CN219626600U - Detection device for semiconductor wafer processing - Google Patents
Detection device for semiconductor wafer processing Download PDFInfo
- Publication number
- CN219626600U CN219626600U CN202320357291.4U CN202320357291U CN219626600U CN 219626600 U CN219626600 U CN 219626600U CN 202320357291 U CN202320357291 U CN 202320357291U CN 219626600 U CN219626600 U CN 219626600U
- Authority
- CN
- China
- Prior art keywords
- fixedly connected
- semiconductor wafer
- wall
- hose
- worm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000001514 detection method Methods 0.000 title claims abstract description 46
- 239000004065 semiconductor Substances 0.000 title claims abstract description 30
- 238000012545 processing Methods 0.000 title claims abstract description 16
- 230000005540 biological transmission Effects 0.000 claims abstract description 66
- 239000000428 dust Substances 0.000 claims abstract description 53
- 238000012546 transfer Methods 0.000 claims description 10
- 238000007789 sealing Methods 0.000 claims description 8
- 238000007689 inspection Methods 0.000 claims 5
- 238000012423 maintenance Methods 0.000 abstract description 4
- 230000000694 effects Effects 0.000 abstract description 2
- 235000012431 wafers Nutrition 0.000 description 18
- 238000005457 optimization Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 230000009471 action Effects 0.000 description 3
- 238000010521 absorption reaction Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000010365 information processing Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
Landscapes
- Sampling And Sample Adjustment (AREA)
Abstract
The utility model discloses a detection device for processing a semiconductor wafer, which comprises a detection machine, wherein the top of the left side of the detection machine is fixedly connected with a transmission box, the top of the transmission box is provided with a dust collector, the bottom output end of the dust collector penetrates into the transmission box and is communicated with a hose, the output end of the hose is communicated with a dust hood, the bottom of the inner wall of the transmission box is fixedly connected with a motor, the output end of the motor is fixedly connected with a worm, and the top of the worm is movably connected with the top of the inner wall of the transmission box through a bearing. The utility model solves the problems that most of detection devices in the prior market do not have the functions of feeding and dust collection, so that the semiconductor wafer can carry dust when entering the detection device, the detection device is easy to have detection faults, maintenance is needed, and the normal use of the detection device is influenced, and the effect of feeding and dust collection is achieved.
Description
Technical Field
The utility model relates to the technical field of semiconductors, in particular to a detection device for processing a semiconductor wafer.
Background
A semiconductor is a substance having a conductivity between an insulator and a conductor, and the conductivity is easily controlled, and can be used as a component material for information processing, and is very important from the viewpoint of technological or economic development, and many electronic products such as computers, mobile phones and digital recorders have a core unit for processing information by utilizing the conductivity change of the semiconductor.
The detection device is needed when the semiconductor wafer is processed, but most detection devices on the market do not have the functions of feeding and dust collection, so that the semiconductor wafer can carry dust when entering the detection device, the detection device is easy to detect faults, maintenance is needed, and normal use of the detection device is affected.
Therefore, the detection device needs to be designed and modified, and the phenomenon that dust is carried by the detection device and enters the detection device is effectively prevented.
Disclosure of Invention
In order to solve the problems in the prior art, the utility model aims to provide a detection device for processing a semiconductor wafer, which has the advantages of feeding and dust collection functions, and solves the problems that most detection devices in the prior art do not have the feeding and dust collection functions, so that the semiconductor wafer can carry dust when entering the detection device, the detection device is easy to have detection faults, maintenance is needed, and normal use of the detection device is affected.
In order to achieve the above purpose, the present utility model provides the following technical solutions: the utility model provides a detection device is used in semiconductor wafer processing, includes the detection machine, the left top fixedly connected with transmission case of detection machine, the top of transmission case is provided with the dust catcher, the bottom output of dust catcher runs through to the inside of transmission case and communicates there is the hose, the output intercommunication of hose has the dust cage, the bottom fixedly connected with motor of transmission case inner wall, the output fixedly connected with worm of motor, the top of worm passes through the top swing joint of bearing and transmission case inner wall, the right side meshing of worm has the worm wheel, the top fixedly connected with pulley of worm wheel, the top of pulley passes through the top swing joint of bearing and transmission case inner wall, the bottom fixedly connected with screw rod of pulley, the surface threaded connection of screw rod has the transfer line, the bottom of transfer line and the top fixedly connected with of dust cage.
As preferable in the utility model, the right side of the motor is fixedly connected with a fixed plate, and the bottom of the fixed plate is fixedly connected with the bottom of the inner wall of the transmission case.
