CN219698107U - Unipolar pulse magnetron sputtering power supply convenient to maintain - Google Patents
Unipolar pulse magnetron sputtering power supply convenient to maintain Download PDFInfo
- Publication number
- CN219698107U CN219698107U CN202320490060.0U CN202320490060U CN219698107U CN 219698107 U CN219698107 U CN 219698107U CN 202320490060 U CN202320490060 U CN 202320490060U CN 219698107 U CN219698107 U CN 219698107U
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- CN
- China
- Prior art keywords
- power supply
- magnetron sputtering
- machine body
- sputtering power
- fixedly connected
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- 238000001755 magnetron sputter deposition Methods 0.000 title claims abstract description 38
- 238000012423 maintenance Methods 0.000 claims description 5
- 238000000151 deposition Methods 0.000 description 7
- 230000008021 deposition Effects 0.000 description 7
- 238000004544 sputter deposition Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 4
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Abstract
The utility model discloses a unipolar pulse magnetron sputtering power supply convenient to maintain, which comprises: the device comprises a machine body, a rotating rod and a pull rod, wherein an adjusting button is arranged on one side of the machine body, and an interface is arranged on the other side of the machine body; the outer side of the rotating rod penetrates through the machine body. This unipolar pulse magnetron sputtering power supply convenient to maintain can drive the gear and rotate when the dwang rotates through rotatory dwang, can mesh with the rack when the gear rotates, and the rack can drive first fixture block and remove, can extrude the first spring of one side when first fixture block removes, makes it shrink, and when first fixture block removes to break away from when the contact with the access door, rotatable open the access door, maintain unipolar pulse magnetron sputtering power supply's inside, so can be convenient for open the access door to unipolar pulse magnetron sputtering power supply through above-mentioned operation, maintain its inside subassembly, improve the efficiency of maintaining.
Description
Technical Field
The utility model relates to the technical field of pulse magnetron sputtering power supplies, in particular to a unipolar pulse magnetron sputtering power supply convenient to maintain.
Background
The pulse magnetron sputtering power supply adopts a rectangular wave voltage pulse power supply to replace the traditional direct current power supply for magnetron sputtering deposition. The pulse sputtering can effectively inhibit the generation of electric arc, reduce the sparking frequency of the sputtered surface, improve the film quality, improve the sputtering deposition rate, reduce the deposition temperature and the like, and is a preferable technological process for the deposition of the sputtering insulating material.
The pulse magnetron sputtering power supply adopts a rectangular wave voltage pulse power supply to replace the traditional direct current power supply to carry out magnetron sputtering deposition, can effectively inhibit the generation of electric arcs, reduces the sparking frequency of sputtering surfaces, improves the film quality, fully satisfies the continuity of the magnetron sputtering process, and when the existing unipolar pulse magnetron sputtering power supply is used for maintaining the inside, the screw connected with a power supply shell and an access panel is required to be rotated by a screwdriver to dismantle the screw, then the access panel is opened to maintain the inside of the power supply.
Disclosure of Invention
The utility model aims to provide a unipolar pulse magnetron sputtering power supply convenient to maintain, so as to solve the problem that the existing unipolar pulse magnetron sputtering power supply proposed by the background art is inconvenient to maintain.
In order to achieve the above purpose, the present utility model provides the following technical solutions: a single polarity pulse magnetron sputtering power supply for ease of maintenance comprising: the device comprises a machine body, a rotating rod and a pull rod, wherein an adjusting button is arranged on one side of the machine body, and an interface is arranged on the other side of the machine body;
the rotary rod outside runs through with the organism, the rotary rod outside fixedly connected with gear, the outside meshing of gear is connected with the rack, rack one side fixedly connected with first fixture block, first fixture block one side fixedly connected with first spring.
Compared with the prior art, the unipolar pulse magnetron sputtering power supply convenient to maintain has the beneficial effects that: the gear can be driven to rotate when the rotating rod is rotated, the gear is meshed with the rack, the first clamping block is made to move, the first spring is extruded, the spring is contracted, after the spring is completely contracted, the first clamping block can move to be separated from the clamping groove in the access door, the access door can be opened in a rotatable mode, and the inside of the unipolar pulse magnetron sputtering power supply is maintained.
