CN219715679U - Chip test fixture and chip sealing device - Google Patents

Abstract

The utility model relates to the technical field of semiconductor processing equipment, in particular to a chip testing jig and chip sealing equipment. The chip testing jig comprises a bearing structure, a clamping assembly, a driving assembly, a pressing plate and an adjusting assembly, wherein the clamping assembly comprises a buffer seat, a clamping block and a supporting structure, and the clamping block is at least partially arranged at intervals with the buffer seat to form an adjusting groove; the pressing plate is used for being abutted to one side, far away from the bearing structure, of the test base, and the supporting structure can move into the adjusting groove and is clamped on two opposite sides of the pressing plate with the clamping blocks respectively; the adjusting component is used for driving the pressing plate to move along the adjusting groove. In the chip test fixture of this embodiment, form the adjustment tank through buffer seat and clamp block combination, can lead the removal of clamp plate and carry out accurate regulation to the clamp plate through adjusting part through the adjustment tank, through the cooperation of drive assembly with bearing structure, can drive the clamp plate and remove in order to carry out quick release and compress tightly fixedly to test the base.

Description

Chip test fixture and chip sealing device

Technical Field

The utility model relates to the technical field of semiconductor processing equipment, in particular to a chip testing jig and chip sealing equipment.

Background

Chip testing is a very important part of the chip manufacturing process. The test base is a device for testing chips, and a pressing plate on the test base is used for fixing the chips so as to fix the test base on the platen. In the testing process, after the testing of the products in one batch is completed, the testing base needs to be replaced and fixed again, and then the testing of the products in the next batch is continued.

In the existing test procedure, the test base is usually replaced and fixed manually, each pressing plate for fixing the test base is required to be loosened by a tool, the position of the pressing plate is adjusted in a visual mode after replacement is completed, and after the position of the test base is aligned, the screw is screwed down to fix the pressing plate. The operation time of manually loosening and fixedly tightening the pressing plate in the process is long, meanwhile, as the position of the pressing plate is adjusted to be positioned through visual inspection, the positioning accuracy is low, the placing and positioning of the chip are affected, and the chip in the testing process is damaged when being placed into the testing base.

Therefore, there is a need for an improvement to the above-described problems to change the current situation.

Disclosure of Invention

The utility model provides a chip testing jig and chip sealing equipment, which are used for solving the problems of low replacement efficiency of a test base and low alignment precision between a chip and the test base caused by manually disassembling the test base and manually positioning a pressing plate in the existing chip testing process.

The utility model provides a chip testing jig, comprising:

the bearing structure is used for bearing a test base of the chip to be tested;

the clamping assembly comprises a buffer seat, a clamping block and a supporting structure, wherein the buffer seat and the bearing structure are movably arranged relatively, the clamping block is connected with the buffer seat, at least part of the clamping block is arranged at intervals with the buffer seat to form an adjusting groove, and the supporting structure is movably connected with the buffer seat;

the driving assembly is connected with the buffer seat and used for driving the buffer seat to move relative to the supporting structure so as to enable the supporting structure to move towards the inside or the outside of the adjusting groove;

the pressing plate is in sliding fit with the adjusting groove and is used for being abutted to one side, away from the bearing structure, of the test base, and the supporting structure can move into the adjusting groove and is clamped on two opposite sides of the pressing plate with the clamping blocks respectively; and

the adjusting component is movably arranged relative to the bearing structure and detachably connected with the pressing plate, and the adjusting component is used for driving the pressing plate to move along the adjusting groove.

According to one embodiment of the utility model, the driving assembly comprises a driving member, a lifting platform and a limiting member, wherein the lifting platform is connected to the buffer seat, the driving member is in power connection with the lifting platform and is used for driving the lifting platform to move relative to the bearing structure, the limiting member is connected to the bearing structure, and is at least partially positioned at the top of the supporting structure, and the driving member is used for driving the buffer seat to move relative to the bearing structure so that the limiting member abuts against the supporting structure to drive the supporting structure to be separated from the pressing plate.

According to one embodiment of the utility model, the bottom of the lifting platform is provided with a sensing piece, the driving assembly further comprises a position sensor, the position sensor is connected to the bearing structure, and the sensing piece is used for being in sensing fit with the position sensor.

