CN219772221U - Plasma thermal spraying equipment - Google Patents
Plasma thermal spraying equipment Download PDFInfo
- Publication number
- CN219772221U CN219772221U CN202321323216.2U CN202321323216U CN219772221U CN 219772221 U CN219772221 U CN 219772221U CN 202321323216 U CN202321323216 U CN 202321323216U CN 219772221 U CN219772221 U CN 219772221U
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- Prior art keywords
- plasma thermal
- thermal spraying
- housing
- plasma
- driving
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- 238000007751 thermal spraying Methods 0.000 title claims abstract description 51
- 239000011248 coating agent Substances 0.000 claims abstract description 29
- 238000000576 coating method Methods 0.000 claims abstract description 29
- 239000000843 powder Substances 0.000 claims abstract description 17
- 230000008021 deposition Effects 0.000 claims abstract description 14
- 238000005507 spraying Methods 0.000 claims abstract description 12
- 238000010438 heat treatment Methods 0.000 claims description 30
- 239000007921 spray Substances 0.000 claims description 24
- 230000002093 peripheral effect Effects 0.000 claims description 7
- 238000001514 detection method Methods 0.000 claims description 5
- 239000000463 material Substances 0.000 abstract description 25
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 22
- 235000012239 silicon dioxide Nutrition 0.000 description 16
- 239000010453 quartz Substances 0.000 description 14
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 13
- 238000000034 method Methods 0.000 description 13
- 230000008569 process Effects 0.000 description 12
- 239000011863 silicon-based powder Substances 0.000 description 12
- 229910021417 amorphous silicon Inorganic materials 0.000 description 6
- 230000007797 corrosion Effects 0.000 description 6
- 238000005260 corrosion Methods 0.000 description 6
- 238000009792 diffusion process Methods 0.000 description 4
- 239000010410 layer Substances 0.000 description 4
- 230000003071 parasitic effect Effects 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 229910000856 hastalloy Inorganic materials 0.000 description 3
- 230000009471 action Effects 0.000 description 2
- 238000005137 deposition process Methods 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000000377 silicon dioxide Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 238000005524 ceramic coating Methods 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 239000011247 coating layer Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 235000012054 meals Nutrition 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 229910044991 metal oxide Inorganic materials 0.000 description 1
- 150000004706 metal oxides Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Coating By Spraying Or Casting (AREA)
- Nozzles (AREA)
Abstract
The utility model discloses plasma thermal spraying equipment, which comprises a shell, a plasma thermal spraying gun and a feeding device, wherein the shell is provided with a deposition chamber for accommodating a pipe body, the plasma thermal spraying gun is used for spraying a coating towards the inner side wall of the pipe body, the feeding device comprises at least two material boxes, each material box is connected with the plasma thermal spraying gun through a feeding pipeline, and at least two material boxes can provide at least two powder materials towards the plasma thermal spraying gun. The plasma thermal spraying equipment can adjust the proportion of powder forming the coating according to actual needs, so that the coating with specific functions can be formed according to actual needs.
Description
Technical Field
The utility model relates to the field of photovoltaic solar cells, in particular to plasma thermal spraying equipment.
Background
The diffusion and deposition processes are common processes in the production process of solar cells, and the expensive quartz tube is damaged and scrapped after being corroded due to corrosive reaction products in the diffusion process, and in the deposition process, amorphous silicon is parasitically deposited on the inner wall of the quartz tube, and the quartz tube is easy to crack in the subsequent work due to the large difference of the thermal expansion coefficients of the amorphous silicon and the quartz tube body.
Disclosure of Invention
The utility model aims to provide plasma thermal spraying equipment which can adjust the proportion of powder forming a coating according to actual needs, so that the coating with specific functions can be formed according to actual needs.
In order to achieve the technical effects, the technical scheme of the utility model is as follows:
the utility model discloses a plasma thermal spraying device, comprising: a housing having a deposition chamber housing a tube; a plasma thermal spray gun for spraying a coating toward an inner sidewall of the pipe body; the feeding device comprises at least two material boxes, each material box is connected with the plasma thermal spraying gun through a feeding pipeline, and at least two material boxes can provide at least two powder materials towards the plasma thermal spraying gun.
In some embodiments, the housing is further provided with a heating device for heating the tube, the heating device being spaced from the outer side wall of the tube.
