CN219816681U - Atomizing device for IPA drying - Google Patents

Atomizing device for IPA drying Download PDF

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Publication number
CN219816681U
CN219816681U CN202321061323.2U CN202321061323U CN219816681U CN 219816681 U CN219816681 U CN 219816681U CN 202321061323 U CN202321061323 U CN 202321061323U CN 219816681 U CN219816681 U CN 219816681U
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atomization
hole
liquid
chemical liquid
storage tank
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CN202321061323.2U
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Chinese (zh)
Inventor
王文和
叶曲波
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Sien Semiconductor Technology Suzhou Co ltd
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Sien Semiconductor Technology Suzhou Co ltd
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Abstract

The utility model discloses an atomization device for taking IPA dry, which relates to the technical field of IPA atomization and aims at solving the problems that the prior atomization device is used for cleaning components and parts just right after spraying, but the spraying size is not uniform enough, a mechanism is complex, the device is not easy to disassemble and assemble, and the manufacturing and maintenance cost is high. The spray nozzle has the advantages of being capable of being assembled and disassembled quickly, simple in structure, low in manufacturing and maintenance cost and capable of spraying mist chemical liquid evenly.

Description

Atomizing device for IPA drying
Technical Field
The utility model relates to the technical field of IPA atomization, in particular to an atomization device for taking and drying IPA.
Background
Semiconductor device cleaning equipment is an important link in the electronic industry, and is generally cleaned by wet technology, components are placed in a tank, chemical cleaning liquid is atomized and sprayed on the surface of the semiconductor device for cleaning operation, and an atomization device is needed in the process.
The existing atomizing device is used for cleaning components and parts just opposite to spray, but the spray size is not uniform enough, the mechanism is complex, the assembly is not easy to disassemble, and the manufacturing and maintenance cost is high.
Disclosure of Invention
The utility model aims to provide an atomization device for IPA drying, which can be quickly assembled and disassembled, has a simple structure, is low in manufacturing and maintenance cost, and can uniformly spray atomized chemical liquid.
In order to achieve the above purpose, the present utility model provides the following technical solutions:
the utility model provides an atomizer for IPA is got futilely, includes the chemical liquid holding vessel, be provided with the screw hole on the terminal surface of chemical liquid holding vessel, and the inside threaded connection of screw hole has the atomizing end, the axis position department of atomizing end is provided with the through-hole, and the inside of through-hole runs through there is the atomizing pole, the maximum diameter department of atomizing pole and atomizing end axis department through-hole threaded connection, the axis department of atomizing pole is provided with the drain passageway, be provided with two through-holes on the side surface of drain passageway, and two through-holes communicate with the both ends of drain passageway respectively, the one end of atomizing pole is provided with trapezoidal pipe section structure, and trapezoidal pipe section structure arranges the inside of atomizing end in, form between trapezoidal pipe section structure and the atomizing end through-hole inner wall of atomizing end and collect chamber and flow gap, be provided with the inlet port on the side surface of atomizing end, be provided with the air guide passageway on the terminal surface of inlet port, the air guide passageway communicates with the chamber with each other, the axis position department of chemical liquid holding vessel bottom terminal surface is provided with the drain hole, the atomizing pole runs through in the inside of drain hole.
Through adopting above-mentioned technical scheme, can utilize venturi principle to realize the extraction of chemical liquid to realize subsequent atomizing operation, the equipment that whole structure can be convenient is dismantled, simple structure, and stability is strong, makes and overhaul low cost.
Further, the liquid outlet of the liquid guide channel is positioned at the flowing clearance, and the liquid inlet of the liquid guide channel is arranged at the bottom end inside the chemical liquid storage tank.
By adopting the technical scheme, the chemical liquid can be ensured to be stably and effectively absorbed.
Further, an atomization stop block is fixedly connected to the inner wall of the port of the atomization end head, and the atomization stop block is located on one side of the atomization rod.
By adopting the technical scheme, the high-speed flowing mixture is ensured to be impacted on the outer surface of the atomization stop block to realize atomization operation.
