CN219797921U - Blast apparatus and silicon carbide cantilever oar reaction sintering are with high temperature sintering kiln - Google Patents
Blast apparatus and silicon carbide cantilever oar reaction sintering are with high temperature sintering kiln Download PDFInfo
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- CN219797921U CN219797921U CN202321343618.9U CN202321343618U CN219797921U CN 219797921 U CN219797921 U CN 219797921U CN 202321343618 U CN202321343618 U CN 202321343618U CN 219797921 U CN219797921 U CN 219797921U
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- base mounting
- blast
- plate
- temperature sintering
- subassembly
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- 238000005245 sintering Methods 0.000 title claims abstract description 70
- 229910010271 silicon carbide Inorganic materials 0.000 title claims abstract description 22
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title claims abstract description 20
- 238000006243 chemical reaction Methods 0.000 title claims abstract description 18
- 238000005096 rolling process Methods 0.000 claims abstract description 10
- 230000008878 coupling Effects 0.000 claims abstract description 8
- 238000010168 coupling process Methods 0.000 claims abstract description 8
- 238000005859 coupling reaction Methods 0.000 claims abstract description 8
- 238000001125 extrusion Methods 0.000 claims description 12
- 238000007664 blowing Methods 0.000 claims description 9
- 238000012423 maintenance Methods 0.000 abstract description 8
- 238000009434 installation Methods 0.000 abstract description 5
- 230000003749 cleanliness Effects 0.000 abstract description 3
- 230000009286 beneficial effect Effects 0.000 abstract description 2
- 239000002585 base Substances 0.000 description 28
- 239000000428 dust Substances 0.000 description 8
- 238000000034 method Methods 0.000 description 5
- 239000011799 hole material Substances 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 3
- 235000012431 wafers Nutrition 0.000 description 3
- 206010010904 Convulsion Diseases 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000036461 convulsion Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000011900 installation process Methods 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000002253 acid Substances 0.000 description 1
- 239000003513 alkali Substances 0.000 description 1
- 230000004075 alteration Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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Abstract
The utility model relates to the field of silicon carbide cantilever paddle reaction sintering, and in particular discloses a blast device and a high-temperature sintering kiln for silicon carbide cantilever paddle reaction sintering, wherein the blast device and the high-temperature sintering kiln for silicon carbide cantilever paddle reaction sintering comprise a base mounting plate and an inserting fixing assembly, a limit baffle is arranged at the left side of the bottom end of the base mounting plate, the inserting fixing assembly is arranged at the left end of the limit baffle, and a rolling bottom plate is arranged in the middle of the bottom end of the base mounting plate, and the beneficial effects are that: through setting up limit baffle, grafting fixed subassembly and rolling bottom plate, peg graft fixedly when the installation, be convenient for the dismouting, shorten maintenance time, improve work efficiency, dustproof subassembly's setting can carry out dustproof maintenance to the work of blast air subassembly, avoids influencing inside sintering cleanliness, improves equipment's practicality, sets up convenient coupling assembling in the outside of blast pipe and fixes, carries out the prefixed earlier, improves equipment fastening's coupling efficiency.
Description
Technical Field
The utility model relates to the field of silicon carbide cantilever paddle reaction sintering, in particular to a blast device and a high-temperature sintering kiln for the silicon carbide cantilever paddle reaction sintering.
Background
In a PN junction diffusion doping device of a solar photovoltaic cell, namely a diffusion furnace and a high-temperature oxidation diffusion furnace for carrying out thermal growth oxidation on silicon wafers in the semiconductor manufacturing industry, a cantilever paddle is a key component of a wafer loading system in the device, and the reaction sintering silicon carbide cantilever paddle has the characteristics of high strength, high purity, high heat conduction, no air hole, acid and alkali corrosion resistance, no pollution at high temperature, no deformation, good thermal shock resistance, high carrying capacity and the like, so that the direct contact with a furnace tube is avoided, the service life of the furnace tube is prolonged, a plurality of silicon wafers are placed on the cantilever paddle during working, the cantilever paddle is placed in the high-temperature furnace for heating and baking, the cantilever paddle plays a supporting role, and the high-temperature sintering furnace needs to use a blast device to drive air to flow, and the internal temperature is increased.
