CN219772251U

CN219772251U - Heat furnace structure

Info

Publication number: CN219772251U
Application number: CN202321200910.5U
Authority: CN
Inventors: 朱太荣; 肖阳; 万林; 林佳继
Original assignee: Laplace New Energy Technology Co ltd
Current assignee: Laplace New Energy Technology Co ltd
Priority date: 2023-05-18
Filing date: 2023-05-18
Publication date: 2023-09-29
Anticipated expiration: 2033-05-18

Abstract

The utility model discloses a hot furnace structure which comprises a furnace body, a furnace mouth flange and a temperature measuring device, wherein one end of the furnace body is opened, the other end of the furnace body is closed, the furnace mouth flange is matched with the open end of the furnace body, and the temperature measuring device penetrates through the closed end of the furnace body and/or the furnace mouth flange and stretches into the furnace body. According to the structure of the hot furnace, the temperature measuring device can be arranged on the sealing end and/or the furnace mouth flange of the furnace body according to actual needs, so that the flexibility is high, the phenomenon that the length of the temperature measuring device is too long can be avoided, the material waste can be reduced, the occurrence probability of electric leakage or short-circuit faults can be effectively reduced, and the use cost of the structure of the hot furnace is reduced.

Description

Heat furnace structure

Technical Field

The utility model relates to the technical field of semiconductor processing equipment, in particular to a hot furnace structure.

Background

The chemical vapor deposition method is widely applied to the field of photovoltaic cell processing and plays an important role in the field of semiconductor processing. In the field of photovoltaic cell processing, common chemical vapor deposition processes include atmospheric pressure chemical deposition, low pressure chemical deposition, and plasma enhanced chemical deposition. Besides the chemical deposition method, the diffusion process is also widely applied to the processing links of the photovoltaic cell, such as boron diffusion, phosphorus diffusion and the like. The chemical deposition equipment and the diffusion equipment are used for processing the silicon wafer by adopting a high-temperature heating mode. Along with the gradual increase of the silicon wafer loading capacity of the photovoltaic processing equipment, how to ensure the uniformity of the silicon wafer coating in the high-temperature furnace is one of the key cores of photovoltaic cell processing. In order to ensure the uniformity of the silicon wafer coating film in the high-temperature furnace, the uniformity of a temperature field can be improved. As the lengths of the photovoltaic chemical deposition apparatus and the diffusion apparatus increase, the high temperature furnace needs to be divided into a plurality of temperature zones to independently monitor the temperature and adjust.

The temperature measuring device of the existing heat furnace structure is generally penetrated from the tail part of the heat furnace, so that the tightness can be improved, the leakage problem caused by installing the temperature measuring device is avoided, but the flexibility is poor, if the temperature area to be measured is at the position of the furnace mouth, the temperature measuring device needs to be longer, on one hand, the material waste is caused, and on the other hand, in the working process, the longer temperature measuring device is also easy to damage, and the use cost of the heat furnace structure is increased.

Disclosure of Invention

The utility model aims to provide a hot furnace structure, which can be used for arranging a temperature measuring device on a sealing end and/or a furnace mouth flange of a furnace body according to actual needs, has high flexibility, can avoid the phenomenon that the length of the temperature measuring device is too long, can reduce material waste, can effectively reduce the occurrence probability of electric leakage or short-circuit faults, and reduces the use cost of the structure of the hot furnace.

In order to achieve the technical effects, the technical scheme of the utility model is as follows:

the utility model discloses a hot furnace structure, which comprises: the furnace body is opened at one end and closed at the other end; the furnace mouth flange is matched with the open end of the furnace body; the temperature measuring device penetrates through the closed end of the furnace body and/or the furnace mouth flange and stretches into the furnace body.