According to one embodiment of the utility model, the bearing structure comprises a bedplate, a mounting frame, a connecting column and a limiting column, wherein the bedplate and the mounting frame are arranged at intervals, and the connecting column is respectively connected with the bedplate and the mounting frame; the lifting platform comprises a lifting plate and a guide shaft, wherein the opposite ends of the guide shaft are respectively connected with the lifting plate and the buffer seat, the guide shaft penetrates through the bedplate and is in sliding fit with the bedplate, the driving piece is in power connection with the lifting plate and is used for driving the lifting plate to move along the axial direction of the guide shaft, the limiting columns are connected with the bottom plate of the bedplate, and the limiting columns are arranged at intervals with the lifting plate and can be in butt joint with the lifting plate.

According to one embodiment of the utility model, the supporting structure comprises a supporting block and an elastic piece, wherein the elastic piece is respectively connected with the supporting block and the buffer seat, the elastic piece is used for driving the supporting block to move towards the inside of the adjusting groove so that the supporting block and the clamping block are respectively clamped at two opposite sides of the pressing plate, and the driving assembly is used for driving the supporting block to move towards the outside of the adjusting groove; the buffer seat is provided with an accommodating hole, and the elastic piece is accommodated in the accommodating hole.

According to one embodiment of the utility model, a movable hole is formed in one side, facing the supporting block, of the buffer seat; the supporting structure further comprises a bushing and a connecting pin, wherein the connecting pin is connected to the supporting block, the connecting pin is suspended in the movable hole, and the bushing is arranged in the movable hole and is in sliding fit with the connecting pin.

According to one embodiment of the utility model, a magnet is further arranged in the buffer seat, a metal insert is arranged in the pressing plate, and the magnet is magnetically matched with the metal insert.

According to one embodiment of the utility model, the adjusting assembly comprises an adjusting frame and an adjusting pin, wherein the adjusting pin is detachably connected to one side of the adjusting frame; the pressure plate is provided with an adjusting hole, the adjusting pin is in plug-in fit with the adjusting hole, and the central axis of the adjusting pin is perpendicular to the extending direction of the adjusting groove.

According to one embodiment of the utility model, the adjusting assembly further comprises a visual inspection camera, wherein the visual inspection camera is arranged on one side of the adjusting frame and is used for acquiring image signals of the pressing plate.

The utility model also provides chip sealing and testing equipment, which comprises the chip testing jig.

The embodiment of the utility model has the following beneficial effects:

when the chip testing jig of the embodiment is used, the supporting structure can be matched with the clamping block to clamp and position the pressing plate, the testing base is fixed on the bearing structure through the pressing plate, after a batch of chip tests are completed, the driving assembly drives the supporting structure to move, so that the supporting structure moves towards a method far away from the clamping block and releases the pressing plate, the testing base can be replaced at the moment, after the testing base is replaced, the testing assembly can drive the pressing plate to a preset position to achieve accurate positioning, and then the driving assembly drives the supporting structure to reset and abut against one side, far away from the pressing plate, of the clamping block, so that the supporting structure can be matched with the clamping block to position the pressing plate.

In the chip test tool of this embodiment, form the adjustment tank through buffer seat and clamp block combination, can lead the removal of clamp plate through the adjustment tank and carry out accurate regulation to the clamp plate through adjusting part, simultaneously, through the cooperation of drive assembly and bearing structure, can drive the clamp plate and remove in order to carry out quick release and compress tightly fixedly to test the base, compare in current manual assembly and disassembly and visual inspection location scheme, can effectively improve the change efficiency of test base in the chip test tool, can also improve the counterpoint precision of clamp plate simultaneously, excellent in use effect.

