CN219676357U - Dispersion objective lens for spectrum confocal displacement sensor - Google Patents
Dispersion objective lens for spectrum confocal displacement sensor Download PDFInfo
- Publication number
- CN219676357U CN219676357U CN202320127304.9U CN202320127304U CN219676357U CN 219676357 U CN219676357 U CN 219676357U CN 202320127304 U CN202320127304 U CN 202320127304U CN 219676357 U CN219676357 U CN 219676357U
- Authority
- CN
- China
- Prior art keywords
- prism
- pinhole
- dispersion
- displacement sensor
- objective lens
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 239000006185 dispersion Substances 0.000 title claims abstract description 34
- 238000006073 displacement reaction Methods 0.000 title claims abstract description 19
- 238000001228 spectrum Methods 0.000 title claims abstract description 16
- 230000003595 spectral effect Effects 0.000 claims abstract description 20
- 230000004075 alteration Effects 0.000 claims abstract description 14
- 239000013307 optical fiber Substances 0.000 claims description 4
- 238000012360 testing method Methods 0.000 abstract description 4
- 238000005259 measurement Methods 0.000 description 9
- 238000013461 design Methods 0.000 description 3
- 230000003287 optical effect Effects 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000004624 confocal microscopy Methods 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 238000000386 microscopy Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000005304 optical glass Substances 0.000 description 1
- 239000003973 paint Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 210000001747 pupil Anatomy 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000012876 topography Methods 0.000 description 1
Landscapes
- Microscoopes, Condenser (AREA)
Abstract
The utility model discloses a dispersion objective lens for a spectrum confocal displacement sensor, which comprises a computer, a spectrometer, a beam splitter prism, a dispersion prism, a pinhole PA, a pinhole PB, a white light source and an M point, wherein the spectrometer is electrically connected with the computer, the dispersion prism is positioned at one side of the beam splitter prism, the pinhole PA is fixedly arranged at the transmitting end of the spectrometer, the pinhole PB is fixedly arranged at the top of the dispersion prism, the white light source is positioned above the dispersion prism, and the M point is positioned below the dispersion prism. The dispersive objective lens for the spectral confocal displacement sensor enables the focusing light spot of the dispersive objective lens to be obviously reduced, improves the transverse resolution, simultaneously reduces the full-height half-width of the energy distribution after the reflection spectrum, improves the testing precision of the system, reduces the spherical aberration of the dispersive objective lens and improves the testing stability of the system; and at the same time, the structure of the dispersive objective lens is simplified.
Description
Technical Field
The present utility model relates to a dispersive objective, and more particularly, to a dispersive objective for a spectral confocal displacement sensor.
Background
Spectral confocal has many applications in displacement, focal position tracking and three-dimensional morphology measurement, as early as seventies in the last century, and a technology that can use chromatic aberration of a microscope objective to detect surface morphology is proposed by a learner, couttney Pratt et al; then Molesini and other scholars build a surface profiler based on a spectrum confocal principle by using a group of lenses with chromatic aberration which are specially designed; boyde.a et al have extended its use in confocal microscopy which has revolutionized the field of microscopy. Thereafter, many foreign scholars have conducted intensive research on measurement techniques based on the principle of spectral confocal, and derived many application examples in the field of measurement: such as surface profile and topography measurements, submicron scale fine structure measurements, displacement measurements in the semiconductor industry and automotive industry, thickness measurements of optical glass and biological films, color measurements in the paint and printing industry, and the like. At present, developed countries have very mature mastering the technology, industrial-grade spectral confocal related products appear on the market, and the working frequency response reaches more than kilohertz.
The spectral confocal displacement sensor is a non-contact sensor based on a confocal principle and adopting a wide-spectrum light source, the highest precision of the spectral confocal displacement sensor can reach the submicron level, almost all material surfaces can be measured, and the spectral confocal displacement sensor has wide application due to the characteristics of non-contact and high precision. One of the key techniques of spectral confocal is to encode the distance using spectral wavelengths and then decode the code using a photoelectric conversion device. In the existing method, the design of the dispersion objective lens mainly has two targets: one is to achieve an axial dispersion range (a measurement range well known in the art) and the other is to correct the on-axis spherical aberration. Because of the limitation of processing cost and implementation difficulty, residual spherical aberration usually exists, the existence of the residual spherical aberration directly affects the full-height half-width of the beam energy of the return beam in the spectrum decoding system, and the accuracy of spectrum peak positioning is reduced, so that the measurement accuracy of the spectrum confocal system is affected. Meanwhile, the existence of the residual spherical aberration increases the spot size of a focused light spot, and the large spot size directly influences the transverse resolution of a spectral confocal system. Theoretically, from the geometric optics perspective, the central ray of the optical axis includes all wavelengths of light, and after the light is reflected (scattered) by the measured surface and returned to the spectrum decoding system, the full-width at half maximum of the beam energy is increased, and the accuracy of spectrum peak positioning is reduced. In the field of optical design, the maximum residual amount of on-axis spherical aberration correction usually occurs at the 0.707 pupil position, and the residual amount of spherical aberration at this position also increases the full-width half-maximum of the beam energy, and reduces the accuracy of spectral peak positioning.