As the preferable mode of the utility model, the bottom of the worm wheel is fixedly connected with a supporting rod, the bottom of the supporting rod is movably connected with a supporting block through a bearing, and the back surface of the supporting block is fixedly connected with the rear side of the inner wall of the transmission case.
As the preferable mode of the utility model, the left side of the transmission rod is fixedly connected with a sliding block, the inside of the sliding block is connected with a guide rod in a sliding way, and the bottom of the guide rod is fixedly connected with the bottom of the inner wall of the transmission box.
Preferably, the bottom of the transmission case is provided with an opening, the width of the opening is larger than that of the transmission rod and the hose, and the opening is matched with the transmission rod and the hose for use.
As the preferable mode of the utility model, the surfaces of the transmission rod and the hose are sleeved with sealing gaskets, and the top of each sealing gasket is fixedly connected with the bottom of the transmission box.
Compared with the prior art, the utility model has the following beneficial effects:
1. according to the utility model, the detection machine, the transmission box, the dust collector, the hose, the dust collection cover, the motor, the worm wheel, the belt pulley, the screw rod and the transmission rod are arranged to be matched for use, when the detection machine is used, a semiconductor wafer is placed at the top of the detection machine, then the motor is started by a user, the motor drives the worm to rotate through the output end, the worm wheel is meshed with the worm wheel to drive the worm wheel to rotate, the worm wheel drives the belt pulley to drive the screw rod to rotate, the screw rod drives the transmission rod to move downwards on the surface of the screw rod through the threaded connection transmission rod, the transmission rod drives the dust collection cover to move downwards, when the dust collection cover moves to a proper position, the dust collector is started, the dust collector sucks dust from the semiconductor wafer at the top of the detection machine through the hose and the dust collection cover, so that the problem that the detection device is easy to generate detection faults when the semiconductor wafer enters the detection device is solved, and maintenance is needed, and the detection device for processing the semiconductor wafer has the advantages of feeding dust collection function.
2. According to the utility model, through the arrangement of the fixing plate, the motor can be supported in an auxiliary way, so that the motor is prevented from being unstable in single-point support and shaking during working.
Drawings
FIG. 1 is a schematic diagram of the structure of the present utility model;
FIG. 2 is a cross-sectional view of the gear box of the present utility model;
FIG. 3 is an enlarged view of a portion of FIG. 2A in accordance with the present utility model;
fig. 4 is a perspective view of the transmission case of the present utility model.
In the figure: 1. a detecting machine; 2. a transmission case; 3. a dust collector; 4. a hose; 5. a dust collection cover; 6. a motor; 7. a worm; 8. a worm wheel; 9. a belt pulley; 10. a screw; 11. a transmission rod; 12. a fixing plate; 13. a support rod; 14. a support block; 15. a slide block; 16. a guide rod; 17. an opening; 18. and a sealing gasket.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
As shown in fig. 1 to 4, the detection device for processing semiconductor wafers provided by the utility model comprises a detection machine 1, wherein the top of the left side of the detection machine 1 is fixedly connected with a transmission box 2, the top of the transmission box 2 is provided with a dust collector 3, the bottom output end of the dust collector 3 penetrates into the transmission box 2 and is communicated with a hose 4, the output end of the hose 4 is communicated with a dust hood 5, the bottom of the inner wall of the transmission box 2 is fixedly connected with a motor 6, the output end of the motor 6 is fixedly connected with a worm 7, the top of the worm 7 is movably connected with the top of the inner wall of the transmission box 2 through a bearing, the right side of the worm 7 is meshed with a worm wheel 8, the top of the worm wheel 8 is fixedly connected with a belt pulley 9, the top of the belt pulley 9 is movably connected with the top of the inner wall of the transmission box 2 through a bearing, the bottom of the belt pulley 9 is fixedly connected with a screw 10, the surface of the screw 10 is in threaded connection with a transmission rod 11, and the bottom of the transmission rod 11 is fixedly connected with the top of the dust hood 5.
Referring to fig. 2, a fixing plate 12 is fixedly connected to the right side of the motor 6, and the bottom of the fixing plate 12 is fixedly connected to the bottom of the inner wall of the transmission case 2.
As a technical optimization scheme of the utility model, the motor 6 can be supported in an auxiliary way through the arrangement of the fixing plate 12, so that the motor 6 is prevented from being unstable in single-point support and shaking is generated during working.
Referring to fig. 2, the bottom of the worm wheel 8 is fixedly connected with a supporting rod 13, the bottom of the supporting rod 13 is movably connected with a supporting block 14 through a bearing, and the back surface of the supporting block 14 is fixedly connected with the back side of the inner wall of the transmission case 2.