In some specific embodiments, the heating device comprises a heating element disposed along an axial extension of the housing.
In some embodiments, a sliding rail extending axially along the housing is provided within the housing, and the plasma thermal spray gun is slidably disposed on the sliding rail.
In some embodiments, a first driving device is further arranged in the shell, the first driving device comprises a driving source and a support, the driving source is used for driving the support to move along the axial direction of the shell, and the support is used for supporting the pipe body.
In some embodiments, a rotation driving device is arranged in the shell, and the rotation driving device is used for stopping on the outer peripheral surface of the pipe body and driving the pipe body to rotate.
In some specific embodiments, the rotation driving device includes a driving member and a rotating roller, the driving member is used for driving the rotating roller to rotate, and the rotating roller extends along the axial direction of the housing and is abutted against the outer peripheral surface of the pipe body.
In some embodiments, the plasma thermal spray apparatus further comprises a second drive means for driving the plasma thermal spray gun to rotate about the axis of the housing.
In some embodiments, a temperature detection device is disposed in the housing, and the temperature detection device is used for detecting the temperature of the pipe body.
In some embodiments, each of the feed lines is provided with a metering device for measuring the flow of powder.
The plasma thermal spraying device has the beneficial effects that as the feeding device is provided with at least two material boxes, the at least two material boxes can provide at least two powder materials towards the plasma thermal spraying gun, in the actual working process, a high-temperature-resistant and corrosion-resistant buffer coating material can be filled in one of the material boxes, and the plasma thermal spraying gun can spray the inside of the pipe body to form a high-temperature-resistant and corrosion-resistant buffer layer. Or silicon powder and silicon dioxide powder are respectively filled in the material box, the content of the introduced silicon dioxide powder and silicon powder is continuously adjusted along with the deposition time in the coating forming process, and after the silicon powder and silicon powder are melted under the action of high-temperature plasma arc of the plasma thermal spraying gun, the silicon powder and the silicon powder are sprayed on the inner wall surface of the quartz furnace tube along with huge plasma airflow, and finally a thermal expansion buffer layer with the thermal expansion coefficient continuously changing from silicon dioxide with the same material as the quartz furnace tube to amorphous silicon with parasitic deposition material is formed, so that the problem that the quartz furnace tube is easy to crack in the subsequent work due to the parasitic deposition of amorphous silicon on the inner wall of the quartz furnace tube is better solved. Since the plasma thermal spraying device can adjust the proportion of powder forming the coating according to actual needs, the coating with specific functions can be formed according to actual needs.
Additional aspects and advantages of the utility model will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of the utility model.
Drawings
Fig. 1 is a schematic structural view of a plasma thermal spraying apparatus according to an embodiment of the present utility model.
Reference numerals:
100. a housing; 110. a deposition chamber; 200. a plasma thermal spray gun; 210. a power supply; 300. a feeding device; 310. a feed line; 400. a heating device; 500. a sliding rail; 600. a rotation driving device; 700. a tube body.
Detailed Description
In order to make the technical problems solved, the technical scheme adopted and the technical effects achieved by the utility model more clear, the technical scheme of the utility model is further described below by a specific embodiment in combination with the attached drawings.
In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present utility model.
Furthermore, features defining "first", "second" may include one or more such features, either explicitly or implicitly, for distinguishing between the descriptive features, and not sequentially, and not lightly. In the description of the present utility model, unless otherwise indicated, the meaning of "a plurality" is two or more.
In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.
The specific structure of the plasma thermal spraying apparatus according to the embodiment of the present utility model is described below with reference to fig. 1.
The present utility model discloses a plasma thermal spraying apparatus, as shown in fig. 1, which includes a housing 100 having a deposition chamber 110 accommodating a tube body 700, a plasma thermal spraying gun 200 for spraying a coating toward an inner sidewall of the tube body 700, and a feeding device 300 including at least two cartridges, each of which is connected to the plasma thermal spraying gun 200 through one feeding line 310, the at least two cartridges being capable of supplying at least two powders toward the plasma thermal spraying gun 200.
