CN219788366U - Finger assembly mounting structure of manipulator - Google Patents

Abstract

The utility model relates to a manipulator, in particular to a finger assembly mounting structure of the manipulator. Finger assembly mounting structure of manipulator includes: the finger assembly is provided with an adaptive positioning structure; the finger mounting base body is provided with a public positioning structure which is used for being matched with the adapting positioning structure in a positioning way so as to position and mount any finger component with corresponding specification on the finger mounting base body; and the fixing piece is used for fixing any finger component with corresponding specification to the finger mounting base body. The public location structure can supply the finger subassembly of arbitrary corresponding specification to rely on adaptation location structure location cooperation, consequently can satisfy the respective location demand of two kinds of specification finger subassemblies, is convenient for realize the accurate location of each finger subassembly when changing different finger subassemblies, and the mounting can satisfy the fixed demand of finger subassembly simultaneously to only through changing local finger subassembly can satisfy the user demand of different target object.

Description

Finger assembly mounting structure of manipulator

Technical Field

The utility model relates to a manipulator, in particular to a finger assembly mounting structure of the manipulator.

Background

Wafers undergo hundreds of processes during processing, and with the process circulation, a manipulator is required to perform wafer picking and placing operations on the wafers in certain process sections. The robot typically includes a Wrist assembly (i.e., a Wrist assembly) and a finger assembly (i.e., a finger assembly) secured to the Wrist assembly for carrying the wafer.

In practical use, different sizes of finger assemblies are required because wafers of different sizes and types need to be inspected on the same apparatus. In addition, in some process segments, backside defects of the wafer need to be detected, but the patterned areas (i.e., the areas with chips) on the backside and the front side of the wafer are not allowed to be contacted, so a framed wafer (frame wafer) is needed to meet the above-mentioned backside defect detection requirements. The framed wafer (frame wafer) is structurally different from the normal wafer (normal wafer) and requires a different type of finger assembly.

Disclosure of Invention

The utility model mainly solves the technical problem of how to enable the manipulator to meet the use requirements of different targets.

The utility model provides a finger assembly mounting structure of a manipulator.

Finger assembly mounting structure of manipulator includes:

the finger assembly is provided with an adaptive positioning structure;

the finger mounting base body is provided with a public positioning structure which is used for being matched with the adaptive positioning structure in a positioning way so as to position and mount the finger assembly with any corresponding specification on the finger mounting base body;

and the fixing piece is used for fixing any finger component with corresponding specification to the finger mounting base body.

In one technical scheme, the fixing piece comprises a pressing plate and a pressing screw, wherein the pressing plate is used for being laminated to the finger assembly, a screw through hole for the pressing screw to pass through is formed in the finger assembly, and the pressing screw is used for applying pressing force to the pressing plate to press the finger assembly to the finger mounting base body.

In one technical scheme, the finger mounting substrate is provided with an avoidance groove, and the pressing plate is embedded into the avoidance groove.

In one aspect, the common positioning structure includes a positioning protrusion protruding from a side of the finger mount base for supporting the finger assembly; the adaptation location structure includes the location cavity, the location cavity supplies the location convex part gets into, the location cavity have with the chamber lateral wall of location convex part adaptation, the chamber lateral wall is used for the location the finger subassembly.

In one technical scheme, the positioning concave cavity extends to the side edge of the finger assembly and forms a through opening at the side edge of the finger assembly, and the through opening is used for the positioning convex part to enter the positioning concave cavity along the extending direction of the positioning concave cavity.

In one technical scheme, the finger mounting substrate is provided with guide convex parts, the guide convex parts and the positioning convex parts are arranged at intervals, and the interval direction is perpendicular to the extending direction of the positioning concave cavity; the matching precision of the guide convex part and the corresponding positioning concave cavity is lower than that of the positioning convex part and the corresponding positioning concave cavity, so that the finger assembly is prevented from being over-positioned by the guide convex part and the positioning convex part.

In one technical scheme, the positioning convex part is a columnar pin or a bar key.

