CN219824341U - Clamp mechanism for wafer film plating machine - Google Patents

Clamp mechanism for wafer film plating machine Download PDF

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Publication number
CN219824341U
CN219824341U CN202320898775.XU CN202320898775U CN219824341U CN 219824341 U CN219824341 U CN 219824341U CN 202320898775 U CN202320898775 U CN 202320898775U CN 219824341 U CN219824341 U CN 219824341U
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China
Prior art keywords
mounting
fixing
rotating
sleeves
blocks
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CN202320898775.XU
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Chinese (zh)
Inventor
赖思明
唐源
刘启东
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Zhuhai Dong Jingda Electronics Technology Co ltd
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Zhuhai Dong Jingda Electronics Technology Co ltd
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Abstract

The utility model relates to the technical field of wafer coating, in particular to a clamp mechanism for a wafer coating machine, which comprises a mounting frame, wherein the upper end of the mounting frame is provided with a mounting and fixing structure, the mounting and fixing structure comprises six clamps, two mounting blocks, a mounting shaft, a mounting sleeve, a folding plate, a clamping assembly and a fixing assembly, and the six clamps are arranged at the upper end of the mounting frame in parallel; the clamping assembly comprises two operation sleeves, two connecting sheets and two inserting rods; the fixing assembly comprises two fixing blocks, a fixing shaft, six rotating blocks, two rotating sleeves, two rotating rods, two operation sliding grooves and two sliding sleeves; the two fixing blocks are respectively arranged on two sides of the upper end of the installation frame. The utility model can quickly fix the two ends of the plurality of clamps, shortens the fixing time of the clamps and further increases the operation efficiency.

