastening bolt penetrates through the threaded connection hole and then abuts against and presses the substrate.

Optionally, in the above substrate holder, the substrate holder further includes a substrate protector provided at an end of the fastening bolt near the substrate.

Optionally, in the above substrate holder, the substrate protector includes a rubber pad.

Optionally, in the above substrate fixture, the pressing block and the clamping jaw are integrally formed, and the pressing block extends from a side of the clamping jaw, which is close to the preset center point, toward the preset center point, so as to form the pressing block.

Optionally, in the substrate holder, the sliding support includes a sliding rail.

Optionally, in the above substrate fixture, the substrate fixture further includes a base, the sliding support is disposed on the base, and the preset center point coincides with a center point of the base.

Optionally, in the substrate holder, the number of the sliding supports is four, and the sliding supports are a first sliding support, a second sliding support, a third sliding support and a fourth sliding support;

the base is a square base, and the first sliding support piece, the second sliding support piece, the third sliding support piece and the fourth sliding support piece respectively radiate and extend from the center point of the square base to four right-angle parts of the square base.

A vacuum evaporation system comprising a substrate holder as described above.

When the substrate clamp provided by the utility model is used, as the plurality of sliding supports are arranged, the plurality of sliding supports radiate and extend in the direction away from the preset center point, the sliding supports are provided with the clamping jaws in a sliding manner, and the clamping jaw is provided with the compression block at one side close to the preset center point, so that an accommodating space capable of accommodating the edge of the substrate is formed between the compression block and the sliding supports.

Therefore, the substrate clamp provided by the utility model can clamp substrates in different shapes by adjusting the positions of the clamping jaws on the sliding support, so that the substrate clamp can be compatible with substrates in various shapes and specifications, and the universality of the substrate clamp is improved.

Drawings

In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, it being obvious that the drawings in the following description are only some embodiments of the utility model, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

FIG. 1 is a schematic diagram of a substrate holder according to an embodiment of the present utility model;

fig. 2 is a schematic structural view of another substrate holder according to an embodiment of the present utility model.

Wherein 100 is a sliding support, 101 is a first sliding support, 102 is a second sliding support, 103 is a third sliding support, 104 is a fourth sliding support, 200 is a clamping jaw, 201 is a compression block, 2011 is a threaded connection hole, and 300 is a base.

Detailed Description

In view of this, the core of the present utility model is to provide a substrate holder to improve the versatility of the substrate holder.

The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

As shown in fig. 1-2, an embodiment of the present utility model discloses a substrate holder comprising a sliding support 100, a clamping jaw 200, and a fastener.

The number of the sliding supports 100 is plural, and the sliding supports 100 radially extend in a direction away from the preset center point at the preset center point; the clamping jaw 200 is arranged on the sliding support 100 in a sliding manner, a compression block 201 is arranged on one side, close to a preset center point, of the clamping jaw 200, and an accommodating space capable of accommodating the edge of a substrate is formed between the compression block 201 and the sliding support 100; fasteners are provided on the compression blocks 201 for compressing the edges of the substrate against the sliding support 100.

When the substrate clamp provided by the utility model is used, as the number of the sliding support pieces 100 is multiple, the sliding support pieces 100 radially extend in the direction away from the preset center point, the clamping jaw 200 is arranged on the sliding support pieces 100 in a sliding manner, the clamping jaw 200 is provided with the clamping block 201 at one side close to the preset center point, and an accommodating space capable of accommodating the edge of the substrate is formed between the clamping block 201 and the sliding support pieces 100, so that when the special-shaped substrate is clamped, the clamping jaw 200 is moved in the direction away from the preset center point, then the substrate is placed on the sliding support pieces 100, the substrate is positioned in the middle area surrounded by the clamping blocks 201, then the clamping jaw 200 is moved to one side close to the preset center point, the edge of the substrate is positioned in the accommodating space formed between the clamping block 201 and the sliding support pieces 100, and finally the edge of the substrate is pressed on the sliding support pieces 100 through the fastening piece, namely the substrate is pressed in the accommodating space, and at the moment, the clamping jaw 200 and the wafer are kept stationary based on static friction force between the substrate and the sliding support pieces 100 and the connection relation between the fastening piece and the clamping piece.

Therefore, the substrate clamp provided by the utility model can clamp substrates of different shapes by adjusting the positions of the clamping jaw 200 on the sliding support 100, so that the substrate clamp can be compatible with substrates of various shapes and specifications, and the universality of the substrate clamp is improved.

It should be noted that the fastening piece may be a fastening bolt or a pressing buckle, and any type of piece that can meet the fastening requirement falls within the scope of the present utility model.

Optionally, as shown in fig. 2, the fastener provided in the embodiment of the present utility model is a fastening bolt, the compression block 201 is provided with a threaded connection hole 2011, and the fastening bolt penetrates through the threaded connection hole 2011 from top to bottom and then abuts against and compresses the substrate, so that the fastening bolt, the compression block 201 and the clamping jaw 200 are all fixed based on the reaction force of the substrate to the fastening bolt, and the substrate is clamped, and meanwhile, the additional arrangement of parts for fastening the clamping jaw 200 is avoided, the number of parts is reduced, and the cost is reduced.

