CN219775915U - Heat recovery system and semiconductor clean room - Google Patents
Heat recovery system and semiconductor clean room Download PDFInfo
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- CN219775915U CN219775915U CN202320386863.1U CN202320386863U CN219775915U CN 219775915 U CN219775915 U CN 219775915U CN 202320386863 U CN202320386863 U CN 202320386863U CN 219775915 U CN219775915 U CN 219775915U
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 16
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- 238000012545 processing Methods 0.000 claims description 29
- 239000007788 liquid Substances 0.000 claims description 12
- 230000001105 regulatory effect Effects 0.000 claims description 12
- 238000005406 washing Methods 0.000 claims description 10
- 238000010438 heat treatment Methods 0.000 claims description 9
- 238000005086 pumping Methods 0.000 claims description 9
- 238000001816 cooling Methods 0.000 claims description 7
- 238000007664 blowing Methods 0.000 claims description 4
- 238000001514 detection method Methods 0.000 claims description 4
- 238000000746 purification Methods 0.000 claims description 3
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 3
- 239000002699 waste material Substances 0.000 abstract description 10
- 238000007599 discharging Methods 0.000 abstract description 4
- 238000000034 method Methods 0.000 description 14
- 238000010586 diagram Methods 0.000 description 3
- LYCAIKOWRPUZTN-UHFFFAOYSA-N Ethylene glycol Chemical compound OCCO LYCAIKOWRPUZTN-UHFFFAOYSA-N 0.000 description 2
- 241000238631 Hexapoda Species 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
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- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000004064 recycling Methods 0.000 description 2
- 238000012546 transfer Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- WGCNASOHLSPBMP-UHFFFAOYSA-N hydroxyacetaldehyde Natural products OCC=O WGCNASOHLSPBMP-UHFFFAOYSA-N 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
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Abstract
The utility model discloses a heat recovery system and a semiconductor clean room, and relates to the field of semiconductors. The heat recovery system includes: the fresh air device is used for inputting fresh air into the clean room and is provided with a first heat exchange piece for adjusting the temperature of the fresh air; the exhaust device is used for exhausting waste gas in the clean room and is provided with a second heat exchange piece for absorbing heat of the waste gas; and the heat recovery pipeline is respectively connected with the first heat exchange piece and the second heat exchange piece and forms a circulating flow path for circulating heat exchange medium between the first heat exchange piece and the second heat exchange piece. The heat recovery system provided by the utility model can recycle heat in the waste gas while discharging the waste gas, so that energy waste is avoided.
Description
Technical Field
The utility model relates to the field of semiconductors, in particular to a heat recovery system and a semiconductor clean room.
Background
The main function of the clean room is to meet the process requirements, and control the parameters of the cleanliness, the temperature and the humidity, the air flow and the like of the atmosphere contacted by the product (such as a silicon chip and the like), so that the product can be produced and manufactured in a good environment space. Clean rooms are usually kept at constant temperature and pressure by regulating fresh air, circulating air and exhausting waste gas.
However, in the process of exhausting the waste gas, the heat contained in the waste gas is exhausted, which causes serious energy waste.
Disclosure of Invention
The utility model aims to provide a heat recovery system which can recycle heat in exhaust gas while discharging the exhaust gas, and avoid energy waste.
Another object of the present utility model is to provide a semiconductor clean room capable of recycling heat in exhaust gas while exhausting the exhaust gas, avoiding waste of energy.
The utility model provides a technical scheme that:
a heat recovery system for use in a clean room, comprising:
the fresh air device is used for inputting fresh air into the clean room and is provided with a first heat exchange piece for adjusting the temperature of the fresh air;
the exhaust device is used for exhausting waste gas in the clean room and is provided with a second heat exchange piece for absorbing heat of the waste gas;
the heat recovery pipeline is respectively connected with the first heat exchange piece and the second heat exchange piece and forms a circulating flow path for circulating heat exchange medium between the first heat exchange piece and the second heat exchange piece.
Further, a pumping device is arranged on the heat recovery pipeline and is used for providing power for the circulating flow of the heat exchange medium.
Further, a regulating valve is arranged on the heat recovery pipeline and is used for regulating the flow of the heat exchange medium.
Further, a temperature detection device is arranged on the heat recovery pipeline and is used for detecting the temperature of the heat exchange medium.