Description

Clamp mechanism for wafer film plating machine
Technical Field
The utility model relates to the technical field of wafer coating, in particular to a clamp mechanism for a wafer coating machine.
Background
At present, the wafer coating machine has the working procedures of coating the wafer, namely, putting the wafer into a frame, cleaning the wafer into the frame, putting the cleaned wafer into a fixture mechanism, and then putting the wafer into the coating machine for operation, namely, finishing the coating operation; therefore, a clamping mechanism is required for clamping during this process.
The wafer placing position of the film plating clamp is 300 clamps, the existing film plating process adopts 4 clamps placed on the clamp frame at a time, the operation number is 1200, the number of a summons is 1800, the film plating operation is carried out by silver, the clamp frame is to be placed twice, the operation time is long, the operation is complex, the existing clamp mounting mode generally adopts a bolt fixing mode, the threaded holes are easy to slide, and the effective fixation of the clamps is difficult.
Disclosure of Invention
The utility model aims to provide a clamping mechanism for a wafer film plating machine, so as to solve the problems in the prior art.
In order to achieve the above purpose, the present utility model provides the following technical solutions: the fixture mechanism for the wafer film plating machine comprises a mounting frame, wherein a mounting and fixing structure is arranged at the upper end of the mounting frame, the mounting and fixing structure comprises six fixtures, two mounting blocks, a mounting shaft, a mounting sleeve, a folding plate, a clamping assembly and a fixing assembly, and the six fixtures are arranged at the upper end of the mounting frame side by side; the clamping assembly comprises two operation sleeves, two connecting sheets and two inserting rods; the fixed assembly comprises two fixed blocks, a fixed shaft, six rotating blocks, two rotating sleeves, two rotating rods, two operation sliding grooves and two sliding sleeves; the two fixing blocks are respectively arranged at two sides of the upper end of the installation frame.
Preferably, the mounting blocks are respectively arranged on two sides of the upper wall surface of the mounting frame, two ends of the mounting shaft are respectively connected with the two mounting blocks, and the mounting sleeve is movably sleeved at the upper end of the mounting shaft.
Preferably, the folding plate is arranged at one side wall surface of the mounting sleeve, the clamping assembly is arranged at two sides of the upper end of the mounting frame and is respectively connected with two sides of the folding plate, and the fixing assembly is arranged at the upper end of the mounting frame.
Preferably, the operation sleeves are respectively arranged at two sides of the upper end of the installation frame, the two connecting sheets are respectively arranged at two sides of the folding plate, the two inserting rods are respectively movably embedded in the two operation sleeves, and one ends of the two inserting rods respectively penetrate through the two connecting sheets.
Preferably, two ends of the fixed shaft are movably embedded in the two fixed blocks respectively, six rotating blocks are installed on one side wall surface of the fixed shaft respectively, a transverse stop block is arranged on the lower wall surface of one side of each rotating block, two rotating sleeves are installed on two sides of the fixed shaft respectively, and two rotating rods are installed on one side of each rotating sleeve respectively.
Preferably, the operation sliding grooves are respectively arranged at two sides of the upper end of the installation frame, and the upper wall surface of each operation sliding groove is provided with a concave sliding groove.
Preferably, the sliding sleeve is respectively embedded in the two operation sliding grooves in a sliding way, and is respectively sleeved at the upper ends of the two rotating rods, and the lower end of the sliding sleeve is provided with a convex sliding block.
Compared with the prior art, the utility model has the beneficial effects that: this anchor clamps mechanism that wafer coating machine was used is through setting up installation fixed knot to construct, increases to six anchor clamps mounted position on traditional anchor clamps frame basis, and the one-time coating operation increases to 1800, consequently need not to carry out the secondary and put into, shortens operating time, simultaneously, the upset fixed mode of adoption can carry out quick fixed to the both ends of a plurality of anchor clamps, shortens the fixed time of anchor clamps, and then increases operating efficiency.
Drawings
FIG. 1 is a schematic perspective view of the present utility model;
FIG. 2 is a schematic top view of the present utility model;
FIG. 3 is a schematic perspective view of a fixing assembly according to the present utility model;
fig. 4 is a schematic perspective view of a fastening assembly according to the present utility model.
In the figure: 1. a mounting frame; 2. a clamp; 3. a mounting block; 4. a mounting shaft; 5. a mounting sleeve; 6. a folding plate; 7. an operating sleeve; 8. a connecting sheet; 9. a rod; 10. a fixed block; 11. a fixed shaft; 12. a rotating block; 13. rotating the sleeve; 14. a rotating lever; 15. operating the chute; 16. a sliding sleeve; 17. and a transverse stop block.
Detailed Description
The technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the drawings in the embodiments of the present utility model, and it is apparent that the described embodiments are only some embodiments of the present utility model, not all embodiments, and furthermore, the terms "first", "second", "third", "up, down, left, right", etc. are used for descriptive purposes only and are not to be construed as indicating or implying relative importance. Meanwhile, in the description of the present utility model, unless explicitly stated and defined otherwise, the terms "connected", "connected" and "connected" should be interpreted broadly, and for example, may be fixedly connected, detachably connected, or integrally connected; the mechanical connection and the electrical connection can be adopted; all other embodiments, which may be directly or indirectly through intermediaries, which may be obtained by a person of ordinary skill in the art without inventive effort based on the embodiments of the present utility model are within the scope of the present utility model.
