CN219701872U - Plasma reaction chamber assembly structure convenient to maintain - Google Patents
Plasma reaction chamber assembly structure convenient to maintain Download PDFInfo
- Publication number
- CN219701872U CN219701872U CN202320803594.4U CN202320803594U CN219701872U CN 219701872 U CN219701872 U CN 219701872U CN 202320803594 U CN202320803594 U CN 202320803594U CN 219701872 U CN219701872 U CN 219701872U
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- reaction chamber
- plate
- fixed plate
- assembly structure
- plasma reaction
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- 238000012423 maintenance Methods 0.000 claims abstract description 10
- 238000009434 installation Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005108 dry cleaning Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
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- Plasma Technology (AREA)
Abstract
The utility model discloses a plasma reaction cavity assembly structure convenient to maintain, relates to the technical field of plasma reaction equipment, and aims to solve the technical problem of convenient maintenance. The key points of the technical scheme are as follows: including reaction chamber body and frame body, the lateral wall fixedly connected with first fixed plate of reaction chamber body, install the second fixed plate on the frame body, be provided with the connecting plate between first fixed plate and the second fixed plate, the both ends of connecting plate are articulated respectively in first fixed plate and second fixed plate. The utility model aims to provide a plasma reaction chamber assembly structure convenient to maintain.
Description
Technical Field
The utility model relates to the technical field of plasma reaction, in particular to a plasma reaction cavity assembly structure convenient to maintain.
Background
In the fabrication of semiconductor integrated circuits, the growth of thin films of different materials, chemical vapor deposition, physical vapor deposition, etching, ion implantation, photoresist stripping, or dry cleaning of process chambers, etc., are commonly accomplished by plasma technology.
In the actual working process, the plasma reaction chamber is arranged on the equipment rack, and when the equipment rack breaks down or needs to be overhauled and maintained, the whole plasma reaction chamber is detached and taken down manually through the need of manpower, which is time-consuming and labor-consuming, and the manual overhauling and maintenance cost is higher.
Therefore, a new solution is needed to solve the above technical problems.
Disclosure of Invention
Aiming at the defects of the prior art, the utility model aims to provide a plasma reaction cavity assembly structure which is convenient to maintain.
The technical aim of the utility model is realized by the following technical scheme: the utility model provides a plasma reaction chamber assembly structure convenient to maintain, includes reaction chamber body and frame body, the lateral wall fixedly connected with first fixed plate of reaction chamber body, install the second fixed plate on the frame body, be provided with the connecting plate between first fixed plate and the second fixed plate, the both ends of connecting plate are articulated respectively in first fixed plate and second fixed plate.
Through adopting above-mentioned technical scheme, when the reaction chamber body need examine and repair the maintenance, through dismantling the separation with equipment with its both ends after, rotate out the frame body with the reaction chamber body through the structure of hinge connection, make its and equipment separation and lie in external environment alone to the staff overhauls the maintenance to it.
The utility model is further provided with: the top and the bottom of first fixed plate one side all are provided with horizontal first extension board, are provided with first connecting axle between two first extension boards, the top of first connecting axle passes the upper surface of the first extension board of top and fixedly connected with first limiting plate, the bottom of first connecting axle passes the lower surface and the threaded connection of the first extension board of below have first bolt, the one end of connecting plate is provided with the cover and establishes and rotate the first axle sleeve of connection in first connecting axle.
The utility model is further provided with: and mounting grooves are formed between the two ends of the first shaft sleeve and the first support plates, and end face bearings are arranged in the mounting grooves.
The utility model is further provided with: the top and the bottom of second fixed plate one side all are provided with horizontal second extension board, are provided with the second connecting axle between two second extension boards, the top of second connecting axle passes the upper surface of top second extension board and fixedly connected with second limiting plate, the ground step of second connecting axle passes the lower surface and the threaded connection of below second extension board have the second bolt, the one end of connecting plate is provided with the cover and establishes and rotate the second collar of connection in the second connecting axle.
The utility model is further provided with: and a spring is sleeved between the bottom end of the second connecting shaft sleeve and the second support plate positioned below the second connecting shaft sleeve.
