CN219744106U - Electronic grade hydrofluoric acid filter equipment - Google Patents

Abstract

The utility model discloses an electron level hydrofluoric acid filter equipment, the utility model discloses a main part, a plurality of mounting panels are all arranged to the equal equidistance in both sides of main part, the intermediate position of main part one end top and bottom all is provided with the discharge gate. The utility model discloses, the filter fineness of first filter is 0.1 mu m, carry out primary filtration to electronic grade hydrofluoric acid, and the filter fineness of second filter is 0.05 mu m, carry out secondary filtration to electronic grade hydrofluoric acid, then the filter fineness of third filter is 0.02 mu m, carry out tertiary filtration to electronic grade hydrofluoric acid, the filter effect has been improved from the container, and the staff can directly take out in the main part through first filter, second filter and third filter and change, and the shape of first filter, second filter and third filter does not have the limitation in the market, be provided with the washing structure simultaneously, can wash the filter, need not the frequent filter of changing of staff.

Description

Electronic grade hydrofluoric acid filter equipment

Technical Field

The utility model relates to a filter equipment technical field specifically is an electron level hydrofluoric acid filter equipment.

Background

At present, the production process of electronic grade hydrofluoric acid generally comprises the following steps: industrial anhydrous hydrofluoric acid is subjected to chemical pretreatment, enters a rectifying tower, purified hydrogen fluoride gas discharged from the rectifying tower is filtered in a filtering device through rectifying operation, the hydrogen fluoride gas obtained by filtering the hydrogen fluoride gas is cooled and then enters an absorption tower, ultrapure water is used for absorption in the absorption tower, and the hydrofluoric acid is further purified by adopting methods of controlling spray density, gas-liquid ratio and the like.

Through the cooperation between sealed apron and the trapezoidal recess of the ultra-clean high-purity hydrofluoric acid filter equipment that retrieves chinese patent publication No. CN208711258U and disclose, the staff of being convenient for changes the filter equipment in the filter tank body to can filter hydrofluoric acid through multistage wavy filtration passageway, filter effect is good, has improved hydrofluoric acid's production quality and quality.

However, the filtering device for ultra-clean high-purity hydrofluoric acid still has some defects, and when the filtering device is replaced, the filtering effect of the multistage wavy filtering channel on the hydrofluoric acid is insufficient, and the filtering device can be replaced only by opening the sealing cover plate, and the filtering device is special in shape and large in limitation, and meanwhile, the filtering plate in the filtering device for ultra-clean high-purity hydrofluoric acid can only be replaced, so that the filtering plate cannot be cleaned.

Disclosure of Invention

An objective of the present utility model is to provide an electronic grade hydrofluoric acid filtering device, so as to solve the problems set forth in the background art.

In order to achieve the above purpose, the present utility model provides the following technical solutions: the utility model provides an electronic grade hydrofluoric acid filter equipment, includes the main part, a plurality of mounting panels are all arranged to the equal equidistance in both sides of main part, main part one end top and the intermediate position of bottom all are provided with the discharge gate, the intermediate position that discharge gate one end was kept away from at the main part top is provided with the feed inlet, the first filter is arranged and is installed to the one end equidistance that the discharge gate was kept away from to the inside bottom of main part, the second filter is arranged and is installed to the intermediate position equidistance of the inside bottom of main part, the one end equidistance that the inside bottom of main part is close to the discharge gate is arranged and is installed the third filter, the pull board is all installed at the top of first filter, second filter and third filter, the outlet is installed to the equidistant range of main part bottom, a plurality of storage tanks are installed to the equidistant range in main part top, the water inlet is installed to the intermediate position at storage tank top, the nozzle is installed to the storage tank bottom.

Preferably, rectangular openings are formed in the top of the main body in an equidistant arrangement mode, the size of the rectangular openings in the main body is matched with the size of the drawing plate, and the main body is clamped with the drawing plate through the rectangular openings.

Preferably, the inside bottom of main part and top equidistance range are provided with the fixture block, the main part passes through fixture block and looks joint before first filter, second filter and the third filter.

Preferably, the discharge hole and the feeding hole are communicated with the main body, a plurality of threaded holes are formed in the bottoms and the tops of the two sides of the main body in an equidistant arrangement mode, mounting holes are formed in the four vertex angle positions of the mounting plate, and the size of the threaded holes in the main body is matched with the size of the mounting holes in the mounting plate.

Preferably, the filter precision of the first filter plate is 0.1 μm, the filter precision of the second filter plate is 0.05 μm, and the filter precision of the third filter plate is 0.02 μm.

Preferably, the main body is communicated with the outside through the water outlet, a plurality of mounting openings are formed in the top of the main body in an equidistant arrangement mode, and the size of each mounting opening in the main body is matched with the size of the water storage tank.