In some embodiments, the temperature measuring device comprises a first sealing protection sleeve and a first thermocouple, the first sealing protection sleeve penetrates through the closed end of the furnace body, the first thermocouple penetrates through the first sealing protection sleeve, and one end of the first thermocouple stretches into the furnace body and corresponds to the temperature region to be measured in the furnace body.

In some specific embodiments, the first thermocouples are plural, and the plural first thermocouples are disposed corresponding to the plural temperature areas to be measured in the furnace body respectively.

In some embodiments, the temperature measuring device comprises a second sealing protection sleeve and a second thermocouple, the second sealing protection sleeve penetrates through the furnace mouth flange, the second thermocouple penetrates through the second sealing protection sleeve, and one end of the second thermocouple stretches into the furnace body and corresponds to the temperature region to be measured in the furnace body.

In some specific embodiments, a mounting hole is formed in the peripheral wall of the furnace mouth flange, the mounting hole extends in the radial direction of the furnace mouth flange, the second sealing protection sleeve is inserted into the mounting hole, a part of the second thermocouple located outside the furnace body extends in the radial direction of the furnace body, and a part of the second thermocouple located inside the furnace body extends in the axial direction of the furnace body.

In some more specific embodiments, a mounting sleeve surrounding the mounting hole is further arranged on the furnace mouth flange, and the second sealing protection sleeve is inserted into the mounting sleeve.

In some specific embodiments, the number of the second thermocouples is plural, and the plural second thermocouples are respectively disposed corresponding to the plural temperature areas to be measured in the furnace body.

In some embodiments, the part of the temperature measuring device extending into the furnace body is arranged at intervals with the inner wall of the furnace body.

In some embodiments, the hot furnace structure further comprises a furnace door, wherein the furnace door can be abutted to the furnace mouth flange and is used for sealing the open end of the furnace body, and the temperature measuring device penetrating through the furnace mouth flange is positioned on the radial outer side of the furnace door; or, the furnace door is provided with an avoidance gap for avoiding the temperature measuring device, and the avoidance gap is isolated from the internal space of the furnace body.

In some embodiments, the heat furnace structure further comprises an air inlet pipe, the air inlet pipe penetrates through the closed end of the furnace body, and the air inlet pipe is staggered with the temperature measuring device penetrating through the closed end of the furnace body.

The heat furnace structure has the beneficial effects that: in the actual working process, if the temperature zone to be measured in the furnace body is positioned at the furnace mouth position, the temperature measuring device is only required to be arranged on the furnace mouth flange; if the temperature zone to be measured in the furnace body is positioned at the furnace tail position, the temperature measuring device is only required to be arranged at the closed end of the furnace body. If the temperature zone to be measured of the furnace body is positioned at the furnace mouth, the furnace tail and the middle part of the furnace body, temperature measuring devices are required to be arranged on the furnace mouth flange and the closed end of the furnace body. Therefore, the temperature measuring device can be arranged on the sealing end and/or the furnace mouth flange of the furnace body according to actual needs, the flexibility is high, the phenomenon that the length of the temperature measuring device is too long can be avoided, the material waste can be reduced, the occurrence probability of electric leakage or short-circuit faults can be effectively reduced, and the use cost of the structure of the heat furnace is reduced.

Additional aspects and advantages of the utility model will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the utility model.

Drawings

FIG. 1 is a schematic view of a heat furnace according to a first embodiment of the present utility model;

FIG. 2 is a schematic view of a heat furnace structure according to another embodiment of the present utility model;

FIG. 3 is a schematic view of a furnace mouth flange of a hot furnace structure according to a first embodiment of the present utility model;

FIG. 4 is a schematic view of a furnace structure according to a second embodiment of the present utility model;

fig. 5 is a schematic structural view of a heat furnace structure according to a third embodiment of the present utility model.

Reference numerals:

100. a furnace body; 200. a furnace mouth flange; 210. a mounting sleeve; 300. a temperature measuring device; 310. a first seal protection sleeve; 320. a first thermocouple; 330. a second seal protection sleeve; 340. a second thermocouple; 400. a furnace door; 500. and an air inlet pipe.