In one technical scheme, the finger mounting base body comprises a base body and a detachable positioning piece, wherein the detachable positioning piece is detachably fixed on the base body, and the common positioning structure is arranged on the detachable positioning piece.

In one aspect, the fixing member includes a crimping screw for forming a pressing force against the finger assembly; in the axial direction of the crimping screw, the detachable locating piece is positioned at the outermost side of the main body of the base body, and at least one crimping screw passes through the detachable locating piece.

In one technical scheme, the corresponding edge of the detachable positioning piece extends out of the outer side of the edge of the finger mounting base body, the extending part is provided with a folded edge, the folded edge and the main body of the detachable positioning piece form an L-shaped structure, and the folded edge is blocked on the corresponding side end face of the finger mounting base body to form positioning fit with the corresponding side end face of the finger mounting base body.

In one technical scheme, the finger mounting base body comprises an inner lining member, the inner lining member and the detachable positioning member are positioned on different sides of the thickness direction of the base body, fixing screws are arranged on the finger mounting base body, the inner lining member and the detachable positioning member in a penetrating mode, the fixing screws enable the finger mounting base body to be clamped between the inner lining member and the detachable positioning member, and fixing of the detachable positioning member is achieved.

The utility model has the beneficial effects that:

according to the finger assembly mounting structure of the manipulator, as the public positioning structure on the finger mounting substrate can be used for positioning and matching any finger assembly with corresponding specification by virtue of the adaptive positioning structure, the respective positioning requirements of the finger assemblies with more than two specifications can be met, finger assemblies can be quickly replaced conveniently when different finger assemblies are replaced, accurate positioning can be realized, the mounting position precision after direct replacement meets the requirement of transmitting a sheet, the robot point position does not need to be taught again, and the time is saved.

Drawings

FIG. 1 is a schematic view of a finger assembly mounting structure of a manipulator;

FIG. 2 is an exploded view of the finger assembly mounting structure at a first wrist joint (i.e., upper wrist joint);

FIG. 3 is a perspective view of the removable retainer of FIG. 2;

FIG. 4 is an exploded view of the finger assembly mounting structure at a second wrist joint (i.e., upper wrist joint);

FIG. 5 is a perspective view of the removable retainer of FIG. 4;

list of feature names corresponding to reference numerals in the figure:

11. a first wrist joint; 12. a second wrist joint; 13. a finger mounting base; 131. an avoidance groove; 14. a detachable positioning piece; 141. positioning convex parts; 142. a guide protrusion; 143. folding edges; 15. a lining member; 16. a fixing screw; 17. a mounting hole;

20. a fixing member; 21. a pressing plate; 22. crimping the screw;

30. a finger assembly; 31. and positioning the concave cavity.

Detailed Description

The utility model will be described in further detail below with reference to the drawings by means of specific embodiments. Wherein like elements in different embodiments are numbered alike in association. In the following embodiments, numerous specific details are set forth in order to provide a better understanding of the present utility model. However, one skilled in the art will readily recognize that some of the features may be omitted, or replaced by other elements, materials, or methods in different situations. In some instances, related operations of the present utility model have not been shown or described in the specification in order to avoid obscuring the core portions of the present utility model, and may be unnecessary to persons skilled in the art from a detailed description of the related operations, which may be presented in the description and general knowledge of one skilled in the art.

Furthermore, the described features, operations, or characteristics of the description may be combined in any suitable manner in various embodiments. Also, various steps or acts in the method descriptions may be interchanged or modified in a manner apparent to those of ordinary skill in the art. Thus, the various orders in the description and drawings are for clarity of description of only certain embodiments, and are not meant to be required orders unless otherwise indicated.

The numbering of the components itself, e.g. "first", "second", etc., is used herein merely to distinguish between the described objects and does not have any sequential or technical meaning. The term "coupled" as used herein includes both direct and indirect coupling (coupling), unless otherwise indicated.

