CN219677768U - Terahertz quantum cascade laser for generating radial polarized column vector beam - Google Patents
Terahertz quantum cascade laser for generating radial polarized column vector beam Download PDFInfo
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Abstract
The patent relates to a terahertz quantum cascade laser for generating radial polarized column vector beams, which sequentially comprises a substrate layer, a lower electrode layer and an active region layer from bottom to top. The active region layer is provided with a circular first upper electrode layer positioned at the center, a circular second upper electrode layer surrounding the first upper electrode layer and a circular absorption boundary layer surrounding the second upper electrode layer. The junction structure of the active region layer and the first upper electrode layer is a first-order concentric circular metal buried grating, and the structure of the second upper electrode layer is a second-order concentric circular metal-air grating. The centers of the first-order concentric circular metal buried grating and the second-order concentric circular metal-air grating are coincident. The first-order concentric circular metal buried grating excitation angle is directed to a fundamental mode, and isotropic cylindrical wave radiation is generated in the waveguide; the second-order concentric circular metal-air grating couples the light inside the waveguide into a vector beam of radial polarized columns emitted from the vertical plane. Finally, the device can be monolithically integrated to obtain the radial polarized column vector beam.
Description
Technical Field
The patent belongs to the technical field of semiconductor lasers and relates to a terahertz quantum cascade laser for generating radial polarized column vector beams.
Background
The vector beam has rich space freedom and has wide application in the fields of optical interaction, optical communication, optical imaging and the like. The column vector beam is a special vector beam with a circularly symmetric light field distribution in a hollow shape, and two special examples are radial polarization and tangential polarization column vector beams. With the growing demand for communications, imaging, etc., there are many reported results in using passive discrete components to generate vector beams through cascades (Naidoo, darryl, et al Nature Photonics 10.5 (2016): 327-332, cai, xinlun, et al science 338.6105 (2012): 363-366, etc.). However, with the development of modern information technology, optical systems increasingly require miniaturization, low power consumption, and stability of optoelectronic devices.
Recently, it has been reported that in the visible light and near infrared bands, the chip is usedThe above-integrated approach produces a vector beam without relying on external optics. Such as optically pumped near infrared communication band vector beam semiconductor lasers (Miao, pei, et al science 353.6298 (2016): 464-467), electrically pumped radially polarized vector beam lasers (Zhang, juan, et al Nature Communications 9.1 (2018): 2652), and the like. In the terahertz wave band, elvisVector beam (++) is generated using an angularly distributed feedback grating>Elvis, et al applied Physics Letters 95.1 (2009): 011120.). The Wang Qijie research group attempted to generate vector beams by second order concentric circle distributed feedback gratings (Liang, guozhen, et al acs photonics 2.11 (2015): 1559-1566, liang, guozhen, et al optics express21.26 (2013): 31872-31882), but the hollow circular symmetric optical field distribution was not successfully observed in the experiment because its laser cavity could not well distinguish between the fundamental and second order angular modes.
Disclosure of Invention
In view of the above prior art, this patent proposes a terahertz quantum cascade laser that generates a radial polarized column vector beam, by combining a first-order concentric circular metal buried grating with a second-order concentric circular metal-air grating, as a new method capable of on-chip integration to obtain a radial polarized column vector beam exiting from a vertical plane.
The terahertz quantum cascade laser for generating the radial polarized column vector beam sequentially comprises the following structures from bottom to top: a substrate layer 1, a lower electrode layer 2 and an active region layer 3. The active region layer 3 is provided with a circular first upper electrode layer 5 at the center, a second upper electrode layer 2 which surrounds the first upper electrode layer 5 in a circular shape, and an absorption boundary layer 4 which surrounds the second electrode layer 2 in a circular shape.
The upper surface of the junction between the active region layer 3 and the first upper electrode layer 5 corrodes the annular groove, the first upper electrode layer 5 fills the corroded groove to form a first-order concentric circular metal buried grating, and the thickness of the first upper electrode layer 5 is equal to the depth of the groove.
The first-order concentric circular metal buried grating is aligned with the center of the second-order concentric circular metal-air grating structure of the second upper electrode layer 6.
The lower electrode layer 2 is a Ti and Au composite material layer, the thickness of Ti is 10nm-20nm, and the thickness of Au is 0.8 μm-1 μm, wherein Ti is on Au.
The first upper electrode layer 5 is a circular Ti and Au composite material layer, the thickness of Ti is 10nm-20nm, the thickness of Au is 1.5 μm-2.5 μm, and the radius of the circle of Ti under Au is 80 μm-130 μm.