Drawings

In order to more clearly illustrate the embodiments of the utility model or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, it being obvious that the drawings in the following description are only some embodiments of the utility model, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

Wherein:

FIG. 1 is a perspective view of a chip test fixture according to an embodiment of the utility model;

FIG. 2 is an enlarged view of portion A of FIG. 1;

FIG. 3 is a schematic diagram of a portion of a chip test fixture according to an embodiment of the utility model;

FIG. 4 is a schematic diagram of a chip test fixture according to an embodiment of the utility model when fixing a test base;

FIG. 5 is a schematic diagram of a chip test fixture according to an embodiment of the utility model when the test base is released;

FIG. 6 is an exploded view of a portion of the structure of a clamping assembly in an embodiment of the utility model;

FIG. 7 is an exploded view of a test base in an embodiment of the utility model;

reference numerals:

10. chip test fixture; 100. a load bearing structure; 110. a platen; 120. a mounting frame; 130. a connecting column; 140. a limit column; 200. a clamping assembly; 210. a buffer seat; 211. an adjustment tank; 2111. a guide slope; 212. a receiving hole; 213. a movable hole; 214. a magnet; 220. a clamping block; 230. a support structure; 231. a support block; 232. an elastic member; 233. a bushing; 234. a connecting pin; 300. a drive assembly; 310. a driving member; 311. a driving motor; 312. a screw rod structure; 320. a lifting table; 321. a lifting plate; 322. a guide shaft; 323. an induction piece; 330. a limiting piece; 340. a position sensor; 400. a pressing plate; 410. a guide part; 411. an adjustment aperture; 420. a crimping part; 430. a metal insert; 500. an adjustment assembly; 510. an adjusting frame; 520. an adjusting pin; 530. a visual inspection camera; 540. a suction nozzle; 20. a test base; 201. a connecting seat body; 202. an adapter plate; 203. and (5) connecting a plate.

Detailed Description

For the purpose of making the objects, technical solutions and advantages of the present utility model more apparent, the technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings, and it is apparent that the described embodiments are some embodiments of the present utility model, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

Referring to fig. 1 to 7, an embodiment of the present utility model provides a chip testing fixture 10, which includes a carrying structure 100, a clamping assembly 200, a driving assembly 300, a pressing plate 400 and an adjusting assembly 500, wherein the carrying structure 100 is used for carrying a testing base 20 of a chip to be tested; the clamping assembly 200 comprises a buffer seat 210, a clamping block 220 and a supporting structure 230, wherein the buffer seat 210 and the bearing structure 100 are movably arranged relatively, the clamping block 220 is connected to the buffer seat 210, at least part of the clamping block 220 is arranged at intervals with the buffer seat 210 to form an adjusting groove 211, and the supporting structure 230 is movably connected with the buffer seat 210; the driving assembly 300 is connected to the buffer seat 210, and the driving assembly 300 is used for driving the buffer seat 210 to move relative to the support structure 230 so as to enable the support structure 230 to move towards the inside or the outside of the adjusting groove 211; the pressing plate 400 is slidably matched with the adjusting groove 211, and the pressing plate 400 is used for abutting against one side of the test base 20 away from the bearing structure 100, and the supporting structure 230 can move into the adjusting groove 211 and be clamped on two opposite sides of the pressing plate 400 with the clamping blocks 220 respectively; the adjusting assembly 500 is movably disposed relative to the carrying structure 100 and detachably connected to the platen 400, and the adjusting assembly 500 is used for driving the platen 400 to move along the adjusting slot 211.

When the chip testing jig 10 of the embodiment is used, the supporting structure 230 can be matched with the clamping block 220 to clamp and position the pressing plate 400, and the testing base 20 is fixed on the carrying structure 100 through the pressing plate 400, after a batch of chips are tested, the supporting structure 230 is driven to move by the driving assembly 300, so that the supporting structure 230 moves towards a method far away from the clamping block 220 and releases the pressing plate 400, at this time, the testing base 20 can be replaced, after the testing base 20 is replaced, the testing assembly can drive the pressing plate 400 to move to a preset position to achieve accurate positioning, and then the driving assembly 300 drives the supporting structure 230 to reset and abut against one side, far away from the pressing plate 400, of the clamping block 220, so that the supporting structure 230 can be matched with the clamping block 220 to position the pressing plate 400.

