CN219713673U - Regenerative heating device of ultra-high vacuum cryogenic pump - Google Patents
Regenerative heating device of ultra-high vacuum cryogenic pump Download PDFInfo
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- CN219713673U CN219713673U CN202321206151.3U CN202321206151U CN219713673U CN 219713673 U CN219713673 U CN 219713673U CN 202321206151 U CN202321206151 U CN 202321206151U CN 219713673 U CN219713673 U CN 219713673U
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- 238000010438 heat treatment Methods 0.000 title claims abstract description 40
- 230000001172 regenerating effect Effects 0.000 title claims abstract description 15
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 41
- 230000008929 regeneration Effects 0.000 claims abstract description 18
- 238000011069 regeneration method Methods 0.000 claims abstract description 18
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 15
- 238000005485 electric heating Methods 0.000 claims abstract description 8
- 239000007789 gas Substances 0.000 claims description 3
- 238000012544 monitoring process Methods 0.000 claims description 3
- 230000000694 effects Effects 0.000 abstract description 3
- 238000010926 purge Methods 0.000 abstract description 2
- 229910001873 dinitrogen Inorganic materials 0.000 description 11
- 238000000034 method Methods 0.000 description 6
- 230000008569 process Effects 0.000 description 6
- 238000001179 sorption measurement Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 2
- 238000005265 energy consumption Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
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- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Abstract
The utility model provides a regenerative heating device of an ultra-high vacuum cryopump, and belongs to the technical field of regeneration of vacuum cryopumps. The utility model comprises a test platform and a heater body arranged on the test platform, wherein a nitrogen cylinder is arranged in the test platform, an air passage is arranged in the heater body, an electric heating wire is arranged in the air passage, a wire plug is arranged on the outer side wall of the heater body, an air inlet pipe and an air outlet pipe which are communicated with the inner part of the air passage are respectively arranged on the outer side wall of the heater body, and one end of the air inlet pipe, which is far away from the heater body, is connected with the nitrogen cylinder. The side wall of the heater body is fixedly provided with an air inlet nozzle and an air outlet nozzle which are communicated with the inside of the air passage respectively, and the air inlet pipe is fixedly connected to the air inlet nozzle and is communicated with the inside of the air passage through the air inlet nozzle. According to the utility model, nitrogen is directly heated and then is introduced into the pump body for purging, so that the heating efficiency is high, and the regeneration time and effect are obviously improved.
Description
Technical Field
The utility model relates to the technical field of vacuum cryopump regeneration, in particular to an ultrahigh vacuum cryopump regeneration heating device.
Background
The ultra-high low temperature vacuum pump is widely used in the industries of wafers, chips, panels, glass coating films and the like at present, the ultra-high low temperature vacuum pump needs to carry out regeneration treatment on the pump in the use process for about half a month (the adsorption device in the pump cavity is fully adsorbed in the use process for about half a month, the vacuumizing efficiency is reduced, the adsorption device of the pump needs to be purged by nitrogen at this time, adsorbed substances can be completely released and discharged out of the cavity, and therefore the vacuumizing capacity of the pump is guaranteed, and the pump is regenerated in the process).
In the regeneration process, the influence of temperature on the regeneration process is relatively large, and most of ultrahigh and low temperature vacuum pumps on the market currently use a mode of not having a heating device or adopting a mode of arranging a heating belt outside a pump body. Nitrogen is introduced through a nitrogen port on the pump body, the nitrogen is purged in the cavity, and the heating belt is heated outside the pump body, so that the temperature inside the pump body is increased, and the aim of regeneration is fulfilled. The existing heating belt heating mode is low in regeneration efficiency, nitrogen purging needs 3 hours in the common regeneration process, and nitrogen consumption and energy consumption are large.
How to invent a regenerative heating device of an ultra-high vacuum low temperature pump to improve the problems becomes a problem to be solved urgently by the person skilled in the art.
Disclosure of Invention
In order to make up for the defects, the utility model provides a regenerative heating device of an ultra-high vacuum low-temperature pump, and aims to solve the problems of low efficiency and high energy consumption of the existing ultra-high low-temperature vacuum pump in a mode of adopting heating belts to perform regeneration through external heating.
The utility model is realized in the following way:
the utility model provides an ultrahigh vacuum cryogenic pump regeneration heating device which comprises a test platform and a heater body arranged on the test platform, wherein a nitrogen cylinder is arranged in the test platform, an air passage is arranged in the heater body, an electric heating wire is arranged in the air passage, a plug wire head is arranged on the outer side wall of the heater body, an air inlet pipe and an air outlet pipe which are communicated with the inner part of the air passage are respectively arranged on the outer side wall of the heater body, and one end, far away from the heater body, of the air inlet pipe is connected with the nitrogen cylinder.
