CN219811478U - Electrostatic adsorption disc cleaning structure - Google Patents
Electrostatic adsorption disc cleaning structure Download PDFInfo
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- CN219811478U CN219811478U CN202321112670.3U CN202321112670U CN219811478U CN 219811478 U CN219811478 U CN 219811478U CN 202321112670 U CN202321112670 U CN 202321112670U CN 219811478 U CN219811478 U CN 219811478U
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- plate
- annular
- circular base
- fly leaf
- cleaning structure
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- 238000001179 sorption measurement Methods 0.000 title claims abstract description 34
- 238000004140 cleaning Methods 0.000 title claims abstract description 31
- 235000012431 wafers Nutrition 0.000 description 8
- 239000012535 impurity Substances 0.000 description 6
- 150000002500 ions Chemical class 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000005507 spraying Methods 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model discloses an electrostatic adsorption disc cleaning structure, which belongs to the technical field of cleaning structures and comprises a first annular plate, wherein an annular sliding rail is arranged at the upper end of the first annular plate, a sliding block is arranged at the upper end of the annular sliding rail, a second annular plate is arranged at the upper end of the sliding block, and a gear ring is arranged on the outer wall of the second annular plate; the semi-annular frame plate is convenient to collect and clean.
Description
Technical Field
The utility model belongs to the technical field of cleaning structures, and particularly relates to an electrostatic adsorption disc cleaning structure.
Background
In the process steps of etching, physical vapor deposition, chemical vapor deposition and the like of a wafer, an electrostatic adsorption device is generally required to fix and support the wafer, the electrostatic adsorption device generally comprises a base and an electrostatic adsorption disk arranged on the base and used for adsorbing the wafer, and the electrostatic adsorption device adsorbs the wafer to be processed on the surface of the electrostatic adsorption disk by utilizing an electrostatic adsorption principle, so that the wafer is prevented from shifting or misplacement in the process of processing;
however, the surface of the electrostatic adsorption disc in the existing electrostatic adsorption device is often concentrated with some impurity particles, but the existing electrostatic adsorption device is only used for adsorbing wafers, and no removing measure is provided for the impurity particles on the surface of the electrostatic adsorption disc, so that not only can the electrostatic adsorption machine generate false alarm to influence the normal operation of the wafer processing procedure, but also the damage to the surface of the wafer can be possibly caused, and at present, the impurity particles on the surface of the electrostatic adsorption disc in the electrostatic adsorption device are removed, and the cleaning efficiency is slow due to the fact that workers regularly open cavities and manually maintain the device.
Disclosure of Invention
The present utility model provides an electrostatic chuck cleaning structure to solve the above-mentioned problems in the background art.
In order to achieve the above purpose, the present utility model provides the following technical solutions: the utility model provides an electrostatic adsorption dish cleaning structure, includes first annular slab, the upper end of first annular slab is provided with annular slide rail, the upper end of annular slide rail is provided with the slider, the upper end of slider is provided with the second annular slab, be provided with the ring gear on the outer wall of second annular slab, one side meshing of ring gear is connected with the gear, the lower extreme of gear is connected with the motor output, the motor is fixed on first annular slab outer wall, the outside of second annular slab is provided with circular base, circular base's upper end is provided with electrostatic adsorption dish, electrostatic adsorption dish's top is provided with the fly leaf, the upper end of fly leaf is provided with air feeder, air feeder's gas transmission mouth end intercommunication has the person in charge, the person in charge sets up inside the fly leaf, the lower extreme of person in charge evenly communicates there is the breather pipe, the breather pipe sets up the slope, and towards first annular slab direction, the lower extreme of being responsible for evenly is provided with the brush cleaner, one side lower extreme that the fly leaf is close to the second annular slab is provided with the axis of rotation, the axis of rotation is connected on the second annular slab.
Further, the inside of axis of rotation is provided with the fixed orifices, the fixed orifices runs through axis of rotation and fly leaf and extends into inside the second annular plate, the outside of fly leaf is connected with the string rope, the lower extreme of string rope is connected with the fixture block.
Further, the cross section of the clamping block is in a cross shape.
Further, one end of a fixing plate is fixed on two sides of the inner portion of the first annular plate, and the other end of the fixing plate is fixed on the outer wall of the circular base.
Further, two semi-annular grooves are formed by the first annular plate, the circular base and the fixed plate, semi-annular frame plates are arranged in the semi-annular grooves, rotating blocks are abutted to the bottoms of the semi-annular frame plates, a plurality of groups of rotating blocks are arranged, and the rotating blocks are respectively connected to the first annular plate, the fixed plate and the circular base in a rotating mode.