In the chip test fixture 10 of this embodiment, form adjustment groove 211 through buffer seat 210 and clamp block 220 combination, can lead the removal of clamp plate 400 and carry out accurate regulation through adjusting assembly 500 to clamp plate 400 through adjustment groove 211, simultaneously, through the cooperation of drive assembly 300 and bearing structure 230, can drive clamp plate 400 to remove in order to release fast and compress tightly fixedly to test base 20, compare in current manual assembly and disassembly and visual inspection location scheme, can effectively improve the change efficiency of test base 20 in the chip test fixture 10, can also improve the counterpoint precision of clamp plate 400 simultaneously, excellent in use effect.

It should be noted that, the adjusting assembly 500 may be driven by an external linear driving element, such as a linear motor, an electric cylinder, etc., and may be controlled and driven by a control module, such as a PLC, an industrial personal computer, a single chip microcomputer, etc., where the preset position refers to that the chip testing fixture 10 may set a preset moving distance of the adjusting assembly 500 according to the corresponding test base 20, after the corresponding type of test base 20 is mounted on the carrying structure 100, the adjusting assembly 500 may drive the platen 400 to move to a preset position (i.e., the adjusting assembly 500 moves by a preset distance), and the platen 400 and the clamping block 220 may clamp and fix the platen 400 under the driving action of the driving assembly 300.

Specifically, referring to fig. 1, the driving assembly 300 includes a driving member 310, a lifting platform 320 and a limiting member 330, the lifting platform 320 is connected to the buffer seat 210, the driving member 310 is dynamically connected to the lifting platform 320 and is used for driving the lifting platform 320 to move relative to the carrying structure 100, the limiting member 330 is connected to the carrying structure 100, and the limiting member 330 is at least partially located at the top of the supporting structure 230, and the driving member 310 is used for driving the buffer seat 210 to move relative to the carrying structure 100, so that the limiting member 330 abuts against the supporting structure 230 to separate the supporting structure 230 from the pressing plate 400.

Thus, referring to fig. 4, when the platen 400 and the clamping block 220 clamp the fixed platen 400, the stopper 330 is spaced apart from the support structure 230 to fix the platen 400; when the pressing plate 400 needs to be removed from the bearing structure 100, the lifting platform 320 is driven by the driving piece 310 to move upwards and drive the buffer seat 210 to move upwards, at this time, the limiting piece 330 is connected to the bearing structure 100 and moves relatively to the buffer seat 210, as shown in fig. 5, when the buffer seat 210 moves to the release position, the buffer seat 210 moves upwards, the limiting piece 330 abuts against the supporting structure 230 to enable the supporting structure 230 to move downwards, at this time, the supporting structure 230 and the clamping block 220 release the pressing plate 400, so that the test base 20 is convenient to replace, in the process, the test base 20 can be manually disassembled and assembled, and the existing replacement needs to manually disassemble and assemble the pressing plate 400, so that the aim of improving the efficiency can be achieved, and the pressing plate 400 can be disassembled and assembled through an external automatic control mechanism such as a manipulator; after the new test base 20 is installed, the adjusting assembly 500 drives the pressing plate 400 to move to a preset position, and then the driving piece 310 drives the lifting platform 320 to move reversely, so that the supporting structure 230 is reset and is matched with the clamping block 220 to clamp and fix the pressing plate 400; the functions of quick replacement of the test base 20 and accurate positioning of the chip test fixture 10 can be realized through the above-mentioned circulation.

Further, referring to fig. 3 to 5, the bottom of the lifting platform 320 is provided with a sensing plate 323, the driving assembly 300 further includes a position sensor 340, the position sensor 340 is connected to the carrying structure 100, and the sensing plate 323 is used for being in sensing fit with the position sensor 340.

In this embodiment, by setting the sensing piece 323 to cooperate with the position sensor 340, when the sensing piece 323 moves relative to the position sensor 340, the position sensor 340 can obtain a position chip of the sensing piece 323 and transmit the position chip to the control module, and the control module determines the moving position of the lifting platform 320 according to a preset program; for example, when the lifting platform 320 is located at the position shown in fig. 4, the sensing plate 323 can move into the sensing area of the position sensor 340, the position sensor 340 can send corresponding data signals to the control module to determine the position of the lifting platform 320, and when the lifting platform 320 moves to the position shown in fig. 5, the sensing plate 323 is separated from the position sensor 340, and the position sensor 340 transmits corresponding data signals to the control module to determine the position of the lifting platform 320. Specifically, the position sensor 340 may be a slot type photoelectric switch, a slot type optocoupler.

