CN219689850U - Air inlet structure and vapor deposition equipment - Google Patents

Abstract

An air inlet structure and vapor deposition equipment relate to the technical field of vapor deposition. This inlet structure, including inlet body, first sealing strip and second sealing strip, inlet body has two processing terminal surfaces that set up relatively, and two processing terminal surfaces are used for processing even gas groove and gas outlet groove respectively in inlet body, and first sealing strip is sealed in order to form even air flue with the notch of even gas groove, and the second sealing strip is sealed in order to form the gas outlet channel with the notch of gas outlet groove, and the bottom of even air flue and gas outlet channel is through the connecting hole intercommunication. The bottom of even air flue and the air outlet channel of this inlet structure passes through the connecting hole intercommunication, and corresponding processing mode has only formed the processing hole between even air groove and air outlet groove, and after first sealing strip and second sealing strip sealed even air groove and air outlet groove, need not to carry out the stifled leakproofness that welds in order to ensure even air flue and air outlet groove at other positions of inlet body, also can not produce the leak hole because of the rosin joint. Therefore, the air inlet structure has higher air tightness and lower processing cost.

Description

Air inlet structure and vapor deposition equipment

Technical Field

The utility model relates to the technical field of vapor deposition, in particular to an air inlet structure and vapor deposition equipment.

Background

In high density plasma chemical vapor deposition (High Density Plasma Chemical Vapor Deposition, HDPCVD) equipment, different kinds of process gases need to flow uniformly from the chamber side into the reaction chamber while not being allowed to contact each other before entering the inside of the reaction chamber.

At present, the main air inlet structure of the HDPCVD device is divided into two types, and the first type is that an annular air passage is processed on a cavity, but the method can increase the processing difficulty and the processing cost. The second is to integrate the air homogenizing and air inlet channel into an independent air inlet ring, the air inlet ring structure comprises a plurality of air homogenizing channels and air inlet channels, the air homogenizing channels and the air inlet channels are communicated by drilling holes on one side of the air inlet ring and penetrating through the side walls of the air homogenizing channels and the air inlet channels, the air homogenizing channels and the air inlet channels are communicated and then the holes on the side walls of the air inlet ring are blocked and welded, and after welding, the thermal stress is very easy to cause cold welding, and leakage holes are generated.

Disclosure of Invention

The utility model aims to provide an air inlet structure and vapor deposition equipment, which have higher air tightness and lower processing cost.

Embodiments of the present utility model are implemented as follows:

the embodiment of the utility model provides an air inlet structure, which comprises an air inlet main body, a first sealing strip and a second sealing strip, wherein the air inlet main body is provided with two processing end surfaces which are oppositely arranged, the two processing end surfaces are respectively used for processing an air homogenizing groove and an air outlet groove in the air inlet main body, the first sealing strip seals the notch of the air homogenizing groove to form an air homogenizing channel, the second sealing strip seals the notch of the air outlet groove to form an air outlet channel, and the bottoms of the air homogenizing channel and the air outlet channel are communicated through a connecting hole.

Optionally, the bottom surface of the air homogenizing channel is parallel to the bottom surface of the air outlet channel, and the connecting holes are respectively perpendicular to the bottom surfaces of the air homogenizing channel and the air outlet channel.

Optionally, an air inlet hole communicated with the uniform air channel and a plurality of air outlet holes communicated with the air outlet channel are arranged on the air inlet main body, and the plurality of air outlet holes are uniformly distributed on the air inlet main body.

Optionally, the air homogenizing channel and the air outlet channels comprise at least two air outlet channels and are arranged in one-to-one correspondence, and each air outlet channel is communicated with a plurality of air outlet holes.

Optionally, all the air outlet holes corresponding to different air outlet channels are located on the same distribution line.

Optionally, the air inlet main body and the air outlet channel are in a closed ring shape, and the air homogenizing channel is in an unclosed ring shape.

Optionally, the air outlet holes are arranged on the inner annular wall of the air inlet main body and are uniformly distributed along the circumferential direction of the air inlet main body.

Optionally, the annular angle of the uniform air channel is 270-330 degrees.