Compared with the prior art, the utility model has the beneficial effects that:
according to the utility model, the gear is driven to rotate by the motor, so that the gear ring is driven to rotate, the second annular plate is driven to rotate by the cooperation of the sliding block and the annular sliding rail, so that the movable plate is driven to rotate around the electrostatic adsorption disc and above the electrostatic adsorption disc, the cleaning brush is enabled to clean the electrostatic adsorption disc, the air supply device supplies air to the main pipe, the air pipe is used for spraying air outwards, impurity ions of the cleaning device are cleaned out of the electrostatic adsorption disc, the effect is good, manual cleaning is not needed, the cleaning efficiency is high, the cleaning is convenient and practical, when the electrostatic adsorption disc is used, the movable plate is moved to one side, the installation and the disassembly are not needed, and the cleaning device is convenient and quick to use; the semi-annular frame plate is convenient to collect and clean.
Drawings
Fig. 1 is a schematic structural view of an electrostatic chuck cleaning structure according to the present utility model.
Fig. 2 is a schematic view of the internal structures of the first ring plate and the second ring plate according to the present utility model.
Fig. 3 is a partial cross-sectional view of the present utility model.
Fig. 4 is a schematic diagram of a connection structure of the first ring plate, the circular base, the fixed plate, the semi-annular frame plate and the rotating block according to the present utility model.
In the figure: 1. a first annular plate; 2. a slide block; 3. a second annular plate; 4. a gas supply device; 5. a gear ring; 6. a movable plate; 7. a rotating shaft; 8. hanging ropes; 9. a clamping block; 10. a gear; 11. a motor; 12. a rotating block; 13. a fixing plate; 14. an electrostatic chuck; 15. a circular base; 16. a main pipe; 17. a vent pipe; 18. a cleaning brush; 19. a fixing hole; 20. an annular slide rail; 21. semi-annular frame plate.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
Referring to fig. 1-4, the present utility model provides the following technical solutions:
example 1
The utility model provides an electrostatic chuck cleaning structure, including first annular slab 1, the upper end of first annular slab 1 is provided with annular slide rail 20, the upper end of annular slide rail 20 is provided with slider 2, the upper end of slider 2 is provided with second annular slab 3, be provided with ring gear 5 on the outer wall of second annular slab 3, one side meshing of ring gear 5 is connected with gear 10, the lower extreme of gear 10 is connected with motor 11 output, motor 11 is fixed on first annular slab 1 outer wall, the outside of second annular slab 3 is provided with circular base 15, the upper end of circular base 15 is provided with electrostatic chuck 14, the top of electrostatic chuck 14 is provided with fly leaf 6, the upper end of fly leaf 6 is provided with air feeder 4, air feeder 4 is air pump or gas pitcher, air feeder 4's gas delivery mouth end intercommunication is equipped with the person in charge 16, be responsible for 16 setting up inside fly leaf 6, the lower extreme homogeneous intercommunication of person in charge 16 has breather pipe 17, and the direction towards first annular slab 1, the lower extreme of person in charge 16 is provided with the brush 18, fly leaf 6 is close to one side of fly leaf 7 of second annular slab 3 is provided with the axis of rotation 7, the axis of rotation 7 is connected on the second annular slab 3.
In this embodiment, in order to be convenient for fixed fly leaf 6, the inside of axis of rotation 7 is provided with fixed orifices 19, and fixed orifices 19 run through axis of rotation 7 and fly leaf 6 and extend into inside second annular plate 3, and the outside of fly leaf 6 is connected with string 8, and the lower extreme of string 8 is connected with fixture block 9, fixture block 9 and fixed orifices 19 assorted, in order for fixture block 9 to insert in the fixed orifices 19, axis of rotation 7 is difficult for removing, and the cross section of fixture block 9 is the cross shape.
The present embodiment is implemented as follows:
when the electrostatic adsorption disc 14 is required to be cleaned, the movable plate 6 is rotated to be above the electrostatic adsorption disc 14, the clamping block 9 is inserted into the fixing hole 19 to fix the movable plate 6, the motor 11 and the air supply device 4 are turned on, the air supply device 4 supplies air through the main pipe 14, finally, the air is discharged through the vent pipe 17, the motor 11 drives the gear 10 to rotate so as to drive the gear ring 5 to rotate, the second annular plate 3 is driven to rotate through the matching of the sliding block 2 and the annular sliding rail 20, so that the movable plate 6 is driven to rotate around and above the electrostatic adsorption disc 14, the cleaning brush 18 is enabled to clean the electrostatic adsorption disc 14, the vent pipe 17 is used for spraying air outwards, impurity ions of the cleaning brush are removed from the electrostatic adsorption disc 14, the electrostatic adsorption disc has good effect, manual cleaning is not required, the cleaning efficiency is high-efficient, the cleaning device is convenient and practical, and the movable plate 6 is moved to one side when the electrostatic adsorption disc 14 is used, and the cleaning device is convenient and quick to use.
