CN219684068U - Ultra-precise machine tool for small micro-nano parts - Google Patents
Ultra-precise machine tool for small micro-nano parts Download PDFInfo
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- CN219684068U CN219684068U CN202321302226.8U CN202321302226U CN219684068U CN 219684068 U CN219684068 U CN 219684068U CN 202321302226 U CN202321302226 U CN 202321302226U CN 219684068 U CN219684068 U CN 219684068U
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- 239000000919 ceramic Substances 0.000 claims abstract description 50
- 238000003801 milling Methods 0.000 claims abstract description 26
- 238000013016 damping Methods 0.000 claims abstract description 7
- 238000007667 floating Methods 0.000 claims description 11
- 239000000463 material Substances 0.000 abstract description 12
- 238000005520 cutting process Methods 0.000 abstract description 9
- 238000000034 method Methods 0.000 abstract description 5
- 230000033001 locomotion Effects 0.000 abstract description 2
- 238000004519 manufacturing process Methods 0.000 description 12
- 238000003754 machining Methods 0.000 description 5
- 238000004891 communication Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229920006351 engineering plastic Polymers 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 229910052755 nonmetal Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/10—Greenhouse gas [GHG] capture, material saving, heat recovery or other energy efficient measures, e.g. motor control, characterised by manufacturing processes, e.g. for rolling metal or metal working
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Abstract
The utility model relates to an ultra-precise machine tool for small micro-nano parts, which comprises a damping table, a servo paying-off station, a roller straightening station, an ultra-precise piezoelectric ceramic wire feeding station, a multi-tool-rest ultra-precise milling station and an ultra-precise whirling cutting and collecting station. All ultra-precise linear motions are realized by an air floatation guide rail module. The multi-tool-holder ultra-precise milling station can process parts with various shapes and can be matched with a laser to punch micropores. The ultra-precise whirling cutting and receiving station consists of a central air floatation main shaft, a whirling milling cutter on a shaft sleeve on the left end face of the shaft, a piezoelectric ceramic chuck in a central hole of the shaft, a miniature negative pressure receiving microtube positioned at the lower part of the chuck and a manual fine adjustment platform for adjusting the position and the posture of the chuck outside the right end face of the shaft. The clamping head clamps one end of the silk material, the ultra-precise cyclone milling cutter cuts off the silk material, a part with a tailless Ding Guang sliding cut surface is obtained, and the material is received.
Description
Technical Field
The utility model relates to the technical field of machine tools, in particular to an ultra-precise machine tool for small micro-nano parts.
Background
Currently, in the industries of microelectronics (which is a semiconductor chip), micro-nano medical treatment, micro-nano optics, optical communication and military industry, the types and the number of the requirements for micrometer-scale parts are increasing, and the miniaturization requirements for the sizes of the parts are also continuously enhanced. The micrometer-scale part business is characterized by ultra-high machining accuracy and huge annual demand.
The diameter of the minimum wire rod processed by the traditional core walking machine can only reach 0.3mm, the processing precision can only reach 5um to 10um, and the requirements of the processing precision of the miniature parts are difficult to meet; the ultra-precise machining center can meet the requirement of the machining precision of the micro parts, but cannot meet the requirement of huge annual requirement quantity due to the fact that the production efficiency is too low. Meanwhile, as China is pinched by western countries in terms of high-end equipment for a long time, the miniature parts are almost imported, so that the development of the ultra-precise machine for small micro-nano parts is decided to solve the passive situation of pinching the neck.
Disclosure of Invention
Aiming at the defects existing in the prior art, the utility model aims to provide the ultra-precise machine tool for the small micro-nano parts, which perfectly combines the high production efficiency of the core moving machine with the ultra-high precision of the ultra-precise machining center, can micro-cut the micro-wire stock with the outer diameter smaller than 0.3mm, meets the requirement on the machining precision of the micro-parts, and improves the production efficiency.