Optionally, a first air passage and a second air passage are further arranged in the air inlet main body, one end of the first air passage is communicated with the uniform air passage, the other end of the first air passage is communicated with the air inlet hole, one end of the second air passage is communicated with the air outlet passage, and the other end of the second air passage is communicated with the air outlet hole.

The embodiment of the utility model also provides vapor deposition equipment, which comprises the air inlet structure.

The beneficial effects of the embodiment of the utility model include:

the air inlet structure comprises an air inlet main body, a first sealing strip and a second sealing strip, wherein the air inlet main body is provided with two processing end faces which are arranged oppositely, the two processing end faces are respectively used for processing an air homogenizing groove and an air outlet groove in the air inlet main body, the first sealing strip seals the notch of the air homogenizing groove to form an air homogenizing channel, the second sealing strip seals the notch of the air outlet groove to form an air outlet channel, and the bottoms of the air homogenizing channel and the air outlet channel are communicated through a connecting hole. The bottom of even air flue and the air outlet channel of this inlet structure is through connecting hole intercommunication, in the actual processing, and drilling cutter can stretch into even gas inslot portion through even gas groove's notch, and at even gas groove's tank bottom drilling to the tank bottom of air outlet groove to form the connecting hole. The processing mode that this structure corresponds has only formed the processing hole between even gas groove and gas outlet groove, and after first sealing strip and second sealing strip will even gas groove and gas outlet groove sealed, need not to carry out the stifled leakproofness that welds in order to ensure even air flue and gas outlet groove at other positions of intake main part, also can not produce the leak hole because of the rosin joint. Therefore, the air inlet structure has higher air tightness and lower processing cost.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings that are needed in the embodiments will be briefly described below, it being understood that the following drawings only illustrate some embodiments of the present utility model and therefore should not be considered as limiting the scope, and other related drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.

Fig. 1 is a top view of an air intake main body in an air intake structure according to an embodiment of the present utility model;

FIG. 2 is one of the partial cross-sectional views of an air intake structure provided in an embodiment of the present utility model;

FIG. 3 is a schematic diagram of a relative positional relationship between a uniform gas channel and a gas outlet channel in an air inlet structure according to an embodiment of the present utility model;

FIG. 4 is a second schematic diagram of a relative positional relationship between a uniform air channel and an air outlet channel in an air inlet structure according to an embodiment of the present utility model;

FIG. 5 is a second partial cross-sectional view of an air intake structure according to an embodiment of the present utility model;

FIG. 6 is a third partial cross-sectional view of an air intake structure according to an embodiment of the present utility model;

fig. 7 is a bottom view of an air intake body in an air intake structure according to an embodiment of the present utility model;

fig. 8 is a schematic structural diagram of an air intake structure according to an embodiment of the present utility model.

Icon: 100-air inlet structure; 110-an intake body; 111-processing end faces; 112-airway group; 1121-uniform gas channel; 1122-outlet path; 113-connecting holes; 114-a first bearing surface; 115-a second bearing surface; 116-an air inlet hole; 117-vent holes; 118-first airway; 119-a second airway; 120-a first sealing strip; 130-second seal strip.

Detailed Description

For the purpose of making the objects, technical solutions and advantages of the embodiments of the present utility model more apparent, the technical solutions of the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model, and it is apparent that the described embodiments are some embodiments of the present utility model, but not all embodiments of the present utility model. The components of the embodiments of the present utility model generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.

Thus, the following detailed description of the embodiments of the utility model, as presented in the figures, is not intended to limit the scope of the utility model, as claimed, but is merely representative of selected embodiments of the utility model. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

It should be noted that: like reference numerals and letters denote like items in the following figures, and thus once an item is defined in one figure, no further definition or explanation thereof is necessary in the following figures.

In the description of the present utility model, it should be noted that, directions or positional relationships indicated by terms such as "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., are directions or positional relationships based on those shown in the drawings, or are directions or positional relationships conventionally put in use of the inventive product, are merely for convenience of describing the present utility model and simplifying the description, and are not indicative or implying that the apparatus or element to be referred to must have a specific direction, be constructed and operated in a specific direction, and thus should not be construed as limiting the present utility model. Furthermore, the terms "first," "second," "third," and the like are used merely to distinguish between descriptions and should not be construed as indicating or implying relative importance.