Example two
As an optimization scheme of the first embodiment, one end of a fixing plate 13 is fixed on two sides of the inside of the first annular plate 1, the other end of the fixing plate 13 is fixed on the outer wall of the circular base 15, the first annular plate 1, the circular base 15 and the fixing plate 13 form two semi-annular grooves, semi-annular frame plates 21 are arranged in the semi-annular grooves, the bottoms of the semi-annular frame plates 21 are abutted to rotating blocks 12, a plurality of groups of the rotating blocks 12 are arranged, and the rotating blocks 12 are respectively connected to the first annular plate 1, the fixing plate 13 and the circular base 15 in a rotating mode.
The present embodiment is implemented as follows:
when the semicircular frame plate 21 is used, when impurity ions sprayed by the vent pipe 17 enter the semicircular frame plate 21, and when cleaning is needed, the semicircular frame plate 21 can be opened by rotating the rotating block 12, and the semicircular frame plate 21 is taken down for cleaning, so that the semicircular frame plate is convenient to collect and clean.
Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.
Claims (5)
1. The utility model provides an electrostatic chuck cleaning structure, includes first annular plate (1), its characterized in that: the upper end of first crown plate (1) is provided with annular slide rail (20), the upper end of annular slide rail (20) is provided with slider (2), the upper end of slider (2) is provided with second crown plate (3), be provided with ring gear (5) on the outer wall of second crown plate (3), one side meshing of ring gear (5) is connected with gear (10), the lower extreme of gear (10) is connected with motor (11) output, motor (11) are fixed on first crown plate (1) outer wall, the outside of second crown plate (3) is provided with circular base (15), the upper end of circular base (15) is provided with electrostatic adsorption dish (14), the top of electrostatic adsorption dish (14) is provided with fly leaf (6), the upper end of fly leaf (6) is provided with air feeder (4), the air feed inlet intercommunication of air feeder (4) has main pipe (16), main pipe (16) set up inside fly leaf (6), the lower part (16) is provided with circular base (15) of circular base (15), the top of being provided with of the top of the same type as the fly leaf (17) is provided with and is responsible for the brush (17) and is set up in the direction of a person in charge (17) and is evenly, the brush (18), the movable plate (6) is provided with a rotating shaft (7) near the lower end of one side of the second annular plate (3), and the rotating shaft (7) is rotationally connected to the upper end of the second annular plate (3).
2. An electrostatic chuck cleaning structure according to claim 1, wherein: the inside of axis of rotation (7) is provided with fixed orifices (19), fixed orifices (19) run through axis of rotation (7) and fly leaf (6) and extend into inside second annular plate (3), the outside of fly leaf (6) is connected with string rope (8), the lower extreme of string rope (8) is connected with fixture block (9).
3. An electrostatic chuck cleaning structure according to claim 2, wherein: the cross section of the clamping block (9) is in a cross shape.
4. An electrostatic chuck cleaning structure according to claim 1, wherein: one end of a fixing plate (13) is fixed on two sides of the inside of the first annular plate (1), and the other end of the fixing plate (13) is fixed on the outer wall of the circular base (15).
5. An electrostatic chuck cleaning structure according to claim 4, wherein: two semi-annular grooves are formed by the first annular plate (1), the circular base (15) and the fixed plate (13), semi-annular frame plates (21) are arranged in the semi-annular grooves, rotating blocks (12) are abutted to the bottoms of the semi-annular frame plates (21), multiple groups of rotating blocks (12) are arranged, and the rotating blocks (12) are respectively connected to the first annular plate (1), the fixed plate (13) and the circular base (15) in a rotating mode.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321112670.3U CN219811478U (en) | 2023-05-10 | 2023-05-10 | Electrostatic adsorption disc cleaning structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321112670.3U CN219811478U (en) | 2023-05-10 | 2023-05-10 | Electrostatic adsorption disc cleaning structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219811478U true CN219811478U (en) | 2023-10-10 |
Family
ID=88215510
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321112670.3U Active CN219811478U (en) | 2023-05-10 | 2023-05-10 | Electrostatic adsorption disc cleaning structure |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219811478U (en) |
-
2023
- 2023-05-10 CN CN202321112670.3U patent/CN219811478U/en active Active
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