It can be appreciated that, since the feeding device 300 of the present embodiment has at least two cartridges, and at least two cartridges can provide at least two powders toward the plasma thermal spraying gun 200, in the actual working process, a high temperature resistant and corrosion resistant buffer coating material (such as hastelloy, which is widely used in industry, can work stably for a long time in a high temperature environment below 1090 ℃ and can well solve the problem of protecting the corrosion-prone parts in the semiconductor or photovoltaic diffusion process, meanwhile, because the hastelloy can form a high temperature resistant dense metal oxide surface, the influence of metal elements on silicon wafer pollution can be well resisted, and other high temperature resistant and corrosion resistant ceramic coatings have the same effect), the plasma thermal spraying gun 200 can spray the inside of the pipe 700 to form a high temperature resistant and corrosion resistant buffer layer. Or silicon powder and silicon dioxide powder are respectively filled in the material box, the content of the introduced silicon dioxide powder and silicon powder is continuously adjusted along with the deposition time in the coating forming process, and after the silicon powder and silicon powder are melted under the action of high-temperature plasma arc of the plasma thermal spraying gun 200, the silicon powder and the silicon powder are sprayed on the inner wall surface of the quartz furnace tube along with huge plasma airflow, and finally a thermal expansion buffer layer with the thermal expansion coefficient continuously changing from silicon dioxide with the same material as the quartz furnace tube to amorphous silicon with parasitic deposition material is formed, so that the problem that the quartz furnace tube is easy to crack in the subsequent work due to the parasitic deposition of amorphous silicon on the inner wall of the quartz furnace tube is better solved.
In summary, since the feeding device 300 of the present embodiment has at least two cartridges, and the at least two cartridges can provide at least two powders toward the plasma thermal spraying gun 200, the ratio of the powders forming the coating can be adjusted according to the actual needs, and the coating with specific functions can be formed according to the actual needs.
It should be noted that, since the structure of the plasma thermal spray gun 200 is the prior art, the power supply 210 is only schematically indicated in fig. 1, and other parts that assist the normal operation of the plasma thermal spray gun 200, such as a gas supply device and a water cooling device, are omitted, and these parts are also connected to the plasma thermal spray gun 200. The detailed structure of the plasma thermal spray gun 200 can be obtained according to the prior art, and need not be described herein.
In some embodiments, as shown in fig. 1, the housing 100 is further provided with a heating device 400 for heating the tube body 700, and the heating device 400 is spaced apart from the outer sidewall of the tube body 700. It will be appreciated that in order to enhance the adhesion of the buffer coating, it is generally necessary to roughen the surface of the substrate and maintain the substrate material at a certain temperature during deposition, and in this embodiment, the heating device 400 is capable of heating the tube 700 such that the surface of the tube 700 is maintained in the temperature range required by the process after heating, thereby facilitating the enhancement of the coating adhesion.
Optionally, the heating device 400 maintains the temperature of the quartz tube 700 at about 200 ℃, which not only provides coating adhesion, but also mitigates the thermal and mechanical impact of high temperature plasma gas flow during thermal spraying.
In some specific embodiments, as shown in FIG. 1, the heating device 400 includes a heating rod or wire extending along the axial direction of the housing 100. It will be appreciated that since the tube body 700 is disposed to extend in the axial direction of the housing 100, the heating device 400 is formed as a heating rod or wire extending in the axial direction of the housing 100 to enable uniform heating of the tube body 700, thereby ensuring that a coating layer is uniformly formed on the inner wall of the tube body 700.
In some more specific embodiments, the heating rod or wire may form a plurality of different temperature zones along the pipe body 700, and it will be appreciated that in the actual working process, the temperature of the pipe orifice of the pipe body 700 will be generally lower, and the heating rod or wire may form a plurality of different temperature zones along the pipe body 700 to heat the pipe body 700 according to actual needs, so as to ensure the temperature uniformity of the whole pipe body 700.
In some embodiments, as shown in FIG. 1, a sliding rail 500 is provided within the housing 100 extending axially therealong, and the plasma thermal spray gun 200 is slidably disposed on the sliding rail 500. It can be appreciated that in the actual working process, the plasma thermal spraying gun 200 can slide on the sliding rail 500, so that the spraying of the pipe body 700 along the axial direction thereof is realized, on one hand, the uniformity of the coating formed on the inner side wall of the pipe body 700 is ensured, and on the other hand, the automatic movement of the plasma thermal spraying gun 200 is facilitated, and the spraying efficiency is improved.