The above object of the present utility model is achieved by the following technical solutions:
the ultra-precise machine tool for the small micro-nano parts comprises a damping table, wherein a plurality of air floatation guide rail modules are arranged on the damping table, milling modules are arranged on the air floatation guide rail modules, and each milling module comprises a piezoelectric ceramic clamp type feeding mechanism, a piezoelectric ceramic micro-clamp fixing mechanism, an air floatation main shaft and a manual fine adjustment platform;
one end of the piezoelectric ceramic micro clamp fixing mechanism is connected with the manual fine adjustment platform, the other end of the piezoelectric ceramic micro clamp fixing mechanism is arranged in the hollow air floatation main shaft, and the piezoelectric ceramic clamp type feeding mechanism is arranged on one side, far away from the manual fine adjustment platform, of the hollow air floatation main shaft;
the automatic fine adjustment device is characterized in that a sleeve is arranged at one end, far away from the manual fine adjustment platform, of the hollow air floatation spindle, an air floatation cyclone knife capable of rotating is arranged on the inner wall of the sleeve, a wire rod is clamped on the piezoelectric ceramic clamp type feeding mechanism, after a step is milled through the air floatation cyclone knife, the step is sent to the piezoelectric ceramic micro clamp fixing mechanism, and after the step is clamped, the wire rod is cut off by the air floatation cyclone knife.
The present utility model may be further configured in a preferred example to: the air supporting guide rail module comprises an X-axis air supporting guide rail, a Y-axis air supporting guide rail and a Z-axis air supporting guide rail, wherein the X-axis air supporting guide rail, the Y-axis air supporting guide rail and the Z-axis air supporting guide rail are respectively used for realizing the positioning of wires on an X axis, a Y axis and a Z axis.
The present utility model may be further configured in a preferred example to: the piezoelectric ceramic clamp type feeding mechanism comprises a frame and piezoelectric ceramic clamps arranged in the frame, wherein a first V-shaped groove is formed in the inner wall of the top of the frame, a second V-shaped groove is formed in the piezoelectric ceramic clamps, the second V-shaped groove is arranged right below the first V-shaped groove, and a diamond-shaped hole for clamping a wire rod is formed between the first V-shaped groove and the second V-shaped groove.
The present utility model may be further configured in a preferred example to: the piezoelectric ceramic miniature clamp fixing mechanism comprises a fixing rod, a bolt and a piezoelectric ceramic miniature clamp, wherein a clamping opening for clamping a wire rod is formed in one end of the piezoelectric ceramic miniature clamp, a plurality of thread installation holes are formed in the other end of the piezoelectric ceramic miniature clamp, and the bolt penetrates through the thread installation holes and then is in threaded connection with the fixing rod.
The present utility model may be further configured in a preferred example to: the rotation precision of the hollow air-bearing spindle is smaller than or equal to 0.1um in axial runout, and smaller than or equal to 0.05um in radial runout.
The present utility model may be further configured in a preferred example to: the X-axis air-floating guide rail, the Y-axis air-floating guide rail and the Z-axis air-floating guide rail have the positioning precision of +/-0.1um, the repeated positioning precision of +/-0.05um and the feeding resolution of 1nm.
The present utility model may be further configured in a preferred example to: the sleeve is internally provided with a material receiving micro-pipe, wires are cut off by the air floatation cyclone knife and fall into the material receiving micro-pipe, and are sucked out and collected along the inner hole of the material receiving micro-pipe under negative air pressure.
The present utility model may be further configured in a preferred example to: the milling module further comprises a passive roller straightening mechanism, and the passive roller straightening mechanism is used for straightening the wire in the process of servo paying-off of the wire.