Specifically, referring to fig. 1 to 3, the load-bearing structure 100 includes a platen 110, a mounting frame 120, a connecting post 130, and a limiting post 140, where the platen 110 and the mounting frame 120 are spaced apart, and the connecting post 130 is connected to the platen 110 and the mounting frame 120, respectively; the lifting platform 320 comprises a lifting plate 321 and a guide shaft 322, opposite ends of the guide shaft 322 are respectively connected to the lifting plate 321 and the buffer seat 210, the guide shaft 322 penetrates through the bedplate 110 and is in sliding fit with the bedplate 110, the driving piece 310 is connected to the lifting plate 321 in a power mode and is used for driving the lifting plate 321 to move along the axial direction of the guide shaft 322, the limiting post 140 is connected to the bottom plate of the bedplate 110, and the limiting post 140 and the lifting plate 321 are arranged at intervals and can be abutted to the lifting plate 321.

By arranging the connecting posts 130 to connect the platen 110 and the mounting frame 120 respectively, an accommodating space is formed between the platen 110 and the mounting frame 120, as shown in fig. 1, the relevant accessories of the test base 20 can be accommodated in the accommodating space, so that the overall structure of the chip test fixture 10 is more compact; by providing the guide shaft 322 to cooperate with the platen 110, the lifting movement of the lifting plate 321 can be guided so that the lifting plate 321 can be parallel to the platen 110, thereby improving the driving smoothness of the driving assembly 300.

Specifically, the driving piece 310 includes a driving motor 311 and a screw rod structure 312, the screw rod structure 312 is connected to an output end of the driving motor 311, and the screw rod structure 312 is connected to the lifting plate 321; the lifting plate 321 can be driven to move along the direction perpendicular to the lifting plate 321 by driving the screw rod structure 312 to rotate through the driving motor 311. In other embodiments, the driving member 310 may be a linear driving member such as an electric cylinder, a hydraulic cylinder, etc., which is not limited herein.

Referring to fig. 6 and 7, in an embodiment, the supporting structure 230 includes a supporting block 231 and an elastic member 232, the elastic member 232 is respectively connected to the supporting block 231 and the buffer seat 210, the elastic member 232 is used for driving the supporting block 231 to move toward the inside of the adjusting slot 211, so that the supporting block 231 and the clamping block 220 are respectively clamped on opposite sides of the pressing plate 400, and the driving assembly 300 is used for driving the supporting block 231 to move toward the outside of the adjusting slot 211; the buffer base 210 has a receiving hole 212, and the elastic member 232 is received in the receiving hole 212.

In this embodiment, by providing the elastic member 232 and the supporting block 231 for connection, after the driving force of the driving member 310 is removed, the supporting block 231 can be abutted against the side of the pressing plate 400 away from the clamping block 220 under the elastic force of the elastic member 232, and the pressing plate 400 is fixed by the clamping of the clamping block 220 and the supporting block 231; when the driving member 310 drives the lifting platform 320 to move, so that the limiting member 330 abuts against the supporting block 231, the elastic member 232 can generate elastic deformation and store elastic potential energy to drive the supporting block 231 to reset. Meanwhile, the elastic member 232 is disposed in the accommodating hole 212 of the buffer seat 210, the accommodating hole 212 can limit the deformation of the elastic member 232, and the combined structure of the buffer seat 210 and the supporting block 231 is more compact.

Specifically, a movable hole 213 is opened at a side of the buffer seat 210 facing the support block 231; the support structure 230 further includes a bushing 233 and a connecting pin 234, the connecting pin 234 is connected to the support block 231, and the connecting pin 234 is suspended in the movable hole 213, and the bushing 233 is disposed in the movable hole 213 and slidably engaged with the connecting pin 234.

Therefore, when the supporting block 231 moves relative to the buffer seat 210, the connecting pin 234 can slide relative to the bushing 233 to avoid abrasion between the supporting block 231 and the buffer seat 210, and the chip testing jig 10 can only replace the bushing 233 and/or the connecting pin 234 during subsequent maintenance, so that the maintenance cost of the chip testing jig 10 is reduced. In some embodiments, the bushing 233 may employ a bushing having a self-lubricating function, such as a graphite bushing, a teflon bushing, or the like, for the purpose of reducing friction loss between the connection pin 234 and the bushing 233, and may also improve the sliding smoothness of the connection pin 234.