Compared with the prior art, the beneficial effects of the utility model are that: this electronic grade hydrofluoric acid filter equipment, the filter fineness of first filter is 0.1 mu m, carry out primary filtration to electronic grade hydrofluoric acid, and the filter fineness of second filter is 0.05 mu m, carry out secondary filtration to electronic grade hydrofluoric acid, then the filter fineness of third filter is 0.02 mu m, carry out tertiary filtration to electronic grade hydrofluoric acid, the filter effect has been improved to the from the container, and the staff can directly follow the main part in extracting and change, and the shape of first filter, second filter and third filter is in the market not limited, be provided with the washing structure simultaneously, can wash the filter, do not need the staff to change the filter frequently.

Drawings

FIG. 1 is a front view block diagram of the present utility model;

FIG. 2 is a top view of the present utility;

fig. 3 is a front view of the present utility model.

In the figure: 1. a main body; 2. a mounting plate; 3. a discharge port; 4. a feed inlet; 5. a first filter plate; 6. a second filter plate; 7. a third filter plate; 8. a drawing plate; 9. a water outlet; 10. a water storage tank; 11. a nozzle; 12. and a water inlet.

Detailed Description

The technical solutions of the present embodiments will be clearly and completely described below with reference to the drawings in the present embodiments, and it is apparent that the described embodiments are only some embodiments of the present utility model, not all embodiments. All other embodiments, based on the embodiments herein, which would be within the purview of one of ordinary skill in the art without the creative effort, are contemplated as falling within the scope of the present utility model.

Referring to fig. 1-3, an embodiment of the present utility model provides: the utility model provides an electronic grade hydrofluoric acid filter equipment, including main part 1, a plurality of mounting panels 2 are installed to the equal interval arrangement in both sides of main part 1, the intermediate position of main part 1 one end top and bottom all is provided with discharge gate 3, the intermediate position that 3 one ends of discharge gate were kept away from at the main part 1 top is provided with feed inlet 4, first filter 5 is installed to the one end equidistance arrangement that 3 was kept away from to main part 1 inside bottom, import electronic grade hydrofluoric acid in toward main part 1 through feed inlet 4, the electronic grade hydrofluoric acid of accomplishing is discharged through discharge gate 3, second filter 6 is installed to the intermediate position equidistance arrangement of main part 1 inside bottom, the one end equidistance arrangement that is close to 3 in main part 1 bottom is installed third filter 7, first filter 8 is all installed at the top of first filter 5, second filter 6 and third filter 7, carry out primary filtration to electronic grade hydrofluoric acid through first filter 5, rethread third filter 7 carries out tertiary filtration to electronic grade hydrofluoric acid, and staff can change first filter 5 through pull plate 8, second filter 6 and third filter 7, the filter 7 is installed at the intermediate position equidistance arrangement of main part 1 bottom is installed at the top 10, the filter 10 is installed at the top 10, the water storage tank 10 is installed at the top 10 to the third filter, the top is installed at the top 10, the top of the storage tank is installed at the top 10.

In this embodiment, rectangular openings are formed in the top of the main body 1 in an equidistant arrangement, the size of the rectangular openings on the main body 1 is matched with the size of the drawing plate 8, and the main body 1 is clamped with the drawing plate 8 through the rectangular openings, so that the first filter plate 5, the second filter plate 6 and the third filter plate 7 can be replaced through the cooperation between the rectangular openings and the drawing plate 8.

In this embodiment, the inside bottom of main part 1 and top equidistance range are provided with the fixture block, and main part 1 is through fixture block looks joint before with first filter 5, second filter 6 and third filter 7, and through fixture block with first filter 5, second filter 6 and the stable firm fixed in main part 1 of third filter 7.

In this embodiment, be linked together between discharge gate 3 and feed inlet 4 and main part 1, a plurality of screw holes have been seted up to the bottom and the top equidistance arrangement of main part 1 both sides, and the mounting hole has all been seted up to four apex angle departments of mounting panel 2, and the size looks adaptation of the size of screw hole on the main part 1 and the mounting hole on mounting panel 2, and mounting panel 2 is stable firmly installs in the both sides of main part 1 through the cooperation between mounting hole and the screw hole.

In this embodiment, the filter accuracy of the first filter plate 5 is 0.1 μm, the filter accuracy of the second filter plate 6 is 0.05 μm, the filter accuracy of the third filter plate 7 is 0.02 μm, and the larger impurities in the electronic grade hydrofluoric acid are filtered by the first filter plate 5, and the smaller impurities in the electronic grade hydrofluoric acid are filtered by the second filter plate 6 and the third filter plate 7.