In summary, the present utility model includes at least one of the following beneficial technical effects:
the utility model discloses an ultra-precise machine tool for small micro-nano parts, which perfectly combines the high production efficiency of a core moving machine with the ultra-high precision of an ultra-precise machining center, adopts a mode that a material does not rotate a cutter in a cutting mode, adopts an air-floating main shaft and an air-floating guide rail of the ultra-precise machine tool, can micro-cut a micro wire rod blank with the outer diameter smaller than 0.3mm, meets the requirement on the machining precision of the micro parts, and improves the production efficiency.
Drawings
Fig. 1 is a schematic diagram of the overall structure of the present utility model.
Fig. 2 is a schematic diagram showing the overall structure of the milling module according to the present utility model.
Fig. 3 is a cross-sectional view of a milling module according to the present utility model.
Fig. 4 is an enlarged partial schematic view of the portion a in fig. 3.
Fig. 5 is a partially enlarged schematic view of the portion B in fig. 4.
Fig. 6 is a side view of the present utility model showing a milling module.
Fig. 7 is an enlarged partial schematic view of the portion C in fig. 6.
Reference numerals: 1. an air-float guide rail module; 10. a shock absorbing platform; 2. a milling module; 3. piezoelectric ceramic clamp type feeding mechanism; 31. a frame; 32. piezoelectric ceramic clamp; 33. a first V-shaped groove; 34. a second V-shaped groove; 4. a piezoelectric ceramic micro clamp fixing mechanism; 41. a fixed rod; 42. a bolt; 43. piezoelectric ceramic miniature clamp; 44. a threaded mounting hole; 5. a medium air floatation main shaft; 6. manually fine-tuning the platform; 7. a sleeve.
Detailed Description
The technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model; it is apparent that the described embodiments are only some embodiments of the present utility model, not all embodiments, and that all other embodiments obtained by persons of ordinary skill in the art without making creative efforts based on the embodiments in the present utility model are within the protection scope of the present utility model.
In the description of the present utility model, it should be noted that the positional or positional relationship indicated by the terms such as "upper", "lower", "inner", "outer", "top/bottom", etc. are based on the positional or positional relationship shown in the drawings, are merely for convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the apparatus or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present utility model. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "configured to," "engaged with," "connected to," and the like are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.
Embodiment one:
referring to fig. 1-7, the ultra-precise machine tool for the small micro-nano parts disclosed by the utility model comprises a damping table 10, wherein a plurality of air-float guide rail modules 1 are arranged on the damping table 10, and milling modules 2 are arranged on the air-float guide rail modules 1. Referring to fig. 2, the milling module 2 comprises a piezoelectric ceramic clamp type feeding mechanism 3, a piezoelectric ceramic micro clamp fixing mechanism 4, a middle air floatation spindle 5 and a manual fine adjustment platform 6; one end of the piezoelectric ceramic micro clamp fixing mechanism 4 is connected with the manual fine adjustment platform 6, the other end of the piezoelectric ceramic micro clamp fixing mechanism is arranged in the middle air floatation main shaft 5, and the piezoelectric ceramic clamp type feeding mechanism 3 is arranged on one side of the middle air floatation main shaft 5 away from the manual fine adjustment platform 6;
the end of the middle air floatation spindle 5 far away from the manual fine adjustment platform 6 is provided with a sleeve 7, the inner wall of the sleeve 7 is provided with an air floatation cyclone knife capable of rotating, a wire rod is clamped on the piezoelectric ceramic clamp type feeding mechanism 3, after a step is milled through the air floatation cyclone knife, the step is sent to the piezoelectric ceramic micro clamp fixing mechanism 4, and after the step is clamped, the wire rod is cut off by the air floatation cyclone knife.