In the description of the present utility model, it should also be noted that, unless explicitly specified and limited otherwise, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be connected between two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.

Referring to fig. 1 and 2, an embodiment of the present utility model provides an air intake structure 100, which includes an air intake main body 110, a first sealing strip 120 and a second sealing strip 130, wherein the air intake main body 110 has two processing end surfaces 111 disposed opposite to each other, the two processing end surfaces 111 are respectively used for processing an air homogenizing groove and an air outlet groove in the air intake main body 110, the first sealing strip 120 seals a notch of the air homogenizing groove to form an air homogenizing channel 1121, the second sealing strip 130 seals a notch of the air outlet groove to form an air outlet channel 1122, and bottoms of the air homogenizing channel 1121 and the air outlet channel 1122 are communicated through a connecting hole 113.

The air inlet structure 100 comprises an air inlet main body 110, wherein the air inlet main body 110 is provided with two opposite processing end surfaces 111, one processing end surface 111 is used for processing an air homogenizing groove in the air inlet main body 110, the notch of the air homogenizing groove faces the processing end surface 111, the groove bottom and the notch are opposite, and the groove bottom of the air homogenizing groove is exposed out of the processing end surface 111; the other processing end surface 111 of the air inlet body 110 is used for processing an air outlet groove in the air inlet body 110, the notch of the air outlet groove faces the processing end surface 111, the groove bottom and the notch are opposite, and the groove bottom of the air outlet groove is exposed out of the processing end surface 111. That is, the slots of the gas distribution groove and the gas outlet groove are away from each other, the groove bottoms are close to each other, and the slots are exposed by the two processed end surfaces 111 of the gas inlet body 110, respectively.

The first sealing strip 120 is disposed at the notch of the air homogenizing groove, and seals the notch of the air homogenizing groove to form an air homogenizing passage 1121 inside the air intake main body 110; the second sealing strip 130 is disposed at the notch of the gas outlet groove, sealing the notch of the gas outlet groove to form the gas outlet channel 1122 inside the gas inlet body 110. It can be understood that the air homogenizing groove is the air homogenizing channel 1121 after being sealed by the first sealing strip 120, and the bottom of the air homogenizing groove is the bottom of the air homogenizing channel 1121; the air outlet groove is the air outlet channel 1122 after being sealed by the second sealing strip 130, and the bottom of the air outlet groove is the bottom of the air outlet channel 1122.

The bottoms of the air homogenizing channel 1121 and the air outlet channel 1122 are communicated through the connecting hole 113, and in actual processing, the drilling tool can extend into the air homogenizing channel through the notch of the air homogenizing channel, and drill holes are formed in the bottom of the air homogenizing channel to the bottom of the air outlet channel so as to form the connecting hole 113. The processing mode that this structure corresponds only has formed the processing hole between even gas groove and gas outlet groove, and after first sealing strip 120 and second sealing strip 130 sealed even gas groove and gas outlet groove, need not to carry out the plug welding in order to ensure even air flue 1121 and gas outlet groove's leakproofness in other positions of inlet body 110, also can not produce the leak because of the rosin joint. Thus, the resulting air intake structure 100 has higher air tightness and lower processing costs.

It should be noted that the gas homogenizing groove and the gas outlet groove may be arranged opposite to each other or may be arranged in a staggered manner, but the relative positions of the gas homogenizing groove and the gas outlet groove should ensure that the drilling tool does not interfere with the gas homogenizing groove or the gas outlet groove when the connecting hole 113 is processed at the bottom of the groove.

The number of the connecting holes 113 may be plural to increase the speed of gas communication between the gas homogenizing gas channel 1121 and the gas outlet channel 1122; preferably, the plurality of connection holes 113 are uniformly distributed along the extending direction of the uniform gas channel 1121 so that the gas uniformly enters the gas outlet channels 1122.

Referring to fig. 2 and 3, in an alternative implementation manner of the embodiment of the present utility model, the bottom surface of the gas homogenizing channel 1121 is parallel to the bottom surface of the gas outlet channel 1122, and the connection holes 113 are perpendicular to the bottom surfaces of the gas homogenizing channel 1121 and the gas outlet channel 1122, respectively.