In the use process of the existing high-temperature sintering furnace, the air blowing device is directly connected with the sintering furnace, so that the disassembly and the assembly are inconvenient, when the sealing performance is wrong or other faults occur, the maintenance time can be influenced, the maintenance efficiency is reduced, and aiming at the conditions, the high-temperature sintering furnace for the reaction sintering of the air blowing device and the silicon carbide cantilever paddle is provided.
Disclosure of Invention
The utility model aims to provide a blast device and a high-temperature sintering kiln for silicon carbide cantilever paddle reaction sintering, so as to solve the problems in the prior art.
In order to achieve the above purpose, the present utility model provides the following technical solutions: the utility model provides a blast apparatus and silicon carbide cantilever oar high temperature sintering kiln for reaction sintering, blast apparatus and silicon carbide cantilever oar high temperature sintering kiln for reaction sintering includes base mounting panel and grafting fixed subassembly, the bottom left side of base mounting panel is provided with limit baffle, grafting fixed subassembly sets up in limit baffle's left end, and the front end of grafting fixed subassembly is connected with fastening screw, the bottom middle part of base mounting panel is provided with rolling bottom plate.
Further, the fixed subassembly of pegging graft includes fixed plate, grafting slide and joint groove, the left end of fixed plate is connected with the grafting slide, and the joint groove has all been seted up to the front and back wall of grafting slide.
Further, the front end of base mounting panel is provided with dustproof subassembly, and the spliced groove has been seted up to the roof of base mounting panel.
The top of base mounting panel sets up two grafting grooves, can peg graft fixedly to the base of air-blower, then the both sides of grafting groove still are provided with the screw mounting hole, the fastening installation to the air-blower of being convenient for.
Further, dustproof subassembly includes convulsions mounting panel and dust guard, and the bottom of convulsions mounting panel is connected with the dust guard.
The exhaust mounting plate is connected with the exhaust pipe mutually, and then the air transmitted by the exhaust mounting plate is dustproof through the dustproof plate, so that dust is prevented from entering the high-temperature sintering kiln body, and the quality of a sintering product is influenced.
Further, the top of base mounting panel is provided with the blast air subassembly, and the blast air subassembly includes air-blower, exhaust column and blast pipe, the front side bottom of air-blower is connected with the exhaust column, and the left end of air-blower is connected with the blast pipe.
Further, the outside of blast pipe is provided with convenient coupling assembling, and convenient coupling assembling includes external ring and extrusion spring, the inner wall of external ring is connected with extrusion spring.
Further, convenient coupling assembling still includes joint piece and fastening staple bolt, the inboard middle part of extrusion spring is connected with the joint piece, and the outside of joint piece is provided with the fastening staple bolt.
The blast pipe passes external ring, then the joint piece can block and extrude in the outside of blast pipe, provides pressure by extrusion spring's elasticity, carries out preliminary fixed to the blast pipe, then uses the fastening staple bolt to fasten the joint piece to this is fixed.
A high-temperature sintering kiln for silicon carbide cantilever paddle reaction sintering, which comprises a high-temperature sintering kiln body, wherein the high-temperature sintering kiln body is provided with the air blowing device.
Compared with the prior art, the utility model has the beneficial effects that: through setting up limit baffle, grafting fixed subassembly and rolling bottom plate, be convenient for peg graft fixedly in the installation, be convenient for the dismouting, shorten maintenance time, improve work efficiency, can prevent dust the maintenance to the work of blast air subassembly through setting up of dustproof subassembly, avoid influencing inside sintering cleanliness to this practicality of improvement equipment sets up convenient coupling assembling in the outside of blast pipe and fixes, can fix in advance, improves the connection efficiency of equipment fastening.