Embodiments of the finger assembly mounting structure of the manipulator of the present utility model:

in one embodiment, as shown in fig. 1, the finger assembly mounting structure of the manipulator is a structure of a wafer carrying manipulator, and the wafer carrying manipulator includes a first Wrist joint 11 (first write) and a second Wrist joint 12 (second write), on which a finger assembly 30 is respectively mounted on the first Wrist joint 11 and the second Wrist joint 12, each finger assembly 30 forms a finger assembly mounting structure with a corresponding Wrist joint, and each finger assembly mounting structure includes a finger assembly 30, a finger mounting base 13 and a fixing member 20.

The finger assembly 30 is used to carry a wafer to be processed or inspected, and the portion thereof used to carry the wafer may take any form known in the art and will not be described in detail herein. Because the finger assemblies 30 have different kinds and sizes, in order to enable different finger assemblies 30 to be interchangeably mounted on the same manipulator, the finger assemblies 30 are provided with an adapting and positioning structure, and the adapting and positioning structure is used for adapting to the finger mounting matrix 13 on the manipulator, so that the positioning requirements of each finger assembly 30 on the finger mounting matrix 13 can be met. Only one of the finger assemblies 30 is shown in the drawings of the present utility model, with the same mating positioning structure for other types and sizes of finger assemblies 30. Correspondingly, the finger mounting base 13 is provided with a common positioning structure, and the common positioning structure is used for being matched with the adaptive positioning structure in a positioning way so as to position and mount the finger assembly 30 with any corresponding specification on the finger mounting base 13. In order to fix the finger assembly 30 that has been positioned on the finger mounting base 13, the finger assembly mounting structure further includes a fixing member 20, the fixing member 20 being capable of fixing any corresponding specification of the finger assembly 30 to the finger mounting base 13.

The following description is made with respect to the finger assembly mounting structures at the first wrist joint 11 and the second wrist joint 12, respectively, and the finger assembly mounting structure at the first wrist joint 11 and the finger assembly mounting structure at the second wrist joint 12 can be regarded as two different embodiments of the finger assembly mounting structure of the manipulator in the present utility model.

Finger assembly mounting structure at the first wrist joint 11 (i.e., upper wrist joint):

as a preferred embodiment, as shown in fig. 1 and 2, the fixing member 20 includes a pressing plate 21 and a pressing screw 22, and the pressing plate 21 is used to be laminated to the finger assembly 30 to form a sandwich structure together with the finger assembly 30 and the finger mounting base 13. The finger assembly 30 is provided with screw holes through which the press screws 22 are passed, and the press screws 22 are used to apply pressing force to the pressing plate 21 to press the finger assembly 30 onto the finger mounting base 13. The provision of the pressing plate 21 can uniformly press the finger assembly 30, which is advantageous in improving fixing reliability. In other embodiments, the securing member 20 may be a screw alone, a head of the screw may be used to compress the finger assembly 30, or a thread of the screw may be used to pull the finger assembly 30 toward the finger mount base 13.

In one embodiment, as shown in fig. 2, the finger mounting base 13 is provided with a avoidance groove 131, and the corresponding pressing plate 21 is covered below the avoidance groove 131, and the pressing plate 21 can press the finger assembly 30 onto the bottom wall of the avoidance groove 131, that is, onto the finger mounting base 13 under the action of the pressing screw 22. The pressing plate 21 is of a flat plate structure, two rows of threaded holes are formed in the pressing plate 21, the threaded holes are used for being connected with the pressing screws 22 in a threaded mode, and upward acting force can be applied to the pressing plate 21 when the pressing screws 22 are screwed.

In one embodiment, the common positioning structure on the finger mounting base 13 includes a positioning protrusion 141, and the positioning protrusion 141 protrudes from the side of the finger mounting base 13 for supporting the finger assembly 30, i.e., protrudes from the bottom wall of the avoidance groove 131 in this embodiment. The finger mounting base 13 is further provided with guide protrusions 142, the guide protrusions 142 are arranged at right and left intervals with the positioning protrusions 141, and the interval direction is perpendicular to the extending direction of the positioning concave cavities 31.