In this embodiment, the main body 1 is communicated with the outside through the water outlet 9, when the filter plate is cleaned, waste water can be discharged through the water outlet 9, a plurality of mounting openings are formed in the top of the main body 1 in an equidistant arrangement mode, the size of the mounting opening on the main body 1 is matched with the size of the water storage tank 10, and the water storage tank 10 is stably and firmly mounted on the main body 1 through the mounting openings.

Working principle: staff passes through feed inlet 4 with electron level hydrofluoric acid and imports into 1 of the body, electron level hydrofluoric acid carries out primary filtration through first filter 5, rethread second filter 6 carries out secondary filtration to electron level hydrofluoric acid, carry out tertiary filtration through third filter 7 at last, and the staff can take out first filter 5 through pull board 8, second filter 6 and third filter 7 in follow 1 of the body, be convenient for first filter 5 and, second filter 6 and third filter 7 are changed, finally the electron level hydrofluoric acid that has filtered is discharged through discharge gate 3, and the staff can wash through water inlet 12, cooperation between storage water tank 10 and the nozzle 11, wash first filter 5, second filter 6 and third filter 7, waste water after the washing is discharged from outlet 9, the device all has the tetrafluoro material to constitute, avoid electron level hydrofluoric acid to react and cause the pollution rather than.

It will be evident to those skilled in the art that the present utility model is not limited to the details of the foregoing illustrative embodiments, and that the present utility model may be embodied in other specific forms without departing from the spirit or scope of the utility model. Accordingly, the present embodiments are exemplary and non-limiting. The scope of the present utility model is defined by the appended claims rather than the foregoing description, and all changes that come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

In the description of the present utility model, unless otherwise indicated, the meaning of "a plurality" is two or more; the terms "upper," "lower," "left," "right," "inner," "outer," "front," "rear," "head," "tail," and the like are used as references to orientations or positional relationships based on the orientations or positional relationships illustrated in the drawings, merely to facilitate description of the present utility model and to simplify the description, and do not indicate or imply that the devices or elements referred to must have a particular orientation, be configured and operated in a particular orientation, and thus are not to be construed as limiting the present utility model. Furthermore, the terms "first," "second," "third," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "connected," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium. The specific meaning of the above terms in this application will be understood by those of ordinary skill in the art in a specific context.

Claims (6)

1. An electronic grade hydrofluoric acid filtering device, comprising a main body (1), characterized in that: the utility model discloses a water storage tank, including main part (1), discharge gate (3), water storage tank (10), water inlet (12) are installed in the intermediate position at main part (1), second filter (6) are installed in the intermediate position equidistance range of main part (1) inside bottom, third filter (7) are installed in the intermediate position equidistance range that main part (1) inside bottom is close to the one end equidistance range of discharge gate (3), pull board (8) are all installed at the top of first filter (5), second filter (6) and third filter (7), outlet (9) are installed in the intermediate position of main part (1) bottom equidistance range, a plurality of storage water tank (10) are installed in the intermediate position at main part (1) inside bottom, nozzle (11) are installed in the intermediate position at storage water tank (10) bottom.

2. An electronic grade hydrofluoric acid filter device as claimed in claim 1, wherein: rectangular openings are formed in the top of the main body (1) in an equidistant arrangement mode, the size of the rectangular openings on the main body (1) is matched with the size of the drawing plate (8), and the main body (1) is clamped with the drawing plate (8) through the rectangular openings.

3. An electronic grade hydrofluoric acid filter device as claimed in claim 1, wherein: the inside bottom of main part (1) and top equidistance range are provided with the fixture block, the front looks joint of main part (1) and first filter (5), second filter (6) and third filter (7) through the fixture block.

4. An electronic grade hydrofluoric acid filter device as claimed in claim 1, wherein: the novel automatic feeding device is characterized in that the discharging hole (3) and the feeding hole (4) are communicated with the main body (1), a plurality of threaded holes are formed in the bottoms and the tops of the two sides of the main body (1) in an equidistant mode, mounting holes are formed in four vertex angle positions of the mounting plate (2), and the size of the threaded holes in the main body (1) is matched with the size of the mounting holes in the mounting plate (2).

5. An electronic grade hydrofluoric acid filter device as claimed in claim 1, wherein: the filter precision of the first filter plate (5) is 0.1 mu m, the filter precision of the second filter plate (6) is 0.05 mu m, and the filter precision of the third filter plate (7) is 0.02 mu m.

6. An electronic grade hydrofluoric acid filter device as claimed in claim 1, wherein: the main body (1) is communicated with the outside through the water outlet (9), a plurality of mounting openings are formed in the top of the main body (1) in an equidistant arrangement mode, and the size of the mounting opening on the main body (1) is matched with the size of the water storage tank (10).