That is, the bottom of the gas homogenizing tank and the bottom of the gas outlet tank are parallel to each other, and at least partial areas of the bottom of the gas homogenizing tank and the bottom of the gas outlet tank are overlapped with each other in a direction perpendicular to the bottom of the gas homogenizing tank, and the connection hole 113 is vertically provided between the overlapped areas. So set up, the processing of connecting hole 113 is easier, and drilling cutter is difficult to take place to interfere with even gas groove or gas outlet groove, and is less to even gas groove, gas outlet groove and connecting hole 113's size restriction.

In fig. 2, the air homogenizing channel 1121 and the air outlet channel 1122 are arranged opposite to each other, and the connecting holes 113 are respectively perpendicular to the bottom surfaces of the air homogenizing channel 1121 and the air outlet channel 1122, at this time, the bottom surfaces of the air homogenizing channel 1121 and the air outlet channel 1122 are completely coincident, and the connecting holes 113 are easy to process and have a larger diameter range. In fig. 3, the air homogenizing channel 1121 and the air outlet channel 1122 are arranged in a staggered manner, the connecting holes 113 are respectively perpendicular to the bottom surfaces of the air homogenizing channel 1121 and the air outlet channel 1122, and at this time, the area of the overlapping area of the bottom surfaces of the air homogenizing channel 1121 and the air outlet channel 1122 is smaller, and the settable diameter range of the connecting holes 113 is also smaller.

Of course, as shown in fig. 4, the connection hole 113 may not be perpendicular to the bottom surfaces of the gas homogenizing channel 1121 and the gas outlet channel 1122, and in the direction perpendicular to the bottom surfaces of the gas homogenizing channel, the bottom surfaces of the gas homogenizing channel and the bottom surfaces of the gas outlet channel may not coincide, that is, the connection hole 113 is obliquely disposed between the gas homogenizing channel 1121 and the gas outlet channel 1122, but such a disposition is not easy to process, and is easy to cause interference between the drilling tool and the gas homogenizing channel or the gas outlet channel, and has a large limitation on the dimensions of the gas homogenizing channel, the gas outlet channel and the connection hole 113.

Optionally, in an implementation manner of the embodiment of the present utility model, a first mounting groove and a second mounting groove are further respectively disposed on the two processing end surfaces 111, the first mounting groove is communicated with the air homogenizing groove, a first bearing surface 114 is formed between the first mounting groove and the air homogenizing groove, a second bearing surface 115 is formed between the second mounting groove and the air outlet groove, a first sealing strip 120 is fixed in the first mounting groove and is attached to the first bearing surface 114, so as to seal the notch of the air homogenizing groove to form an air homogenizing channel 1121, and a second sealing strip 130 is fixed in the second mounting groove and is attached to the second bearing surface 115, so as to seal the notch of the air outlet groove to form an air outlet channel 1122.

Optionally, in an implementation manner of the embodiment of the present utility model, the air inlet main body 110 is provided with an air inlet hole 116 that is communicated with the air homogenizing channel 1121 and a plurality of air outlet holes 117 that are communicated with the air outlet channel 1122, and the plurality of air outlet holes 117 are uniformly distributed on the air inlet main body 110.

At least one air inlet hole 116 and a plurality of air outlet holes 117 are arranged on the air inlet main body 110, and the process gas required by the process is fed into the air homogenizing channel 1121 through the air inlet hole 116, uniformly dispersed by the air homogenizing channel 1121, fed into the air outlet channel 1122 through the connecting hole 113, and then fed into the reaction chamber after leaving the air inlet main body 110 through the air outlet holes 117. The plurality of gas outlet holes 117 are uniformly distributed on the gas inlet body 110, so that the process gas can uniformly flow into the reaction chamber, and the process effect is improved.

Preferably, the plurality of outlet holes 117 are uniformly distributed on the inlet body 110 along the extending direction of the outlet channels 1122 to shorten the outlet path between the outlet channels 1122 and the outlet holes 117.

Referring to fig. 5 and 6, in an alternative implementation manner of the embodiment of the present utility model, a first air passage 118 and a second air passage 119 are further provided in the air intake main body 110, one end of the first air passage 118 is communicated with the air homogenizing passage 1121, the other end is communicated with the air intake 116, one end of the second air passage 119 is communicated with the air outlet passage 1122, and the other end is communicated with the air outlet 117.