In one embodiment, the mating positioning structure on the finger assembly 30 includes a positioning cavity 31 (not shown in FIG. 2, refer to FIG. 4), the positioning cavity 31 being accessible by the positioning boss 141, the positioning cavity 31 having cavity sidewalls mating with the positioning boss 141 for positioning the finger assembly 30. As a preferred embodiment, the positioning cavity 31 extends to the side of the finger assembly 30 and forms a through opening in the side of the finger assembly 30, i.e. the positioning cavity 31 is a single-sided through slot. The through opening allows the positioning protrusion 141 to enter the positioning cavity 31 along the extending direction of the positioning cavity 31. As a preferred embodiment, the positioning protrusion 141 and the guide protrusion 142 are each a cylindrical pin having a plane portion on the left and right sides thereof, the plane portion being parallel to the front and rear direction for guiding the finger assembly 30 and preventing the finger assembly 30 from being deflected, thereby enabling stable left and right positioning of the finger assembly 30. The front end of the cylindrical pin can be adapted to the blind end of the positioning cavity 31 to achieve front-to-back positioning of the finger assembly 30. The front end face of the columnar pin is an arc-shaped face, can play a guiding role and is convenient to form jogging with the positioning concave cavity 31.

As a preferred embodiment, the mating accuracy of the guide projection 142 and the corresponding positioning recess 31 is lower than the mating accuracy of the positioning projection 141 and the corresponding positioning recess 31 to avoid over-positioning the finger assembly 30 by the guide projection 142 and the positioning projection 141. The guide projection 142, i.e., a projection for guiding, can form coarse positioning with the positioning concave cavity 31, and the positioning projection 141 can form fine positioning with the positioning concave cavity 31 for determining the positioning position. In one embodiment, the positioning protrusion 141 and the guiding protrusion 142 have the same size, and the groove width (the left-right dimension) of the positioning cavity 31 corresponding to the guiding protrusion 142 on the finger assembly 30 is a first groove width, and the groove width of the positioning cavity 31 corresponding to the positioning protrusion 141 on the finger assembly 30 is a second groove width, and the first groove width is larger than the second groove width, so that the positioning protrusion 142 and the positioning protrusion 141 are prevented from over positioning the finger assembly 30, and further, jamming is prevented when the finger assembly 30 is mounted, so that the finger assembly 30 is conveniently mounted on the finger mounting substrate 13. In other embodiments, in the case where the groove widths of the positioning concave cavities 31 are the same, the left-right dimensions of the guide convex portions 142 and the positioning convex portions 141 may be made different to avoid over positioning. Of course, whether or not the over-positioning is substantially determined by the fitting accuracy of the guide projection 142 and the corresponding positioning concave cavity 31 and the fitting accuracy of the positioning projection 141 and the corresponding positioning concave cavity 31, and the over-positioning can be avoided even if the guide projection 142 and the positioning projection 141 have the left-right dimension difference and the positioning concave cavities 31 on the left and right sides have the left-right dimension difference.

In other embodiments, in the case that the machining precision can meet the positioning requirement and the requirement on cost is relatively loose, the machining precision of the guide convex part 142 and the positioning convex part 141 can be improved, and the guide convex part 142 and the positioning convex part 141 are simultaneously used as accurate positioning structures to realize the positioning of the finger assembly 30. In addition, in other embodiments, the columnar pin may have other shapes, such as a cylindrical shape, where deflection of the finger assembly 30 may be avoided by more than two columnar pins; for another example, the columnar pin may be square.

In other embodiments, the positioning cavity 31 of the finger assembly 30 may be a hole-like structure, and may be fitted over the guide protrusion 142 in the up-down direction during installation.