The utility model provides a clamp mechanism for a wafer film plating machine, which is structurally shown in fig. 1 and 2, and comprises a mounting frame 1, wherein a mounting and fixing structure is arranged at the upper end of the mounting frame 1, the mounting and fixing structure comprises six clamps 2, two mounting blocks 3, a mounting shaft 4, a mounting sleeve 5, a folding plate 6, a clamping assembly and a fixing assembly, the six clamps 2 are arranged at the upper end of the mounting frame 1 side by side, the mounting blocks 3 are respectively arranged at two sides of the upper wall surface of the mounting frame 1, two ends of the mounting shaft 4 are respectively connected with the two mounting blocks 3, the mounting sleeve 5 is movably sleeved at the upper end of the mounting shaft 4, the folding plate 6 is arranged at one side wall surface of the mounting sleeve 5, the clamping assembly is arranged at two sides of the upper end of the mounting frame 1 and is respectively connected with two sides of the folding plate 6, and the fixing assembly is arranged at the upper end of the mounting frame 1.
When the clamp 2 is fixed, a worker places six clamps 2 at the upper ends of the mounting frames 1, dials the folding plates 6, so that the folding plates 6 rotate on the mounting shafts 4 between the two mounting blocks 3 under the action of the mounting sleeves 5 until one side of each folding plate 6 is attached to the lower ends of the six clamps 2, the operation clamping assembly works, the two ends of each folding plate 6 are fixed, the purpose of fixing the bottom ends of the six clamps 2 is achieved, the fixing assembly works through the operation fixing assembly, the upper ends of the six clamps 2 are fixed, and the purpose of fixing the upper ends of the six clamps 2 is achieved.
Further, as shown in fig. 3, the clamping assembly includes two operation sleeves 7, two connection pieces 8 and two inserting rods 9, the operation sleeves 7 are respectively installed at two sides of the upper end of the installation frame 1, the two connection pieces 8 are respectively installed at two sides of the folding plate 6, the two inserting rods 9 are respectively movably embedded in the two operation sleeves 7, and one ends of the two inserting rods penetrate through the two connection pieces 8.
During implementation, the folding plate 6 is rotated by a worker, so that the connecting pieces 8 on two sides of the folding plate 6 are in a superposition state with the two operation sleeves 7, the two inserting rods 9 are inserted into the two operation sleeves 7 and the two connecting pieces 8, the two operation sleeves 7 and the two connecting pieces 8 are fixed through the two inserting rods 9, the purpose of fixing the folding plate 6 is achieved, and during disassembly, the folding plate 6 can be turned over by taking down the two inserting rods 9.
Further, as shown in fig. 4, the fixing assembly includes two fixing blocks 10, a fixing shaft 11, six rotating blocks 12, two rotating sleeves 13, two rotating rods 14, two operation sliding grooves 15 and two sliding sleeves 16, wherein two ends of the fixing shaft 11 are respectively movably embedded in the two fixing blocks 10, the six rotating blocks 12 are respectively installed at one side wall surface of the fixing shaft 11, a transverse stop block 17 is arranged at the lower wall surface of one side of the rotating block 12, the two rotating sleeves 13 are respectively installed at two sides of the fixing shaft 11, the two rotating rods 14 are respectively installed at one side of the two rotating sleeves 13, the operation sliding grooves 15 are respectively installed at two sides of the upper end of the installation frame 1, concave sliding grooves are formed in the upper wall surface of the operation sliding grooves 15, the sliding sleeves 16 are respectively embedded in the two operation sliding grooves 15 and are respectively sleeved at the upper ends of the two rotating rods 14, and convex sliding blocks are arranged at the lower ends of the sliding sleeves 16; two fixing blocks 10 are respectively installed at both sides of the upper end of the installation frame 1.
During implementation, a worker dials two rotating rods 14, drives a fixed shaft 11 to rotate in two fixed blocks 10 through two rotating sleeves 13, so that six rotating blocks 12 on one side of the fixed shaft 11 are respectively contacted with the upper ends of six clamps 2, the upper ends of the clamps 2 are fixed, the two sliding sleeves 16 are pushed to move in two operation sliding grooves 15 by sliding upwards, the two sliding sleeves 16 are respectively sleeved at the upper ends of the two rotating rods 14, the two rotating rods 14 are fixed, and the two sliding sleeves 16 are fixed through two bolts.
Working principle: when the clamp 2 is used, when the clamp 2 is fixed, a worker places six clamps 2 at the upper end of the installation frame 1, dials the folding plate 6, so that the folding plate 6 rotates on the installation shaft 4 between the two installation blocks 3 under the action of the installation sleeve 5 until one side of the folding plate 6 is attached to the lower ends of the six clamps 2, the operation clamping assembly works, the two ends of the folding plate 6 are fixed, the purpose of bottom end fixing of the six clamps 2 is achieved, the operation fixing assembly works, the upper ends of the six clamps 2 are fixed, and the purpose of upper end fixing of the six clamps 2 is achieved.
When the folding plate 6 is used, a worker rotates the folding plate 6, so that connecting pieces 8 on two sides of the folding plate 6 are in a superposition state with the two operation sleeves 7, two inserting rods 9 are inserted into the two operation sleeves 7 and the two connecting pieces 8, the two operation sleeves 7 and the two connecting pieces 8 are fixed through the two inserting rods 9, the purpose of fixing the folding plate 6 is achieved, and when the folding plate 6 is disassembled, the two inserting rods 9 are taken down, so that the folding plate 6 can be turned over.
When the upper end of the clamp 2 is fixed, a worker dials the two rotating rods 14, drives the fixed shaft 11 to rotate in the two fixed blocks 10 through the two rotating sleeves 13, enables the six rotating blocks 12 on one side of the fixed shaft 11 to be respectively contacted with the upper ends of the six clamps 2, fixes the upper end of the clamp 2, pushes the two sliding sleeves 16 to move in the two operation sliding grooves 15 through upwards sliding the two sliding sleeves 16, and is respectively sleeved at the upper ends of the two rotating rods 14 to fix the two rotating rods 14, and fixes the two sliding sleeves 16 through two bolts.
It will be evident to those skilled in the art that the utility model is not limited to the details of the foregoing illustrative embodiments, and that the present utility model may be embodied in other specific forms without departing from the spirit or essential characteristics thereof. The present embodiments are, therefore, to be considered in all respects as illustrative and not restrictive, the scope of the utility model being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Claims (7)