The utility model is further provided with: the second connecting shaft sleeve is provided with a first limiting block, the first limiting block is fixedly connected to the upper surface of the second support plate below, and a first limiting groove for inserting a spring is formed in the upper surface of the first limiting block.
The utility model is further provided with: the second limiting plate is sleeved on the second connecting shaft and is connected with the second connecting shaft in a sliding mode, the second limiting plate is located between the spring and the second shaft sleeve, and a second limiting groove for inserting the spring is formed in the lower surface of the second limiting plate.
The utility model has the following beneficial effects: when the reaction chamber body needs to be overhauled and maintained, after the two ends of the reaction chamber body are detached and separated from the equipment, the reaction chamber body is rotated out of the frame body through the hinged structure, so that the reaction chamber body is separated from the equipment and is independently located in the external environment, and therefore, workers can overhaul and maintain the reaction chamber body.
Drawings
Fig. 1 is a schematic perspective view of the present embodiment;
fig. 2 is a schematic diagram of a part of the structure of the present embodiment.
Description of the drawings: 1. a reaction chamber body; 2. a first fixing plate; 3. a second fixing plate; 4. a connecting plate; 5. a first support plate; 6. a first connecting shaft; 7. a first limiting plate; 8. a first bolt; 9. a first sleeve; 10. an end face bearing; 11. a second support plate; 12. a second connecting shaft; 13. a second limiting plate; 14. a second bolt; 15. a second sleeve; 16. a spring; 17. a first limiting block; 18. and a second limiting block.
Detailed Description
The present utility model will be described in further detail with reference to the accompanying drawings.
Wherein like parts are designated by like reference numerals. It should be noted that the words "front", "back", "left", "right", "upper" and "lower" used in the following description refer to directions in the drawings, and the words "bottom" and "top", "inner" and "outer" refer to directions toward or away from, respectively, the geometric center of a particular component.
As shown in the figure, a plasma reaction chamber assembly structure convenient to maintain comprises a reaction chamber body 1 and a frame body (not shown in the figure), wherein a first fixing plate 2 is fixedly connected with the side wall of the reaction chamber body 1, a second fixing plate 3 is arranged on the frame body, a connecting plate 4 is arranged between the first fixing plate 2 and the second fixing plate 3, and two ends of the connecting plate 4 are respectively hinged with the first fixing plate 2 and the second fixing plate 3.
When the reaction chamber body 1 needs to be overhauled and maintained, after the two ends of the reaction chamber body are detached and separated from the equipment, the reaction chamber body 1 is rotated out of the frame body through the hinged structure, so that the reaction chamber body is separated from the equipment and is independently located in the external environment, and therefore, the reaction chamber body is overhauled and maintained by workers.
The top and the bottom of first fixed plate 2 one side all are provided with horizontal first extension board 5, are provided with first connecting axle 6 between two first extension boards 5, and the top of first connecting axle 6 passes the upper surface of top first extension board 5 and fixedly connected with first limiting plate 7, and the bottom of first connecting axle 6 passes the lower surface of below first extension board 5 and threaded connection has first bolt 8, is provided with first gasket between first bolt 8 and the first extension board 5, and the one end of connecting board 4 is provided with the cover and establishes and rotate the first axle sleeve 9 of connecting in first connecting axle 6. An installation groove is formed between the two ends of the first shaft sleeve 9 and the first support plate 5, end face bearings 10 are installed in the installation groove, and the stability during rotation of the first support plate 5 and the first shaft sleeve 9 is improved by arranging the end face bearings 10 to reduce friction between the first support plate and the first shaft sleeve 9.
The top and the bottom of second fixed plate 3 one side all are provided with horizontal second extension board 11, are provided with second connecting axle 12 between two second extension boards 11, and the top of second connecting axle 12 passes the upper surface of top second extension board 11 and fixedly connected with second limiting plate 13, and the ground step of second connecting axle 12 passes the lower surface of below second extension board 11 and threaded connection has second bolt 14, is provided with the second gasket between second bolt 14 and the second extension board 11, and the one end of connecting plate 4 is provided with the cover and establishes and rotate the second sleeve 15 of connecting in second connecting axle 12. A spring 16 is sleeved between the bottom end of the second connecting shaft 12 positioned on the second shaft sleeve 15 and the second support plate 11 positioned below. Stability is further improved by the spring force of the spring 16.
