CN219694076U - Roller detector - Google Patents
Roller detector Download PDFInfo
- Publication number
- CN219694076U CN219694076U CN202320268037.7U CN202320268037U CN219694076U CN 219694076 U CN219694076 U CN 219694076U CN 202320268037 U CN202320268037 U CN 202320268037U CN 219694076 U CN219694076 U CN 219694076U
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- sleeve
- roller
- bracket
- rocker arm
- arm
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- 230000007246 mechanism Effects 0.000 claims abstract description 23
- 238000001514 detection method Methods 0.000 claims abstract description 12
- 230000006835 compression Effects 0.000 claims description 7
- 238000007906 compression Methods 0.000 claims description 7
- 230000006978 adaptation Effects 0.000 claims description 2
- 210000002421 cell wall Anatomy 0.000 claims description 2
- 230000000149 penetrating effect Effects 0.000 claims description 2
- 230000006872 improvement Effects 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 235000012431 wafers Nutrition 0.000 description 4
- 230000009191 jumping Effects 0.000 description 3
- 238000010009 beating Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 210000004027 cell Anatomy 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 230000008569 process Effects 0.000 description 1
Landscapes
- A Measuring Device Byusing Mechanical Method (AREA)
Abstract
The utility model discloses a roller detector, which comprises a roller body, a first sleeve and a second sleeve which are respectively and movably sleeved at two ends of the roller body, wherein the roller detector comprises a first bracket, at least two detection units, a second bracket and a rotary driving mechanism which are sequentially arranged along the axial direction of the roller body, the first bracket is used for supporting and fixing the first sleeve, the second bracket is used for supporting and fixing the second sleeve, and when the first sleeve and the second sleeve at two ends of the roller body are respectively erected on the first bracket and the second bracket, the roller body can be driven to rotate by the rotary driving mechanism. The roller detector can be used for conveniently installing the roller and accurately and efficiently measuring the runout of the surface of the roller.
Description
Technical Field
The utility model relates to the technical field of straightness detection, in particular to a roller detector.
Background
Silicon wafer processing equipment generally transmits silicon wafers through a roller, the straightness of the roller can directly influence the processing quality of the silicon wafers, and the roller is excessively bent to cause breakage, scratch or other problems of the silicon wafers, so that the bending deformation of the roller needs to be detected before installation.
Traditional straightness measurement is generally that a roller body is placed on two bearing frames, and then a ruler is held by a person to compare with a roller.
Disclosure of Invention
The utility model aims to solve the technical problem of providing a roller detector which can conveniently install a roller and accurately and efficiently measure the surface runout of the roller.
In order to solve the technical problems, the utility model provides a roller detector, which comprises a roller body, and a first sleeve and a second sleeve which are respectively and movably sleeved at two ends of the roller body, wherein the roller detector comprises a first bracket, at least two detection units, a second bracket and a rotary driving mechanism which are sequentially arranged along the axial direction of the roller body, the first bracket is used for supporting and fixing the first sleeve, the second bracket is used for supporting and fixing the second sleeve, and when the first sleeve and the second sleeve at two ends of the roller body are respectively erected on the first bracket and the second bracket, the roller body can be driven to rotate by the rotary driving mechanism.
As an improvement of the scheme, the first bracket is provided with a first accommodating groove with an opening at the top and matched with the first sleeve, and the second bracket is provided with a second accommodating groove with an opening at the top and matched with the second sleeve;
the second external member is equipped with the spout of second holding tank's cell wall looks adaptation.
As an improvement of the scheme, the roller body is provided with a driven gear, and the first sleeve member, the second sleeve member and the driven gear are sequentially arranged;
the rotary driving mechanism comprises a driving gear, and when the first sleeve piece and the second sleeve piece are respectively abutted to the first accommodating groove and the second accommodating groove, the driven gear is just meshed with the driving gear.
As an improvement of the scheme, the first bracket and the second bracket are respectively provided with a clamp, and the top of the first sleeve member and the top of the second sleeve member are respectively abutted with the clamps.
As an improvement of the scheme, the clamp comprises a connecting seat, a rocker arm, a locking buckle and an operating rod, wherein one end of the rocker arm is hinged with the connecting seat, and the other end of the rocker arm is provided with a compression bar;
the locking buckle is provided with a first connecting arm, a second connecting arm and a buckling part which is arranged between the first connecting arm and the second connecting arm and is arranged towards the side of the pressure rod, and the first connecting arm is hinged with the rocker arm;
the operating rod is provided with two third connecting arms which span the rocker arm and the locking buckle, and the two third connecting arms are hinged with the connecting seat and the second connecting arm;
when the third connecting arm drives the first connecting arm to rotate so as to drive the buckling part to abut against the rocker arm, the pressing rod abuts against the first sleeve member or the second sleeve member.