Further, the first heat exchange piece and the second heat exchange piece are heat exchange coils, the heat recovery pipeline comprises a first pipe section and a second pipe section, two ends of the first pipe section are respectively connected with a liquid outlet of the second heat exchange piece and a liquid inlet of the first heat exchange piece, and two ends of the second pipe section are respectively connected with the liquid outlet of the first heat exchange piece and the liquid inlet of the second heat exchange piece.
Further, the new trend device is provided with new trend entry, new trend export and new trend passageway, the new trend entry pass through the new trend passageway with new trend export intercommunication, the new trend export be used for with the toilet intercommunication, first heat exchange piece set up in the new trend passageway, still be provided with in the new trend passageway to the first fan that the new trend export bloied.
Further, still be provided with first purifier, washing device, heat sink and heating device in the new trend passageway, by new trend entry extremely the new trend export, first purifier first heat transfer piece washing device the heat sink the heating device reaches first fan is in set gradually in the new trend passageway.
Further, exhaust device is provided with exhaust gas inlet, exhaust gas outlet and exhaust gas channel, exhaust gas inlet pass through exhaust gas channel with exhaust gas outlet intercommunication, exhaust gas inlet be used for with the toilet intercommunication, the second heat transfer piece set up in the exhaust gas channel, still be provided with in the exhaust gas channel to the second fan that exhaust gas outlet bloied.
Further, a second purifying device is further arranged in the exhaust gas channel, and the second purifying device, the second heat exchange piece and the second fan are sequentially arranged in the exhaust gas channel from the exhaust gas inlet to the exhaust gas outlet.
The embodiment of the utility model also provides a semiconductor clean room, which comprises a heat recovery system, wherein the heat recovery system comprises: the fresh air device is used for inputting fresh air into the clean room and is provided with a first heat exchange piece for adjusting the temperature of the fresh air; the exhaust device is used for exhausting waste gas in the clean room and is provided with a second heat exchange piece for absorbing heat of the waste gas; the heat recovery pipeline is respectively connected with the first heat exchange piece and the second heat exchange piece and forms a circulating flow path for circulating heat exchange medium between the first heat exchange piece and the second heat exchange piece. The main part is provided with processing chamber, fresh air device with exhaust device respectively with processing chamber intercommunication, fresh air device be used for to processing chamber carries the new trend, exhaust device is used for discharging exhaust gas in the processing chamber.
Compared with the prior art, the heat recovery system provided by the utility model has the advantages that the second heat exchange piece arranged in the exhaust device can absorb the heat of the exhaust gas and store the heat in the heat exchange medium. The heat recovery pipeline can convey the heat exchange medium in the second heat exchange piece to the first heat exchange piece, so that heat exchange is carried out on the first heat exchange piece and fresh air, and the temperature of the fresh air is regulated by utilizing the heat of waste gas so as to meet the temperature requirement of a clean room. The heat exchange medium flows out of the first heat exchange piece and then flows back to the second heat exchange piece through the heat recovery pipeline so as to be recycled for the next time, and the waste gas heat is recycled. Therefore, the heat recovery system provided by the utility model has the beneficial effects that: the heat in the waste gas can be recycled while the waste gas is discharged, and energy waste is avoided.
Drawings
In order to more clearly illustrate the technical solution of the embodiments of the present utility model, the drawings that are required to be used in the embodiments will be briefly described. It is appreciated that the following drawings depict only certain embodiments of the utility model and are therefore not to be considered limiting of its scope. Other relevant drawings may be made by those of ordinary skill in the art without undue burden from these drawings.
Fig. 1 is a schematic structural view of a semiconductor clean room according to an embodiment of the present utility model;
FIG. 2 is a schematic view of the fresh air device of the heat recovery system of FIG. 1;
fig. 3 is a schematic view of the structure of the exhaust device of the heat recovery system of fig. 1.
Icon: 10-semiconductor clean room; 11-a body; 12-a processing chamber; 100-heat recovery system; 110-a fresh air device; 111-a first heat exchange member; 112-a fresh air inlet; 113-a fresh air outlet; 114-a fresh air channel; 115-a first fan; 116-a first purifying device; 117-a water washing device; 118-a cooling device; 119-heating device; 120-an exhaust device; 121-a second heat exchange member; 122-exhaust gas inlet; 123-an exhaust outlet; 124-an exhaust gas channel; 125-a second fan; 126-a second purification device; 130-a heat recovery line; 131-pumping means; 132-a first pipe section; 133-second tube segment.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present utility model more clear, the technical solutions of the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model. It will be apparent that the described embodiments are some, but not all, embodiments of the utility model. The components of the embodiments of the present utility model generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.