The second connecting shaft 12 is sleeved with a first limiting block 17, the first limiting block 17 is fixedly connected to the upper surface of the second support plate 11 below, and a first limiting groove for inserting the spring 16 is formed in the upper surface of the first limiting block 17. The second limiting block 18 is sleeved on the second connecting shaft 12 and is slidably connected with the second connecting shaft, the second limiting block 18 is located between the spring 16 and the second shaft sleeve 15, a second limiting groove for the spring 16 to be inserted into is formed in the lower surface of the second limiting block 18, and the spring 16 is limited under the action of the first limiting groove and the second limiting groove, so that the stability of the spring 16 is guaranteed.
The present utility model is not limited by the specific embodiments, and modifications can be made to the embodiments without creative contribution by those skilled in the art after reading the present specification, but are protected by patent laws within the scope of claims of the present utility model.
Claims (7)
1. The utility model provides a plasma reaction chamber assembly structure convenient to maintain, includes reaction chamber body and frame body, its characterized in that: the side wall fixedly connected with first fixed plate of reaction chamber body, install the second fixed plate on the frame body, be provided with the connecting plate between first fixed plate and the second fixed plate, the both ends of connecting plate are articulated respectively in first fixed plate and second fixed plate.
2. The plasma reaction chamber assembly structure for easy maintenance according to claim 1, wherein: the top and the bottom of first fixed plate one side all are provided with horizontal first extension board, are provided with first connecting axle between two first extension boards, the top of first connecting axle passes the upper surface of the first extension board of top and fixedly connected with first limiting plate, the bottom of first connecting axle passes the lower surface and the threaded connection of the first extension board of below have first bolt, the one end of connecting plate is provided with the cover and establishes and rotate the first axle sleeve of connection in first connecting axle.
3. The plasma reaction chamber assembly structure for easy maintenance according to claim 2, wherein: and mounting grooves are formed between the two ends of the first shaft sleeve and the first support plates, and end face bearings are arranged in the mounting grooves.
4. The plasma reaction chamber assembly structure for easy maintenance according to claim 1, wherein: the top and the bottom of second fixed plate one side all are provided with horizontal second extension board, are provided with the second connecting axle between two second extension boards, the top of second connecting axle passes the upper surface of top second extension board and fixedly connected with second limiting plate, the ground step of second connecting axle passes the lower surface and the threaded connection of below second extension board have the second bolt, the one end of connecting plate is provided with the cover and establishes and rotate the second collar of connection in the second connecting axle.
5. The plasma reaction chamber assembly structure for easy maintenance according to claim 4, wherein: and a spring is sleeved between the bottom end of the second connecting shaft sleeve and the second support plate positioned below the second connecting shaft sleeve.
6. The plasma reaction chamber assembly structure for easy maintenance according to claim 5, wherein: the second connecting shaft sleeve is provided with a first limiting block, the first limiting block is fixedly connected to the upper surface of the second support plate below, and a first limiting groove for inserting a spring is formed in the upper surface of the first limiting block.
7. The plasma reaction chamber assembly structure for easy maintenance according to claim 6, wherein: the second limiting block is sleeved on the second connecting shaft and is connected with the second limiting block in a sliding mode, the second limiting block is located between the spring and the second shaft sleeve, and a second limiting groove for inserting the spring is formed in the lower surface of the second limiting plate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320803594.4U CN219701872U (en) | 2023-04-11 | 2023-04-11 | Plasma reaction chamber assembly structure convenient to maintain |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320803594.4U CN219701872U (en) | 2023-04-11 | 2023-04-11 | Plasma reaction chamber assembly structure convenient to maintain |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219701872U true CN219701872U (en) | 2023-09-19 |
Family
ID=88004342
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202320803594.4U Active CN219701872U (en) | 2023-04-11 | 2023-04-11 | Plasma reaction chamber assembly structure convenient to maintain |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219701872U (en) |
-
2023
- 2023-04-11 CN CN202320803594.4U patent/CN219701872U/en active Active
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