As an improvement of the scheme, the end part of the pressure rod is sleeved with a rubber sleeve which is used for being abutted to the first sleeve member or the second sleeve member, the outer wall of the pressure rod is provided with threads, the pressure rod penetrates through the rocker arm, and locking nuts are arranged on two sides of the rocker arm.
As the improvement of above-mentioned scheme, detecting element is in the cylinder body below sets up to three, detecting element includes digital display micrometer and micrometer support, digital display micrometer's pointer is followed the radial setting of cylinder body, one of them detecting element digital display micrometer sets up the cylinder body intermediate position, and two other detecting element digital display micrometer symmetry sets up the cylinder body both ends.
As an improvement of the scheme, the digital display micrometer is connected with an external processor.
As an improvement of the scheme, the device further comprises a base, wherein the first bracket, the at least two detection units, the second bracket and the rotary driving mechanism are fixed with the base.
The implementation of the utility model has the following beneficial effects:
according to the utility model, the first bracket, the at least two detection units, the second bracket and the rotary driving mechanism are sequentially arranged along the axial direction of the roller body, when the first sleeve piece and the second sleeve piece at the two ends of the roller body are respectively arranged on the first bracket and the second bracket, the rotary driving mechanism and the roller body do not need to be additionally connected and assembled, the rotary driving mechanism can drive the roller body to rotate, and the roller assembly is convenient;
and at least two detecting elements of the roller detector are arranged along the axial direction of the assembled roller body, after the first support and the second support are respectively fixed with the first sleeve member and the second sleeve member, the rotary driving mechanism drives the roller body to rotate, the detecting elements can detect the jumping values of different parts of the roller body, further, the curvature parameters of the roller are calculated, the detection is efficient and accurate, the roller body is not directly restrained by the first support and the second support, and the detection result of the jumping values is more accurate.
Drawings
FIG. 1 is a schematic view of a drum detector according to an embodiment of the present utility model;
FIG. 2 is a schematic structural view of the drum of FIG. 1;
FIG. 3 is a schematic view of the drum detector of FIG. 1;
FIG. 4 is a cross-sectional view of section A-A of FIG. 1;
FIG. 5 is a schematic view of the structure of the clamp;
fig. 6 is a schematic view of the lever of fig. 5 in a disassembled configuration.
Detailed Description
The present utility model will be described in further detail with reference to the accompanying drawings, for the purpose of making the objects, technical solutions and advantages of the present utility model more apparent.
As shown in fig. 1 to 4, the present utility model discloses an embodiment of a roller detector, where the roller 1 includes a roller body 11, and a first sleeve member 12 and a second sleeve member 13 movably sleeved at two ends of the roller body 11, the roller detector 2 includes a first bracket 21, at least two detection units 22, a second bracket 23, and a rotation driving mechanism 24 sequentially disposed along an axial direction of the roller body 11, the first bracket 21 is used for supporting and fixing the first sleeve member 12, the second bracket 23 is used for supporting and fixing the second sleeve member 13, and when the first sleeve member 12 and the second sleeve member 13 at two ends of the roller body 11 are respectively set up on the first bracket 21 and the second bracket 23, the roller body 11 can be driven to rotate by the rotation driving mechanism 24.
According to the embodiment, the first bracket 21, the at least two detection units 22, the second bracket 23 and the rotary driving mechanism 24 are sequentially arranged along the axial direction of the roller body 11, when the first sleeve member 12 and the second sleeve member 13 at the two ends of the roller body 11 are respectively erected on the first bracket 21 and the second bracket 23, the rotary driving mechanism 24 and the roller body 11 do not need to be additionally connected and assembled, the rotary driving mechanism 24 can drive the roller body 11 to rotate, and the roller 1 is convenient to assemble; and at least two detecting element 22 of cylinder detector 2 are arranged along the axial of assembled cylinder body 11, and after first support 21, second support 23 are fixed first external member 12, second external member 13 respectively, rotatory actuating mechanism 24 drive cylinder body 11 is rotatory, and detecting element can carry out the detection of the value of beating to the different positions of cylinder body 11, and then calculate the crookedness parameter of cylinder 1, detects high-efficient, accurate, and cylinder body 11 is not restricted by first support 21, second support 23 directly, and the testing result of value of beating is more accurate.