As a preferred embodiment, the finger mount base 13 includes a base body and a detachable positioning member 14, the detachable positioning member 14 being detachably fixed to the base body, and the common positioning structure being provided on the detachable positioning member 14. Of course, since the finger assembly and the finger mounting base should meet the set relative position requirement, and the finger assembly is positioned by means of the detachable positioning member, a positioning structure must also be provided between the base body and the detachable positioning member 14. By providing the removable positioning member 14, different removable positioning members 14 can be provided according to positioning requirements of different finger assemblies 30, thereby reducing or avoiding structural adjustment of the base body.

In one embodiment, the corresponding edge of the detachable positioning member 14 extends outside the edge of the finger mounting base 13, the extending portion is provided with a folded edge 143, the folded edge 143 and the main body of the detachable positioning member 14 form an L-shaped structure, and the folded edge 143 is stopped on the corresponding side end surface of the finger mounting base 13 and forms positioning fit with the corresponding side end surface of the finger mounting base 13. The detachable positioning piece 14 adopts an L-shaped structure to realize stable positioning, which is beneficial to improving the positioning stability and reliability of the finger assembly 30.

In one embodiment, the finger mounting base 13 includes an inner lining member 15, the inner lining member 15 and the detachable positioning member 14 are located on different sides in the thickness direction of the base body, and fixing screws 16 are inserted through the finger mounting base 13, the inner lining member 15 and the detachable positioning member 14, the fixing screws 16 allow the finger mounting base 13 to be clamped between the inner lining member 15 and the detachable positioning member 14, and the detachable positioning member 14 to be fixed. The lining member 15 is provided with two threaded holes for corresponding to the fixing screws 16, and the two threaded holes are used for the threaded connection and fixation of the fixing screws 16. A positioning structure is arranged between the lining member 15 and the main body of the base body, specifically, the lining member 15 is in a flat plate structure, the shape is U-shaped, and the left side, the right side and the rear side of the lining member form positioning fit with the corresponding groove walls of the avoidance groove 131 on the main body of the base body.

Meanwhile, in the axial direction (i.e., up-down direction) of the press screw 22, the detachable positioning member 14 is located at the top outermost side of the base body, in contact with the outer side surface of the base body, and at least one press screw 22 passes through the detachable positioning member 14 to fix the detachable positioning member 14. The structure that the compression screw 22 passes through the detachable positioning piece 14 is convenient for ensuring the integrity of the detachable positioning piece 14, and compared with the structure that the detachable positioning piece 14 is arranged as a split structure to avoid the pressing plate, the compression screw is beneficial to reducing the number of parts; for the case that the common positioning structure is provided on different sides of the finger mounting base 13 in the left-right direction, the relative position accuracy of the common positioning structure in different positions can also be improved, and thus the overall positioning accuracy is ensured.

The front part of the lining element 15 is provided with recesses which can clear the two of the six crimp screws 22 located at the rear. Six crimping screws 22 pass through the detachable locating piece 14, the finger installation base body 13 and the finger assembly 30 from top to bottom in sequence and then are respectively connected in corresponding six threaded holes on the pressing plate 21 in a threaded manner, so that the finger assembly 30 is clamped and fixed.

Because the detachable positioning piece 14 is fixed by the fixing screw 16 and the lining piece 15 and is not mutually related to the fixation of the crimping screw 22 and the finger assembly 30, the fixed position of the detachable positioning piece 14 is not affected when the finger assembly 30 is disassembled and assembled, the positioning accuracy is improved, and the finger assembly 30 is convenient to replace efficiently.

When the finger assembly 30 needs to be replaced, the six crimping screws 22 are disassembled, the original finger assembly 30 is disassembled, then the finger assembly 30 to be used is inserted into the avoiding groove 131 on the bottom surface of the finger mounting substrate 13 along the front-back direction, the positioning is formed by the adapting positioning structure formed by the positioning convex parts 141 and the common positioning structure formed by the columnar pins, then the pressing plate 21 is covered, the crimping screws 22 are screwed, the pressing plate 21 is tightly pressed on the finger assembly 30, and the positioning and fixing of the finger assembly 30 to be used can be completed. When the finger assembly 30 to be used is mounted, the position of the finger assembly 30 in the up-down direction may be adjusted after the fitting positioning structure at the end of the finger assembly 30 is aligned with the common positioning structure on the finger mounting base 13 in the up-down direction, so that the finger assembly 30 to be used is positioned on the finger mounting base 13.

