CN219659911U - MEMS microphone - Google Patents
MEMS microphone Download PDFInfo
- Publication number
- CN219659911U CN219659911U CN202320755451.0U CN202320755451U CN219659911U CN 219659911 U CN219659911 U CN 219659911U CN 202320755451 U CN202320755451 U CN 202320755451U CN 219659911 U CN219659911 U CN 219659911U
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- CN
- China
- Prior art keywords
- substrate
- back plate
- gasket
- mems microphone
- vibrating diaphragm
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Links
- 239000000758 substrate Substances 0.000 claims abstract description 32
- 230000000149 penetrating effect Effects 0.000 abstract description 2
- 125000006850 spacer group Chemical group 0.000 description 16
- 238000005516 engineering process Methods 0.000 description 3
- 230000001413 cellular effect Effects 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000010295 mobile communication Methods 0.000 description 2
- 238000004891 communication Methods 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000005459 micromachining Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 230000005236 sound signal Effects 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
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- Electrostatic, Electromagnetic, Magneto- Strictive, And Variable-Resistance Transducers (AREA)
Abstract
The utility model provides an MEMS microphone, which comprises a substrate with a back cavity and a capacitance system arranged on the substrate, wherein the capacitance system comprises a back plate and a vibrating diaphragm arranged opposite to the back plate, the vibrating diaphragm is positioned between the substrate and the back plate, the vibrating diaphragm is provided with a through hole, the back plate comprises a body part, an extension column extending from the body part to the substrate and penetrating through the through hole, and a gasket connected with the extension column, the gasket is positioned between the vibrating diaphragm and the substrate, one end of the extension column is connected with the body part of the back plate, and the other end of the extension column is connected with the gasket. Compared with the related art, the MEMS microphone provided by the utility model can enhance the reliability of products.
Description
[ field of technology ]
The utility model relates to the field of electroacoustic conversion, in particular to an MEMS microphone.
[ background Art ]
In recent years mobile communication technology has rapidly evolved and consumers increasingly use mobile communication devices, such as cellular telephones, internet enabled cellular telephones, personal digital assistants or other devices that communicate over a private communication network, where a microphone is one of the important components, in particular a MEMS microphone.
A Micro-Electro-Mechanical System (MEMS) microphone is an electrical transducer manufactured by using a micromachining technology, and has the characteristics of small volume, good frequency response, low noise and the like. As electronic devices are miniaturized and light and thin, MEMS microphones are increasingly used in these devices.
The MEMS microphone in the related art comprises a substrate with a back cavity and a capacitance system arranged on the substrate, wherein the capacitance system comprises a back plate and a vibrating diaphragm arranged opposite to the back plate. The vibrating diaphragm is located one side of the back plate, which is close to the substrate, and the vibrating diaphragm is contacted with the edge of the substrate in the vibration process, especially when the vibrating diaphragm is impacted by a large force, so that the strength and the reliability of the MEMS are reduced.
Accordingly, there is a need to provide an improved MEMS microphone that addresses the above-described problems.
[ utility model ]
The utility model aims to provide a MEMS microphone with higher reliability.
In order to solve the technical problem, the MEMS microphone comprises a substrate with a back cavity and a capacitance system arranged on the substrate, wherein the capacitance system comprises a back plate and a vibrating diaphragm which is arranged opposite to the back plate, the vibrating diaphragm is positioned between the substrate and the back plate, the vibrating diaphragm is provided with a through hole, the back plate comprises a body part, an extending column which extends from the body part to the substrate and penetrates through the through hole, and a gasket connected with the extending column, the gasket is positioned between the vibrating diaphragm and the substrate, one end of the extending column is connected with the body part of the back plate, and the other end of the extending column is connected with the gasket.
Preferably, the projection of the gasket along the vibration direction of the diaphragm is at least partially located on the substrate.
Preferably, the width of the spacer is greater than the width of the extension post.
Preferably, the width of the spacer is larger than the aperture of the through hole.
Preferably, the extension column and the body part are of a unitary structure.
Preferably, the spacer is an insulating spacer.
Preferably, the extension column and the gasket are hollow annular structures.
Compared with the related art, the gasket connected with the body part of the backboard is arranged between the vibrating diaphragm and the substrate, so that the vibrating diaphragm is prevented from being in direct contact with the edge of the substrate, the strength of the vibrating diaphragm is enhanced, and the reliability of a product can be improved.
[ description of the drawings ]
For a clearer description of the technical solutions of the embodiments of the present utility model, the drawings that are needed in the description of the embodiments will be briefly introduced below, it being obvious that the drawings in the description below are only some embodiments of the present utility model, and that other drawings can be obtained according to these drawings without inventive effort for a person skilled in the art, wherein:
fig. 1 is a cross-sectional view of a MEMS microphone provided by the present utility model.