Referring to fig. 3 and 7, in an embodiment, the buffer seat 210 is further provided with a magnet 214, the platen 400 is provided with a metal insert 430, and the magnet 214 magnetically cooperates with the metal insert 430.

In this embodiment, by providing the magnet 214 in the buffer seat 210 and matching the metal insert 430 in the pressing plate 400, after the supporting structure 230 is separated from the pressing plate 400, as shown in fig. 5, the pressing plate 400 is separated from the supporting block 231 and a distance L is provided between the buffer seat 210 and the end of the buffer seat 210, and the pressing plate 400 can be fixed by the magnetic attraction between the magnet 214 and the metal insert 430, so as to avoid the pressing plate 400 from being separated from the adjusting slot 211. Specifically, the spacing distance L may be 0-3mm, and in this embodiment L may be 0.5mm.

Specifically, referring to fig. 2, the adjusting assembly 500 includes an adjusting bracket 510 and an adjusting pin 520, the adjusting pin 520 being detachably coupled to one side of the adjusting bracket 510; the pressing plate 400 is provided with an adjusting hole 411, an adjusting pin 520 is in plug-in fit with the adjusting hole 411, and the central axis of the adjusting pin 520 is perpendicular to the extending direction of the adjusting groove 211.

When the pressing plate 400 needs to be driven to move by the adjusting assembly 500, the adjusting assembly 500 firstly moves towards the pressing plate 400 and enables the adjusting pin 520 to correspond to the adjusting hole 411 of the pressing plate 400, then the adjusting assembly 500 moves towards the pressing plate 400 along the vertical direction and enables the adjusting pin 520 to be in plug-in fit with the adjusting hole 411, as shown in fig. 1, at this time, the adjusting assembly 500 can drive the pressing plate 400 to move in the adjusting groove 211 by driving the adjusting frame 510 along the adjusting direction, so as to realize the adjusting function of the adjusting assembly 500; after the pressing plate 400 is moved to the preset position, the adjustment assembly 500 is reversely moved in the vertical direction to release the adjustment pin 520 from the adjustment hole 411. Referring to fig. 1 to 3, in the present embodiment, the number of the clamping assemblies 200 is two, and two sets of parallel and symmetrically arranged adjusting grooves 211 are formed, two opposite ends of the pressing plate 400 are respectively slidably matched with the two sets of adjusting grooves 211, in a preferred embodiment, the number of the adjusting pins 520 and the adjusting holes 411 are two, and the connecting line of the two adjusting pins 520 is perpendicular to the extending direction of the adjusting grooves 211, when the adjusting assembly 500 drives the adjusting frame 510 to move, the moving direction of the pressing plate 400 can be limited by matching the two sets of adjusting pins 520 and the adjusting holes 411, so that the pressing plate 400 can smoothly move along the adjusting grooves 211, the pressing plate 400 is prevented from deflecting during moving, and the moving accuracy and smoothness of the pressing plate 400 are improved.

Further, referring to fig. 2, the adjusting assembly 500 further includes a visual inspection camera 530, wherein the visual inspection camera 530 is disposed on one side of the adjusting frame 510, and the visual inspection camera 530 is used for acquiring an image signal of the platen 400.

Thus, when the adjusting assembly 500 drives the platen 400 to move, the vision detecting camera 530 can scan the platen 400 and perform positioning control on the platen 400 according to the built-in program of the control module; for example, the control module may match the image signal of the platen 400 and the model of the test base 20 according to the object in the built-in program, and output the movement control signal of the adjustment assembly 500, and after the adjustment assembly 500 receives the movement control signal, the platen 400 may be driven to move to the preset position.

Specifically, the pressing plate 400 includes a guiding portion 410 and a pressing portion 420, where the guiding portion 410 is slidably engaged with the adjusting slot 211, and the pressing portion 420 is used for pressing against a side of the test base 20 away from the bearing structure 100.