Finger assembly mounting structure at the second wrist joint 12 (i.e., lower wrist joint):

in one embodiment, the finger mounting base 13 has a base body with a groove on its top surface, the groove having a forward opening; as shown in fig. 4 and 5, the main body of the detachable positioning member 14 has a plate-like structure, and the overall profile is U-shaped, and the detachable positioning member 14 further includes a rib protruding downward on the bottom surface of the main body thereof, the rib corresponding to the lining member 15 at the first wrist joint 11 and integrally formed with the main body of the detachable positioning member 14. The convex ribs are embedded into the groove body on the main body of the base body, and the left side surface, the right side surface and the back side surface of the convex ribs are matched with the corresponding side walls of the groove body in a positioning way, so as to realize the positioning of the detachable positioning piece 14 on the main body of the base body.

In one embodiment, similar to the removable locator 14 at the first wrist joint 11, the front portion of the removable locator 14 at the second wrist joint 12 is also provided with a locating tab 141 and a guide tab 142, the locating tab 141 and the guide tab 142 being bar-shaped keys extending in a fore-aft direction to mate with the locating recess 31 on the finger assembly 30. Since the bar key can be provided in the groove on the base body, the length thereof can be longer than the front-rear dimension of the columnar pin at the first wrist joint 11 to improve positioning stability. As a preferred embodiment, the precision of the engagement of the guide protrusion 142 with the corresponding positioning recess 31 is lower than the precision of the engagement of the positioning protrusion 141 with the corresponding positioning recess 31, so as to avoid over positioning of the finger assembly 30 by the guide protrusion 142 and the positioning protrusion 141, the guide protrusion 142 can form coarse positioning with the positioning recess 31, and the positioning protrusion 141 can form fine positioning with the positioning recess 31 for determining the positioning position.

In one embodiment, the left and right rear corners of the removable retainer 14 are provided with mounting holes 17, and corresponding set screws 16 pass through the mounting holes 17 and are secured to the base body of the finger mount base 13. The detachable positioning member 14 is fixed to the body of the finger mounting base 13 with a space from the bottom surface of the groove to form a socket for inserting the finger assembly 30. In other embodiments, the removable retainer 14 may be integrally formed with the base body of the finger mount base 13 or otherwise secured to the base body, such as by welding.

In one embodiment, the pressure plate 21 in the finger assembly mounting structure at the second wrist joint 12 compresses the finger assembly 30 from above. Specifically, as a preferred embodiment, the detachable positioning member 14 forms the escape groove 131, and the pressing plate 21 is fitted into the escape groove 131, so that the overall structure is more compact. Six screw perforations are formed in the pressing plate 21, and the six pressing screws 22 sequentially penetrate through the pressing plate 21 and the finger assembly 30 from top to bottom and are respectively connected to the finger mounting base 13 in a threaded mode, so that clamping and fixing of the finger assembly 30 are achieved.

When the finger assembly 30 at the second wrist joint 12 needs to be replaced, the six compression screws 22 are disassembled, the original finger assembly 30 is disassembled, then the finger assembly 30 to be used is inserted into the avoiding groove 131 on the bottom surface of the finger mounting base 13 along the front-back direction, the positioning is formed by the adapting positioning structure formed by the positioning convex parts 141 and the public positioning structure formed by the bar key, then the pressing plate 21 is covered, the compression screws 22 are installed, the pressing plate 21 downwards compresses the finger assembly 30, and the positioning and fixing of the finger assembly 30 to be used can be completed.

In the utility model, the common positioning structure is arranged on the finger mounting substrate 13, and can be matched with the adaptive positioning structure on different finger assemblies 30 to realize the positioning of different finger assemblies 30, and meanwhile, the fixing piece 20 can realize the fixing of the finger assemblies 30, so that the use requirements of different target objects can be met only by replacing partial finger assemblies 30, one manipulator can adapt to different target objects, and the cost is reduced and the convenience is improved.