1. The fixture mechanism for the wafer film plating machine comprises a mounting frame and is characterized in that a mounting and fixing structure is arranged at the upper end of the mounting frame, the mounting and fixing structure comprises six fixtures, two mounting blocks, a mounting shaft, a mounting sleeve, a folding plate, a clamping assembly and a fixing assembly, and the six fixtures are arranged at the upper end of the mounting frame in a parallel manner; the clamping assembly comprises two operation sleeves, two connecting sheets and two inserting rods; the fixing assembly comprises two fixing blocks, a fixing shaft, six rotating blocks, two rotating sleeves, two rotating rods, two operation sliding grooves and two sliding sleeves; the two fixing blocks are respectively arranged on two sides of the upper end of the installation frame.
2. The fixture mechanism for a wafer plating machine according to claim 1, wherein: the two mounting blocks are respectively mounted on two sides of the upper wall surface of the mounting frame, two ends of the mounting shaft are respectively connected with the two mounting blocks, and the mounting sleeve is movably sleeved at the upper end of the mounting shaft.
3. A fixture mechanism for a wafer plating machine according to claim 2, wherein: the folding plate is installed in a side wall surface of the installation sleeve, the clamping components are installed on two sides of the upper end of the installation frame and are respectively connected with two sides of the folding plate, and the fixing components are installed on the upper end of the installation frame.
4. The fixture mechanism for a wafer plating machine according to claim 1, wherein: the two operation sleeves are respectively arranged on two sides of the upper end of the installation frame, the two connecting sheets are respectively arranged on two sides of the folding plate, the two inserting rods are respectively movably embedded in the two operation sleeves, and one ends of the inserting rods penetrate through the two connecting sheets respectively.
5. The fixture mechanism for a wafer plating machine according to claim 1, wherein: the two ends of the fixed shaft are movably embedded in the two fixed blocks respectively, six rotating blocks are installed on one side wall surface of the fixed shaft respectively, a transverse stop block is arranged on the lower wall surface of one side of each rotating block, two rotating sleeves are installed on two sides of the fixed shaft respectively, and two rotating rods are installed on one side of each rotating sleeve respectively.
6. The fixture mechanism for a wafer plating machine according to claim 5, wherein: the two operation sliding grooves are respectively arranged on two sides of the upper end of the installation frame, and concave sliding grooves are formed in the upper wall surface of each operation sliding groove.
7. The fixture mechanism for a wafer plating machine according to claim 6, wherein: the two sliding sleeves are respectively embedded in the two operation sliding grooves in a sliding manner and are respectively sleeved at the upper ends of the two rotating rods, and a convex sliding block is arranged at the lower end of each sliding sleeve.
CN202320898775.XU 2023-04-20 2023-04-20 Clamp mechanism for wafer film plating machine Active CN219824341U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202320898775.XU CN219824341U (en) 2023-04-20 2023-04-20 Clamp mechanism for wafer film plating machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202320898775.XU CN219824341U (en) 2023-04-20 2023-04-20 Clamp mechanism for wafer film plating machine

Publications (1)

Publication Number Publication Date
CN219824341U true CN219824341U (en) 2023-10-13

Family

ID=88250125

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202320898775.XU Active CN219824341U (en) 2023-04-20 2023-04-20 Clamp mechanism for wafer film plating machine

Country Status (1)

Country Link
CN (1) CN219824341U (en)

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