Further, the lower ends of the symmetrical side surfaces of the chemical liquid storage tank are respectively provided with a liquid inlet, and the upper part of the side surface of the chemical liquid storage tank is provided with a liquid level hole.
By adopting the technical scheme, the stable inflow of the chemical liquid is ensured.
Further, a liquid return hole is formed in the atomization end, and two ends of the liquid return hole are respectively communicated with an atomization cavity in the atomization end and the chemical liquid storage tank.
By adopting the technical scheme, the chemical liquid which is collected again can be effectively ensured to flow back to the chemical liquid storage tank for reuse.
Further, a mounting hole is formed in the end face of the bottom of the chemical liquid storage tank, and a resistance heating pipe is fixedly mounted in the mounting hole.
Through adopting above-mentioned technical scheme, can improve the chemical liquid temperature of waiting to atomize under cold weather, ensure that atomizing operation can be stable orderly going on.
In summary, the beneficial technical effects of the utility model are as follows:
1. according to the utility model, when chemical liquid is atomized, high-pressure gas is introduced into the air inlet hole and the air guide channel, the high-pressure gas enters the inside of the collecting cavity at the moment and is discharged from the flowing gap, the flowing pipe diameter of the high-pressure gas is reduced because the size of the flowing gap is smaller than that of the collecting cavity, and the liquid outlet port of the liquid guide channel is positioned at the flowing gap, according to the Venturi principle, the pressure at the liquid outlet port of the liquid guide channel is reduced, the liquid inlet port of the liquid guide channel generates suction force, so that the chemical liquid in the chemical liquid storage tank can be sucked, the chemical liquid passes through the liquid guide channel and enters the flowing gap to be mixed with the high-pressure gas, then is rapidly injected into the atomizing cavity in the atomizing end head to realize atomization operation by collision with the atomizing stop block, and the whole device has the advantages of simple structure, low production and maintenance cost, flexible and convenient disassembly and assembly, convenient maintenance operation, and high practicability, and can effectively adapt to atomization operation of different types of chemical liquids at the same time;
2. according to the utility model, the resistance heating pipe is fixedly arranged on the inner bottom end surface of the chemical liquid storage tank, so that the chemical liquid to be atomized can be heated by using the resistance heating pipe, the high-efficiency fluidity of the chemical liquid can be ensured in a severe cold environment, the stable and orderly atomization operation can be ensured, and the structure effectively improves the functionality and the practicability of the device.
Drawings
FIG. 1 is a schematic perspective view of the present utility model;
FIG. 2 is an internal block diagram of the present utility model;
fig. 3 is an enlarged view of fig. 2 at a in accordance with the present utility model.
In the figure: 1. a chemical liquid storage tank; 2. an atomizing end; 3. an air inlet hole; 4. a liquid inlet; 5. an atomization stop block; 6. a resistance heating tube; 7. an atomizing rod; 8. a liquid return hole; 9. a liquid level hole; 10. a liquid guide channel; 11. an air guide channel; 12. a flow gap; 13. and a collection chamber.
Detailed Description
The process according to the utility model is described in further detail below with reference to the accompanying drawings.
Referring to fig. 1, 2 and 3, an atomizer for taking IPA dry comprises a chemical liquid storage tank 1, a threaded hole is arranged on the end face of the chemical liquid storage tank 1, an atomizing end head 2 is connected with the internal threads of the threaded hole, a through hole is arranged at the center axis position of the atomizing end head 2, an atomizing rod 7 penetrates through the through hole, the maximum diameter of the atomizing rod 7 is connected with the through hole at the center axis of the atomizing end head 2 in a threaded manner, a liquid guide channel 10 is arranged at the center axis of the atomizing rod 7, the aperture of the liquid guide channel 10 is 1mm, two through holes are arranged on the side surface of the liquid guide channel 10 and are respectively communicated with two ends of the liquid guide channel 10, a trapezoid pipe section structure is arranged at one end of the atomizing rod 7 and is arranged in the atomizing end head 2, a collecting cavity 13 and a flowing gap 12 are formed between the trapezoid pipe section structure of the atomizing rod 7 and the inner wall of the through hole of the atomizing end head 2, the flow gap 12 is 0.22mm, the side surface of the atomizing end head 2 is provided with an air inlet hole 3, the end surface of the air inlet hole 3 is provided with an air guide channel 11, the air guide channel 11 is communicated with a collecting cavity 13, the middle axis position of the end surface of the bottom of the chemical liquid storage tank 1 is provided with a liquid discharge