Drawings
FIG. 1 is a schematic front view of the present utility model;
FIG. 2 is a left side schematic view of the present utility model;
FIG. 3 is a schematic top view of the present utility model;
FIG. 4 is a schematic left view of a rack of the present utility model;
FIG. 5 is a schematic left-hand cross-sectional view of the connection block of the present utility model;
fig. 6 is an enlarged schematic view of the present utility model a.
In the figure: 1. a body; 2. an adjusting knob; 3. an interface; 4. a rotating lever; 5. a gear; 6. a rack; 7. a first clamping block; 8. a first spring; 9. an access door; 10. a pull rod; 11. a first connection block; 12. a second clamping block; 13. a second spring; 14. a second connection block; 15. and (3) a filter screen.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
Referring to fig. 1, 2, 3, 4 and 6, the present utility model provides a technical solution: a single polarity pulse magnetron sputtering power supply for ease of maintenance comprising: the device comprises a machine body, a rotating rod and a pull rod, wherein an adjusting button is arranged on one side of the machine body, and an interface is arranged on the other side of the machine body;
the outer side of the rotating rod penetrates through the machine body, a gear is fixedly connected to the outer side of the rotating rod, a rack is connected to the outer side of the gear in a meshed mode, a first clamping block is fixedly connected to one side of the rack, and a first spring is fixedly connected to one side of the first clamping block; one end of the rotating rod is movably connected with the machine body through a bearing, and one side of the first clamping block is connected with an access door; one end of the first spring is fixedly connected with the machine body, one side of the access door is movably connected with the machine body through a hinge, the machine body, the first clamping block and the first spring form an elastic telescopic structure, the gear and the rack form a meshed transmission structure, and the access door form a rotating structure through the hinge.
In the specific implementation, the pulse magnetron sputtering power supply is used for carrying out magnetron sputtering deposition by replacing the traditional direct current power supply with a rectangular wave voltage pulse power supply, so that the generation of electric arcs can be effectively inhibited, the number of times of striking a sputtering surface is reduced, the quality of a film layer is improved, the continuity of the magnetron sputtering process is fully satisfied, when the unipolar pulse magnetron sputtering power supply is maintained, a rotating rod is rotated to drive a gear to rotate, the gear is meshed with a rack when rotating, the rack drives a first clamping block to move, the first clamping block can squeeze a first spring on one side to shrink the first spring when moving, the first clamping block can rotate to open the access door when moving out of contact with the access door, and the interior of the unipolar pulse magnetron sputtering power supply is maintained, so that the access door of the unipolar pulse magnetron sputtering power supply can be conveniently opened through the operation, components are maintained in the interior of the unipolar pulse magnetron sputtering power supply, and the maintenance efficiency is improved.
Referring to fig. 1, 2 and 5, the outer side of the pull rod penetrates through the machine body, one side of the pull rod is fixedly connected with a first connecting block, and the outer side of the first connecting block is connected with the machine body; a second clamping block is arranged on one side of the first connecting block, the outer side of the second clamping block is connected with the machine body, and a second spring is fixedly connected on one side of the second clamping block; one end of the second spring is fixedly connected with a second connecting block, one side of the second connecting block is fixedly connected with a filter screen, the outer side of the filter screen is connected with the machine body, the second clamping block, the second spring and the second connecting block form an elastic telescopic structure, the machine body and the pull rod form a sliding structure, and the machine body and the second clamping block form a clamping structure
In specific implementation, the pulse magnetron sputtering power supply is used for performing magnetron sputtering deposition by replacing the traditional direct current power supply with a rectangular wave voltage pulse power supply, so that the generation of electric arcs can be effectively restrained, the number of times of striking sparks on the sputtering surface is reduced, the quality of a film layer is improved, the continuity of the magnetron sputtering process is fully met, when a filter screen needs to be cleaned, a pull rod is pulled to move, a first connecting block is driven to move when the pull rod moves, the first connecting block is contacted with the inclined surface of a second clamping block to enable the second clamping block to move, a second spring at the bottom is extruded when the second clamping block moves to shrink, and when the second clamping block is separated from the machine body, the filter screen can be removed to clean, and the filter screen of the pulse magnetron sputtering power supply can be conveniently detached to clean through the operation.