1. In the use process, the equipment is required to be installed, besides the connection of the air supply equipment, the bottom end of the equipment is required to be fixed, the equipment can be pushed and arranged through a rolling bottom plate at the bottom end of a base mounting plate, then a plug-in sliding plate is inserted into a base of a high-temperature sintering kiln body, clamping grooves on two sides are used for clamping and limiting, a limiting baffle is propped against the high-temperature sintering kiln body for limiting the position, and finally a fastening screw is used for connecting the base of the high-temperature sintering kiln body with a fixing plate together for fixing, so that the equipment is convenient for plug-in fixing in the installation process, convenient for disassembly and assembly, shortening the maintenance time and improving the working efficiency.
2. In the use process, the air supply pipe and the connecting pipe outside the high-temperature sintering kiln body are mutually inserted and fixed, the connecting part penetrates through the external ring, then the clamping block is clamped outside the air supply pipe to be extruded, the elastic force of the extrusion spring provides pressure to preliminarily fix the air supply pipe, and then the fastening hoop is used for fastening the clamping block, so that the fixing is finished, and the connection efficiency of equipment fastening is improved through the pre-fixing arrangement.
Drawings
FIG. 1 is a schematic diagram of the front view of a high temperature sintering kiln for reactive sintering of a blast apparatus and a silicon carbide cantilever paddle according to the present utility model;
FIG. 2 is a schematic view of a limiting baffle and a plug-in fixing assembly of a high-temperature sintering kiln for reactive sintering of a blast apparatus and a silicon carbide cantilever paddle according to the present utility model;
FIG. 3 is a schematic view of a partial perspective view of a mounting plate and dust-proof assembly of a high temperature sintering kiln for reactive sintering of a blast apparatus and a silicon carbide cantilever paddle according to the present utility model;
fig. 4 is a schematic diagram of a partial side view cross-section structure of a convenient connection assembly of a high-temperature sintering kiln for reactive sintering of a blast apparatus and a silicon carbide cantilever paddle.
In the figure: 1. a high temperature sintering kiln body; 2. a base mounting plate; 3. a limit baffle; 4. a plug-in fixing component; 401. a fixing plate; 402. a plug-in sliding plate; 403. a clamping groove; 5. a fastening screw; 6. a rolling bottom plate; 7. a dust-proof assembly; 701. an air draft mounting plate; 702. a dust-proof plate; 8. a plug-in groove; 9. a blower assembly; 901. a blower; 902. an exhaust tube; 903. an air supply pipe; 10. a convenient connecting component; 1001. an external ring; 1002. extruding a spring; 1003. a clamping block; 1004. and fastening the anchor ear.
Detailed Description
In order to make the objects, technical solutions, and advantages of the present utility model more apparent, the embodiments of the present utility model will be further described in detail with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are some, but not all, embodiments of the present utility model, are intended to be illustrative only and not limiting of the embodiments of the present utility model, and that all other embodiments obtained by persons of ordinary skill in the art without making any inventive effort are within the scope of the present utility model.
In the description of the present utility model, it should be noted that the terms "center," "middle," "upper," "lower," "left," "right," "inner," "outer," "top," "bottom," "side," "vertical," "horizontal," and the like indicate orientations or positional relationships based on the orientation or positional relationships shown in the drawings, merely to facilitate description of the present utility model and simplify the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model. Furthermore, the terms "a," an, "" the first, "" the second, "" the third, "" the fourth, "" the fifth, "and the sixth" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.
For purposes of brevity and description, the principles of the embodiments are described primarily by reference to examples. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the embodiments. It will be apparent, however, to one of ordinary skill in the art that the embodiments may be practiced without limitation to these specific details. In some instances, well-known methods and structures have not been described in detail so as not to unnecessarily obscure the embodiments. In addition, all embodiments may be used in combination with each other.