Thus, the following detailed description of the embodiments of the utility model, as presented in the figures, is not intended to limit the scope of the utility model, as claimed, but is merely representative of selected embodiments of the utility model. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
It should be noted that: like reference numerals and letters denote like items in the following figures, and thus once an item is defined in one figure, no further definition or explanation thereof is necessary in the following figures.
In the description of the present utility model, it should be understood that the directions or positional relationships indicated by the terms "upper", "lower", "inner", "outer", "left", "right", etc. are based on the directions or positional relationships shown in the drawings, or the directions or positional relationships conventionally put in place when the inventive product is used, or the directions or positional relationships conventionally understood by those skilled in the art are merely for convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the apparatus or elements referred to must have a specific direction, be configured and operated in a specific direction, and therefore should not be construed as limiting the present utility model.
Furthermore, the terms "first," "second," and the like, are used merely to distinguish between descriptions and should not be construed as indicating or implying relative importance.
In the description of the present utility model, it should also be noted that, unless explicitly specified and limited otherwise, terms such as "disposed," "connected," and the like are to be construed broadly, and for example, "connected" may be either fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances.
The following describes specific embodiments of the present utility model in detail with reference to the drawings.
Examples
Referring to fig. 1, fig. 1 is a schematic diagram illustrating a semiconductor clean room 10 according to the present embodiment.
The semiconductor clean room 10 provided in this embodiment includes a main body 11 and a heat recovery system 100, the main body 11 is provided with a processing chamber 12, a process machine for semiconductor production is disposed in the processing chamber 12, and the processing chamber 12 provides an ideal environment for semiconductor production and processing. The heat recovery system 100 comprises a fresh air device 110 and an exhaust device 120, wherein the fresh air device 110 and the exhaust device 120 are respectively communicated with the processing chamber 12, the fresh air device 110 is used for conveying fresh air to the processing chamber 12, the exhaust device 120 is used for exhausting waste gas in the processing chamber 12, and the fresh air device 110 and the exhaust device 120 are used for cooperatively working to update gas in the processing chamber 12.
Considering that the existing clean room discharges heat in the exhaust gas while discharging the exhaust gas when the internal gas is renewed, serious energy waste is caused. In order to solve the problem, the heat recovery system 100 provided in this embodiment further includes a heat recovery pipeline 130, a first heat exchange member 111 for adjusting the temperature of fresh air is disposed in the fresh air device 110, a second heat exchange member 121 for absorbing heat of exhaust air is disposed in the air exhaust device 120, and the heat recovery pipeline 130 is respectively connected to the first heat exchange member 111 and the second heat exchange member 121 to form a circulation flow path for circulating heat exchange medium between the first heat exchange member 111 and the second heat exchange member 121.
It will be appreciated that both the first heat exchange member 111 and the second heat exchange member 121 exchange heat with the outside using the same heat exchange medium circulating therebetween. In practical application, during the process of exhausting the exhaust gas in the processing chamber 12, the exhaust gas flows through the second heat exchange member 121, and the heat exchange medium flowing in the second heat exchange member 121 exchanges heat with the exhaust gas, so as to realize heat recovery of the exhaust gas, and the heat exchange medium carrying the heat of the exhaust gas flows along the heat recovery pipeline 130 to the first heat exchange member 111 in the fresh air device 110.
During operation, the fresh air device 110 is configured to process ambient fresh air and deliver the processed fresh air into the processing chamber 12. The external fresh air flows through the first heat exchange piece 111 before entering the processing chamber 12, and the heat exchange medium carrying the heat of the waste gas exchanges heat with the fresh air flowing through the first heat exchange piece 111 after reaching the first heat exchange piece 111, so that the temperature of the fresh air is regulated. After the heat exchange medium exchanges heat with the fresh air, the fresh air flows out of the first heat exchange piece 111, flows back into the second heat exchange piece 121 along the heat recovery pipeline 130, and completes one cycle.