The period of the first-order concentric circular metal buried grating along the radial direction is 1/2 of the wavelength of light in a medium at the working frequency, and the corresponding period is 12.1 mu m; the radius of the center-most ring of the grating is 3/4 of the period of the grating, and the corresponding radius is 9 mu m; the grating duty ratio is 50%, the number of grating periods is 6-10, and the grating depth is 1.5-2.5 μm.
The second upper electrode layer 6 is a ring-shaped Ti and Au composite material layer, the thickness of Ti is 10nm-20nm, the thickness of Au is 0.8 μm-1 μm, and the size of the ring in the radial direction is 150 μm-250 μm under the condition of Au. The second upper electrode layer 6 is a second-order concentric circular metal-air grating. The second-order concentric circle metal-air grating has a period along the radius direction of one wavelength of light in a medium at the working frequency, the corresponding period is 24.2 mu m, the number of periods is 6-10, and the duty ratio is 50%.
The absorption boundary layer 4 is a circular ring-shaped n-type heavily doped GaAs material layer, and the doping concentration of the material is 10 18 cm -3 The thickness of the material is 0.6 mu m, and the size of the circular ring along the radial direction is 200 mu m-300 mu m.
The radial polarized column vector light beam capable of being emitted from the vertical plane through the electric pumping straight joint sheet is integrated, the light beam presents an annular far-field light spot, the polarization characteristic is polarized along the radial direction of the circular ring, and the device has the advantages of being high in integration level, high in stability, high in excitation efficiency and the like.
Drawings
Fig. 1 is a schematic diagram of the device of the present patent. 1 is a substrate layer, 2 is a lower electrode layer, 3 is an active region layer, 4 is an absorption boundary layer, 5 is a first upper electrode layer, and 6 is a second upper electrode layer.
Fig. 2 is a schematic cross-sectional view of the device of the present patent.
Detailed Description
In order to further describe the technical means adopted by the present patent and the effects thereof, the following detailed description is made with reference to the preferred embodiments of the present patent and the accompanying drawings.
Specific example 1:
the terahertz quantum cascade laser for generating the radial polarized column vector beam sequentially comprises the following structures from bottom to top: a substrate layer 1, a lower electrode layer 2 and an active region layer 3. The active region layer 3 is provided with a circular first upper electrode layer 5 positioned at the center, a second upper electrode layer 2 which surrounds the first upper electrode layer 5 in a circular shape and an absorption boundary layer 4 which surrounds the second upper electrode layer 2 in a circular shape.
The upper surface of the junction of the active region layer 3 and the first upper electrode layer 5 corrodes the annular groove, and the first upper electrode layer 5 fills the corroded groove to form a first-order concentric circular metal buried grating.
The first-order concentric circular metal buried grating is aligned with the center of the second-order concentric circular metal-air grating structure of the second upper electrode layer 6.
The lower electrode layer 2 is a Ti and Au composite material layer, the thickness of Ti is 15nm, and the thickness of Au is 0.9 mu m, wherein Ti is on Au.
The active region material of the active region layer 3 comprises 90 modules which are repeated in cycles, and each module comprises 9 layers of GaAs potential wells and 9 layers of Al which are overlapped with each other 0.15 Ga 0.85 The As potential barrier, starting from GaAs, has the following thickness: 11.4, 2.0, 12.0, 2.0, 12.2, 1.8, 12.8, 1.5, 15.8, 0.6, 9.0, 0.6, 14.0, 3.8, 11.6, 3.5, 11.3, 2.7 (nm), the first two GaAs layers being doped layers with an n-type doping concentration of 10 16 cm -3 . The first upper electrode layer 5 is a circular Ti and Au composite material layer, the thickness of Ti is 15nm, the thickness of Au is 2 mu m, and the radius of the circle of Ti under Au is 110 mu m.
The period of the first-order concentric circular metal buried grating along the radial direction is 12.1 mu m; the radius of the center-most circular ring of the grating is 9 mu m; the grating duty cycle is 50%, the number of grating periods is 8, and the grating depth is 2 μm. The second upper electrode layer 6 is a ring-shaped Ti and Au composite material layer, the thickness of Ti is 15nm, and the thickness of Au is 0.9 mu m, wherein the size of the ring in the radial direction is 200 mu m under the condition of Au. The second upper electrode layer 6 is a second-order concentric circular metal-air grating. The second-order concentric circular metal-air grating has a period of 24.2 mu m along the radial direction, the number of the periods is 8, and the duty ratio is 50%.