The ultra-precise machine tool for the small micro-nano parts further comprises a servo paying-off station, a roller straightening station, an ultra-precise piezoelectric ceramic wire feeding station, a multi-tool-holder ultra-precise milling station and an ultra-precise whirling cutting and collecting station. All ultra-precise linear motions are realized by an air floatation guide rail module. The multi-tool-holder ultra-precise milling station can process parts with various shapes and can be matched with a laser to punch micropores. The ultra-precise whirling cutting and receiving station consists of a central air floatation main shaft, a whirling milling cutter on a shaft sleeve on the left end face of the shaft, a piezoelectric ceramic chuck in a central hole of the shaft, a miniature negative pressure receiving microtube positioned at the lower part of the chuck and a manual fine adjustment platform for adjusting the position and the posture of the chuck outside the right end face of the shaft. The clamping head clamps one end of the silk material, the ultra-precise cyclone milling cutter cuts off the silk material, a part with a tailless Ding Guang sliding cut surface is obtained, and the material is received.
The sleeve 7 is internally provided with a receiving microtube, wires are cut off by an air floatation cyclone knife and fall into the receiving microtube, and are sucked out and collected along the inner hole of the receiving microtube under negative air pressure. The milling module 2 further comprises a passive roller straightening mechanism by which the wire is passively roller straightened during the servo paying-off of the wire.
Referring to fig. 1, the air-float guide module 1 includes an X-axis air-float guide, a Y-axis air-float guide, and a Z-axis air-float guide, which are used to realize the positioning of the wire on the X-axis, the Y-axis, and the Z-axis, respectively.
Referring to fig. 6-7, the piezoelectric ceramic clamp type feeding mechanism 3 comprises a frame 31 and a piezoelectric ceramic clamp 32 arranged in the frame 31, wherein a first V-shaped groove 33 is formed in the inner wall of the top of the frame 31, a second V-shaped groove 34 is formed in the piezoelectric ceramic clamp 32, the second V-shaped groove 34 is arranged right below the first V-shaped groove 33, and a diamond-shaped hole for clamping a wire rod is formed between the first V-shaped groove 33 and the second V-shaped groove 34.
Referring to fig. 3, the piezoceramic micro gripper fixing mechanism 4 includes a fixing rod 41, a bolt 42 and a piezoceramic micro gripper 43, one end of the piezoceramic micro gripper 43 is provided with a clamping opening for clamping a wire, the other end is provided with a plurality of threaded mounting holes 44, and the bolt 42 is connected with the fixing rod 41 in a threaded manner after passing through the threaded mounting holes 44.
The rotation precision of the middle air floatation spindle 5 is smaller than or equal to 0.1um in axial runout and smaller than or equal to 0.05um in radial runout.
The positioning precision of the X-axis air-float guide rail, the Y-axis air-float guide rail and the Z-axis air-float guide rail is +/-0.1um, the repeated positioning precision is +/-0.05um, and the feeding resolution is 1nm.
When the utility model works, five stations are provided, and the detailed work flow of the five stations is described as follows:
a first station for servo paying-off;
the second station, the passive high-precision roller straightens, reach the micron-order precision;
the third station, ultra-precise clamp type feeding, wherein the front piezoelectric ceramic micro-motion clamp and the rear piezoelectric ceramic micro-motion clamp are matched with an open/clamp (see figures 4-5), micro-feeding is realized through ultra-precise guide rail feeding, and the micro-feeding can realize the straightness accuracy of 0.1um/100mm and the resolution of 1nm;
a fourth station, ultra-precise milling, skin/femtosecond laser milling;
1) Ultraprecise milling, wherein the rotation precision of a main shaft is less than 1um (a gas distribution floating main shaft can be adopted, and the rotation precision can reach 0.05 um): x-axis air-float guide rail, Y-axis air-float guide rail and Z-axis air-float guide rail, positioning accuracy +/-0.1um, repeated positioning accuracy +/-0.05um, and feeding resolution 1m. The method can be used for milling end surfaces, various steps (such as round, square, gear, polygon and the like), various micropores (such as round holes, square holes and the like), threads and free curved surfaces (such as relief faces and the like), and can be used for processing metals and nonmetal (such as glass, ceramics, engineering plastics and the like);
2) The skin/femtosecond laser is mainly used for micro-hole (such as: circular holes with an outer diameter of 2 um).