In some embodiments, a first driving device is further disposed in the housing 100, where the first driving device includes a driving source and a bracket, the driving source is used to drive the bracket to move along the axial direction of the housing 100, and the bracket is used to support the pipe body 700. It can be appreciated that in the actual working process, the plasma thermal spraying gun 200 is kept stationary, and the first driving device drives the pipe body 700 to move along the axial direction of the housing 100, so that the pipe body 700 can be sprayed along the axial direction thereof, on one hand, the uniformity of a coating formed on the inner side wall of the pipe body 700 is ensured, on the other hand, the automatic spraying is realized, and the spraying efficiency is improved.
It should be noted that, in the embodiment of the present utility model, the driving source may select any linear driving structure such as a conveyor belt mechanism, a screw nut structure, an electric push rod, or a pneumatic push rod according to actual needs, and the specific type of the driving source is not limited herein.
In some embodiments, as shown in fig. 1, a rotation driving device 600 is provided in the housing 100, and the rotation driving device 600 is used to stop against the outer peripheral surface of the pipe body 700 and is used to drive the pipe body 700 to rotate. It will be appreciated that during actual operation, the pipe body 700 rotates and the plasma thermal spray gun 200 is capable of achieving spraying along the circumferential direction of the pipe body 700, thereby ensuring uniformity of the coating formed on the inner wall of the pipe body 700 along the circumferential direction of the pipe body 700.
In some specific embodiments, the rotation driving device 600 includes a driving member and a rotating roller, wherein the driving member is used for driving the rotating roller to rotate, and the rotating roller is arranged along the axial direction of the housing 100 and is abutted against the outer peripheral surface of the pipe body 700. It can be appreciated that in the actual working process, the driving member drives the rotating roller to rotate, so that the pipe body 700 can rotate under the driving of the rotating roller, and the pipe body 700 is driven to rotate under the premise of ensuring the stability of the pipe body 700, thereby indirectly ensuring the uniformity of the coating formed on the inner wall of the pipe body 700 along the circumferential direction of the pipe body 700.
In some embodiments, the plasma thermal spray apparatus further comprises a second drive means for driving the plasma thermal spray gun 200 to rotate about the axis of the housing 100. It will be appreciated that the plasma thermal spray gun 200 may be driven to rotate during actual operation, so that the plasma thermal spray gun 200 can perform spraying along the circumferential direction of the pipe body 700, thereby ensuring uniformity of the coating formed on the inner wall of the pipe body 700 along the circumferential direction of the pipe body 700.
In some embodiments, a temperature detection device is provided within the housing 100 for detecting the temperature of the tube 700. It will be appreciated that the temperature detection device can detect the temperature of the pipe body 700 to ensure that the workpiece is maintained in the temperature range required by the process, and avoid damage caused by excessive temperature of the pipe body 700 during operation.
In some embodiments, each feed line 310 is provided with a metering device for measuring the flow of the meal. It can be understood that the flow rate of different powders can be controlled accurately through the metering device, so that the plasma thermal spraying equipment can accurately adjust the ratio of the powders forming the coating according to actual needs, and the coating with specific functions can be formed according to actual needs.
Examples:
as shown in fig. 1, the plasma thermal spraying apparatus includes a housing 100 having a deposition chamber 110 accommodating a tube body 700, a plasma thermal spraying gun 200 for spraying a coating toward an inner sidewall of the tube body 700, a supply device 300, and a heating device 400, the supply device 300 including two cartridges, each of which is connected to the plasma thermal spraying gun 200 through one supply line 310, the two cartridges being capable of supplying two kinds of powder toward the plasma thermal spraying gun 200. The heating device 400 is spaced apart from the outer sidewall of the tube body 700, and the heating device 400 includes a heating member extending in the axial direction of the housing 100. A slide rail 500 extending in the axial direction thereof is provided in the housing 100, and the plasma thermal spray gun 200 is slidably provided on the slide rail 500. The casing 100 is provided therein with a rotation driving device 600, and the rotation driving device 600 is used for stopping on the outer peripheral surface of the pipe body 700 and driving the pipe body 700 to rotate. The rotation driving device 600 includes a driving member for driving the rotation roller and a rotation roller which is provided to extend in an axial direction of the housing 100 and is stopped against an outer circumferential surface of the pipe body 700.