To sum up: when the machine body is maintained, the rotating rod can be rotated by fingers, the rotating rod drives the gear to rotate when rotating, the gear can be meshed with the rack when rotating, so as to drive the first clamping block to rotate, the first clamping block moves out of the clamping groove in the access door, the first clamping block moves and extrudes with the first spring on one side, the first spring contracts, after the first clamping block moves out of the access door, the movable access door is separated from the machine body, and components in the machine body are maintained, after maintenance, the access door can be abutted with the connecting groove in the machine body, the inclined plane of the access door and the first clamping block is contacted, the first clamping block moves, the first spring at one side is extruded while the first clamping block moves, the first spring is contracted, when the access door continues to move, the clamping groove in the access door is contacted with the first clamping block, the first spring resets after the contact, the first clamping block is pushed to contact with the clamping groove in the access door, the access door is fixed, the machine body is closed, heat generated during the operation of the machine body can be dissipated through the filter screens at two sides of the machine body, the internal temperature of the machine body is not excessively high, the machine body is failed, when the filter screens are taken out for cleaning, the pull rod is pulled to move, and the first connecting block also moves while the pull rod moves, the inclined plane to the second fixture block is extruded to make the second fixture block remove, also can extrude the second spring of bottom simultaneously when the second piece removes, after the second spring shrink completely, the second fixture block can break away from the contact with the organism, portable filter screen makes it separate with the organism this moment, place the filter screen of taking out in the clear water, utilize the clearance brush to clear up, after the clearance finishes airing, can load the filter screen into the organism again, carry out dustproof heat dissipation to the organism, this is the unipolar pulse magnetron sputtering power supply's that is convenient for maintain characteristics, the content that does not make detailed description in this specification belongs to the prior art that the expert of the field knows.
Although the present utility model has been described with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments described, or equivalents may be substituted for elements thereof, and any modifications, equivalents, improvements and changes may be made without departing from the spirit and principles of the present utility model.
Claims (6)
1. A single polarity pulse magnetron sputtering power supply for ease of maintenance comprising: the device comprises a machine body, a rotating rod and a pull rod and is characterized in that an adjusting button is arranged on one side of the machine body, and an interface is arranged on the other side of the machine body;
the rotary rod outside runs through with the organism, the rotary rod outside fixedly connected with gear, the outside meshing of gear is connected with the rack, rack one side fixedly connected with first fixture block, first fixture block one side fixedly connected with first spring.
2. The maintenance-friendly unipolar pulsed magnetron sputtering power supply of claim 1, wherein: one end of the rotating rod is movably connected with the machine body through a bearing, and one side of the first clamping block is connected with an access door.
3. The maintenance-friendly unipolar pulsed magnetron sputtering power supply of claim 2, wherein: one end of the first spring is fixedly connected with the machine body, and one side of the access door is movably connected with the machine body through a hinge.
4. The maintenance-friendly unipolar pulsed magnetron sputtering power supply of claim 1, wherein: the outer side of the pull rod penetrates through the machine body, one side of the pull rod is fixedly connected with a first connecting block, and the outer side of the first connecting block is connected with the machine body.
5. The maintenance-friendly unipolar pulsed magnetron sputtering power supply of claim 4, wherein: the first connecting block one side is provided with the second fixture block, the second fixture block outside is connected with the organism, second fixture block one side fixedly connected with second spring.
6. The maintenance-friendly unipolar pulsed magnetron sputtering power supply of claim 5, wherein: the second spring one end fixedly connected with second connecting block, second connecting block one side fixedly connected with filter screen, the filter screen outside is connected with the organism.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320490060.0U CN219698107U (en) | 2023-03-02 | 2023-03-02 | Unipolar pulse magnetron sputtering power supply convenient to maintain |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320490060.0U CN219698107U (en) | 2023-03-02 | 2023-03-02 | Unipolar pulse magnetron sputtering power supply convenient to maintain |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219698107U true CN219698107U (en) | 2023-09-15 |
Family
ID=87964008
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202320490060.0U Active CN219698107U (en) | 2023-03-02 | 2023-03-02 | Unipolar pulse magnetron sputtering power supply convenient to maintain |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219698107U (en) |
-
2023
- 2023-03-02 CN CN202320490060.0U patent/CN219698107U/en active Active
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