In the present embodiment, the number of the guide portions 410 is two, and the two guide portions 410 are symmetrically disposed on opposite sides of the press-connection portion 420, so that the movement of the pressing plate 400 can be guided by the cooperation of the two guide portions 410 and the two groups of the adjustment grooves 211.

Further, a guiding inclined plane 2111 is provided at the opening of the adjusting groove 211.

Accordingly, when the pressing plate 400 is coupled with the clamping assembly 200, the guide portion 410 of the pressing plate 400 may be guided to the inside of the adjustment groove 211 through the guide slope 2111, thereby improving the convenience of assembly of the pressing plate 400.

Referring to fig. 2, in an embodiment, the adjusting assembly 500 further includes a suction nozzle 540, the suction nozzle 540 is disposed on one side of the visual inspection camera 530, and the suction nozzle 540 is used for connecting with an external air source.

In this embodiment, by providing the suction nozzle 540 on the adjusting component 500, when the chip in the test base 20 needs to be adjusted, or when the test base 20 needs to be adjusted, the chip or the test base 20 can be adsorbed and released by the suction nozzle 540, and when the suction nozzle 540 adsorbs the chip or the test base 20, the chip or the test base 20 can be moved under the driving action of the adjusting component 500.

Specifically, the test base 20 includes a connection base 201, an adapter plate 202, and a connection plate 203, where the connection plate 203 is detachably connected to the platen 110 and is used to connect with an external detection circuit, the adapter plate 202 is respectively connected to the connection base 201 and the connection plate 203, at least one interface corresponding to the connection base 201 and an interface connected to the connection plate 203 may be respectively provided on the adapter plate 202, and different interfaces provided on the adapter plate 202 are connected to the connection base 201, so that detection can be performed on connection bases 201 of different models.

The utility model also provides a chip sealing and testing device, which comprises the chip testing jig 10 in any one of the embodiments.

It can be appreciated that, in the chip sealing and testing device of this embodiment, by setting the chip testing tool 10 in any one of the above embodiments, the chip testing tool 10 forms the adjusting groove 211 through the combination of the buffer seat 210 and the clamping block 220, the movement of the pressing plate 400 can be guided by the adjusting groove 211 and the pressing plate 400 can be precisely adjusted through the adjusting component 500, meanwhile, the pressing plate 400 can be driven to move to rapidly release and press and fix the testing base 20 through the cooperation of the driving component 300 and the supporting structure 230, compared with the existing manual disassembly and visual inspection positioning scheme, the replacement efficiency of the testing base 20 in the chip testing tool 10 can be effectively improved, thereby effectively improving the operation efficiency of the chip sealing and testing device, and meanwhile, the damage to chips in the sealing and testing process can be avoided by improving the alignment precision of the pressing plate 400.

In the description of the embodiments of the present utility model, it should be noted that the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are merely for convenience in describing the embodiments of the present utility model and simplifying the description, and do not indicate or imply that the apparatus or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the embodiments of the present utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In describing embodiments of the present utility model, it should be noted that, unless explicitly stated and limited otherwise, the terms "coupled," "coupled," and "connected" should be construed broadly, and may be either a fixed connection, a removable connection, or an integral connection, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium. The specific meaning of the above terms in embodiments of the present utility model will be understood in detail by those of ordinary skill in the art.

In embodiments of the utility model, unless expressly specified and limited otherwise, a first feature "up" or "down" on a second feature may be that the first and second features are in direct contact, or that the first and second features are in indirect contact via an intervening medium. Moreover, a first feature being "above," "over" and "on" a second feature may be a first feature being directly above or obliquely above the second feature, or simply indicating that the first feature is level higher than the second feature. The first feature being "under", "below" and "beneath" the second feature may be the first feature being directly under or obliquely below the second feature, or simply indicating that the first feature is less level than the second feature.

In the description of the present specification, a description referring to terms "one embodiment," "some embodiments," "examples," "specific examples," or "some examples," etc., means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the embodiments of the present utility model. In this specification, schematic representations of the above terms are not necessarily directed to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, the different embodiments or examples described in this specification and the features of the different embodiments or examples may be combined and combined by those skilled in the art without contradiction.

Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present utility model, and are not limiting; although the utility model has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit and scope of the technical solutions of the embodiments of the present utility model.

Claims (10)

1. A chip test fixture, which is characterized by comprising:

the bearing structure is used for bearing a test base of the chip to be tested;

the clamping assembly comprises a buffer seat, a clamping block and a supporting structure, wherein the buffer seat and the bearing structure are movably arranged relatively, the clamping block is connected with the buffer seat, at least part of the clamping block is arranged at intervals with the buffer seat to form an adjusting groove, and the supporting structure is movably connected with the buffer seat;

the driving assembly is connected with the buffer seat and used for driving the buffer seat to move relative to the supporting structure so as to enable the supporting structure to move towards the inside or the outside of the adjusting groove;

the pressing plate is in sliding fit with the adjusting groove and is used for being abutted to one side, away from the bearing structure, of the test base, and the supporting structure can move into the adjusting groove and is clamped on two opposite sides of the pressing plate with the clamping blocks respectively; and

the adjusting component is movably arranged relative to the bearing structure and detachably connected with the pressing plate, and the adjusting component is used for driving the pressing plate to move along the adjusting groove.

2. The die testing jig of claim 1, wherein the drive assembly comprises a drive member, a lift table and a stop member, the lift table is connected to the buffer base, the drive member is in power connection with the lift table and is used for driving the lift table to move relative to the carrier structure, the stop member is connected to the carrier structure, and the stop member is at least partially located at the top of the support structure, and the drive member is used for driving the buffer base to move relative to the carrier structure so that the stop member abuts against the support structure to drive the support structure to separate from the platen.

3. The die test fixture of claim 2, wherein the bottom of the lift table is provided with an inductive tab, the drive assembly further comprises a position sensor connected to the load bearing structure, and the inductive tab is adapted to inductively mate with the position sensor.

4. The die testing jig of claim 2, wherein the carrying structure comprises a platen, a mounting frame, a connecting column and a limiting column, the platen and the mounting frame are arranged at intervals, and the connecting column is respectively connected with the platen and the mounting frame; the lifting platform comprises a lifting plate and a guide shaft, wherein the opposite ends of the guide shaft are respectively connected with the lifting plate and the buffer seat, the guide shaft penetrates through the bedplate and is in sliding fit with the bedplate, the driving piece is in power connection with the lifting plate and is used for driving the lifting plate to move along the axial direction of the guide shaft, the limiting columns are connected with the bottom plate of the bedplate, and the limiting columns are arranged at intervals with the lifting plate and can be in butt joint with the lifting plate.

5. The die test fixture of claim 1, wherein the support structure comprises a support block and an elastic member, the elastic member is respectively connected to the support block and the buffer seat, the elastic member is used for driving the support block to move towards the inside of the adjustment groove so that the support block and the clamping block are respectively clamped at two opposite sides of the pressing plate, and the driving assembly is used for driving the support block to move towards the outside of the adjustment groove; the buffer seat is provided with an accommodating hole, and the elastic piece is accommodated in the accommodating hole.

6. The die test jig of claim 5, wherein a movable hole is formed in a side of the buffer seat facing the support block; the supporting structure further comprises a bushing and a connecting pin, wherein the connecting pin is connected to the supporting block, the connecting pin is suspended in the movable hole, and the bushing is arranged in the movable hole and is in sliding fit with the connecting pin.

7. The die testing jig of claim 1, wherein a magnet is further disposed inside the buffer seat, a metal insert is disposed inside the pressing plate, and the magnet is magnetically matched with the metal insert.

8. The die test jig of claim 1, wherein the adjustment assembly comprises an adjustment frame and an adjustment pin, the adjustment pin being detachably connected to one side of the adjustment frame; the pressure plate is provided with an adjusting hole, the adjusting pin is in plug-in fit with the adjusting hole, and the central axis of the adjusting pin is perpendicular to the extending direction of the adjusting groove.

9. The die test jig of claim 8, wherein the adjustment assembly further comprises a vision inspection camera disposed on one side of the adjustment frame, and the vision inspection camera is configured to acquire image signals of the platen.

10. A chip sealing device comprising the chip testing jig according to any one of claims 1 to 9.