The number of first air passages 118 is equal to the number of air inlet holes 116, and the number of second air passages 119 is equal to the number of air outlet holes 117. The first air passage 118 and the second air passage 119 may be passages located in the intake main body 110, may be ventilation pipes provided in the intake main body 110, or may be a combination of both.

Referring to fig. 1, 2 and 7, in an alternative implementation manner of the embodiment of the present utility model, the air homogenizing passages 1121 and the air outlet passages 1122 each include at least two air outlet passages 1122, which are arranged in a one-to-one correspondence, and each air outlet passage 1122 is in communication with the plurality of air outlet holes 117.

Generally, more than one process gas is required for a process (e.g., chemical vapor deposition) and are not allowed to contact each other before entering the reaction chamber, so that at least two uniform gas channels 1121 and at least two gas outlet channels 1122 are provided in one gas inlet body 110 to circulate different process gases. The number of the air homogenizing passages 1121 and the air outlet passages 1122 are the same, and each air homogenizing passage 1121 is communicated with one air outlet passage 1122 through the connecting hole 113, and different air homogenizing passages 1121 are communicated with different air outlet passages 1122. Each gas outlet passage 1122 communicates with a plurality of gas outlet holes 117, and the gas outlet holes 117 are uniformly distributed on the gas inlet body 110 to ensure that each process gas flows uniformly into the reaction chamber.

Illustratively, one uniform gas channel 1121 and one gas outlet channel 1122 which are communicated with each other are divided into one gas channel group 112, and at least two gas channel groups 112 are distributed at intervals along a straight line in the gas inlet main body 110 so as to avoid mutual interference and also facilitate processing. If the air intake body 110 is annular, at least two air passage groups 112 may be distributed at intervals along the radial direction of the air intake body 110. The uniform air passages 1121 and the air outlet passages 1122 in the two adjacent air passage groups 112 are formed on the same processing end face 111 of the air inlet main body 110, so that the positions of the air outlet passages 1122 in the two adjacent air passage groups 112 are staggered, and the air outlet passages 1122 are convenient to communicate with the air outlet holes 117.

Referring to fig. 1 and 8, in an alternative implementation manner of the embodiment of the present utility model, all the outlet holes 117 corresponding to different outlet channels 1122 are located on the same distribution line.

That is, when the number of the air outlet channels 1122 is greater than or equal to two, all the air outlet holes 117 on the air inlet main body 110 are located on the same distribution line, the distribution line is located on the surface of the air inlet main body 110, and the plurality of air outlet holes 117 corresponding to the same air outlet channel 1122 are uniformly distributed on the distribution line, so that the air outlet holes 117 are divided according to groups and are matched with a machine for processing, so that the process effect is further improved.

The number of gas outlet holes 117 through which the various gas outlet channels 1122 communicate is determined by the volume of process gas in the gas channel required during processing. For example, referring to fig. 2 and 8, the air inlet main body 110 is provided with two air homogenizing passages 1121, two air outlet passages 1122, and 36 air outlet holes 117, wherein 24 air outlet holes 117 are communicated with the same air outlet passage 1122, and the remaining 12 air outlet holes 117 are communicated with another air outlet passage 1122. Of the 36 air outlet holes 117, every 3 air outlet holes 117 are grouped together in 12 groups. The same process gas flows through the gas outlet holes 117 on both sides of each group, the included angle between the gas outlet holes is 15 degrees, and the angle between the gas outlet holes and the gas outlet holes 117 of other adjacent groups is 15 degrees, namely 24 gas outlet holes 117 are uniformly distributed around, and the included angle between every two adjacent holes is 15 degrees. The other process gas flows through the middle air outlet holes 117 of each group, the included angle of every two adjacent middle air outlet holes 117 is 30 degrees, namely, 12 air outlet holes 117 are uniformly distributed around, and the included angle between every two adjacent air outlet holes is 30 degrees. In this example, the process is more demanding in terms of the process gas flowing through the gas outlet holes 117 on both sides of each group, and less demanding in terms of the process gas flowing through the intermediate gas outlet holes 117.