[ detailed description ] of the utility model
The following description of the embodiments of the present utility model will be made clearly and fully with reference to the accompanying drawings, in which it is evident that the embodiments described are only some, but not all embodiments of the utility model. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
Referring to fig. 1, a MEMS microphone 100 according to the present utility model includes a substrate 11 having a back cavity 10 and a capacitive system 20 disposed on the substrate 11. The capacitive system 20 comprises a back plate 21 and a diaphragm 22 arranged opposite to the back plate 21, the diaphragm 22 being located on a side of the back plate 21 close to the substrate 11. When sound pressure acts on the diaphragm 22, a pressure difference exists on two sides of the diaphragm 22 opposite to the back plate 21 and the back plate 21, so that the diaphragm 22 moves close to the back plate 21 or away from the back plate 21, thereby causing the capacitance between the diaphragm 22 and the back plate 21 to change, and realizing the conversion from sound signals to electric signals.
The diaphragm 22 is provided with a through hole 220, which through hole 220 can be used for adjusting the damping of the diaphragm 22. The back plate 21 includes a body portion 211, an extension column 212 extending from the body portion 211 toward the base 11 and penetrating the through hole 220, and a spacer 213 connected to the extension column 212, the body portion 211 is provided with a plurality of back plate holes 210, one end of the extension column 212 is connected to the body portion 211 of the back plate 21, the other end is connected to the spacer 213, and the spacer 213 is located between the diaphragm 22 and the base 11.
In the present embodiment, the projection of the spacer 213 along the vibration direction of the diaphragm 22 is at least partially located on the substrate 11. When the diaphragm 22 is in a working state under sound pressure, the diaphragm 22 moves upwards, and the design of the back plate 21 does not influence the freedom degree of the diaphragm 22, so that the sensitivity of the diaphragm 22 is not lost; when the MEMS microphone 100 falls or is impacted by a large force, the spacer 213 of the back plate 21 protects the diaphragm 22 from directly contacting the edge of the substrate 11, thereby strengthening the diaphragm 22 and alleviating damage to the diaphragm 22 when the diaphragm 22 contacts the substrate 11.
Specifically, the width of the spacer 213 is greater than the width of the extension column 212 and the aperture of the through hole 220, so that when the amplitude of the diaphragm 22 is too large, the diaphragm 22 contacts with the spacer 213, or the spacer 213 contacts with the substrate 11, so as to protect the diaphragm 22.
The extension column 212 and the body 211 may be integrally formed, i.e. the nitride back plate is directly deposited, and the spacer 213 is made of an insulating material. In addition, in the present embodiment, the extension column 212 and the spacer 213 are hollow ring structures, and in other embodiments, the extension column and the spacer may be several independent structures.
Compared with the related art, by providing the spacer 213 connected to the body portion 211 of the back plate 21 between the diaphragm 22 and the substrate 11, the diaphragm 22 is prevented from directly contacting the edge of the substrate 11, the strength of the diaphragm 22 is enhanced, and the reliability of the product can be improved.
While the utility model has been described with respect to the above embodiments, it should be noted that modifications can be made by those skilled in the art without departing from the inventive concept, and these are all within the scope of the utility model.
Claims (7)
1. The MEMS microphone comprises a substrate with a back cavity and a capacitance system arranged on the substrate, wherein the capacitance system comprises a back plate and a vibrating diaphragm which is arranged opposite to the back plate, the vibrating diaphragm is positioned between the substrate and the back plate, and the MEMS microphone is characterized in that the vibrating diaphragm is provided with a through hole, the back plate comprises a body part, an extension column which extends from the body part to the substrate and penetrates through the through hole, and a gasket connected with the extension column, the gasket is positioned between the vibrating diaphragm and the substrate, one end of the extension column is connected with the body part of the back plate, and the other end of the extension column is connected with the gasket.
2. The MEMS microphone of claim 1, wherein: the projection of the gasket along the vibration direction of the vibrating diaphragm is at least partially positioned on the substrate.
3. The MEMS microphone of claim 1, wherein: the width of the gasket is greater than the width of the extension post.
4. The MEMS microphone of claim 1, wherein: the width of the gasket is larger than the aperture of the through hole.
5. The MEMS microphone of claim 1, wherein: the extension column and the body part are of an integrated structure.
6. The MEMS microphone of claim 1, wherein: the gasket is an insulating gasket.
7. The MEMS microphone of claim 1, wherein: the extending column and the gasket are of hollow annular structures.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320755451.0U CN219659911U (en) | 2023-04-04 | 2023-04-04 | MEMS microphone |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320755451.0U CN219659911U (en) | 2023-04-04 | 2023-04-04 | MEMS microphone |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219659911U true CN219659911U (en) | 2023-09-08 |
Family
ID=87857429
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202320755451.0U Active CN219659911U (en) | 2023-04-04 | 2023-04-04 | MEMS microphone |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219659911U (en) |
-
2023
- 2023-04-04 CN CN202320755451.0U patent/CN219659911U/en active Active
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| Date | Code | Title | Description |
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| GR01 | Patent grant | ||
| GR01 | Patent grant |