Detailed Description

In order to make the technical problems solved, the technical scheme adopted and the technical effects achieved by the utility model more clear, the technical scheme of the utility model is further described below by a specific embodiment in combination with the attached drawings.

In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present utility model.

Furthermore, features defining "first", "second" may include one or more such features, either explicitly or implicitly, for distinguishing between the descriptive features, and not sequentially, and not lightly. In the description of the present utility model, unless otherwise indicated, the meaning of "a plurality" is two or more.

In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.

The specific structure of the heat furnace structure according to the embodiment of the present utility model will be described below with reference to fig. 1 to 5.

The utility model discloses a hot furnace structure, as shown in fig. 1, 4 and 5, the hot furnace structure of the embodiment comprises a furnace body 100, a furnace mouth flange 200 and a temperature measuring device 300, wherein one end of the furnace body 100 is opened, the other end of the furnace body 100 is closed, the furnace mouth flange 200 is matched with the open end of the furnace body 100, and the temperature measuring device 300 penetrates through the closed end of the furnace body 100 and/or the furnace mouth flange 200 and stretches into the furnace body 100. It can be understood that, in the embodiment of the present utility model, if the temperature area to be measured in the furnace body 100 is located at the furnace mouth position, only the temperature measuring device 300 needs to be disposed on the furnace mouth flange 200; if the temperature zone to be measured in the furnace body 100 is located at the tail position, the temperature measuring device 300 is only required to be arranged at the closed end of the furnace body 100. If the temperature area to be measured of the furnace body 100 is located at the furnace mouth, the furnace tail and the middle part of the furnace body 100, the temperature measuring devices 300 are required to be arranged on the furnace mouth flange 200 and the closed end of the furnace body 100. Therefore, the temperature measuring device 300 can be arranged on the sealing end of the furnace body 100 and/or the furnace mouth flange 200 according to actual needs, the flexibility is high, the phenomenon that the length of the temperature measuring device 300 is too long can be avoided, the material waste can be reduced, the occurrence probability of electric leakage or short-circuit faults can be effectively reduced, and the use cost of the structure of the heat furnace is reduced.

It should be noted that, in some embodiments, the furnace body 100 is a furnace tube structure with one end opened and the other end closed; in some embodiments, the furnace body 100 is formed as a furnace tube structure with open ends, but one of the open ends is fitted with a furnace tail flange and a furnace tail cover to enclose it in a long-term enclosed state.

In some embodiments, as shown in fig. 1 and 4, the temperature measuring device 300 includes a first sealing protection sleeve 310 and a first thermocouple 320, the first sealing protection sleeve 310 is disposed through the closed end of the furnace body 100, the first thermocouple 320 is disposed through the first sealing protection sleeve 310, and one end of the first thermocouple 320 extends into the furnace body 100 and is disposed corresponding to a temperature region to be measured in the furnace body 100. It can be appreciated that the first sealing protection sleeve 310 can better protect the first thermocouple 320 on one hand, reduce the damage probability of the first thermocouple 320, and on the other hand, improve the installation tightness of the first thermocouple 320, so as to avoid the occurrence of air leakage caused by installing the temperature measuring device 300.

In some specific embodiments, the first thermocouples 320 are plural, and the plural first thermocouples 320 are disposed corresponding to plural temperature measurement areas in the furnace body 100 respectively. It can be understood that in the actual use process, the number of temperature areas to be measured in the furnace body 100 may be plural, and by setting plural first thermocouples 320, the temperature signal monitored by each first thermocouple 320 is fed back to the temperature control processor of the heating furnace, and the heating strategy of different temperature areas is determined after comparing the monitored temperature with the set temperature. Each temperature zone is respectively monitored by an independent first thermocouple 320, so that the temperature consistency of different temperature zones in the heating furnace tube is improved, the accurate monitoring of the temperature in the furnace body 100 is ensured, and the product yield is improved.

