CN219796297U

CN219796297U - Quick fluid discharge valve device

Info

Publication number: CN219796297U
Application number: CN202321061239.0U
Authority: CN
Inventors: 叶曲波; 王文和; 朱伟然
Original assignee: Sien Semiconductor Technology Suzhou Co ltd
Current assignee: Sien Semiconductor Technology Suzhou Co ltd
Priority date: 2023-05-06
Filing date: 2023-05-06
Publication date: 2023-10-03
Anticipated expiration: 2033-05-06

Abstract

The utility model discloses a quick liquid discharge valve device, which relates to the technical field of liquid discharge valves and aims to solve the problems that the existing liquid discharge mode is more and complex in pipeline connection, if the quick liquid discharge requirement is required to be met, larger pipe diameter is needed, corresponding joints and elbows are larger, the equipment size is easy to increase, when a large-sized solution tank is discharged, the supporting distance of a supporting plate is too long, the solution tank filled with solution cannot be supported, and the cost is increased when the high-strength supporting plate is replaced. The effect that excessive pipelines are avoided when the rapid liquid discharge is realized, meanwhile, an overlong supporting structure is not needed, and the cost is low is achieved.

Description

Quick fluid discharge valve device

Technical Field

The utility model relates to the technical field of drain valves, in particular to a rapid drain valve device.

Background

The cleaning of the semiconductor device is an important process step in the electronic industry, when the solution after the cleaning of the chemical liquid and the flushing of DI water does not reach the recycling standard, the solution is regarded as waste liquid to be discharged from the corresponding solution tank, the current common liquid discharging mode in the industry is divided into two types, the liquid outlet of the solution tank is connected with the liquid outlet of the equipment through a pipeline by the first type, wherein the corresponding elbow is reasonably used according to the spatial positions of the liquid outlet of each solution tank and the liquid outlet of the equipment in the equipment; according to the calibers of the liquid discharging ports and the air pressure control valves, the corresponding reducer union is reasonably used; when the partition plate is penetrated, the second type of the threading connector is reasonably used, the liquid outlet of the solution tank is connected with the air pressure control valve through a section of pipeline and is subjected to diameter changing treatment, the air pressure control valve is fixed in a certain mode, waste liquid is directly discharged on the equipment bottom plate under the solution tank, the waste liquid flows to the liquid outlet of the equipment through the inclined bottom plate by self weight, wherein the liquid outlet of the equipment is positioned at the lowest position of the inclined bottom plate of the equipment, the solution tank is supported by the supporting plate, the inclined end of the supporting plate is connected with the inclined floor, the inclined angles of the supporting plate and the inclined floor are complementary, and the plane end of the supporting plate supports the solution tank, so that the bottom plate of the solution tank is parallel to the ground, and the bottom plate of the solution tank is provided with a certain distance from the bottom plate of the equipment through the supporting plate.

The existing liquid draining mode is more and complex in pipeline connection, if the requirement of quick liquid draining is met, larger pipe diameter is needed, corresponding connectors and elbows are larger, the equipment size is easy to increase, the supporting distance of the supporting plate is too long when liquid is drained from a large-sized solution tank, the solution tank filled with the solution cannot be supported, and the cost is increased when the high-strength supporting plate is replaced.

Disclosure of Invention

The utility model aims to provide a rapid liquid discharge valve device which can avoid excessive pipelines when rapid liquid discharge is realized, and meanwhile, an overlong supporting structure is not needed, so that the cost is low.

In order to achieve the above purpose, the present utility model provides the following technical solutions:

the utility model provides a quick flowing back valve arrangement, includes the cylinder, the one end external screw thread of cylinder has the second apron, the external screw thread of second apron is connected with the fixing base, all be provided with the through-hole on the terminal surface and the side surface of fixing base, the inside sliding connection of cylinder has the piston rod, the one end threaded connection of piston rod has the putty structure, the putty structure mutually supports with the through-hole of fixing base terminal surface.