It can be seen that the heat recovery system 100 provided in this embodiment can absorb the heat of the exhaust gas in the process of exhausting the exhaust gas in the processing chamber 12, and use the absorbed heat for adjusting the temperature of the fresh air input into the processing chamber 12, so as to realize reutilization of the heat of the exhaust gas and avoid waste of energy of the exhaust gas.
Moreover, under the condition of low external temperature, in the process that the fresh air device 110 conveys the external fresh air to the processing chamber 12, the fresh air is easy to cause frost crack of a pipeline through which the fresh air flows due to low temperature. In this embodiment, the heat of the exhaust gas is absorbed by the exhaust device 120 and then is transferred to the fresh air device 110, so that the fresh air device 110 can be heated while the temperature of the fresh air is regulated, and the pipelines, elements and the like of the fresh air device 110 are protected from being frozen.
In this embodiment, in order to ensure the heat exchange effect and avoid missing heat exchange, the heat exchange medium fills the circulation flow path formed by the heat recovery pipeline 130, the first heat exchange member 111 and the second heat exchange member 121. In addition, the heat exchange medium used in the embodiment is a 75% glycol solution, and in other embodiments, the components of the heat exchange medium can be replaced according to practical application conditions.
In order to ensure that the heat exchange medium can keep continuous and smooth flow in the circulation flow path, in this embodiment, the heat recovery pipeline 130 is provided with a pumping device 131, and the pumping device 131 is used for providing power for the circulation flow of the heat exchange medium. Specifically, the pumping device 131 in this embodiment is disposed on a pipe section of the second heat exchange member 121 that is conveyed to the first heat exchange member 111, and in an operating state, the heat exchange medium in the second heat exchange member 121 can be pumped to the first heat exchange member 111.
In fact, the first heat exchange member 111 and the second heat exchange member 121 in this embodiment are heat exchange coils. The heat recovery pipeline 130 comprises a first pipe section 132 and a second pipe section 133, two ends of the first pipe section 132 are respectively connected with a liquid outlet of the second heat exchange member 121 and a liquid inlet of the first heat exchange member 111, and the pumping device 131 is arranged on the first pipe section 132. Two ends of the second pipe section 133 are respectively connected with the liquid outlet of the first heat exchange piece 111 and the liquid inlet of the second heat exchange piece 121.
In the actual working process, the pumping device 131 operates to pump the heat exchange medium in the second heat exchange piece 121 which completes heat exchange with the waste gas to the first heat exchange piece 111 through the first pipe section 132, and after the heat exchange medium completes heat exchange with the fresh air at the first heat exchange piece 111, the heat exchange medium flows out of the first heat exchange piece 111 and flows back into the second heat exchange piece 121 along the second pipe section 133, so that one cycle is completed.
In other embodiments, a regulating valve may be further disposed on the heat recovery pipeline 130, and the opening degree of the regulating valve is controlled to realize flow regulation of the heat exchange medium in the flow path. In addition, a temperature detecting device may be disposed on the heat recovery pipeline 130 according to practical application conditions, so as to detect the temperature of the heat exchange medium. In such embodiments, the opening degree of the regulating valve is finely regulated according to the detection result of the temperature detection device, so that more accurate regulation of the fresh air temperature can be realized, and higher process requirements are met.
Referring to fig. 2 in combination, fig. 2 is a schematic diagram illustrating a structure of a fresh air device 110 of the heat recovery system 100 in fig. 1.
In this embodiment, the fresh air device 110 is provided with a fresh air inlet 112, a fresh air outlet 113 and a fresh air channel 114, the fresh air inlet 112 is communicated with the fresh air outlet 113 through the fresh air channel 114, and the first heat exchange member 111 is disposed in the fresh air channel 114. The fresh air inlet 112 is communicated with the outside, the fresh air outlet 113 is communicated with the processing chamber 12 of the main body 11 through a pipeline, and a first fan 115 for blowing air to the fresh air outlet 113 is further arranged in the fresh air channel 114.
In practical application, the first fan 115 sucks external fresh air into the fresh air channel 114 from the fresh air inlet 112 and flows along the fresh air channel 114 to the fresh air outlet 113 in an operation state. In this process, the fresh air flows through the first heat exchange member 111 and completes heat exchange with the heat exchange medium in the first heat exchange member 111, thereby completing preliminary adjustment of the temperature thereof.