The plasma thermal spraying apparatus of the present embodiment has the advantages as follows:
first, it is possible to deposit a thermal expansion buffer coating using more than one material in a method of continuously varying the flow ratio between different materials during plasma thermal spraying;
second,: the high-temperature-resistant corrosion-resistant buffer coating can be sprayed on the inner wall of the semiconductor or photovoltaic diffusion quartz furnace tube in a mode of thermally spraying hastelloy and ceramic powder through plasma;
thirdly, the heating device 400 is additionally arranged to ensure the temperature of the pipe body 700 to be between 100 ℃ and 300 ℃ so as to maintain the temperature of the pipe body 700 within the range required by the process.
Fourth,: uniform deposition is achieved by horizontal movement of the plasma thermal spray gun 200 and simultaneous rotation of the tube body 700 while avoiding stress build up at the spray points.
In the description of the present specification, reference to the term "some embodiments," "other embodiments," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the utility model. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiments or examples. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
The foregoing is merely exemplary of the present utility model, and those skilled in the art should not be considered as limiting the utility model, since modifications may be made in the specific embodiments and application scope of the utility model in light of the teachings of the present utility model.
Claims (10)
1. Plasma thermal spraying apparatus, characterized in that it comprises:
-a housing (100), the housing (100) having a deposition chamber (110) housing a tube (700);
a plasma thermal spray gun (200), the plasma thermal spray gun (200) for spraying a coating toward an inner sidewall of the pipe body (700);
-a feeding device (300), said feeding device (300) comprising at least two cartridges, each of said cartridges being connected to said plasma thermal spray gun (200) by means of a feeding line (310), at least two of said cartridges being capable of providing at least two powders towards said plasma thermal spray gun (200).
2. Plasma thermal spraying apparatus according to claim 1, characterized in that the housing (100) is further provided with heating means (400) for heating the tube body (700), the heating means (400) being arranged spaced apart from the outer side wall of the tube body (700).
3. Plasma-thermal spraying apparatus according to claim 2, characterized in that said heating means (400) comprise a heating element arranged along the axial extension of said housing (100).
4. The plasma thermal spraying apparatus according to claim 1, wherein a slide rail (500) extending in an axial direction thereof is provided in the housing (100), and the plasma thermal spraying gun (200) is slidably provided on the slide rail (500).
5. The plasma thermal spraying apparatus according to claim 1, characterized in that a first driving means is further provided in the housing (100), the first driving means comprising a driving source for driving the support in an axial movement of the housing (100) and a support for supporting the tube body (700).
6. The plasma thermal spraying apparatus according to claim 1, wherein a rotation driving device (600) is provided in the housing (100), and the rotation driving device (600) is configured to abut against an outer peripheral surface of the pipe body (700) and is configured to drive the pipe body (700) to rotate.
7. The plasma thermal spraying apparatus according to claim 6, wherein the rotation driving means (600) includes a driving member for driving the rotation roller and a rotation roller which is provided extending in an axial direction of the housing (100) and is stopped against an outer peripheral surface of the tube body (700).
8. The plasma thermal spraying apparatus according to claim 1, further comprising a second driving means for driving the plasma thermal spraying gun (200) in rotation about the axis of the housing (100).
9. Plasma thermal spraying apparatus according to any one of claims 1 to 8, characterized in that temperature detection means are provided in the housing (100) for detecting the temperature of the tube body (700).
10. Plasma thermal spraying apparatus according to any one of claims 1 to 8, characterized in that each of the feed lines (310) is provided with metering means for measuring the flow rate of the powder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321323216.2U CN219772221U (en) | 2023-05-29 | 2023-05-29 | Plasma thermal spraying equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321323216.2U CN219772221U (en) | 2023-05-29 | 2023-05-29 | Plasma thermal spraying equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219772221U true CN219772221U (en) | 2023-09-29 |
Family
ID=88134830
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321323216.2U Active CN219772221U (en) | 2023-05-29 | 2023-05-29 | Plasma thermal spraying equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219772221U (en) |
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2023
- 2023-05-29 CN CN202321323216.2U patent/CN219772221U/en active Active
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