By adopting the technical scheme, the piston rod can be utilized to drive the blocking structure to move, so that quick opening and closing operation is realized.

Further, a first cover plate is connected to one port of the air cylinder in a threaded mode, a second air hole is formed in the middle shaft position of the first cover plate, a first air hole is formed in the side surface of the air cylinder, and the first air hole and the second air hole are located on two sides of the piston end of the piston rod respectively.

Through adopting above-mentioned technical scheme, can utilize first gas pocket and second gas pocket to realize stable air guide, ensure that the piston rod can be stable effectual carry out telescopic motion.

Further, the side surface of the piston rod is provided with a mounting groove, the inside of the mounting groove is provided with a first sealing ring in a buckling mode, the inner wall of the port of the cylinder is provided with two mounting grooves, and the inside of the two mounting grooves is provided with a second sealing ring in a buckling mode respectively.

By adopting the technical scheme, the sealing performance between the piston rod and the cylinder is ensured.

Further, the blocking structure comprises a fixed block and a movable blocking block, a groove is formed in the outer surface of one side of the movable blocking block, the fixed block is clamped in the groove, a threaded hole is formed in the outer surface of the fixed block, the inner thread of the threaded hole is connected with a buffer structure, and the telescopic end of the buffer structure penetrates through the threaded hole in the outer surface of the fixed block and is in threaded connection with the movable blocking block.

Through adopting above-mentioned technical scheme, can utilize buffer structure to carry out effectual buffering operation to the striking between movable closure and the fixing base.

Further, the buffer structure comprises a pipe sleeve and a connecting rod, wherein the pipe sleeve is in threaded connection with the threaded hole in the outer surface of the fixed block, the connecting rod is in threaded connection with the threaded hole in the outer surface of the movable block, a spring is arranged in the pipe sleeve, and two ends of the spring are respectively abutted to the end face of the connecting rod and the inner end face of the pipe sleeve.

Through adopting above-mentioned technical scheme, can utilize the spring to realize the buffering operation of impact, also can utilize the spring to realize the operation that rises simultaneously, ensure the seal of the contact of blocking structure and fixed block.

Further, a through hole is formed in the middle shaft position of the end face of the pipe sleeve.

Through adopting above-mentioned technical scheme, guaranteed that the connecting rod can be at the inside stable flexible of pipe box.

In summary, the beneficial technical effects of the utility model are as follows:

1. according to the utility model, the piston rod can be driven to move in the cylinder by using compressed air, so that the blocking structure is driven to move along the axial direction of the piston rod, when the blocking structure is separated from the through hole on the end surface of the fixed seat, the liquid discharge channel is opened, and the rapid liquid discharge operation can be realized, meanwhile, the whole device has compact and small structure, is convenient to use, and reduces the pipeline connection and reducing treatment of the liquid discharge port of the solution tank and the valve, thereby reducing the pipeline system, greatly shortening the supporting distance, reducing the volume of the device, reducing the fixation of the valve, greatly improving the compactness of the semiconductor cleaning device and reducing the manufacturing cost of the device;

2. according to the utility model, the buffer structure is arranged between the fixed block and the movable block, so that when the piston rod drives the block structure to block the liquid discharge channel, the collision between the movable block and the fixed seat is buffered and protected, the impact abrasion between the block structure and the fixed seat caused by frequent opening and closing operation is avoided, the occurrence of the condition of leakage of a solution with poor sealing is further avoided, and the overall practicability is effectively improved.

Drawings

FIG. 1 is a schematic perspective view of the present utility model;

FIG. 2 is an internal block diagram of the present utility model;

fig. 3 is an enlarged view of fig. 2 at a in accordance with the present utility model.

In the figure: 1. a cylinder; 2. a first cover plate; 3. a second cover plate; 4. a fixing seat; 5. a blocking structure; 6. a piston rod; 7. a first seal ring; 8. a second seal ring; 9. a first air hole; 10. a second air hole; 11. a fixed block; 12. a movable block; 13. a buffer structure; 14. a connecting rod; 15. a pipe sleeve; 16. and (3) a spring.

