CN219722275U - High-precision welding type filter element - Google Patents
High-precision welding type filter element Download PDFInfo
- Publication number
- CN219722275U CN219722275U CN202321036709.8U CN202321036709U CN219722275U CN 219722275 U CN219722275 U CN 219722275U CN 202321036709 U CN202321036709 U CN 202321036709U CN 219722275 U CN219722275 U CN 219722275U
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- China
- Prior art keywords
- fixed
- metal filter
- shell
- filter sleeve
- column
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- 238000005493 welding type Methods 0.000 title description 5
- 239000002184 metal Substances 0.000 claims abstract description 70
- 238000007789 sealing Methods 0.000 claims abstract description 10
- 238000003466 welding Methods 0.000 claims description 3
- 238000001914 filtration Methods 0.000 abstract description 22
- 230000002035 prolonged effect Effects 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 description 11
- 238000004519 manufacturing process Methods 0.000 description 5
- 230000013011 mating Effects 0.000 description 5
- 239000000428 dust Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 230000003749 cleanliness Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
Abstract
The utility model discloses a high-precision welded filter element, and relates to the technical field of filtration. The utility model comprises a shell, a jacking column, a metal filter sleeve and a closing mechanism, wherein the top of the shell is fixed with an outer sleeve, the jacking column is fixed in the outer sleeve, the bottom end of the jacking column is fixed with a connecting column, the bottom end of the connecting column is fixed with the metal filter sleeve, the periphery of the metal filter sleeve is movably connected with a movable ring, and the closing mechanism is fixed at the bottom end of the metal filter sleeve. By arranging the shell, the jacking column, the metal filter sleeve and the sealing mechanism, the problems that the smoothness is poor when the metal filter element filters, and the use cost is high only when the filtering performance is reduced to a certain degree are solved, and the metal filter element has the advantages that: the smoothness is better during filtration, and after the filtration performance is reduced to a certain extent, the filter element energy can be restored to a certain extent by shaking, so that the use time is prolonged, and the use cost is reduced.
Description
Technical Field
The utility model belongs to the technical field of filtration, and particularly relates to a high-precision welding type filter element.
Background
In the high-end manufacturing industry of semiconductors and the like, the cleanliness of gas has great influence on product quality, production efficiency, production safety and the like. Therefore, the high-end manufacturing industries such as the semiconductor industry have extremely high requirements on the cleanliness of gas, in order to ensure the filtering efficiency, a metal filter is generally adopted, the structural form of the filter is a cylinder structure, according to the requirements of working conditions, the filter can be in different appearance shapes such as a cylinder shape and a square shape, the integral structure of the filter comprises a shell and a filter element, and the filter element and the shell are connected together in a manufacturing mode such as argon arc welding and laser welding, but the following defects still exist in the practical use:
in the filtering process of the metal filter, gas is input into the filter element, filtered through the filter element, then guided to the surface of the filter element, guided out, and in the filtering process, the filtering area of the filter element is only within a certain range, so that the filtering smoothness is poor;
after the metal filter is used for a period of time, a large amount of dust can be accumulated on the surface of the filter element due to filtration, so that the filtration performance of the filter element is obviously reduced, and after the filtration performance is reduced to a certain extent, the metal filter is generally designed in an integrated way, so that the whole filter needs to be replaced at the moment, and the use cost is high.
Disclosure of Invention
The utility model aims to provide a high-precision welded filter element, which solves the problems that the smoothness is poor when a metal filter element is filtered, and the filtering performance is reduced to a certain degree, and the use cost is high only when the metal filter element is replaced by arranging a shell, a jacking column, a metal filter sleeve and a sealing mechanism.