Referring to fig. 1 and 2, the present utility model provides a technical solution: the utility model provides a blast apparatus and carborundum cantilever oar high temperature sintering kiln for reaction sintering, blast apparatus and carborundum cantilever oar high temperature sintering kiln for reaction sintering includes base mounting panel 2 and grafting fixed subassembly 4, the bottom left side of base mounting panel 2 is provided with limit baffle 3, grafting fixed subassembly 4 sets up in limit baffle 3's left end, and grafting fixed subassembly 4's front end is connected with fastening screw 5, base mounting panel 2's bottom middle part is provided with rolling bottom plate 6, grafting fixed subassembly 4 includes fixed plate 401, grafting slide 402 and joint groove 403, the left end of fixed plate 401 is connected with grafting slide 402, and the joint groove 403 has all been seted up to both walls around grafting slide 402, in the use, need install equipment is, except that blast apparatus's connection, the bottom also need be fixed, the rolling bottom plate 6 of accessible base mounting panel 2 bottom promotes the setting, then let grafting slide 402 insert in high temperature sintering kiln body 1's the base, the joint groove 403 of both sides carries out the joint spacing, let limit baffle 3 carry out the position and inject, finally use fastening body 5 wear high temperature kiln body 1 and install at fixed plate 401, the fixed time is convenient for the installation is together in order to improve the sintering kiln, the fixed time.
Referring to fig. 1 and 3, the front end of the base mounting plate 2 is provided with a dustproof component 7, and the top wall of the base mounting plate 2 is provided with a plugging slot 8, the dustproof component 7 comprises an exhaust mounting plate 701 and a dustproof plate 702, the bottom end of the exhaust mounting plate 701 is connected with the dustproof plate 702, the top end of the base mounting plate 2 is provided with a blast component 9, the blast component 9 comprises a blast fan 901, an exhaust tube 902 and an air supply tube 903, the bottom end of the front side of the blast fan 901 is connected with the exhaust tube 902, the left end of the blast fan 901 is connected with the air supply tube 903, the top end of the base mounting plate 2 is provided with two plugging slots 8, the base of the blast fan 901 can be plugged and fixed, then, both sides of the plugging slots 8 are also provided with screw mounting holes, the fastening installation of the blast fan 901 is facilitated, the exhaust mounting plate 701 is connected with the exhaust tube 902, then the air of the exhaust mounting plate 701 is all dustproof through the dustproof plate 702, the dust is prevented from entering the high-temperature sintering kiln body 1, the quality of the sintering product is affected, the inside sintering cleanliness is prevented from being affected, and the practicability of the equipment is improved.
Referring to fig. 1 and 4, the top end of the base mounting plate 2 is provided with a blower assembly 9, and the blower assembly 9 includes a blower 901, an exhaust pipe 902 and an air supply pipe 903, the front bottom end of the blower 901 is connected with the exhaust pipe 902, and the left end of the blower 901 is connected with the air supply pipe 903, the outside of the air supply pipe 903 is provided with a convenient connection assembly 10, and the convenient connection assembly 10 includes an external ring 1001 and an extrusion spring 1002, the inner wall of the external ring 1001 is connected with the extrusion spring 1002, the convenient connection assembly 10 further includes a clamping block 1003 and a fastening hoop 1004, the middle part of the inner side of the extrusion spring 1002 is connected with the clamping block 1003, and the outside of the clamping block 1003 is provided with the fastening hoop 1004.
A high-temperature sintering kiln for silicon carbide cantilever paddle reaction sintering, which comprises a high-temperature sintering kiln body 1, wherein a blast device as set forth in any one of the above is arranged on the high-temperature sintering kiln body 1.