Detailed Description

The process according to the utility model is described in further detail below with reference to the accompanying drawings.

Referring to fig. 1 and 2, a quick liquid discharge valve device comprises a cylinder 1, one end of the cylinder 1 is externally connected with a second cover plate 3 in a threaded manner, the second cover plate 3 is externally connected with a fixing seat 4 in a threaded manner, the end face and the side surface of the fixing seat 4 are respectively provided with a through hole, the interior of the cylinder 1 is connected with a piston rod 6 in a sliding manner, one end of the piston rod 6 is connected with a blocking structure 5 in a threaded manner, the blocking structure 5 is matched with the through hole of the end face of the fixing seat 4, one end of the cylinder 1 is connected with a first cover plate 2 in a threaded manner, a second air hole 10 is formed in the middle shaft of the first cover plate 2, a first air hole 9 is formed in the side surface of the cylinder 1, the first air hole 9 and the second air hole 10 are respectively positioned on two sides of the piston end of the piston rod 6, the piston rod 6 can be driven by compressed air, the blocking structure 5 is driven to move along the axial direction of the piston rod 6, when the blocking structure 5 is separated from the through hole of the end face of the fixing seat 4, a liquid discharge channel is opened, quick liquid discharge operation can be realized, meanwhile, the whole device is compact in structure and small in structure, the use, the size of the connection between a solution tank and a liquid discharge device is greatly reduced, the size is reduced, the size and the volume of a semiconductor device is greatly reduced, and has reduced, and the size is greatly reduced, and has the size and has reduced cost.

Referring to fig. 2, a mounting groove is provided on a side surface of the piston rod 6, and a first sealing ring 7 is installed at an inner buckle of the mounting groove, two mounting grooves are provided on an inner wall of a port of the cylinder 1, and a second sealing ring 8 is installed at inner buckles of the two mounting grooves, wherein sealing between the piston rod 6 and the cylinder 1 can be improved by using the first sealing ring 7 and the second sealing ring 8, and stable axial movement of the piston rod 6 is ensured.

Referring to fig. 2 and 3, the block structure 5 includes a fixed block 11 and a movable block 12, a groove is formed in an outer surface of one side of the movable block 12, the fixed block 11 is clamped in the groove, a threaded hole is formed in an outer surface of the fixed block 11, a buffer structure 13 is connected with internal threads of the threaded hole, a telescopic end of the buffer structure 13 penetrates through the threaded hole in the outer surface of the fixed block 11 and is in threaded connection with the movable block 12, the buffer structure 13 includes a pipe sleeve 15 and a connecting rod 14, the pipe sleeve 15 is in threaded connection with the threaded hole in the outer surface of the fixed block 11, the connecting rod 14 is in threaded connection with the threaded hole in the outer surface of the movable block 12, a spring 16 is arranged in the pipe sleeve 15, two ends of the spring 16 are respectively abutted to an end surface of the connecting rod 14 and an inner end surface of the pipe sleeve 15, a through hole is formed in a center axis position of the end surface of the pipe sleeve 15, wherein the buffer structure 13 is arranged between the fixed block 11 and the movable block 12, so that when the piston rod 6 drives the block structure 5 to block a liquid discharging channel, the movable block 12 and the fixed seat 4 are subjected to buffer protection, frequent opening and closing operation is avoided, serious impact between the block structure 5 and 4 is avoided, the problem that leakage of a practical solution is seriously caused, and the whole leakage condition is avoided.