In addition, the substrate clamp further comprises a substrate protection piece, wherein the substrate protection piece is arranged at one end, close to the substrate, of the fastening bolt so as to prevent the fastening bolt from damaging the substrate when the substrate is pressed, so that the rejection rate of the substrate is improved, and economic loss of enterprises is increased.

It should be understood that the substrate protecting member may be a rubber pad, a rubber sleeve, a silica gel pad, a silica gel sleeve, a sponge pad, or the like, and any member capable of protecting a substrate is within the scope of the present utility model; optionally, the substrate protection member provided by the embodiment of the utility model is a rubber pad.

The compacting block 201 and the clamping jaw 200 provided by the utility model can be of a split type structure or an integrated structure, and all the types of structures capable of meeting the use requirements are within the protection scope of the utility model; optionally, the compression block 201 and the clamping jaw 200 provided in the embodiment of the present utility model are integrally formed, where the compression block 201 extends from a side of the clamping jaw 200 near a preset center point toward the preset center point, so as to form the compression block 201, so as to reduce the number of connecting parts, and improve the overall strength of the compression block 201 and the clamping jaw 200.

In addition, the sliding support 100 may be a structure such as a guide rail, a guide rod, or a guide groove, and any structure capable of meeting the use requirement falls within the scope of the present utility model; optionally, the sliding support 100 provided in the embodiment of the present utility model is a sliding rail.

Further, the substrate holder further includes a base 300, and the sliding support 100 is disposed on the base 300, and a preset center point coincides with a center point of the base 300 to support the sliding support 100, the clamping jaw 200, and the clamped substrate through the base 300.

The present utility model is not particularly limited as long as the parameters such as the shape and the dimension of the base 300, the number and the distribution form of the sliding supports 100, and the like are satisfied.

Alternatively, in one embodiment of the present utility model, the number of sliding supports 100 is four, namely, a first sliding support 101, a second sliding support 102, a third sliding support 103 and a fourth sliding support 104; the base 300 is a square base 300, the first sliding support 101, the second sliding support 102, the third sliding support 103 and the fourth sliding support 104 radially extend from the center point of the square base 300 to four right-angle parts of the square base 300, and the adjacent sliding supports 100 are arranged at an included angle of 90 degrees, so that clamping positions can be adjusted in four mutually perpendicular directions, and compatibility of substrates in different shapes can be realized.

In addition, the utility model also discloses a vacuum evaporation system which comprises the substrate clamp, so that all the technical effects of the substrate clamp are achieved, and the description is omitted herein.

The terms first and second and the like in the description and in the claims and in the above-described figures are used for distinguishing between different objects and not necessarily for describing a sequential or chronological order. Furthermore, the terms "comprise" and "have," as well as any variations thereof, are intended to cover a non-exclusive inclusion. For example, a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to the listed steps or elements but may include steps or elements not expressly listed.

The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present utility model. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the utility model. Thus, the present utility model is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims (9)

1. A substrate holder, comprising:

the sliding support pieces are multiple in number and extend in a radiation mode at a preset center point in a direction away from the preset center point;

the clamping jaw is arranged on the sliding support piece in a sliding manner, a compression block is arranged on one side, close to the preset center point, of the clamping jaw, and an accommodating space capable of accommodating the edge of the substrate is formed between the compression block and the sliding support piece;

and the fastener is arranged on the compression block and is used for compressing the edge of the substrate on the sliding support piece.

2. The substrate clamp according to claim 1, wherein the fastening piece is a fastening bolt, a threaded connection hole is formed in the pressing block, and the fastening bolt penetrates through the threaded connection hole and then abuts against and presses the substrate.

3. The substrate holder of claim 2, further comprising a substrate protector disposed at an end of the fastening bolt adjacent the substrate.

4. A substrate holder according to claim 3 wherein the substrate protector comprises a rubber pad.

5. The substrate holder of claim 1, wherein the hold down block is integrally formed with the clamping jaw, the hold down block extending from a side of the clamping jaw proximate the predetermined center point toward the predetermined center point to form the hold down block.

6. The substrate holder of claim 1, wherein the slide support comprises a slide rail.

7. The substrate holder of claim 1, further comprising a base, wherein the sliding support is disposed on the base, and wherein the predetermined center point coincides with a center point of the base.

8. The substrate holder of claim 7, wherein the number of slide supports is four, first, second, third, and fourth slide supports, respectively;

the base is a square base, and the first sliding support piece, the second sliding support piece, the third sliding support piece and the fourth sliding support piece respectively radiate and extend from the center point of the square base to four right-angle parts of the square base.

9. A vacuum evaporation system comprising the substrate holder according to any one of claims 1 to 8.