The absorption boundary layer 4 is a circular ring-shaped n-type heavily doped GaAs material layer, and the doping concentration of the material is 10 18 cm -3 The thickness of the material is 0.6 μm, and the size of the circular ring along the radial direction is 250 μm.
Specific example 2:
the terahertz quantum cascade laser for generating the radial polarized column vector beam sequentially comprises the following structures from bottom to top: a substrate layer 1, a lower electrode layer 2 and an active region layer 3. The active region layer 3 is provided with a circular first upper electrode layer 5 at the center, a second upper electrode layer 2 which surrounds the first upper electrode layer 5 in a circular shape, and an absorption boundary layer 4 which surrounds the second electrode layer 2 in a circular shape.
The upper surface of the junction of the active region layer 3 and the first upper electrode layer 5 corrodes the annular groove, and the first upper electrode layer 5 fills the corroded groove to form a first-order concentric circular metal buried grating.
The first-order concentric circular metal buried grating is aligned with the center of the second-order concentric circular metal-air grating structure of the second upper electrode layer 6.
The lower electrode layer 2 is a Ti and Au composite material layer, the thickness of Ti is 10nm, and the thickness of Au is 0.8 mu m, wherein Ti is on Au.
The active region material of the active region layer 3 comprises 90 modules which are repeated in cycles, and each module comprises 9 layers of GaAs potential wells and 9 layers of Al which are overlapped with each other 0.15 Ga 0.85 The As potential barrier, starting from GaAs, has the following thickness: 11.4, 2.0, 12.0, 2.0, 12.2, 1.8, 12.8, 1.5, 15.8, 0.6, 9.0, 0.6, 14.0, 3.8, 11.6, 3.5, 11.3, 2.7 (nm), the first two GaAs layers being doped layers with an n-type doping concentration of 10 16 cm -3 . The first upper electrode layer 5 is a circular Ti and Au composite material layer, the thickness of Ti is 10nm, the thickness of Au is 1.5 mu m, and the radius of the circle of Ti under Au is 130 mu m.
The period of the first-order concentric circular metal buried grating along the radial direction is 12.1 mu m; the radius of the center-most circular ring of the grating is 9 mu m; the grating duty cycle is 50%, the number of grating periods is 10, and the grating depth is 1.5 μm. The second upper electrode layer 6 is a circular Ti and Au composite material layer, the thickness of Ti is 10nm, the thickness of Au is 0.8 μm, and the size of the circular ring along the radial direction is 150 μm under the Au. The second upper electrode layer 6 is a second-order concentric circular metal-air grating. The second-order concentric circle metal-air grating has a period of 24.2 mu m along the radial direction, the number of the periods is 6, and the duty ratio is 50%.
The absorption boundary layer 4 is a circular ring-shaped n-type heavily doped GaAs material layer, and the doping concentration of the material is 10 18 cm -3 The thickness of the material is 0.6 μm, and the size of the circular ring along the radial direction is 200 μm.
Specific example 3:
the terahertz quantum cascade laser for generating the radial polarized column vector beam sequentially comprises the following structures from bottom to top: a substrate layer 1, a lower electrode layer 2 and an active region layer 3. The active region layer 3 is provided with a circular first upper electrode layer 5 at the center, a second upper electrode layer 2 which surrounds the first upper electrode layer 5 in a circular shape, and an absorption boundary layer 4 which surrounds the second electrode layer 2 in a circular shape.
The upper surface of the junction of the active region layer 3 and the first upper electrode layer 5 corrodes the annular groove, and the first upper electrode layer 5 fills the corroded groove to form a first-order concentric circular metal buried grating.
The first-order concentric circular metal buried grating is aligned with the center of the second-order concentric circular metal-air grating structure of the second upper electrode layer 6.
The lower electrode layer 2 is a Ti and Au composite material layer, the thickness of Ti is 20nm, and the thickness of Au is 1 mu m, wherein Ti is on Au.
The active region material of the active region layer 3 comprises 90 modules which are repeated in cycles, and each module comprises 9 layers of GaAs potential wells overlapped with each otherAnd 9 layers of Al 0.15 Ga 0.85 The As potential barrier, starting from GaAs, has the following thickness: 11.4, 2.0, 12.0, 2.0, 12.2, 1.8, 12.8, 1.5, 15.8, 0.6, 9.0, 0.6, 14.0, 3.8, 11.6, 3.5, 11.3, 2.7 (nm), the first two GaAs layers being doped layers with an n-type doping concentration of 10 16 cm -3 . The first upper electrode layer 5 is a circular Ti and Au composite material layer, the thickness of Ti is 20nm, the thickness of Au is 2.5 mu m, and the radius of the circle of Ti under Au is 80 mu m.