As a technical optimization scheme of the utility model, the worm wheel 8 can be supported in an auxiliary way through the arrangement of the supporting rods 13 and the supporting blocks 14, so that the worm wheel 8 is prevented from tilting during movement.
Referring to fig. 2, a slider 15 is fixedly connected to the left side of the transmission rod 11, a guide rod 16 is slidably connected to the inside of the slider 15, and the bottom of the guide rod 16 is fixedly connected to the bottom of the inner wall of the transmission case 2.
As a technical optimization scheme of the utility model, the transmission rod 11 can be limited by the arrangement of the sliding block 15 and the guide rod 16, so that the following rotation phenomenon of the transmission rod 11 during movement can be prevented.
Referring to fig. 3, an opening 17 is formed in the bottom of the transmission case 2, the width of the opening 17 is larger than that of the transmission rod 11 and the hose 4, and the opening 17 is matched with the transmission rod 11 and the hose 4.
As a technical optimization scheme of the utility model, through the arrangement of the opening 17, the transmission rod 11 and the hose 4 can completely and mechanically transmit through the opening 17, and the phenomenon that the transmission rod 11 and the hose 4 are blocked at the opening 17 due to the fact that the width of the opening 17 is too narrow is avoided.
Referring to fig. 3, the surfaces of the transmission rod 11 and the hose 4 are sleeved with a sealing gasket 18, and the top of the sealing gasket 18 is fixedly connected with the bottom of the transmission case 2.
As a technical optimization scheme of the utility model, the joint of the transmission rod 11 and the hose 4 and the transmission box 2 can be sealed through the arrangement of the sealing gasket 18, so that the internal effect of the transmission box 2 is improved.
The working principle and the using flow of the utility model are as follows: when the dust collector is used, a semiconductor wafer is placed at the top of the detector 1, then a user starts the motor 6, the motor 6 drives the worm 7 to rotate through the output end, the worm 7 is meshed with the worm wheel 8 to drive the worm wheel 8 to rotate, the worm wheel 8 drives the belt pulley 9 to rotate, the belt pulley 9 drives the screw 10 to rotate, the screw 10 drives the transmission rod 11 to move downwards on the surface of the screw 10 through the threaded connection transmission rod 11, the transmission rod 11 drives the dust collection cover 5 to move downwards, when the dust collection cover 5 moves to a proper position, then the dust collector 3 is started, and the dust collector 3 sucks dust from the semiconductor wafer at the top of the detector 1 through the hose 4 and the dust collection cover 5.
To sum up: this detection device for semiconductor wafer processing, through detecting machine 1, the transmission case 2, the dust catcher 3, the hose 4, dust cage 5, motor 6, worm 7, worm wheel 8, belt pulley 9, screw rod 10 and transfer line 11 cooperation use, during the use, place the semiconductor wafer at the top of detecting machine 1, then user's start-up motor 6, motor 6 drives worm 7 through the output and rotates, worm 7 meshing worm wheel 8 drives worm wheel 8 and rotates, worm wheel 8 drives belt pulley 9 and rotates, belt pulley 9 drives screw rod 10 and rotates, screw rod 10 drives transfer line 11 through threaded connection transfer line 11 and moves down at the surface of screw rod 10, the transfer line 11 drives dust cage 5 and moves down, then turn on dust catcher 3, the dust catcher 3 is through hose 4 and dust cage 5 with the semiconductor wafer at detecting machine 1 top dust absorption, most detection device on the existing market does not have the function of feeding dust absorption, lead to the semiconductor wafer can carry the dust when entering detection device inside, thereby cause detection device to appear detecting the condition that detects trouble easily, need to maintain the normal problem that detects the device has been used.
It is noted that relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.
Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.
Claims (6)
1. The utility model provides a detection device is used in semiconductor wafer processing, includes detection machine (1), its characterized in that: the utility model discloses a dust collection device for the dust collection of the dust collection device, including detection machine (1), dust collection box (2), worm (7), worm wheel (8)'s top fixedly connected with belt pulley (9), the top of belt pulley (9) is through the inside of bearing and transmission box (2) inner wall and is linked together there is hose (4), the output intercommunication of hose (4) has dust cage (5), the bottom fixedly connected with motor (6) of transmission box (2) inner wall, the output fixedly connected with worm (7) of motor (6), the top of worm (7) is through the top swing joint of bearing and transmission box (2) inner wall, the right side meshing of worm (7) has worm wheel (8), the top swing joint of top fixedly connected with belt pulley (9) of worm wheel (8), the bottom fixedly connected with screw rod (10) of belt pulley (9), the surface threaded connection of screw rod (10) has transfer line (11), the bottom of transfer line (11) and dust cage (5) inner wall.