Preferably, the side wall of the heater body is fixedly provided with an air inlet nozzle and an air outlet nozzle which are communicated with the inside of the air passage respectively, and the air inlet pipe is fixedly connected to the air inlet nozzle and is communicated with the inside of the air passage through the air inlet nozzle.
Preferably, the air outlet nozzle is fixedly connected with a through pipe structure, and the air outlet pipe is fixedly connected to the through pipe structure and is communicated with the inside of the air passage through the through pipe structure.
Preferably, the through pipe structure comprises a main through pipe fixedly connected to the air outlet nozzle, a bypass pipe communicated with the inside of the main through pipe is arranged on the side wall of the main through pipe, the air outlet pipe is fixedly connected to one end of the bypass pipe, which is far away from the main through pipe, the main through pipe and the air outlet nozzle, and the air outlet pipe is communicated with the inside of the air passage.
Preferably, a thermometer for monitoring the temperature of the gas in the main through pipe is arranged on the main through pipe.
Preferably, the heater body is respectively provided with a knob a for adjusting the air inflow of the air inlet nozzle and a knob b for adjusting the heating temperature of the electric heating wire.
The beneficial effects of the utility model are as follows: through the cooperation between heater body, intake pipe, the outlet duct and use, nitrogen gas is entering into the inside money of pump body, in the heater body is advanced, heats nitrogen gas through the heater body, and the nitrogen gas after the heating is recharged the pump body the inside, directly heats the inside adsorption equipment of pump body like this, and the efficiency of heating is higher like this, and the time and the effect of regeneration can improve more than one time. And through knob a and knob b's setting, heating device temperature and air input can be adjusted as required, and heating device safety precaution is multiple-unit, and the heater body removes conveniently, and the user only prepares one just can carry out regeneration treatment for all pumps.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings that are needed in the embodiments will be briefly described below, it being understood that the following drawings only illustrate some examples of the present utility model and therefore should not be considered as limiting the scope, and other related drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
Fig. 1 is a schematic diagram of the overall structure of an ultra-high vacuum cryopump regenerative heating device according to an embodiment of the present utility model;
fig. 2 is a schematic diagram of a heater body of an ultra-high vacuum cryopump regenerative heating device according to an embodiment of the present utility model;
fig. 3 is a front view of a heater body of an ultra-high vacuum cryopump regenerative heating apparatus according to an embodiment of the present utility model.
In the figure: 1. a test platform; 2. a heater body; 3. an air inlet nozzle; 4. an air outlet nozzle; 5. an air inlet pipe; 6. a tube structure; 61. a main pipe; 62. a thermometer; 63. a bypass pipe; 7. an air outlet pipe; 8. a plug of wire; 9. a knob a; 10. and a knob b.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present utility model more apparent, the technical solutions of the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model, and it is apparent that the described embodiments are some embodiments of the present utility model, but not all embodiments. All other embodiments, based on the embodiments of the utility model, which are apparent to those of ordinary skill in the art without inventive faculty, are intended to be within the scope of the utility model.
Examples
Referring to fig. 1-3, an ultra-high vacuum cryopump regeneration heating device comprises a test platform 1 and a heater body 2 arranged on the test platform 1, wherein a nitrogen cylinder is arranged in the test platform 1, an air passage is arranged in the heater body 2, an electric heating wire is arranged in the air passage, a wire plug 8 is arranged on the outer side wall of the heater body 2 and used for electrifying the electric heating wire, and an air inlet pipe 5 and an air outlet pipe 7 which are communicated with the inside of the air passage are respectively arranged on the outer side wall of the heater body 2. The air inlet pipe 5 and the air outlet pipe 7 are flexible pipes, so that the trend of the pipeline can be adjusted conveniently.
One end of the air inlet pipe 5 far away from the heater body 2 is connected with a nitrogen cylinder. The side wall of the heater body 2 is fixedly provided with an air inlet nozzle 3 and an air outlet nozzle 4 which are communicated with the inside of the air passage respectively, and an air inlet pipe 5 is fixedly connected to the air inlet nozzle 3 and is communicated with the inside of the air passage through the air inlet nozzle 3. The air outlet nozzle 4 is fixedly connected with a through pipe structure 6, and the air outlet pipe 7 is fixedly connected with the through pipe structure 6 and is communicated with the inside of the air passage through the through pipe structure 6.
The through pipe structure 6 comprises a main through pipe 61 fixedly connected to the air outlet nozzle 4, a bypass pipe 63 communicated with the inside of the main through pipe 61 is arranged on the side wall of the main through pipe 61, an air outlet pipe 7 is fixedly connected to one end, far away from the main through pipe 61, of the bypass pipe 63, and the air outlet pipe 7 is communicated with the inside of the air passage through the bypass pipe 63, the main through pipe 61 and the air outlet nozzle 4. The main pipe 61 is provided with a thermometer 62 for monitoring the temperature of the gas inside the main pipe 61. The heater body 2 is respectively provided with a knob a9 for adjusting the air inflow of the air inlet nozzle 3 and a knob b10 for adjusting the heating temperature of the electric heating wire. The nitrogen gas discharged from the air outlet nozzle 4 enters the main through pipe 61, so that the temperature of the heated nitrogen gas can be monitored by the thermometer 62, and the nitrogen gas can be conveniently adjusted according to the requirement. The nitrogen gas introduced into the main pipe 61 is introduced into the outlet pipe 7 through the bypass pipe 63, and is thereby introduced into the pump body.
