CN219739979U

CN219739979U - Storage box with wireless sensor charging and data transmission functions

Info

Publication number: CN219739979U
Application number: CN202222865652.4U
Authority: CN
Inventors: 邓晨辉; 夏子奂
Original assignee: Shanghai Gnd Etech Co ltd
Current assignee: Shanghai Gnd Etech Co ltd
Priority date: 2022-10-28
Filing date: 2022-10-28
Publication date: 2023-09-22
Anticipated expiration: 2032-10-28

Abstract

The utility model provides a storage box with functions of charging a wireless sensor and transmitting data, which is characterized by comprising a box body (1), a sensor bearing part and a circuit system (6), wherein the sensor bearing part is used for placing a mask sensor or a wafer sensor, the circuit system (6) is provided with an interface and is connected with the mask sensor or the wafer sensor, and the circuit system (6) is at least used for supplying power to the mask sensor or the wafer sensor and or transmitting data. The technical scheme provided by the utility model can effectively solve the problems in the prior art, and compared with the existing mask and wafer storage box, the mask and wafer storage box provides data storage, charging and data transmission functions for the mask sensor and the wafer sensor.

Description

Storage box with wireless sensor charging and data transmission functions

Technical Field

The utility model belongs to the technical field of semiconductor integrated circuit manufacturing, mainly relates to sensor application in the field of semiconductors, in particular to a sensor storage box, and especially relates to a storage box with functions of charging a wireless sensor and transmitting data.

Background

In advanced semiconductor integrated circuit manufacturing processes, there are various scenes in which measurement is performed, for example, high-accuracy and high-speed measurement is required for various physical quantities such as temperature, humidity, vibration, level, and the like. For example, reticle sensors in photolithography processes, and wafer sensors in chip manufacturing, all require simulation of reticle and wafer measurements in actual processes back and forth within multiple process chambers, during which multiple measurements occur, and these measurements need to be recorded. The recording mode can be transmitted to the outside in real time, i.e. each measurement result is transmitted to the external equipment of the photoetching machine, such as a host computer, a main processor and the like. However, such an implementation is too difficult and costly to implement by real-time transmission, and thus a more viable solution is to solve the measurement technical problems in these environments.

Disclosure of Invention

In order to solve the technical problem that the sensor cannot be conveniently transmitted in real time under a specific environment in the prior art, the technical scheme provided by the utility model is that the sensor is designed to be in a wireless form and has a data storage function, and the sensor and the outside are not transmitted in real time according to the traditional thought. In a preferred embodiment, after the measurement is completed, the sensor is placed in a special device, which reads the data from the sensor, charges and stores it, thus solving the problems of the prior art.

According to one aspect of the utility model, a storage box with functions of charging a wireless sensor and transmitting data is provided, and the storage box is characterized by comprising a box body (1), a sensor bearing part and a circuit system (6), wherein the sensor bearing part is used for placing a mask sensor or a wafer sensor, the circuit system (6) is provided with an interface and is connected with the mask sensor or the wafer sensor, and the circuit system (6) is at least used for supplying power to the mask sensor or the wafer sensor and or transmitting data.

Preferably, the circuitry (6) is further provided with a cover, the cover (611) covering the circuitry (6).

Preferably, the circuit system (6) comprises a charging module (63), a data transmission module and a base plate (62), wherein the charging module and the data transmission module are arranged on the base plate (62).

Preferably, the charging module comprises a wired charging module or a wireless charging module, the wired charging module comprises a charging circuit and a connector, and the wireless charging module comprises a wireless charging circuit and a wireless charging coil.

Preferably, the data transmission module comprises a wired data transmission module or a wireless data transmission module, the wired data transmission module comprises a circuit and a connector, and the wireless data transmission module comprises a wireless circuit and a wireless communication antenna.

Preferably, the wireless circuit is a bluetooth module or a Wi F i module.

Preferably, the circuit system (6) further comprises at least one display module (610) for displaying the working state of the storage box, the display module (610) is connected with the bottom plate (62) and is arranged on the outer surface of the storage box, and the display module (610) is any one or more of an l ed indicator light, a liquid crystal screen or a nixie tube.

Preferably, the circuitry (6) further comprises at least one power supply for powering the charging module (63) and/or the data transmission module.

Preferably, the power supply is a battery (64) or an external power supply connection port.

Preferably, the storage box is further provided with an actuating switch (5) which is electrically connected in series with the power supply and is used for switching on or off the power supply.

Preferably, the circuitry (6) is placed within the case (1).