Considering that the fresh air contains dust, insects, harmful gases, etc., the direct input into the processing chamber 12 may destroy the process environment. Therefore, in the present embodiment, the fresh air device 110 is further provided with a first purifying device 116, a washing device 117, a cooling device 118, and a heating device 119 in the fresh air channel 114. From the fresh air inlet 112 to the fresh air outlet 113, a first purifying device 116, a first heat exchange piece 111, a washing device 117, a cooling device 118, a heating device 119 and a first fan 115 are sequentially arranged in the fresh air channel 114.
When the first fan 115 is operated, the external fresh air enters the fresh air channel 114, and then passes through the first purifying device 116, and the first purifying device 116 filters and purifies the fresh air, so that dust, insects and part of harmful gas in the fresh air can be removed. After that, the fresh air passes through the first heat exchange piece 111, reaches the washing device 117 after the preliminary temperature adjustment is completed, and the washing device 117 realizes the humidity adjustment of the fresh air. The fresh air flowing through the washing device 117 sequentially passes through the cooling device 118 and the heating device 119, and the cooling device 118 and the heating device 119 cooperate to further regulate the temperature of the fresh air. Finally, fresh air meeting the process requirements of humidity, temperature and the like enters the processing chamber 12.
The type of the device for treating the fresh air disposed in the fresh air duct 114 may be increased or decreased according to the actual application condition in other embodiments.
Referring to fig. 3 in combination, fig. 3 is a schematic diagram illustrating a structure of an exhaust device 120 of the heat recovery system 100 in fig. 1.
In this embodiment, the exhaust device 120 is provided with an exhaust gas inlet 122, an exhaust gas outlet 123 and an exhaust gas channel 124, the exhaust gas inlet 122 is communicated with the exhaust gas outlet 123 through the exhaust gas channel 124, and the second heat exchange member 121 is disposed in the exhaust gas channel 124. The exhaust gas inlet 122 communicates with the processing chamber 12 of the main body 11 through a pipe, the exhaust gas outlet 123 is used for communicating with the outside, and a second fan 125 for blowing air toward the exhaust gas outlet 123 is further provided in the exhaust gas passage 124.
In practice, when the second fan 125 is operated, the exhaust gas in the processing chamber 12 is sucked into the exhaust gas channel 124 through the exhaust gas inlet 122, and flows along the exhaust gas channel 124 to the exhaust gas outlet 123. In this process, the exhaust gas passes through the second heat exchange member 121 to exchange heat with the heat exchange medium in the second heat exchange member 121, and heat in the exhaust gas is absorbed by the heat exchange medium.
In addition, in the present embodiment, the exhaust device 120 is further provided with a second purifying device 126 in the exhaust gas channel 124, and the second purifying device 126, the second heat exchanging element 121 and the second fan 125 are sequentially disposed in the exhaust gas channel 124 from the exhaust gas inlet 122 to the exhaust gas outlet 123.
When the second fan 125 is operated, the exhaust gas in the processing chamber 12 enters the exhaust gas channel 124, and then passes through the second purifying device 126, and the second purifying device 126 filters and purifies the exhaust gas. After that, the exhaust gas flows through the second heat exchange member 121, and the heat exchange medium in the second heat exchange member 121 absorbs the heat in the exhaust gas, so that the direct discharge of the heat in the exhaust gas is avoided, and the energy waste is caused.
Similarly, in other embodiments, the type of the device for treating exhaust gas disposed in the exhaust gas passage 124 may be increased or decreased according to the actual application conditions.
In summary, in the heat recovery system 100 provided in the present embodiment, the first heat exchange member 111 is disposed in the fresh air device 110, the second heat exchange member 121 is disposed in the exhaust device, and the first heat exchange member 111 and the second heat exchange member 121 are communicated through the heat recovery pipeline 130 to form a circulation flow path for circulating the heat exchange medium, so as to realize the absorption and recycling of the heat of the exhaust gas in the exhaust gas emission process, and avoid energy waste. Therefore, the semiconductor clean room 10 provided in this embodiment has a feature of being able to avoid energy waste.
The above description is only of the preferred embodiments of the present utility model and is not intended to limit the present utility model, but various modifications and variations can be made to the present utility model by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present utility model should be included in the protection scope of the present utility model.