The working principle of the regenerative heating device of the ultra-high vacuum low-temperature pump is as follows: when regenerating the adsorption equipment of the pump body, place the pump body on test platform 1 to will insert line head 8 grafting socket and come to supply power to heater body 2, the nitrogen gas import on the pump body is connected to the one end that heater body 2 was kept away from to outlet duct 7, adjusts the heating temperature of the inside electric heater strip of heater body 2 through knob b10, adjusts the nitrogen gas air input of air inlet nozzle 3 through knob a 9. Through this heating device, carry out direct heating to nitrogen gas, nitrogen gas after the heating is refilled to the pump body the inside, directly heats the inside adsorption equipment of pump body like this, and the efficiency of heating is higher like this, and the time and the effect of regeneration can improve more than one time. The temperature and the air inflow of the heating device can be adjusted according to the needs, the safety measures of the heating device are complete, the total weight is about 3 kg, the movement is convenient, and a user can carry out regeneration treatment on all pumps only by preparing one pump.
It should be noted that, specific model specifications of the motor need to be determined by selecting a model according to actual specifications of the device, and a specific model selection calculation method adopts the prior art in the field, so detailed description is omitted.
The above description is only of the preferred embodiments of the present utility model and is not intended to limit the present utility model, and various modifications and variations may be made to the present utility model by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present utility model should be included in the protection scope of the present utility model.
Claims (6)
1. The utility model provides an ultrahigh vacuum cryopump regeneration heating device, includes test platform (1) and sets up heater body (2) on test platform (1), a serial communication port, the inside of test platform (1) is provided with the nitrogen bottle, the inside of heater body (2) is provided with the air flue, the inside of air flue is provided with electric heating wire, be provided with plug (8) on the lateral wall of heater body (2), be provided with intake pipe (5) and outlet duct (7) that are linked together with the air flue inside on the lateral wall of heater body (2) respectively, the one end that heater body (2) was kept away from to intake pipe (5) is connected with the nitrogen bottle.
2. The regenerative heating device of the ultra-high vacuum cryopump according to claim 1, wherein an air inlet nozzle (3) and an air outlet nozzle (4) which are communicated with the inside of the air passage are fixedly arranged on the side wall of the heater body (2), and the air inlet pipe (5) is fixedly connected to the air inlet nozzle (3) and communicated with the inside of the air passage through the air inlet nozzle (3).
3. The regenerative heating device of the ultra-high vacuum cryopump according to claim 2, wherein the vent nozzle (4) is fixedly connected with a through pipe structure (6), and the vent pipe (7) is fixedly connected to the through pipe structure (6) and is communicated with the inside of the air passage through the through pipe structure (6).
4. An ultra-high vacuum cryopump regenerative heating apparatus according to claim 3, wherein the tube structure (6) comprises a main tube (61) fixedly connected to the air outlet nozzle (4), a bypass tube (63) communicated with the inside of the main tube (61) is arranged on the side wall of the main tube (61), the air outlet tube (7) is fixedly connected to one end of the bypass tube (63) far away from the main tube (61), and the air outlet tube (7) is communicated with the inside of the air passage through the bypass tube (63), the main tube (61) and the air outlet nozzle (4).
5. The regenerative heating device of the ultra-high vacuum cryopump of claim 4, wherein a thermometer (62) for monitoring the temperature of the gas inside the main tube (61) is provided on the main tube (61).
6. The regenerative heating device of the ultra-high vacuum cryopump according to claim 1, wherein a knob a (9) for adjusting the air inflow of the air inlet nozzle (3) and a knob b (10) for adjusting the heating temperature of the electric heating wire are respectively arranged on the heater body (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321206151.3U CN219713673U (en) | 2023-05-16 | 2023-05-16 | Regenerative heating device of ultra-high vacuum cryogenic pump |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321206151.3U CN219713673U (en) | 2023-05-16 | 2023-05-16 | Regenerative heating device of ultra-high vacuum cryogenic pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219713673U true CN219713673U (en) | 2023-09-19 |
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ID=87979628
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202321206151.3U Active CN219713673U (en) | 2023-05-16 | 2023-05-16 | Regenerative heating device of ultra-high vacuum cryogenic pump |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219713673U (en) |
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2023
- 2023-05-16 CN CN202321206151.3U patent/CN219713673U/en active Active
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