Preferably, the storage box at least further comprises a data connection port for data communication with the upper computer.

Preferably, the storage case comprises at least further fastening elements for fastening the sensor carrier part and/or the electrical circuit system (6) inside the case (1).

Preferably, the fixing element is any one or more of a screw, a stud and an adhesive.

Preferably, the case (1) is a case of a storage case, and the case (1) may be made of plastic or metal.

Preferably, the shape of the box body (1) is any one of the following shapes:

-a shape adapted to the mask size; or alternatively

-a shape adapted to the wafer size.

Preferably, the sensor carrier is in the form of a support column or tray.

The technical scheme provided by the utility model can effectively solve the problems in the prior art, and compared with the existing mask and wafer storage box, the mask and wafer storage box provides data storage, charging and data transmission functions for the mask sensor and the wafer sensor.

When the sensor battery is not electrified, the battery on the sensor is not required to be disassembled and replaced, and the sensor is only required to be placed in the storage box, and the charging function is opened. When the sensor transmits data, the sensor and the computer are not required to be connected by using related cables, the sensor is only required to be placed in the storage box, a wireless module such as Bluetooth or Wi F i is opened to wirelessly transmit the data with the sensor, and then the data is transmitted to the computer or other external upper computers through the storage box.

Drawings

Other features, objects and advantages of the present utility model will become more apparent upon reading of the detailed description of non-limiting embodiments, given with reference to the accompanying drawings in which:

fig. 1 shows a schematic structural diagram of a preferred first embodiment according to the present utility model;

fig. 2 shows a schematic internal structure of a preferred first embodiment according to the present utility model;

fig. 3 shows a schematic diagram of circuitry according to a preferred first embodiment of the utility model;

FIG. 4 shows a schematic back side view of circuitry according to a preferred first embodiment of the present utility model;

FIG. 5 shows a schematic diagram of a reticle sensor placement in accordance with a preferred first embodiment of the present utility model;

fig. 6 shows a schematic view of the addition of a carrying tray according to a preferred first embodiment of the utility model;

FIG. 7 shows a schematic diagram of a wafer sensor placed according to a preferred first embodiment of the present utility model;

fig. 8 shows a schematic structural diagram of a preferred second embodiment according to the present utility model;

fig. 9 shows a schematic structural view, in particular a schematic view of the back side, of a preferred second embodiment according to the utility model;

fig. 10 shows a schematic view of the internal structure of a preferred second embodiment according to the present utility model;

FIG. 11 shows a schematic diagram of circuitry according to a preferred second embodiment of the present utility model;

fig. 12 shows a schematic diagram of circuitry, in particular a schematic diagram of the back side, according to a preferred second embodiment of the utility model; and

fig. 13 shows a schematic diagram of a wafer sensor placed according to a preferred second embodiment of the present utility model.

Description of the reference numerals:

1. a case body;

2. a screw;

3. a power port;

4. a data port;

5. starting a switch;

6. circuit system

61. A cover plate;

62. a bottom plate;

63. a charging module;

64. a battery;

65. a charging coil;

66. a charging coil bracket;

67. a coil driving module;

68. a wireless module;

69. a patch nut;

610. a display module;

611. a cover cap;

71. a load-bearing column;

72. a carrying tray;

8. a spring thimble;

9. mask plate sensor

91. A receiving coil;

92. a thimble contactor;

10. wafer sensor

101. And a receiving coil.

Detailed Description

The utility model aims to provide a storage box for charging and wireless communication of a sensor in a semiconductor process. The following figures illustrate the solution of the storage case provided by the present utility model from different angles.

First embodiment the structure is shown in fig. 1, and in the preferred embodiment, the power port 3, the data port 4, the display module 610 and the screw 2 are provided on the case 1. The power port 3 is used for connecting a power line to supply power to internal components or charge a battery. The data port 4 is used for transmitting data with an upper computer. The display module 610 is used to display the status of the storage box, in a preferred embodiment, such as the embodiment shown in fig. 1, an led indicator is used, and in other variations, a liquid crystal display, a nixie tube, etc. may be used for the display module 610, which are all within the scope of the present utility model. The screw 2 is used to fix the internal components.

Further, the internal structure of the first embodiment is shown in fig. 2. Circuitry 6 is placed on either side of the interior of the case, preferably on the other side, for placement of the sensor. For example, in the embodiment shown in fig. 2, the sensor is placed on the carrier post 71. The person skilled in the art will appreciate that the load bearing column is in the form of a support column. In a further variant, the sensor is arranged on the side of the circuitry 6, all of which are within the scope of the utility model.