A fifth station for cutting off the blanking in ultra-precise mode;
1) The hollow shaft air-float main shaft has axial runout smaller than or equal to 0.1um and radial runout smaller than or equal to 0.05um.
2) X-axis air-float guide rail, Y-axis air-float guide rail and Z-axis air-float guide rail, positioning accuracy +/-0.1um, repeated positioning accuracy +/-0.05um and feeding resolution 1nm.
3) The 3 rd piezoelectric ceramic micro clamp 43 positioned in the hollow hole of the hollow shaft air-float main shaft clamps the free end of the fixed part, and then the hollow shaft air-float main shaft rotates at a high speed to drive the micro cyclone milling cutter to move in a matching way through the air-float guide rail XYZ1, so that the part is cut off from the wire blank in an ultra-precise way. The parts fall on the receiving microtubes, and are sucked out and collected along the inner holes of the receiving microtubes under negative air pressure.
The manufacturing precision is 0.1um, and micro cutting manufacturing of parts with the minimum size of 1um can be realized.
The utility model relates to an ultra-precise machine tool for a part of positive Feng Xiaowei nm, which is compared with a global top-level core moving machine, and the specific comparison table is as follows:
therefore, the Zhengfeng microcomputer is a perfect combination of high production efficiency of the heart walking machine, ultra-high precision of an ultra-precision machining center and flexibility intelligence, belongs to the world initiative, exceeds Switzerland and Japan, and reaches the world top level.
The ultra-precise machine tool for the parts of Feng Xiaowei nanometers has the advantages that in the aspects of straightening and feeding of bundle wire blanks, the feeding mode of the Swiss ESC0 centering machine is absorbed and digested, and the highest production efficiency in the centering machine industry is realized. In the cutting mode, the mode that the Swiss ESC0 core-moving machine material does not rotate is absorbed and digested, meanwhile, an air floatation main shaft and an air floatation guide rail of an ultra-precise machine tool are adopted, the manufacturing precision reaches ultra-precise level, the method is far superior to the Swiss ESC0 core-moving machine, and the diameter of a wire rod blank which can be cut is smaller.
The implementation principle of the utility model is as follows: the utility model discloses an ultra-precise machine tool for small micro-nano parts, which perfectly combines the high production efficiency of a core moving machine with the ultra-high precision of an ultra-precise machining center, adopts a mode that a material does not rotate a cutter in a cutting mode, adopts an air-floating main shaft and an air-floating guide rail of the ultra-precise machine tool, can micro-cut a micro wire rod blank with the outer diameter smaller than 0.3mm, meets the requirement on the machining precision of the micro parts, and improves the production efficiency.
The embodiments of the present utility model are all preferred embodiments of the present utility model, and are not intended to limit the scope of the present utility model in this way, therefore: all equivalent changes in structure, shape and principle of the utility model should be covered in the scope of protection of the utility model.
Claims (8)
1. The ultra-precise machine tool for the small micro-nano parts comprises a damping table (10), and is characterized in that a plurality of air floatation guide rail modules (1) are arranged on the damping table (10), milling modules (2) are arranged on the air floatation guide rail modules (1), and each milling module (2) comprises a piezoelectric ceramic clamp type feeding mechanism (3), a piezoelectric ceramic micro-clamp fixing mechanism (4), an air floatation main shaft (5) and a manual fine adjustment platform (6);
one end of the piezoelectric ceramic micro clamp fixing mechanism (4) is connected with the manual fine adjustment platform (6), the other end of the piezoelectric ceramic micro clamp fixing mechanism is arranged in the middle air floatation main shaft (5), and the piezoelectric ceramic clamp type feeding mechanism (3) is arranged on one side, far away from the manual fine adjustment platform (6), of the middle air floatation main shaft (5);
the automatic fine adjustment device is characterized in that one end of the hollow air floatation spindle (5) far away from the manual fine adjustment platform (6) is provided with a sleeve (7), the inner wall of the sleeve (7) is provided with an air floatation cyclone knife capable of rotating, a wire rod is clamped on the piezoelectric ceramic clamp type feeding mechanism (3), after a step is milled through the air floatation cyclone knife, the step is fed into the piezoelectric ceramic micro clamp fixing mechanism (4), and after the step is clamped, the wire rod is cut off by the air floatation cyclone knife.