hole, the atomizing rod 7 penetrates through the inside of the liquid discharge hole, the liquid outlet port of the liquid guide channel 10 is positioned at the flow gap 12, the liquid inlet port of the liquid guide channel 10 is positioned at the bottom end of the inside of the chemical liquid storage tank 1, the inner wall of the port of the atomizing end head 2 is fixedly connected with an atomizing stop block 5, the atomizing stop block 5 is positioned at one side of the atomizing rod 7, wherein high-pressure air can be introduced into the air inlet hole 3 and the air guide channel 11 when atomizing chemical liquid, then the high-pressure air enters the inside of the collecting cavity 13 and is discharged from the flow gap 12, and the size of the flow gap 12 is smaller than the size of the collecting cavity 13, therefore, the flow pipe diameter of the high-pressure gas is reduced, the liquid outlet port of the liquid guide channel 10 is positioned at the flow gap 12, the pressure at the liquid outlet port of the liquid guide channel 10 is reduced according to the Venturi principle, the liquid inlet port of the liquid guide channel 10 generates suction, and then chemical liquid in the chemical liquid storage tank 1 can be sucked, the chemical liquid passes through the liquid guide channel 10 to enter the flow gap 12 and is mixed with the high-pressure gas, then is rapidly sprayed into an atomization cavity in the atomization end 2 and is impacted by the atomization stop block 5 to realize atomization operation, atomized chemical liquid is guided by a pipeline connected to one end of the atomization end 2, so that the sprayed mist quantity is ensured to be uniform.
Referring to fig. 2, the lower ends of the symmetrical side surfaces of the chemical liquid storage tank 1 are respectively provided with a liquid inlet 4, the upper part of the side surface of the chemical liquid storage tank 1 is provided with a liquid level hole 9, the inside of the atomizing end 2 is provided with a liquid return hole 8, and the two ends of the liquid return hole 8 are respectively communicated with the atomizing cavity inside the atomizing end 2 and the inside of the chemical liquid storage tank 1, so that the stable inflow of chemical liquid can be ensured, and meanwhile, the liquid level hole 9 is utilized to ensure that the inside of the chemical liquid storage tank 1 has enough air pressure, so that the stable extraction of the chemical liquid can be ensured.
Referring to fig. 2, a mounting hole is provided on the bottom end surface of the chemical liquid storage tank 1, and a resistance heating pipe 6 is fixedly installed inside the mounting hole, wherein the chemical liquid to be atomized can be heated by using the resistance heating pipe 6 by fixedly installing the resistance heating pipe 6 on the inner bottom end surface of the chemical liquid storage tank 1, so that the efficient fluidity of the chemical liquid can be ensured under a severe cold environment, the stable and orderly atomization operation can be ensured, and the functionality and the practicability of the device are effectively improved.
Working principle: when the device is used, the device is firstly arranged at a designated position, chemical liquid to be atomized is guided into the chemical liquid storage tank 1 through the liquid inlet 4, when atomization operation is needed, high-pressure gas is guided into the air inlet 3 and the air guide channel 11, the high-pressure gas enters the atomization cavity 13, and is discharged from the flow gap 12, the flow pipe diameter of the high-pressure gas is reduced because the size of the flow gap 12 is smaller than that of the collection cavity 13, the liquid outlet of the liquid guide channel 10 is positioned at the position of the flow gap 12, according to the Venturi principle, the pressure at the liquid outlet of the liquid guide channel 10 is reduced, suction is generated at the liquid inlet of the liquid guide channel 10, the chemical liquid can be absorbed into the chemical liquid storage tank 1, the chemical liquid passes through the liquid guide channel 10 and enters the flow gap 12 and is mixed with the high-pressure gas, then the high-pressure gas is quickly injected into the atomization cavity inside the atomization end head 2, and is impacted with the atomization stop 5 to realize atomization operation, the chemical liquid re-converged inside the atomization end head 2 flows back to the chemical liquid storage tank 1 along the back hole 8 in the whole atomization operation process, and the heating pipe can be heated in a stable and cold environment when the chemical liquid is heated by the heating pipe 6 under the cold condition, and the cold condition can be ensured, and the stable environment can be heated under the cold condition when the environment is ensured, and the environment is stable when the environment is heated.
The embodiments of the present utility model are all preferred embodiments of the present utility model, and are not intended to limit the scope of the present utility model in this way, therefore: all equivalent changes in structure, shape and principle of the utility model should be covered in the scope of protection of the utility model.