Further, in a preferred embodiment, the circuitry 6 is fastened by screws as shown in fig. 2, and in other variations, other fastening methods such as screws and nuts, adhesives, etc. are also within the scope of the present utility model.

Further, in a preferred embodiment, the storage case is provided with an activation switch 5 for activating the circuitry.

Further, in a preferred embodiment, the circuitry 6 is structured as shown in fig. 3 and 4, and in particular, the circuitry 6 includes a cover plate 61; a bottom plate 62; a charging module 63; a battery 64; a charging coil 65; a charging coil holder 66; a coil drive module 67; a wireless module 68; patch nut 69; a display module 610. More specifically, the charging coil 65 and the charging coil bracket 66 are on a cover 61, and the charging module 63, the battery 64, the coil driving module 67, and the wireless module 68 are provided in the middle of the cover 61 and the base 62, which are connected using the patch nut 69. The display module 610 is positioned on the back of the backplane.

The manner of placing the mask sensor in the first embodiment is shown in fig. 5, the mask sensor is placed on a carrying column in the storage box, the storage box cover is closed when in operation, the receiving coil of the sensor is aligned with the transmitting coil of the circuit system, the storage box can perform wireless charging or wireless data communication on the sensor, and meanwhile, the working states can be displayed through the display module, such as charging, full charging, communication, disconnection and the like.

The circuitry of the cartridge may also be provided with a connection port, such as spring pin 8, for wired charging or wired data transmission with a connection port on the sensor, such as pin contactor 92.

With further reference to the embodiments shown in fig. 1 and 5, it will be appreciated by those skilled in the art that the support posts are in the form of support posts, which are one expression of the sensor support member provided by the present utility model, namely, a preferred embodiment. In other variations, the sensor carrier may be embodied in other ways, such as in the form of a carrier tray as shown in fig. 6 and 13, and may be referred to as a wafer tray or other designation, which variations are within the scope of the present utility model.

Preferably, the carrying column may be replaced with a carrying tray in the first embodiment described above, as shown in fig. 6. Yet further preferably, the wafer sensor may be placed on the carrier tray, as shown in fig. 7. When the storage box cover is closed, the receiving coil of the sensor is aligned with the transmitting coil of the circuit system, the storage box can carry out wireless charging or wireless data communication on the sensor, and meanwhile, the working states can be displayed through the display module, and the states are charging, full charging, communication, disconnection and the like.

On the basis of the above illustrated embodiment and the variation, the second embodiment is structured as shown in fig. 8 and 9, the box body is similar to the wafer monolithic box in shape, and the circuit system is mounted on the back of the outer side of the box body. The circuit system panel is provided with a display screen, a power supply and data ports, a starting switch, a fixing screw and the like. In a variant, the fixing screw may be omitted, all of which are within the scope of the utility model.

Second embodiment internal structure as shown in fig. 10, a charging coil and a holder are mounted in a side case near the circuitry, and the charging coil holder can be used as a carrier to support a wafer sensor.

The circuit system structure of the second embodiment is shown in fig. 11, in which a base plate 62 is mounted on a cover 611 by means of a chip nut 69, the base plate is made of a Printed Circuit Board (PCB), and a charging module 63, a coil driving module 67, and a wireless module 68 are preferably soldered to the base plate. The battery 64 is preferably placed in a recess in the cover plate.

A display module 610 and a power port 3 and a data port 4 are welded to the other side of the base plate 62, and the switch 5 is actuated and fitted into the hole of the cover 611 as shown in fig. 12.

As shown in fig. 13, when the wafer sensor is placed on the charging coil support in the storage box of the second embodiment, the receiving coil of the sensor is aligned with the transmitting coil of the circuit system, the storage box can perform wireless charging or wireless data communication on the sensor, and meanwhile, the working states such as charging, full charging, communication, wire breakage and the like can be displayed through the display module.

In another preferred embodiment, those skilled in the art will appreciate that the present disclosure contemplates a storage case having a function of charging a wireless sensor and data transmission. Specifically, the storage box comprises a box body, a sensor bearing component and a circuit system.

The box body is a shell of a storage box, can be a box body suitable for the size of a mask plate or a box body suitable for the size of a wafer, and can be made of plastics or metals.

The sensor bearing component is used for placing mask sensors or wafer sensors and can be in a support column form or a tray form.

The circuit system comprises a charging module, a data transmission module, a cover plate and a bottom plate.