In order to solve the technical problems, the utility model is realized by the following technical scheme:
the utility model relates to a high-precision welding type filter element, which comprises a shell, a jacking column, a metal filter sleeve and a closing mechanism, wherein the top of the shell is fixedly provided with a jacket, the jacking column is fixedly arranged in the jacket, the bottom end of the jacking column is fixedly provided with a connecting column, the bottom end of the connecting column is fixedly provided with the metal filter sleeve, the periphery of the metal filter sleeve is movably connected with a movable ring, the bottom end of the metal filter sleeve is fixedly provided with the closing mechanism, and when the high-precision welding type filter element works, the metal filter sleeve is accommodated in the metal filter sleeve through the shell and is connected with the metal filter sleeve through the bottom of the jacking column, and the jacket is connected with the shell, so that the metal filter sleeve is connected in the shell, and the bottom end of the metal filter sleeve is closed through the closing mechanism.
Further, an air inlet is formed in the center of the bottom of the shell, an air inlet pipe is fixed in the center of the bottom of the shell, and air conveyed in the air inlet pipe is guided into the air inlet pipe through the air inlet.
Further, the air inlet pipe corresponds to the air inlet, limiting rings are fixed on the upper portion and the lower portion of the periphery of the shell, and the shell is limited after being clamped by a spanner through the limiting rings.
Further, an air outlet is formed in the center of the top end face of the jacking column through the connecting column, an air outlet cylinder is fixed in the center of the top end face of the jacking column, and filtered air in the metal filter sleeve is led into the air outlet cylinder through the air outlet on the jacking column to be led out.
Further, the connecting column is arranged in the shell, the air outlet corresponds to the air outlet barrel, and filtered air is guided into the semiconductor device through the air outlet barrel.
Further, the closing mechanism is arranged in the shell, the closing mechanism comprises an end cover, a matching disc and a limiting ring, the end cover is fixed at the bottom end of the metal filter sleeve, the matching disc is fixed at the top of the end cover and arranged in the metal filter sleeve, the limiting ring is fixed at the periphery of the end cover, and the closing mechanism closes the bottom of the metal filter sleeve through the end cover.
The utility model has the following beneficial effects:
according to the utility model, the problem of poor smoothness during filtering of the metal filter element is solved by arranging the shell, the top column and the metal filter sleeve, air is filtered through the metal filter sleeve after entering the shell, then enters the metal filter sleeve, is guided into the air outlets in the top column and the connecting column and is guided into the air outlet cylinder, so that during filtering, the air can be filtered through the surface of the air outlet cylinder, the whole filtering area of the filter is increased, and the smoothness of filtering is increased.
According to the utility model, the shell, the top column, the metal filter sleeve and the sealing mechanism are arranged, so that the problem that the metal filter can only be replaced after the filtering performance of the metal filter is reduced to a certain extent, and the use cost is high is solved.
Drawings
FIG. 1 is a perspective view of a cross-sectional structure of the present utility model;
FIG. 2 is a perspective view of the housing structure of the present utility model;
FIG. 3 is a bottom view of the housing of the present utility model in a disassembled perspective;
FIG. 4 is a perspective view showing the separation of the structure of the jack-prop of the present utility model;
FIG. 5 is a perspective view of a metal filter sleeve according to the present utility model;
FIG. 6 is a perspective view of the closure mechanism of the present utility model;
fig. 7 is a perspective view of the complete structure of the present utility model.
Reference numerals:
100. a housing; 101. an air inlet; 102. an air inlet pipe; 103. a confinement ring; 200. a top column; 201. an air outlet; 202. a jacket; 203. a connecting column; 204. an air outlet tube; 300. a metal filter sleeve; 301. a movable ring; 400. a closing mechanism; 401. an end cap; 402. a mating tray; 403. and a limiting ring.
Detailed Description
The technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model.