Claims (6)

1. An atomizing device for IPA is got futilely, includes chemical liquid holding vessel (1), its characterized in that: the chemical liquid storage tank is characterized in that a threaded hole is formed in the end face of the chemical liquid storage tank (1), an atomization end (2) is connected to the inner thread of the threaded hole, a through hole is formed in the center shaft position of the atomization end (2), an atomization rod (7) penetrates through the inside of the through hole, the maximum diameter of the atomization rod (7) is connected with the center shaft of the atomization end (2) through hole in a threaded mode, a liquid guide channel (10) is arranged at the center shaft of the atomization rod (7), two through holes are formed in the side surface of the liquid guide channel (10), the two through holes are respectively communicated with the two ends of the liquid guide channel (10), a trapezoid pipe section structure is arranged at one end of the atomization rod (7), the trapezoid pipe section structure is arranged in the inside of the atomization end (2), a collecting cavity (13) and a flowing clearance (12) are formed between the trapezoid pipe section structure of the atomization rod (7) and the inner wall of the through hole of the atomization end (2), an air inlet hole (3) is formed in the side surface of the atomization end (2), an air guide channel (11) is formed in the end face of the atomization end (3), the two through holes are respectively communicated with the two ends of the liquid guide channel (10, and the liquid drain hole is formed in the bottom of the liquid storage tank.
2. An atomizer for IPA drying as recited in claim 1, wherein: the liquid outlet of the liquid guide channel (10) is positioned at the position of the flowing gap (12), and the liquid inlet of the liquid guide channel (10) is arranged at the bottom end inside the chemical liquid storage tank (1).
3. An atomizer for IPA drying as recited in claim 1, wherein: an atomization stop block (5) is fixedly connected to the inner wall of a port of the atomization end head (2), and the atomization stop block (5) is positioned on one side of an atomization rod (7).
4. An atomizer for IPA drying as recited in claim 1, wherein: the chemical liquid storage tank is characterized in that liquid inlets (4) are respectively formed in the lower ends of the symmetrical side surfaces of the chemical liquid storage tank (1), and liquid level holes (9) are formed in the upper portions of the side surfaces of the chemical liquid storage tank (1).
5. An atomizer for IPA drying as recited in claim 1, wherein: the inside of atomizing end (2) is provided with back liquid hole (8), and the both ends of back liquid hole (8) communicate with each other with inside atomizing chamber and the chemical liquid holding vessel (1) of atomizing end (2) inside respectively.
6. An atomizer for IPA drying as recited in claim 1, wherein: the chemical liquid storage tank is characterized in that a mounting hole is formed in the end face of the bottom of the chemical liquid storage tank (1), and a resistance heating pipe (6) is fixedly arranged in the mounting hole.
CN202321061323.2U 2023-05-06 2023-05-06 Atomizing device for IPA drying Active CN219816681U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202321061323.2U CN219816681U (en) 2023-05-06 2023-05-06 Atomizing device for IPA drying

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202321061323.2U CN219816681U (en) 2023-05-06 2023-05-06 Atomizing device for IPA drying

Publications (1)

Publication Number Publication Date
CN219816681U true CN219816681U (en) 2023-10-13

Family

ID=88247719

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202321061323.2U Active CN219816681U (en) 2023-05-06 2023-05-06 Atomizing device for IPA drying

Country Status (1)

Country Link
CN (1) CN219816681U (en)

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