The first sleeve 12 and the second sleeve 13 at two ends of the roller body 11 are preferably plastic parts.
The roller detector 2 of the present embodiment further includes a base 25, and the first bracket 21, the at least two detecting units 22, the second bracket 23, and the rotation driving mechanism 24 are all fixed to the base 25.
In order to facilitate evaluation of the runout values of the respective portions of the drum body 11, the present embodiment is preferably provided with three of the detecting units 22 on the base 25. The detecting unit 22 comprises a digital micrometer 221 and a micrometer bracket 222, wherein a pointer of the digital micrometer 221 is arranged along the radial direction of the roller body 11, one detecting unit 22 is arranged at the middle position of the roller body 11, and the digital micrometer 221 of the other two detecting units 22 is symmetrically arranged at two ends of the roller body 11.
In order to facilitate the assembly of the roller 1 and the roller detector 2, the first bracket 21 is provided with a first accommodating groove 211 with an open top and adapted to the first sleeve member 12, and the second bracket 23 is provided with a second accommodating groove 231 with an open top and adapted to the second sleeve member 13; furthermore, the second sleeve 13 is provided with a slot 131 adapted to the slot wall of the second receiving slot 231. The chute 131 can play a guiding role during assembly of the roller 1, is convenient to position and assemble, and can realize axial limiting on the roller 1 on the other hand, so that the roller 1 is prevented from generating any small axial movement to influence the test stability.
The roller body 11 is provided with a driven gear 14, and the first sleeve member 12, the second sleeve member 13 and the driven gear 14 are sequentially arranged; the rotary driving mechanism 24 includes a driving motor 241 and a driving gear 242 disposed below the second accommodating groove 231, and when the first sleeve member 12 and the second sleeve member 13 are respectively abutted to the first accommodating groove 211 and the second accommodating groove 231, the driven gear 14 just meshes with the driving gear 242, so as to realize transmission between the rotary driving mechanism 24 and the roller body 11.
In this embodiment, the first bracket 21 and the second bracket 23 are provided with clamps 26, and the top of the first sleeve 12 and the top of the second sleeve 13 are abutted with the clamps 26. Referring to fig. 5 and 6, the clamp 26 specifically includes a connection seat 261, a swing arm 262, a locking buckle 263 and an operation lever 264, wherein one end of the swing arm 262 is hinged with the connection seat 261, and the other end is provided with a compression bar 265; the locking buckle 263 is provided with a first connecting arm a, a second connecting arm b, and a buckling part c arranged between the first connecting arm a and the second connecting arm b and facing the compression bar 265, wherein the first connecting arm a is hinged with the swing arm 262; the operating lever 264 is provided with two third connecting arms d which span the swinging arm 262 and the locking buckle 263, and the two third connecting arms d are hinged with the connecting seat 261 and the second connecting arm b; when the third connecting arm d drives the first connecting arm a to rotate to drive the buckling part c to abut against the swinging arm 262, the pressing rod 265 abuts against the first sleeve member 12 or the second sleeve member 13, so that the first sleeve member 12 or the second sleeve member 13 does not rotate along with the roller body 11. The operation rod 264 of the present embodiment is turned to enable the compression rod 265 to rapidly clamp the first sleeve member 12 or the second sleeve member 13, and the locking buckle 263 has a self-locking function, so that the action failure between the compression rod 265 and the first sleeve member 12 or the second sleeve member 13 caused by the lifting of the swing arm 262 can be prevented.
The end part of the pressing rod 265 is sleeved with a rubber sleeve which is used for being abutted against the first sleeve member 12 or the second sleeve member 13, the outer wall of the pressing rod 265 is provided with threads, the pressing rod 265 is arranged on the swinging arm 262 in a penetrating mode, and locking nuts are arranged on two sides of the swinging arm 262. By adjusting the relative positions of the strut 265 and the rocker 262, different sized sets and compression levels may be accommodated.