The period of the first-order concentric circular metal buried grating along the radial direction is 12.1 mu m; the radius of the center-most circular ring of the grating is 9 mu m; the grating duty cycle is 50%, the number of grating periods is 6, and the grating depth is 2.5 μm. The second upper electrode layer 6 is a ring-shaped Ti and Au composite material layer, the thickness of Ti is 20nm, the thickness of Au is 1 mu m, and the size of the ring in the radial direction is 250 mu m under the condition of Au. The second upper electrode layer 6 is a second-order concentric circular metal-air grating. The second-order concentric circular metal-air grating has a period of 24.2 mu m along the radial direction, the number of the periods is 10, and the duty ratio is 50%.
The absorption boundary layer 4 is a circular ring-shaped n-type heavily doped GaAs material layer, and the doping concentration of the material is 10 18 cm -3 The thickness of the material is 0.6 μm, and the size of the circular ring along the radial direction is 300 μm.
Finally, it should be noted that the above embodiments are only for illustrating the technical solution of the present patent and not for limiting the same, and although the present patent has been described in detail with reference to the preferred embodiments, it should be understood by those skilled in the art that the technical solution of the present patent may be modified or substituted equally without departing from the spirit and scope of the technical solution of the present patent, and all such modifications are intended to be covered by the scope of the claims of the present patent. Not described in detail in this patent is the conventional technical content.
Claims (6)
1. A terahertz quantum cascade laser for generating radial polarized column vector beams comprises a substrate layer (1), a lower electrode layer (2) and an active region layer (3); the method is characterized in that:
the structure of the terahertz quantum cascade laser for generating the radial polarized column vector beam sequentially comprises the following components from bottom to top: the active area layer (3) is provided with a circular first upper electrode layer (5) positioned at the center, a circular second upper electrode layer (6) surrounding the first upper electrode layer (5) and a circular absorption boundary layer (4) surrounding the second upper electrode layer (6); the upper surface of the junction of the active region layer (3) and the first upper electrode layer (5) is corroded to form an annular groove, the corroded groove is filled in the first upper electrode layer (5) to form a first-order concentric circular metal buried grating, and the thickness of the first upper electrode layer (5) is equal to the depth of the groove; the first-order concentric circular metal buried grating is aligned with the center of the second-order concentric circular metal-air grating structure of the second upper electrode layer (6).
2. A terahertz quantum cascade laser for generating a radially polarized column vector beam according to claim 1, wherein: the lower electrode layer (2) is a Ti and Au composite material layer, the thickness of Ti is 10nm-20nm, and the thickness of Au is 0.8 mu m-1 mu m, wherein Ti is on Au.
3. A terahertz quantum cascade laser for generating a radially polarized column vector beam according to claim 1, wherein: the first upper electrode layer (5) is a circular Ti and Au composite material layer, the thickness of Ti is 10nm-20nm, the thickness of Au is 1.5 mu m-2.5 mu m, and the radius of the circle of Ti under Au is 80 mu m-130 mu m.
4. A terahertz quantum cascade laser for generating a radially polarized column vector beam according to claim 1, wherein: the period of the first-order concentric circular metal buried grating along the radial direction is 1/2 of the wavelength of light in a medium at the working frequency, and the corresponding period is 12.1 mu m; the radius of the center-most ring of the grating is 3/4 of the period of the grating, and the corresponding radius is 9 mu m; the grating duty ratio is 50%, the number of grating periods is 6-10, and the grating depth is 1.5-2.5 μm.
5. A terahertz quantum cascade laser for generating a radially polarized column vector beam according to claim 1, wherein: the second upper electrode layer (6) is a ring-shaped Ti and Au composite material layer, the thickness of Ti is 10nm-20nm, the thickness of Au is 0.8 mu m-1 mu m, wherein the size of a ring in the radial direction of Ti under Au is 150 mu m-250 mu m; the second upper electrode layer (6) is in a second-order concentric circular metal-air grating structure; the second-order concentric circle metal-air grating has a period along the radius direction of one wavelength of light in a medium at the working frequency, the corresponding period is 24.2 mu m, the number of periods is 6-10, and the duty ratio is 50%.
6. A terahertz quantum cascade laser for generating a radially polarized column vector beam according to claim 1, wherein: the absorption boundary layer (4) is a circular ring-shaped n-type heavily doped GaAs material layer, the thickness of the material is 0.6 mu m, and the size of the circular ring along the radial direction is 200 mu m-300 mu m.
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