Working principle: when the blast device and the high-temperature sintering kiln for silicon carbide cantilever paddle reaction sintering are used, firstly, in the use process, equipment needs to be installed, besides the connection of air supply equipment, the bottom end needs to be fixed, the rolling bottom plate 6 at the bottom end of the base mounting plate 2 can be pushed and arranged, then the plugging sliding plate 402 is inserted into the base of the high-temperature sintering kiln body 1, the clamping grooves 403 at two sides are used for clamping and limiting, the limiting baffle 3 is propped against the high-temperature sintering kiln body 1 for position limiting, finally, the fastening screw 5 is used for connecting the high-temperature sintering kiln body 1 with the fixing plate 401 through the base of the high-temperature sintering kiln body 1 for fixing, so that the plugging and the fixing are conveniently carried out in the installation process, the disassembly is convenient, the maintenance time is shortened, then the top end of the base mounting plate 2 is provided with two plugging grooves 8, can peg graft fixedly to the base of air-blower 901, then the both sides of jack-in groove 8 still are provided with the screw mounting hole, be convenient for install the fastening of air-blower 901, exhaust mounting plate 701 and exhaust column 902 interconnect, then the air of exhaust mounting plate 701 transmission all prevents dust through dust guard 702, avoid the dust to get into in the high temperature sintering kiln body 1, at last peg graft fixedly each other blast pipe 903 and the outside connecting pipe of high temperature sintering kiln body 1, in the junction, pass external ring 1001, then joint piece 1003 can block and extrude in the outside of blast pipe 903, provide pressure by the elasticity of extrusion spring 1002, carry out preliminary fixed to blast pipe 903, then reuse fastening staple bolt 1004 to fasten joint piece 1003, thereby accomplish fixedly, can operate air-blower 901 and use.
Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.
Claims (8)
1. The utility model provides a blast apparatus, its characterized in that, includes base mounting panel (2) and grafting fixed subassembly (4), the bottom left side of base mounting panel (2) is provided with limit baffle (3), grafting fixed subassembly (4) set up in limit baffle (3) left end, and the front end of grafting fixed subassembly (4) is connected with fastening screw (5), the bottom middle part of base mounting panel (2) is provided with rolling bottom plate (6).
2. A blowing device according to claim 1, characterized in that: the plug-in fixing assembly (4) comprises a fixing plate (401), a plug-in sliding plate (402) and a clamping groove (403), wherein the left end of the fixing plate (401) is connected with the plug-in sliding plate (402), and the clamping groove (403) is formed in the front wall and the rear wall of the plug-in sliding plate (402).
3. A blowing device according to claim 1, characterized in that: the front end of base mounting panel (2) is provided with dustproof subassembly (7), and spliced groove (8) have been seted up to the roof of base mounting panel (2).
4. A blowing device according to claim 3, characterized in that: the dustproof assembly (7) comprises an air draft mounting plate (701) and a dustproof plate (702), and the dustproof plate (702) is connected to the bottom end of the air draft mounting plate (701).
5. A blowing device according to claim 1, characterized in that: the top of base mounting panel (2) is provided with blast air subassembly (9), and blast air subassembly (9) are including air-blower (901), exhaust column (902) and blast pipe (903), the front side bottom of air-blower (901) is connected with exhaust column (902), and the left end of air-blower (901) is connected with blast pipe (903).
6. A blowing device according to claim 5, characterized in that: the outside of blast pipe (903) is provided with convenient coupling assembling (10), and convenient coupling assembling (10) are including external ring (1001) and extrusion spring (1002), the inner wall of external ring (1001) is connected with extrusion spring (1002).
7. A blowing device according to claim 6, wherein: the convenient connecting assembly (10) further comprises a clamping block (1003) and a fastening hoop (1004), the middle part of the inner side of the extrusion spring (1002) is connected with the clamping block (1003), and the fastening hoop (1004) is arranged outside the clamping block (1003).
8. A high temperature sintering kiln for silicon carbide cantilever paddle reaction sintering, comprising a high temperature sintering kiln body (1), characterized in that the high temperature sintering kiln body (1) is provided with a blower device according to any one of claims 1-7.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321343618.9U CN219797921U (en) | 2023-05-29 | 2023-05-29 | Blast apparatus and silicon carbide cantilever oar reaction sintering are with high temperature sintering kiln |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321343618.9U CN219797921U (en) | 2023-05-29 | 2023-05-29 | Blast apparatus and silicon carbide cantilever oar reaction sintering are with high temperature sintering kiln |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219797921U true CN219797921U (en) | 2023-10-03 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321343618.9U Active CN219797921U (en) | 2023-05-29 | 2023-05-29 | Blast apparatus and silicon carbide cantilever oar reaction sintering are with high temperature sintering kiln |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219797921U (en) |
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2023
- 2023-05-29 CN CN202321343618.9U patent/CN219797921U/en active Active
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