The operation procedure of the drum detector 2 of the present embodiment for detecting the drum 1 is as follows:
the operating lever 264 of the clamp 26 is turned over, the pressing lever 265 is separated from the position right above the first accommodating groove 211 and the second accommodating groove 231, the roller 1 to be detected is placed on the first bracket 21 and the second bracket 23, the first sleeve member 12 and the second sleeve member 13 are respectively abutted against the first accommodating groove 211 and the second accommodating groove 231, the groove wall of the second accommodating groove 231 stretches into the sliding groove 131, meanwhile, the driven gear 14 is meshed with the driving gear 242 on the driving motor 241, the operating lever 264 of the clamp 26 is turned over further, the pressing lever 265 presses the first sleeve member 12 and the second sleeve member 13 at two ends of the roller 1, the driving motor 241 is started further, the roller body 11 rotates along with the driving motor 241, the jumping value of the roller 1 can be measured by the digital micrometer 221, and the curvature parameter of the roller 1 can be calculated further. Furthermore, the digital display micrometer can input data into an external processor, and the processor can automatically process the data and automatically judge whether the roller 1 is qualified or not. The external processor may be, but is not limited to, a computer, PAD, cell phone, etc. The connection mode of the digital display micrometer and the external processor can be wired connection or wireless connection.
While the foregoing is directed to the preferred embodiments of the present utility model, it will be appreciated by those skilled in the art that changes and modifications may be made without departing from the principles of the utility model, such changes and modifications are also intended to be within the scope of the utility model.
Claims (10)
1. The utility model provides a cylinder detector, the cylinder includes the cylinder body, and the movable sleeve respectively locates first external member, the second external member at cylinder body both ends, its characterized in that, including following the axial of cylinder body sets gradually first support, two at least detecting element, second support and rotary drive mechanism, first support is used for supporting and fixing first external member, the second support is used for supporting and fixing the second external member, works as first external member, the second external member at cylinder body both ends are set up respectively when first support, second support are last, the cylinder body can receive rotary drive mechanism drive is rotatory.
2. The roller detector according to claim 1, wherein the first bracket is provided with a first accommodating groove with an open top and matched with the first sleeve, and the second bracket is provided with a second accommodating groove with an open top and matched with the second sleeve;
the second external member is equipped with the spout of second holding tank's cell wall looks adaptation.
3. The roller detector according to claim 2, wherein a driven gear is provided on the roller body, and the first sleeve member, the second sleeve member and the driven gear are sequentially provided;
the rotary driving mechanism comprises a driving gear, and when the first sleeve piece and the second sleeve piece are respectively abutted to the first accommodating groove and the second accommodating groove, the driven gear is just meshed with the driving gear.
4. The roller detector of claim 1, wherein the first and second brackets are each provided with a clamp, and the top of the first sleeve and the top of the second sleeve are each in abutment with the clamp.
5. The roller detector according to claim 4, wherein the clamp comprises a connecting seat, a rocker arm, a locking buckle and an operating rod, wherein one end of the rocker arm is hinged with the connecting seat, and the other end of the rocker arm is provided with a compression bar;
the locking buckle is provided with a first connecting arm, a second connecting arm and a buckling part which is arranged between the first connecting arm and the second connecting arm and is arranged towards the side of the pressure rod, and the first connecting arm is hinged with the rocker arm;
the operating rod is provided with two third connecting arms which span the rocker arm and the locking buckle, and the two third connecting arms are hinged with the connecting seat and the second connecting arm;
when the third connecting arm drives the first connecting arm to rotate so as to drive the buckling part to abut against the rocker arm, the pressing rod abuts against the first sleeve member or the second sleeve member.
6. The roller detector of claim 5, wherein the plunger end is sleeved with a gum cover for abutting the first sleeve or the second sleeve.
7. The roller detector according to claim 5, wherein the outer wall of the pressing rod is provided with threads, the pressing rod is arranged on the rocker arm in a penetrating manner, and locking nuts are arranged on two sides of the rocker arm.
8. The roller detector of claim 1, wherein the detection unit comprises a digital micrometer and a micrometer support, and a pointer of the digital micrometer is disposed along a radial direction of the roller body.
9. The roller detector of claim 8, wherein the digital micrometer is coupled to an external processor.
10. The roller detector of claim 1, further comprising a base, wherein the first bracket, the at least two detection units, the second bracket, and the rotary drive mechanism are all fixed to the base.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320268037.7U CN219694076U (en) | 2023-02-20 | 2023-02-20 | Roller detector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320268037.7U CN219694076U (en) | 2023-02-20 | 2023-02-20 | Roller detector |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219694076U true CN219694076U (en) | 2023-09-15 |
Family
ID=87968552
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202320268037.7U Active CN219694076U (en) | 2023-02-20 | 2023-02-20 | Roller detector |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219694076U (en) |
-
2023
- 2023-02-20 CN CN202320268037.7U patent/CN219694076U/en active Active
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