Referring to fig. 1-7, the present utility model is a high precision welded filter cartridge, comprising a housing 100, a top column 200, a metal filter sleeve 300 and a sealing mechanism 400, wherein a casing 202 is fixed at the top of the housing 100, the housing 100 accommodates the metal filter sleeve 300 therein, the top column 200 is connected to the top of the housing 100 through the casing 202, the top column 200 is fixed in the casing 202, the casing 202 is fixed to the housing 100 through the bottom, and then the top column 200 is connected together, such that the top column 200 is connected to the top of the housing 100, a connecting column 203 is fixed at the bottom end of the top column 200, the connecting column 203 connects the metal filter sleeve 300 in the housing 100, a metal filter sleeve 300 is fixed at the bottom end of the connecting column 203, air entering the housing 100 permeates into the metal filter sleeve 300, such that the air is filtered when passing through the metal filter sleeve 300, a movable ring 301 is movably connected to the periphery of the metal filter sleeve 300, after the filtering effect of the metal filter sleeve 300 is reduced, the housing 100 is shaken, such that the movable ring 301 is movable at the periphery of the metal filter sleeve 300, such that when the movable ring 301 is movably connected to the top of the housing 100, the metal filter sleeve 300 is filtered by the metal filter sleeve 300, a part of the metal filter sleeve 300 is filtered by the metal filter sleeve 300 is fixed at the bottom end of the sealing mechanism 400, and the metal filter sleeve 300 is sealed by the sealing mechanism 400.
As shown in fig. 1-3, an air inlet 101 is formed in the center of the bottom of the housing 100, the air inlet 101 guides air conveyed in the air inlet pipe 102 into the air inlet, the air inlet pipe 102 is fixed in the center of the bottom of the housing 100, when the air inlet is connected, the air inlet pipe 102 is aligned to a structure for conveying air to be filtered, a pipeline connecting piece for conveying the air structure and the air inlet pipe 102 are screwed together, and after screwing, air conveying equipment is started, and air to be filtered is guided into the housing 100.
As shown in fig. 1, 2 and 3, the air inlet pipe 102 corresponds to the air inlet 101 in position, the upper part and the lower part of the peripheral side of the casing 100 are both fixed with a limiting ring 103, and when the casing 100 works through the limiting ring 103, the casing 100 is clamped on the limiting ring through a spanner, so that the connection stability between the casing 100 and the corresponding connection structure is provided.
As shown in fig. 1 and 4, an air outlet 201 is formed in a through connection column 203 at the center of the top end surface of the top column 200, air filtered in the metal filter sleeve 300 is led into an air outlet tube 204 by the top column 200 and the connection column 203 through the air outlet 201, the air outlet tube 204 is fixed at the center of the top end surface of the top column 200, and when the semiconductor device using clean air is operated, the air outlet tube 204 is aligned with the semiconductor device, a pipeline connection connecting piece for conveying air of the semiconductor device is sleeved with the air outlet tube 204, and the connecting piece and the air outlet tube 204 are rotated together and screwed, so that the air outlet tube 204 is communicated with the semiconductor device.
As shown in fig. 1 and 4, the connection column 203 is disposed in the housing 100, and the air outlet 201 corresponds to the air outlet 204, so that the clean air led out from the air outlet 201 enters the air outlet 204.
As shown in fig. 1 and 6, the sealing mechanism 400 is disposed in the housing 100, the sealing mechanism 400 includes an end cover 401, a mating disc 402 and a limiting ring 403, the bottom end of the metal filter sleeve 300 is fixed with the end cover 401, the metal filter sleeve 300 seals the bottom thereof through the end cover 401, the top of the end cover 401 is fixed with the mating disc 402, the mating disc 402 is disposed in the metal filter sleeve 300, the mating end cover 401 seals the bottom end of the metal filter sleeve 300, the limiting ring 403 is fixed on the periphery of the end cover 401, the end cover 401 connects the limiting ring 403 on the periphery thereof, and is used for limiting the movable ring 301 movably connected with the periphery of the metal filter sleeve 300, so that the movable ring 301 cannot be separated from the periphery of the metal filter sleeve 300 when moving.