2. The inspection apparatus for semiconductor wafer processing according to claim 1, wherein: the right side of motor (6) fixedly connected with fixed plate (12), the bottom of fixed plate (12) is fixedly connected with the bottom of transmission case (2) inner wall.
3. The inspection apparatus for semiconductor wafer processing according to claim 1, wherein: the bottom of worm wheel (8) fixedly connected with bracing piece (13), the bottom of bracing piece (13) is through bearing swing joint has supporting shoe (14), the rear side fixed connection of the back and transmission case (2) inner wall of supporting shoe (14).
4. The inspection apparatus for semiconductor wafer processing according to claim 1, wherein: the left side fixedly connected with slider (15) of transfer line (11), the inside sliding connection of slider (15) has guide arm (16), the bottom of guide arm (16) and the bottom fixed connection of transfer line (2) inner wall.
5. The inspection apparatus for semiconductor wafer processing according to claim 1, wherein: an opening (17) is formed in the bottom of the transmission case (2), the width of the opening (17) is larger than that of the transmission rod (11) and the hose (4), and the opening (17) is matched with the transmission rod (11) and the hose (4).
6. The inspection apparatus for semiconductor wafer processing according to claim 1, wherein: the surface of the transmission rod (11) and the surface of the hose (4) are sleeved with a sealing gasket (18), and the top of the sealing gasket (18) is fixedly connected with the bottom of the transmission box (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320357291.4U CN219626600U (en) | 2023-03-01 | 2023-03-01 | Detection device for semiconductor wafer processing |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320357291.4U CN219626600U (en) | 2023-03-01 | 2023-03-01 | Detection device for semiconductor wafer processing |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219626600U true CN219626600U (en) | 2023-09-01 |
Family
ID=87794663
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202320357291.4U Active CN219626600U (en) | 2023-03-01 | 2023-03-01 | Detection device for semiconductor wafer processing |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219626600U (en) |
-
2023
- 2023-03-01 CN CN202320357291.4U patent/CN219626600U/en active Active
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN206378792U (en) | A kind of computer cabinet with constant temperature dust reduction capability | |
| CN104111415B (en) | PCB board test device | |
| CN219626600U (en) | Detection device for semiconductor wafer processing | |
| CN218382505U (en) | Detection equipment for laser diode | |
| CN216348432U (en) | X-ray fluorescence spectrum detection device for thickness of silicone oil coating on release paper | |
| CN212351716U (en) | Building detects uses material fixing device | |
| CN220519402U (en) | Sealing ring detection equipment for PTFE liquid filter element | |
| CN209627321U (en) | A kind of defect detection equipment of monocrystaline silicon solar cell piece | |
| CN113385831A (en) | Cutting device is used in circuit board processing | |
| CN217234905U (en) | Transformer oil leakage detection and restoration all-in-one machine | |
| CN217787313U (en) | Detection equipment based on hoist and mount motor loss | |
| CN217132748U (en) | Steel pipe water pressure detection device | |
| CN111413605A (en) | Quality detection equipment for phototriode | |
| CN115008327B (en) | Polishing device for automobile part production | |
| CN115346902B (en) | Temperature measuring mechanism for constant temperature device of wafer pickling machine | |
| CN220844274U (en) | Scrap collecting device for belt conveyor | |
| CN218170727U (en) | Serging blanking machine capable of automatically metering | |
| CN218283745U (en) | Lathe headstock with watertight fittings | |
| CN217142336U (en) | Automatic feeding and discharging machine of CNC lathe | |
| CN216770406U (en) | Cloth inspecting machine capable of automatically measuring length | |
| CN211956123U (en) | Photoresist washing unit is used in liquid crystal display production | |
| CN216771654U (en) | Oxidation purity automatic checkout device | |
| CN218086301U (en) | Visual optical coupling shielding case detection packaging machine | |
| CN217901733U (en) | Silicon content detection device in phosphorus pig iron smelting | |
| CN218499409U (en) | Data acquisition control device based on internet of things |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20240511 Address after: No. 186 Wenchang East Road, Taixing High tech Industrial Development Zone, Taizhou City, Jiangsu Province, 225300 Patentee after: Jiangsu Advanced Quancheng Technology Co.,Ltd. Country or region after: China Address before: 214135 North side of Wenchang East Road, Taixing High tech Industrial Development Zone, Taizhou City, Jiangsu Province Patentee before: Jiangsu Advanced Technology Semiconductor Equipment Co.,Ltd. Country or region before: China |
|
| TR01 | Transfer of patent right |