Alternatively, the first thermocouple 320 is parallel to the axis of the furnace body 100. Thereby, the accurate monitoring of the temperature inside the furnace body 100 is ensured, and the product yield is improved.

In some embodiments, as shown in fig. 1 and 5, the temperature measuring device 300 includes a second sealing protection sleeve 330 and a second thermocouple 340, the second sealing protection sleeve 330 is penetrated through the furnace mouth flange 200, the second thermocouple 340 is penetrated through the second sealing protection sleeve 330, and one end of the second thermocouple 340 extends into the furnace body 100 and is arranged corresponding to a temperature region to be measured in the furnace body 100. It can be appreciated that the second sealing protection sleeve 330 can better protect the second thermocouple 340 on one hand, reduce the damage probability of the second thermocouple 340, and on the other hand, improve the installation tightness of the second thermocouple 340, so as to avoid the occurrence of air leakage caused by installing the temperature measuring device 300.

In some specific embodiments, the outer peripheral wall of the furnace mouth flange 200 is provided with a mounting hole, the mounting hole is arranged along the radial extension of the furnace mouth flange 200, the second sealing protection sleeve 330 is inserted into the mounting hole, the part of the second thermocouple 340 located outside the furnace body 100 is arranged along the radial extension of the furnace body 100, and the part of the second thermocouple 340 located inside the furnace body 100 is arranged along the axial extension of the furnace body 100. It can be appreciated that the second seal protection sleeve 330 is inserted into the mounting hole to ensure the mounting stability of the second seal protection sleeve 330, and the furnace mouth flange 200 is attached to the furnace door 400 to seal the furnace mouth under normal conditions, so that the portion of the second thermocouple 340 located outside the furnace body 100 extends radially along the furnace body 100 to avoid interference of the portion of the second thermocouple 340 located outside the furnace body 100 to the furnace door 400, thereby ensuring that the furnace door 400 can seal the furnace mouth stably, and the portion of the second thermocouple 340 located inside the furnace body 100 extends axially along the furnace body 100 to realize stable temperature measurement. It should be noted that, when the second thermocouple 340 is installed, the second thermocouple 340 is inserted into the second seal protection sleeve 330, and the portion located inside the furnace body 100 needs to be bent, so that the second thermocouple 340 is close to the inner wall of the furnace body 100 and is parallel to the axis of the furnace body 100.

In some more specific embodiments, as shown in fig. 3, the furnace mouth flange 200 is further provided with a mounting sleeve 210 disposed around the mounting hole, and the second seal protection sleeve 330 is inserted into the mounting sleeve 210. Thereby, the connection stability of the second seal protector 330 can be further improved.

In some specific embodiments, the number of the second thermocouples 340 is plural, and the plurality of the second thermocouples 340 are respectively disposed corresponding to a plurality of areas to be measured in the furnace body 100. It can be understood that in the actual use process, the number of temperature areas to be measured in the furnace body 100 may be plural, and by setting plural second thermocouples 340, the temperature signal monitored by each second thermocouple 340 is fed back to the temperature control processor of the heating furnace, and the heating strategy of different temperature areas is determined after comparing the monitored temperature with the set temperature. Each temperature zone is respectively monitored by an independent second thermocouple 340, so that the temperature consistency of different temperature zones in the heating furnace tube is improved, the accurate monitoring of the temperature in the furnace body 100 is ensured, and the product yield is improved.

In some embodiments, the portion of the temperature measuring device 300 extending into the furnace body 100 is spaced apart from the inner wall of the furnace body 100. Thus, the temperature of the inner wall of the furnace body 100 can be prevented from interfering with the temperature measuring device 300, and the measurement accuracy of the temperature measuring device 300 can be ensured.