The charging module may be in the form of wired or wireless charging. The wired charging module comprises a charging circuit and a connector. The wireless charging module comprises a wireless charging circuit and a wireless charging coil.

The data transmission module may be in wired or wireless form. The wired data transmission module comprises a circuit and a connector. The wireless data transmission module comprises a wireless circuit and a wireless communication antenna.

The wireless circuitry may use bluetooth or Wi F i modules.

The circuitry also has a cover.

The circuitry may be placed inside or outside the cartridge.

The circuitry may also include a battery for powering the built-in module, which may be a rechargeable lithium battery, a nickel metal hydride battery.

The circuit system can also comprise a display module for displaying the state of the storage box, and the display module can be an l ed indicator lamp, a liquid crystal screen and a nixie tube.

The storage case may further include a switch for turning on or off a power supply of the storage case, or a charging function, or a data transmission function.

The storage case may also include a power connection port for powering the module within the storage case or for charging the battery.

The storage box can also comprise a data connection port for communicating data with an upper computer.

The storage box can also comprise a fixing element which is used for connecting and fixing all modules and elements in the storage box, and the fixing element can be a screw, a stud and an adhesive.

The foregoing describes specific embodiments of the present utility model. It is to be understood that the utility model is not limited to the particular embodiments described above, and that various changes and modifications may be made by one skilled in the art within the scope of the claims without affecting the spirit of the utility model.

Claims

1. The storage box with the functions of charging and data transmission for the wireless sensor is characterized by comprising a box body (1), a sensor bearing part and a circuit system (6), wherein the sensor bearing part is used for placing a mask sensor or a wafer sensor, the circuit system (6) is provided with an interface and is connected with the mask sensor or the wafer sensor, and the circuit system (6) is at least used for supplying power to the mask sensor or the wafer sensor and or transmitting data.

2. The storage case according to claim 1, characterized in that the circuitry (6) is further provided with a cover, the cover (611) covering the circuitry (6).

3. The storage case according to claim 1 or 2, characterized in that the circuitry (6) comprises a charging module (63), a data transmission module and a base plate (62), both of which are provided on the base plate (62).

4. The storage case of claim 3, wherein the charging module comprises a wired charging module comprising a charging circuit, a connector, or a wireless charging module comprising a wireless charging circuit and a wireless charging coil.

5. The storage case of claim 3, wherein the data transmission module comprises a wired data transmission module or a wireless data transmission module, the wired data transmission module comprising a circuit, a connector, and the wireless data transmission module comprising a wireless circuit and a wireless communication antenna.

6. The case of claim 5, wherein the wireless circuit is a bluetooth module or a WiFi module.

7. A storage box according to claim 3, wherein the circuit system (6) further comprises at least one display module (610) for displaying the working state of the storage box, the display module (610) is connected with the bottom plate (62) and is disposed on the outer surface of the storage box, and the display module (610) is any one or more of led indicator lights, a liquid crystal screen or a nixie tube.

8. A storage case according to claim 3, wherein the circuitry (6) further comprises at least one power source for powering the charging module (63) and/or the data transmission module.

9. The case of claim 8, wherein the power source is a battery (64) or an external power connection port.

10. A cartridge according to claim 8 or 9, characterized in that the cartridge is further provided with an activation switch (5) which is electrically connected in series with the power supply and is adapted to switch the power supply on or off.

11. A storage case according to claim 1 or 2, characterized in that the circuitry (6) is placed in the case (1).

12. The case of claim 1 or 2 or 4 or 5 or 6 or 7 or 8 or 9, wherein the case further comprises at least one data connection port for data communication with a host computer.

13. The storage case according to claim 1 or 2 or 4 or 5 or 6 or 7 or 8 or 9, characterized in that the storage case at least further comprises a plurality of fixing elements for fixing the sensor carrier and or the circuitry (6), respectively, inside the case (1).

14. The case of claim 13, wherein the fixing element is any one or more of a screw, a stud, an adhesive.

15. A storage case according to claim 1 or 2 or 4 or 5 or 6 or 7 or 8 or 9 or 14, wherein the case (1) is a case of the storage case, and the case (1) may be made of plastic or metal.

16. The storage case according to claim 1 or 2 or 4 or 5 or 6 or 7 or 8 or 9 or 14, wherein the shape of the case (1) is any one of the following shapes:

-a shape adapted to the mask size; or alternatively

-a shape adapted to the wafer size.

17. The cartridge of claim 1 or 2 or 4 or 5 or 6 or 7 or 8 or 9 or 14, wherein the sensor carrier is in the form of a support column or tray.