As a preferred embodiment, the finger mounting base 13 includes a base body and a detachable positioning member 14, and the base body can adopt a structure on an existing manipulator, and by providing the detachable positioning member 14, the adaptation requirements of different finger assemblies 30 can be conveniently realized by using the original mechanism, and the cost can be effectively saved.

The foregoing description of the utility model has been presented for purposes of illustration and description, and is not intended to be limiting. Several simple deductions, modifications or substitutions may also be made by a person skilled in the art to which the utility model pertains, based on the idea of the utility model.

Claims (11)

1. Finger assembly mounting structure of manipulator, its characterized in that includes:

the finger assembly is provided with an adaptive positioning structure;

the finger mounting base body is provided with a public positioning structure which is used for being matched with the adaptive positioning structure in a positioning way so as to position and mount the finger assembly with any corresponding specification on the finger mounting base body;

and the fixing piece is used for fixing any finger component with corresponding specification to the finger mounting base body.

2. The finger assembly mounting structure of claim 1, wherein the fixing member includes a pressing plate for lamination to the finger assembly and a pressing screw provided with a screw hole through which the pressing screw passes, the pressing screw being for applying a pressing force to the pressing plate to press the finger assembly to the finger mounting base.

3. The finger assembly mounting structure of claim 2, wherein the finger mounting base is provided with a relief groove, and the pressure plate is embedded in the relief groove.

4. A finger assembly mounting structure for a manipulator according to any one of claims 1-3, wherein the common positioning structure comprises a positioning protrusion protruding from a side of the finger mounting base for supporting the finger assembly; the adaptation location structure includes the location cavity, the location cavity supplies the location convex part gets into, the location cavity have with the chamber lateral wall of location convex part adaptation, the chamber lateral wall is used for the location the finger subassembly.

5. The finger assembly mounting structure of claim 4, wherein the positioning cavity extends to a side of the finger assembly and forms a through opening in the side of the finger assembly, the through opening allowing the positioning protrusion to enter the positioning cavity along an extending direction of the positioning cavity.

6. The finger assembly mounting structure of claim 5, wherein the finger mounting base has guide protrusions thereon, the guide protrusions being spaced apart from the positioning protrusions in a direction perpendicular to an extending direction of the positioning cavities; the matching precision of the guide convex part and the corresponding positioning concave cavity is lower than that of the positioning convex part and the corresponding positioning concave cavity, so that the finger assembly is prevented from being over-positioned by the guide convex part and the positioning convex part.

7. The finger assembly mounting structure of claim 4, wherein the positioning protrusion is a cylindrical pin or a bar key.

8. The finger assembly mounting structure of claim 1, wherein the finger mounting base includes a base body and a removable positioning member removably secured to the base body, the common positioning structure being disposed on the removable positioning member.

9. The finger assembly mounting structure of the manipulator of claim 8, wherein the fixture comprises a crimp screw for forming a compression force against the finger assembly; in the axial direction of the crimping screw, the detachable locating piece is positioned at the outermost side of the main body of the base body, and at least one crimping screw passes through the detachable locating piece.

10. The finger assembly mounting structure of claim 8, wherein the corresponding edge of the removable positioning member extends outside the rim of the finger mounting base, the extending portion is provided with a flange, the flange and the body of the removable positioning member form an L-shaped structure, and the flange is stopped on the corresponding side end surface of the finger mounting base to form a positioning fit with the corresponding side end surface of the finger mounting base.

11. The finger assembly mounting structure of claim 8, wherein the finger mounting base includes an inner lining member, the inner lining member and the detachable positioning member being located on different sides in a thickness direction of the base body, and fixing screws being provided to the finger mounting base, the inner lining member and the detachable positioning member in a penetrating manner, the fixing screws allowing the finger mounting base to be clamped between the inner lining member and the detachable positioning member and achieving fixing of the detachable positioning member.