Referring to fig. 1, in an alternative implementation manner of the embodiment of the present utility model, the air inlet main body 110 and the air outlet duct 1122 are both in a closed loop shape, and the air homogenizing duct 1121 is in an open loop shape.

That is, the extension paths of the inlet body 110 and the outlet channels 1122 are circular, and the extension path of the uniform air channel 1121 is circular. Preferably, the centers of the extension paths of the inlet body 110, the outlet channels 1122 and the uniform air channels 1121 coincide with each other.

Optionally, in one implementation manner of the embodiment of the present utility model, the ring angle α of the air homogenizing channel 1121 is 270 ° to 330 °, and in this range, the air homogenizing effect of the air homogenizing channel 1121 is better. Preferably, the annular angle α of the air homogenizing channel 1121 is 300 °, and at this time, the air homogenizing effect of the air homogenizing channel 1121 is optimal.

Alternatively, in one possible implementation manner of the embodiment of the present utility model, the air outlet holes 117 are disposed on the inner circumferential wall of the air inlet body 110 and are uniformly distributed along the circumferential direction of the air inlet body 110.

The present embodiment also provides a vapor deposition apparatus including the air intake structure 100 as defined in any one of the above.

The vapor deposition apparatus includes the same structure and advantageous effects as the air intake structure 100 in the foregoing embodiment. The structure and the advantages of the air intake structure 100 are described in detail in the foregoing embodiments, and are not described herein.

The above description is only of the preferred embodiments of the present utility model and is not intended to limit the present utility model, but various modifications and variations can be made to the present utility model by those skilled in the art. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present utility model should be included in the protection scope of the present utility model.

Claims (10)

1. The utility model provides an inlet structure, its characterized in that, including inlet body (110), first sealing strip (120) and second sealing strip (130), inlet body (110) have two processing terminal surfaces (111) of relative setting, two processing terminal surfaces (111) are used for respectively processing even air groove and air outlet groove in inlet body (110), first sealing strip (120) will the notch seal in even air groove is in order to form even air flue (1121), second sealing strip (130) will the notch seal in order to form air outlet channel (1122) in the air outlet groove, even air flue (1121) with the bottom of air outlet channel (1122) is through connecting hole (113) intercommunication.

2. The air intake structure according to claim 1, wherein a bottom surface of the air homogenizing duct (1121) is parallel to a bottom surface of the air outlet duct (1122), and the connection hole (113) is perpendicular to the bottom surfaces of the air homogenizing duct (1121) and the air outlet duct (1122), respectively.

3. The air inlet structure according to claim 1, wherein the air inlet main body (110) is provided with an air inlet hole (116) communicated with the air homogenizing channel (1121) and a plurality of air outlet holes (117) communicated with the air outlet channel (1122), and the plurality of air outlet holes (117) are uniformly distributed on the air inlet main body (110).

4. The air intake structure of claim 3, wherein the air homogenizing channel (1121) and the air outlet channel (1122) each comprise at least two and are disposed in one-to-one correspondence, each air outlet channel (1122) being in communication with a plurality of the air outlet holes (117).

5. The inlet arrangement of claim 4, wherein all of the outlet apertures (117) corresponding to different outlet channels (1122) are located on the same distribution line.

6. The inlet structure of claim 3, wherein the inlet body (110) and the outlet channels (1122) are each in a closed loop shape, and the uniform air channels (1121) are each in an open loop shape.

7. The air intake structure according to claim 6, wherein the air outlet holes (117) are provided on an inner circumferential wall of the air intake body (110) and are uniformly distributed along a circumferential direction of the air intake body (110).

8. The air intake structure according to claim 6, wherein the circular angle of the uniform air passage (1121) is 270 ° to 330 °.

9. An air inlet structure according to claim 3, wherein a first air passage (118) and a second air passage (119) are further arranged in the air inlet main body (110), one end of the first air passage (118) is communicated with the air homogenizing passage (1121), the other end of the first air passage is communicated with the air inlet hole (116), one end of the second air passage (119) is communicated with the air outlet passage (1122), and the other end of the second air passage is communicated with the air outlet hole (117).

10. A vapor deposition apparatus comprising the gas inlet structure according to any one of claims 1 to 9.