2. The ultra-precise machine tool of the small micro-nano parts according to claim 1, wherein the air-float guide rail module (1) comprises an X-axis air-float guide rail, a Y-axis air-float guide rail and a Z-axis air-float guide rail, and the X-axis air-float guide rail, the Y-axis air-float guide rail and the Z-axis air-float guide rail are respectively used for realizing the positioning of wires on an X axis, a Y axis and a Z axis.
3. The ultra-precise machine tool for small micro-nano parts according to claim 1, wherein the piezoelectric ceramic clamp type feeding mechanism (3) comprises a frame (31) and piezoelectric ceramic clamps (32) arranged in the frame (31), a first V-shaped groove (33) is formed in the inner wall of the top of the frame (31), a second V-shaped groove (34) is formed in the piezoelectric ceramic clamps (32), the second V-shaped groove (34) is arranged under the first V-shaped groove (33), and diamond-shaped holes for clamping wires are formed between the first V-shaped groove (33) and the second V-shaped groove (34).
4. The ultra-precise machine tool of the small micro-nano part according to claim 1, wherein the piezoelectric ceramic micro-clamp fixing mechanism (4) comprises a fixing rod (41), a bolt (42) and a piezoelectric ceramic micro-clamp (43), a clamping opening for clamping a wire rod is formed in one end of the piezoelectric ceramic micro-clamp (43), a plurality of thread mounting holes (44) are formed in the other end of the piezoelectric ceramic micro-clamp, and the bolt (42) penetrates through the thread mounting holes (44) and then is in threaded connection with the fixing rod (41).
5. The ultra-precise machine tool for small micro-nano parts according to claim 1, wherein the rotation precision of the hollow air floatation spindle (5) is less than or equal to 0.1um, and the radial runout is less than or equal to 0.05um.
6. The ultra-precise machine tool for small micro-nano parts according to claim 2, wherein the positioning precision of the X-axis air-floating guide rail, the Y-axis air-floating guide rail and the Z-axis air-floating guide rail is +/-0.1um, the repeated positioning precision is +/-0.05um, and the feeding resolution is 1nm.
7. The ultra-precise machine tool of the small micro-nano parts according to claim 1, wherein a receiving micro-pipe is arranged in the sleeve (7), wires fall into the receiving micro-pipe after being cut off by an air floatation cyclone knife, and are sucked out and collected along the inner hole of the receiving micro-pipe under negative air pressure.
8. Ultra-precise machine tool for small micro-nano parts according to claim 1, characterized in that the milling module (2) further comprises a passive roller straightening mechanism by which the wire is passively roller straightened during the servo paying-off of the wire.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321302226.8U CN219684068U (en) | 2023-05-26 | 2023-05-26 | Ultra-precise machine tool for small micro-nano parts |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202321302226.8U CN219684068U (en) | 2023-05-26 | 2023-05-26 | Ultra-precise machine tool for small micro-nano parts |
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| Publication Number | Publication Date |
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| CN219684068U true CN219684068U (en) | 2023-09-15 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202321302226.8U Active CN219684068U (en) | 2023-05-26 | 2023-05-26 | Ultra-precise machine tool for small micro-nano parts |
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| Country | Link |
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| CN (1) | CN219684068U (en) |
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2023
- 2023-05-26 CN CN202321302226.8U patent/CN219684068U/en active Active
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