The specific working principle of the utility model is as follows: when the semiconductor device is in operation, firstly, the shell 100 is held, the pipeline connecting piece for conveying air of the semiconductor device is sleeved with the air outlet tube 204, the connecting piece is rotated with the air outlet tube 204 and screwed, so that the air outlet tube 204 is communicated with the semiconductor device, then the air inlet tube 102 is aligned to a structure for conveying air to be filtered, the pipeline connecting piece for conveying the air structure is screwed with the air inlet tube 102 and screwed, then the air conveying device is started, the air to be filtered is guided into the shell 100, after entering the shell 100, the air is filtered through the metal filter sleeve 300, then enters the metal filter sleeve 300, is guided into the air outlet 201 in the top column 200 and the connecting column 203, then is guided into the air outlet tube 204, and is guided into the semiconductor device using clean air through the air outlet tube 204, after a period of use, a large amount of dust is filtered out from the surface of the metal filter sleeve 300, so that the filtering effect of the metal filter sleeve 300 is reduced, at the moment, the shell 100 is shaken, the movable ring 301 movably connected on the metal filter sleeve 300 moves up and down on the periphery of the metal filter sleeve 300, the dust is scraped by the movable ring 301, and the dust on the periphery of the metal filter sleeve 300 is restored to a certain filtering effect.
The foregoing is only a preferred embodiment of the present utility model, and the present utility model is not limited thereto, and any modification, equivalent replacement, and improvement of some of the technical features described in the foregoing embodiments are all within the scope of the present utility model.
Claims (6)
1. The utility model provides a high accuracy welding formula filter core, includes shell (100), jack-prop (200), metal filter sleeve (300) and closing mechanism (400), its characterized in that: the top of shell (100) is fixed with overcoat (202), overcoat (202) internal fixation has spliced pole (200), the bottom of spliced pole (200) is fixed with spliced pole (203), the bottom mounting of spliced pole (203) has metal to strain cover (300), the week side swing joint of metal to strain cover (300) has expansion ring (301), the bottom mounting of metal to strain cover (300) has closing mechanism (400).
2. A high precision welded filter cartridge as defined in claim 1, wherein: an air inlet (101) is formed in the center of the bottom of the shell (100), and an air inlet pipe (102) is fixed in the center of the bottom of the shell (100).
3. A high precision welded filter cartridge as defined in claim 2, wherein: the air inlet pipe (102) corresponds to the air inlet (101), and limiting rings (103) are fixed on the upper part and the lower part of the periphery of the shell (100).
4. A high precision welded filter cartridge as defined in claim 1, wherein: an air outlet (201) is formed in the center of the top end surface of the top column (200) through connection column (203), and an air outlet tube (204) is fixed in the center of the top end surface of the top column (200).
5. A high precision welded filter cartridge as defined in claim 4, wherein: the connecting column (203) is arranged in the shell (100), and the air outlet (201) corresponds to the air outlet cylinder (204) in position.
6. A high precision welded filter cartridge as defined in claim 1, wherein: the sealing mechanism (400) is arranged in the shell (100), the sealing mechanism (400) comprises an end cover (401), a matching disc (402) and a limiting ring (403), the end cover (401) is fixed at the bottom end of the metal filter sleeve (300), the matching disc (402) is fixed at the top of the end cover (401), the matching disc (402) is arranged in the metal filter sleeve (300), and the limiting ring (403) is fixed at the periphery of the end cover (401).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321036709.8U CN219722275U (en) | 2023-05-04 | 2023-05-04 | High-precision welding type filter element |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321036709.8U CN219722275U (en) | 2023-05-04 | 2023-05-04 | High-precision welding type filter element |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219722275U true CN219722275U (en) | 2023-09-22 |
Family
ID=88027188
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321036709.8U Active CN219722275U (en) | 2023-05-04 | 2023-05-04 | High-precision welding type filter element |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219722275U (en) |
-
2023
- 2023-05-04 CN CN202321036709.8U patent/CN219722275U/en active Active
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