Claims (10)
1. A heat recovery system for use in a clean room, the heat recovery system (100) comprising:
the fresh air device (110), the fresh air device (110) is used for inputting fresh air into the clean room, and the fresh air device (110) is provided with a first heat exchange piece (111) for adjusting the temperature of the fresh air;
an exhaust device (120), wherein the exhaust device (120) is used for exhausting waste gas in the clean room, and the exhaust device (120) is provided with a second heat exchange piece (121) for absorbing heat of the waste gas;
and the heat recovery pipeline (130), wherein the heat recovery pipeline (130) is respectively connected with the first heat exchange piece (111) and the second heat exchange piece (121) and jointly forms a circulating flow path for circulating heat exchange medium between the first heat exchange piece (111) and the second heat exchange piece (121).
2. Heat recovery system according to claim 1, characterized in that the heat recovery line (130) is provided with pumping means (131), which pumping means (131) are adapted to power the circulating flow of heat exchange medium.
3. Heat recovery system according to claim 1, characterized in that the heat recovery line (130) is provided with a regulating valve for regulating the flow of heat exchange medium.
4. Heat recovery system according to claim 1, characterized in that the heat recovery line (130) is provided with temperature detection means for detecting the temperature of the heat exchange medium.
5. The heat recovery system according to claim 1, wherein the first heat exchange member (111) and the second heat exchange member (121) are heat exchange coils, the heat recovery pipeline (130) comprises a first pipe section (132) and a second pipe section (133), two ends of the first pipe section (132) are respectively connected with a liquid outlet of the second heat exchange member (121) and a liquid inlet of the first heat exchange member (111), and two ends of the second pipe section (133) are respectively connected with a liquid outlet of the first heat exchange member (111) and a liquid inlet of the second heat exchange member (121).
6. The heat recovery system according to claim 1, wherein the fresh air device (110) is provided with a fresh air inlet (112), a fresh air outlet (113) and a fresh air channel (114), the fresh air inlet (112) is communicated with the fresh air outlet (113) through the fresh air channel (114), the fresh air outlet (113) is used for being communicated with the clean room, the first heat exchange member (111) is arranged in the fresh air channel (114), and a first fan (115) for blowing air to the fresh air outlet (113) is further arranged in the fresh air channel (114).
7. The heat recovery system according to claim 6, wherein a first purifying device (116), a water washing device (117), a cooling device (118) and a heating device (119) are further disposed in the fresh air channel (114), and the first purifying device (116), the first heat exchanging piece (111), the water washing device (117), the cooling device (118), the heating device (119) and the first fan (115) are sequentially disposed in the fresh air channel (114) from the fresh air inlet (112) to the fresh air outlet (113).
8. The heat recovery system according to claim 1, wherein the exhaust device (120) is provided with an exhaust gas inlet (122), an exhaust gas outlet (123) and an exhaust gas channel (124), the exhaust gas inlet (122) is communicated with the exhaust gas outlet (123) through the exhaust gas channel (124), the exhaust gas inlet (122) is used for being communicated with the clean room, the second heat exchanging member (121) is arranged in the exhaust gas channel (124), and a second fan (125) blowing towards the exhaust gas outlet (123) is further arranged in the exhaust gas channel (124).
9. The heat recovery system according to claim 8, wherein a second purification device (126) is further provided in the exhaust gas channel (124), from the exhaust gas inlet (122) to the exhaust gas outlet (123), the second purification device (126), the second heat exchanging element (121) and the second fan (125) being provided in this order in the exhaust gas channel (124).
10. Semiconductor clean room characterized by comprising a main body (11) and a heat recovery system (100) according to any of claims 1-9, wherein the main body (11) is provided with a processing chamber (12), the fresh air device (110) and the air exhaust device (120) are respectively communicated with the processing chamber (12), the fresh air device (110) is used for conveying fresh air to the processing chamber (12), and the air exhaust device (120) is used for exhausting waste gas in the processing chamber (12).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320386863.1U CN219775915U (en) | 2023-03-03 | 2023-03-03 | Heat recovery system and semiconductor clean room |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320386863.1U CN219775915U (en) | 2023-03-03 | 2023-03-03 | Heat recovery system and semiconductor clean room |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219775915U true CN219775915U (en) | 2023-09-29 |
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| CN202320386863.1U Active CN219775915U (en) | 2023-03-03 | 2023-03-03 | Heat recovery system and semiconductor clean room |
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| Country | Link |
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| CN (1) | CN219775915U (en) |
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- 2023-03-03 CN CN202320386863.1U patent/CN219775915U/en active Active
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