In some embodiments, as shown in fig. 1, the heat furnace structure further includes a furnace door 400, where the furnace door 400 can be abutted against the furnace mouth flange 200 and is used for sealing the open end of the furnace body 100, and the temperature measuring device 300 penetrating through the furnace mouth flange 200 is located radially outside the furnace door 400; or, the furnace door 400 is provided with an avoidance gap for avoiding the temperature measuring device 300, and the avoidance gap is isolated from the internal space of the furnace body 100. Therefore, the temperature measuring device 300 penetrating through the furnace mouth flange 200 is positioned on the radial outer side of the furnace door 400 or the furnace door 400 is provided with the avoidance notch for avoiding the temperature measuring device 300, so that interference of the temperature measuring device 300 penetrating through the furnace mouth flange to the furnace door 400 can be well avoided, and the furnace door 400 can be ensured to stably close the furnace mouth. The avoiding notch is isolated from the internal space of the furnace body 100, so that the phenomenon of air leakage at the avoiding notch is avoided when the furnace door 400 is closed.

In some embodiments, as shown in fig. 1, the heat furnace structure further includes an air inlet pipe 500, the air inlet pipe 500 is disposed through the closed end of the furnace body 100, and the air inlet pipe 500 is disposed in a staggered manner with respect to the temperature measuring device 300 disposed through the closed end of the furnace body 100. Thus, the temperature of the intake pipe 500 can be prevented from interfering with the temperature measuring device 300, and the measurement accuracy of the temperature measuring device 300 can be ensured.

Embodiment one:

as shown in fig. 1-3, the heat furnace structure of this embodiment includes a furnace body 100, a furnace mouth flange 200, a temperature measuring device 300, a furnace door 400 and an air inlet pipe 500, one end of the furnace body 100 is opened, the other end is closed, the furnace mouth flange 200 is matched with the open end of the furnace body 100, a mounting hole and a mounting sleeve 210 surrounding the mounting hole are arranged on the peripheral wall of the furnace mouth flange 200, the mounting hole extends along the radial direction of the furnace mouth flange 200, the temperature measuring device 300 includes a first sealing protection sleeve 310, four first thermocouples 320, a second sealing protection sleeve 330 and four second thermocouples 340, the first sealing protection sleeve 310 is arranged at the closed end of the furnace body 100 in a penetrating manner, the first thermocouple 320 is arranged at the first sealing protection sleeve 310 in a penetrating manner, one end of the first thermocouple 320 extends into the furnace body 100 and corresponds to the setting of a temperature measuring area to be measured in the furnace body 100, and the four first thermocouples 320 correspond to the setting of the four temperature measuring areas to be measured. The second sealing protection sleeve 330 is arranged on the mounting sleeve 210 in a penetrating way, the second thermocouples 340 are arranged on the second sealing protection sleeve 330 in a penetrating way, and the four first thermocouples 320 are arranged corresponding to the four areas to be measured. The portion of each second thermocouple 340 located outside the furnace body 100 is disposed to extend in the radial direction of the furnace body 100, and the portion of the second thermocouple 340 located inside the furnace body 100 is disposed to extend in the axial direction of the furnace body 100. The oven door 400 can abut against the oven port flange 200 and is used to seal the open end of the oven body 100, the oven door 400 being located radially inward of the mounting sleeve 210. The air inlet pipe 500 penetrates through the closed end of the furnace body 100 and is staggered with the first sealing protection sleeve 310.

Embodiment two:

as shown in fig. 4, the heat furnace structure of the present embodiment is substantially the same as that of the first embodiment, except that the temperature measuring device 300 of the present embodiment is disposed through the closed end of the furnace body 100 and includes a first sealing protection sleeve 310 and a first thermocouple 320.

Embodiment III:

as shown in fig. 5, the heat furnace structure of the present embodiment is substantially the same as that of the first embodiment, except that the temperature measuring device 300 of the present embodiment is disposed through the furnace mouth flange 200 and includes a second sealing protection sleeve 330 and a second thermocouple 340.