Disclosure of Invention
In view of the foregoing problems in the prior art, the present utility model provides a dispersive objective for a spectral confocal displacement sensor.
In order to achieve the above purpose, the present utility model provides the following technical solutions:
the utility model provides a dispersion objective for spectral confocal displacement sensor, includes computer, spectrum appearance, beam split prism, dispersion prism, pinhole PA, pinhole PB, white light source and M point, the spectrum appearance is connected with the computer electricity, dispersion prism is located one side of beam split prism, pinhole PA is fixed to be set up at the transmitting end of spectrum appearance, pinhole PB is fixed to be set up at the top of dispersion prism, white light source is located the top of dispersion prism, M point is located the below of dispersion prism.
Preferably, along the M point, the non-light-transmitting portion is located at the dispersing prism and below the dispersing prism, and the annular light-transmitting portion is located at the M point to the dispersing prism and below the dispersing prism.
Preferably, the pinhole PA is a light-emitting pinhole or a light-emitting end of an optical fiber.
Preferably, the light passing portions of the pinholes PB are discontinuously distributed.
Preferably, there is a region that blocks light propagation in a predetermined range at the center of the pinhole PB.
Preferably, there is a region that blocks light propagation in a predetermined range of the residual maximum spherical aberration band of the color dispersion prism.
Compared with the prior art, the utility model has the beneficial effects that:
according to the utility model, through the optimized design of the diaphragm structure, the focusing light spot of the dispersion objective lens is obviously reduced, the transverse resolution is improved, meanwhile, the full-height half-width of the energy distribution after the reflection spectrum is reduced, the testing precision of the system is improved, the spherical aberration of the dispersion objective lens is reduced, and the stability of the system test is improved; and at the same time, the structure of the dispersive objective lens is simplified.
Drawings
FIG. 1 is a schematic view of a dispersive objective lens according to the present utility model.
The marks in the figure: 1. a computer; 2. a spectrometer; 3. a beam-splitting prism; 4. a dispersion prism; 5. pinhole PA; 6. a pinhole PB; 7. a white light source; 8. and M point.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
Referring to fig. 1, the present utility model provides a technical solution: the utility model provides a dispersion objective for spectral confocal displacement sensor, including computer 1, spectrometer 2, beam splitter prism 3, dispersion prism 4, pinhole PA5, pinhole PB6, white light source 7 and M point 8, spectrometer 2 is connected with the computer 1 electricity, dispersion prism 4 is located one side of beam splitter prism 3, pinhole PA5 is fixed to be set up at the transmitting end of spectrometer 2, pinhole PB6 is fixed to be set up at the top of dispersion prism 4, white light source 7 is located above dispersion prism 4, M point 8 is located below dispersion prism 4;
along the M point 8, the non-light-transmitting portion is located between the dispersing prism 4 and the lower portion thereof, the annular light-transmitting portion is located between the M point 8 and the dispersing prism 4 and the lower portion thereof, the pinhole PA5 is a light-emitting aperture or a light-emitting end of an optical fiber, the light-transmitting portion of the pinhole PB6 is discontinuously distributed, a region for blocking light propagation is provided in a predetermined range of the center of the pinhole PB6, and a region for blocking light propagation is provided in a predetermined range of a residual maximum spherical aberration band of the color dispersing prism 4.
Working principle: the pinhole PA5 is not particularly limited, for example, may be a light-emitting pinhole or an optical fiber light-emitting end, after light beams emitted from the pinhole PA5 sequentially pass through the pinhole PB6 and the dispersion prism 4, light with different wavelengths are dispersed along the optical axis direction to form dispersed light beams, different distances correspond to different wavelengths, the light-emitting device comprises a first annular light-passing portion and a second annular light-passing portion disposed at the periphery of the first annular light-passing portion, and the light-passing portion of the dispersion prism 3 is divided into two portions: the dispersing prism 4 and the lower part thereof are non-light-passing parts, the M point 8 to the dispersing prism 4 and the lower part thereof are annular light-passing parts, the structure of the dispersing prism 3 of the objective lens is discontinuously distributed, the aperture diaphragm of the objective lens is used for preventing light transmission in a certain range of the center, the aperture diaphragm of the objective lens is used for preventing light transmission in a specific area of the residual maximum spherical aberration zone of the dispersing objective lens, and the radius value of the aperture diaphragm is normalized.