Working principle: when the novel cleaning device is used, the fixed seat is fixedly connected at a designated position, the blocking structure 5 is blocked in the through hole on the end face of the fixed seat 4, the flow of cleaning liquid is effectively prevented, when a liquid discharge channel is required to be opened, air is injected into the cylinder 1 through the first air hole 9, meanwhile, the original air in the cylinder 1 is discharged from the second air hole 10, the piston rod 6 axially moves in the cylinder 1, the blocking structure 5 is in threaded connection with one end of the piston rod 6, the movement of the piston rod 6 drives the blocking structure 5 to move, the liquid discharge channel is further opened, liquid to be discharged passes through the through hole on the end face of the fixed seat 4 and enters the inside of the fixed seat 4, then the liquid is discharged from the through hole on the side surface of the fixed seat 4, the stable liquid discharge operation is realized, when the liquid discharge channel is required to be closed, air is injected into the cylinder 1 through the second air hole 10, original air in the cylinder 1 is discharged through the first air hole 9, the piston rod 6 moves reversely, the blocking structure 5 can be buckled on the through hole of the end face of the fixed seat 4 again, in the blocking process, the movable blocking 12 is connected with the fixed block 11 through the buffer structure 13, the fixed block 11 continuously moves for a certain distance when contacting the fixed seat 4, in the process, the connecting rod 14 which is connected with the threaded hole of the movable blocking 12 in a threaded mode can extend into the pipe sleeve 15 which is connected with the threaded hole of the fixed block 11 in a threaded mode, the spring 16 in the pipe sleeve 15 is compressed, and the reactive force generated by the spring 16 enables the movable blocking 12 to be stressed gradually, so that the movable blocking 12 is prevented from hard impact on the fixed seat 4.

The embodiments of the present utility model are all preferred embodiments of the present utility model, and are not intended to limit the scope of the present utility model in this way, therefore: all equivalent changes in structure, shape and principle of the utility model should be covered in the scope of protection of the utility model.

Claims

1. The utility model provides a quick flowing back valve device, includes cylinder (1), its characterized in that: one end external screw thread of cylinder (1) is connected with second apron (3), the external screw thread of second apron (3) is connected with fixing base (4), all be provided with the through-hole on the terminal surface and the side surface of fixing base (4), the inside sliding connection of cylinder (1) has piston rod (6), the one end screw thread of piston rod (6) is connected with blocking structure (5), blocking structure (5) mutually support with the through-hole of fixing base (4) terminal surface.

2. A quick drain valve assembly according to claim 1, wherein: the novel piston rod is characterized in that a first cover plate (2) is connected to one port of the cylinder (1) in a threaded mode, a second air hole (10) is formed in the middle shaft position of the first cover plate (2), a first air hole (9) is formed in the side surface of the cylinder (1), and the first air hole (9) and the second air hole (10) are respectively located at two sides of the piston end of the piston rod (6).

3. A quick drain valve assembly according to claim 1, wherein: the piston rod is characterized in that a mounting groove is formed in the side surface of the piston rod (6), a first sealing ring (7) is mounted in the inner buckle of the mounting groove, two mounting grooves are formed in the inner wall of the port of the cylinder (1), and a second sealing ring (8) is mounted in the inner buckle of the two mounting grooves.

4. A quick drain valve assembly according to claim 1, wherein: the utility model discloses a movable blocking block, including fixed block (11) and movable blocking block (12), be provided with the recess on the surface of one side of movable blocking block (12), fixed block (11) block is in the recess, be provided with the screw hole on the surface of fixed block (11), and the inside threaded connection of screw hole has buffer structure (13), the flexible end of buffer structure (13) runs through the screw hole on the surface of fixed block (11) to with movable blocking block (12) threaded connection.

5. The quick drain valve assembly according to claim 4, wherein: the buffer structure (13) comprises a pipe sleeve (15) and a connecting rod (14), wherein the pipe sleeve (15) is in threaded connection with a threaded hole in the outer surface of the fixed block (11), the connecting rod (14) is in threaded connection with a threaded hole in the outer surface of the movable block (12), a spring (16) is arranged in the pipe sleeve (15), and two ends of the spring (16) are respectively abutted to the end face of the connecting rod (14) and the inner end face of the pipe sleeve (15).

6. A quick drain valve assembly according to claim 5, wherein: and a through hole is arranged at the middle shaft position of the end face of the pipe sleeve (15).