In the description of the present specification, reference to the term "some embodiments," "other embodiments," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the utility model. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiments or examples. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

The foregoing is merely exemplary of the present utility model, and those skilled in the art should not be considered as limiting the utility model, since modifications may be made in the specific embodiments and application scope of the utility model in light of the teachings of the present utility model.

Claims

1. The hot stove structure, its characterized in that includes:

the device comprises a furnace body (100), wherein one end of the furnace body (100) is opened, and the other end of the furnace body is closed;

a furnace mouth flange (200), the furnace mouth flange (200) being fitted to an open end of the furnace body (100);

the temperature measuring device (300) is arranged on the closed end of the furnace body (100) in a penetrating mode and/or the furnace mouth flange (200), and the temperature measuring device (300) stretches into the furnace body (100).

2. The furnace structure according to claim 1, wherein the temperature measuring device (300) comprises a first sealing protection sleeve (310) and a first thermocouple (320), the first sealing protection sleeve (310) is arranged on the closed end of the furnace body (100) in a penetrating manner, the first thermocouple (320) is arranged on the first sealing protection sleeve (310) in a penetrating manner, and one end of the first thermocouple (320) extends into the furnace body (100) and is arranged corresponding to a temperature measuring area in the furnace body (100).

3. The furnace structure according to claim 2, wherein the number of the first thermocouples (320) is plural, and the plural first thermocouples (320) are respectively disposed corresponding to the plural temperature areas to be measured in the furnace body (100).

4. The furnace structure according to claim 1, wherein the temperature measuring device (300) comprises a second sealing protection sleeve (330) and a second thermocouple (340), the second sealing protection sleeve (330) is arranged in a penetrating manner on the furnace mouth flange (200), the second thermocouple (340) is arranged in a penetrating manner on the second sealing protection sleeve (330), and one end of the second thermocouple (340) extends into the furnace body (100) and is arranged corresponding to a temperature measuring area in the furnace body (100).

5. The heat furnace structure according to claim 4, wherein a mounting hole is provided in an outer peripheral wall of the furnace mouth flange (200), the mounting hole is provided along a radial extension of the furnace mouth flange (200), the second seal protection sleeve (330) is inserted into the mounting hole, a portion of the second thermocouple (340) located outside the furnace body (100) is provided along a radial extension of the furnace body (100), and a portion of the second thermocouple (340) located inside the furnace body (100) is provided along an axial extension of the furnace body (100).

6. The furnace structure according to claim 5, wherein the furnace mouth flange (200) is further provided with a mounting sleeve (210) surrounding the mounting hole, and the second sealing protection sleeve (330) is inserted into the mounting sleeve (210).

7. The furnace structure according to claim 4, wherein the number of the second thermocouples (340) is plural, and the plural second thermocouples (340) are respectively disposed corresponding to the plural temperature areas to be measured in the furnace body (100).

8. The heat furnace structure according to any one of claims 1 to 7, wherein a portion of the temperature measuring device (300) extending into the furnace body (100) is spaced from an inner wall of the furnace body (100).

9. The heat furnace structure according to any one of claims 1-7, further comprising a furnace door (400), the furnace door (400) being capable of abutting against the furnace mouth flange (200) and being used for sealing an open end of the furnace body (100), the temperature measuring device (300) penetrating the furnace mouth flange (200) being located radially outside the furnace door (400); or, an avoidance gap for avoiding the temperature measuring device (300) is formed in the furnace door (400), and the avoidance gap is isolated from the inner space of the furnace body (100).

10. The heat furnace structure according to any one of claims 1-7, further comprising an air inlet pipe (500), wherein the air inlet pipe (500) is arranged through the closed end of the furnace body (100), and the air inlet pipe (500) is arranged in a staggered manner with respect to the temperature measuring device (300) arranged through the closed end of the furnace body (100).