Finally, it should be noted that the above description is only for illustrating the technical solution of the present utility model, and not for limiting the scope of the present utility model, and that the simple modification and equivalent substitution of the technical solution of the present utility model can be made by those skilled in the art without departing from the spirit and scope of the technical solution of the present utility model.
Claims (6)
1. A dispersion objective lens for a spectrum confocal displacement sensor is characterized by comprising a computer (1), a spectrometer (2), a beam splitter prism (3), a dispersion prism (4), a pinhole PA (5), a pinhole PB (6), a white light source (7) and an M point (8), wherein the spectrometer (2) is electrically connected with the computer (1), the dispersion prism (4) is positioned on one side of the beam splitter prism (3), the pinhole PA (5) is fixedly arranged at the transmitting end of the spectrometer (2), the pinhole PB (6) is fixedly arranged at the top of the dispersion prism (4), the white light source (7) is positioned above the dispersion prism (4), and the M point (8) is positioned below the dispersion prism (4).
2. A dispersive objective for a spectral confocal displacement sensor according to claim 1, characterized in that along said M-point (8), the non-light-passing portion is at and below the dispersive prism (4), and the annular light-passing portion is at and below the M-point (8) to the dispersive prism (4).
3. A dispersive objective for a spectral confocal displacement sensor according to claim 1, wherein the pinhole PA (5) is an exit aperture or an optical fiber exit end.
4. A dispersive objective for a spectral confocal displacement sensor according to claim 1, characterized in that the light-passing portion of the pinhole PB (6) is discontinuously distributed.
5. A dispersive objective lens for a spectral confocal displacement sensor according to claim 1, characterized in that there is a region of impeding light propagation in a central predetermined range of said pinhole PB (6).
6. A dispersive objective for a spectral confocal displacement sensor according to claim 1, characterized in that there is a region of obstruction to light propagation in a predetermined range of the residual maximum spherical aberration band of the chromatic dispersive prism (4).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320127304.9U CN219676357U (en) | 2023-01-16 | 2023-01-16 | Dispersion objective lens for spectrum confocal displacement sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320127304.9U CN219676357U (en) | 2023-01-16 | 2023-01-16 | Dispersion objective lens for spectrum confocal displacement sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219676357U true CN219676357U (en) | 2023-09-12 |
Family
ID=87895509
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202320127304.9U Active CN219676357U (en) | 2023-01-16 | 2023-01-16 | Dispersion objective lens for spectrum confocal displacement sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219676357U (en) |
-
2023
- 2023-01-16 CN CN202320127304.9U patent/CN219676357U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN108817656B (en) | Laser focusing system for realizing coaxial displacement measurement function | |
| US20130010286A1 (en) | Method and device of differential confocal and interference measurement for multiple parameters of an element | |
| CN113375572B (en) | Method and system for measuring thickness of GRIN lens by spectrum confocal method | |
| CN101769821A (en) | Lens refractive index and thickness measuring method and device based on differential confocal technology | |
| Bai et al. | Improved chromatic confocal displacement-sensor based on a spatial-bandpass-filter and an X-shaped fiber-coupler | |
| CN101922919B (en) | Non-contact measurement method for geometric parameters of optical part and measuring device thereof | |
| CN112556990A (en) | Lens refractive index measuring device and measuring method thereof | |
| CN112556991A (en) | Lens refractive index measuring device and measuring method thereof | |
| CN113804651B (en) | Lens refractive index measuring device and method based on multi-wavelength astigmatic probe | |
| CN109458939A (en) | With the lens center thickness measurement method combined of quickly feeling relieved | |
| CN219676357U (en) | Dispersion objective lens for spectrum confocal displacement sensor | |
| CN210863101U (en) | Lens refractive index measuring device | |
| CN108535846B (en) | Chromatic dispersion collimating objective lens | |
| CN112902875A (en) | Aspheric reflector curvature radius detection device and method | |
| CN110986836B (en) | High-precision roughness measuring device based on annular core optical fiber | |
| CN102547048A (en) | Laser scanning device | |
| CN214173280U (en) | Improved dispersion objective lens | |
| CN210863100U (en) | Lens refractive index measuring device | |
| US4074937A (en) | Optical measuring device | |
| CN2599524Y (en) | Dot diffraction interferometer for detecting surface shape | |
| CN110567379B (en) | Spectrum confocal displacement sensor based on chirped fiber bragg grating | |
| CN221173297U (en) | Line spectrum confocal measuring device | |
| CN111964580A (en) | Device and method for detecting position and angle of film based on optical lever | |
| CN217060621U (en) | Optical system, dispersive objective lens and spectrum confocal sensor | |
| CN215893972U (en) | Novel multi-wavelength astigmatic probe |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant |