CN219625570U - Low leakage current calibrating device - Google Patents
Low leakage current calibrating device Download PDFInfo
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- CN219625570U CN219625570U CN202320168917.7U CN202320168917U CN219625570U CN 219625570 U CN219625570 U CN 219625570U CN 202320168917 U CN202320168917 U CN 202320168917U CN 219625570 U CN219625570 U CN 219625570U
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- transmission line
- leakage current
- low leakage
- calibration device
- butt joint
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- 239000000523 sample Substances 0.000 claims abstract description 43
- 210000001503 joint Anatomy 0.000 claims abstract description 20
- 238000009434 installation Methods 0.000 claims abstract description 10
- 230000000149 penetrating effect Effects 0.000 claims description 5
- 238000003032 molecular docking Methods 0.000 description 13
- 238000012360 testing method Methods 0.000 description 10
- 238000010586 diagram Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 230000013011 mating Effects 0.000 description 4
- 230000033001 locomotion Effects 0.000 description 3
- 238000012546 transfer Methods 0.000 description 3
- 238000000605 extraction Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
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Abstract
The utility model provides a low leakage current calibration device, and belongs to the technical field of probe calibration. The low leakage current calibration device comprises a clamping installation seat, a rotating connecting line assembly, a driving piece and a calibration source meter; the clamping mounting seat is provided with a plurality of mounting ports which are arranged along the same circumference, and each mounting port is used for placing a probe box to be calibrated; the rotating connecting line component comprises a transmission line, one end of the transmission line is connected with the calibration source meter, the other end of the transmission line is a butt joint end arranged above a probe head of the probe box to be calibrated, and the rotating connecting line component rotates along the circumference under the drive of the driving piece and is pressed down when the butt joint end of the transmission line is aligned with the probe head so as to be effectively connected with the transmission line and the probe head. The low leakage current calibration device has a simpler wiring mode, and can ensure smooth calibration and calibration precision.
Description
Technical Field
The utility model relates to the technical field of probe calibration, in particular to a low leakage current calibration device.
Background
The chip probe needs to be calibrated by detecting through a calibration source table because of low leakage current. Specifically, in the prior art, there is a mode of sequentially connecting the output end of each probe module with the calibration source meter to measure the electric signal, and the mode sequentially connects each probe module to be calibrated and the calibration source meter in a manual mode, so that repeated wiring is needed in the process, and the efficiency is low.
In order to solve the efficiency problem, in the prior art, a wiring mode that probe modules to be calibrated are arranged in sequence and are connected with a calibration source meter one by one through relays is adopted, a control circuit is designed to be connected with each relay, the control circuit is utilized to control each relay to be connected in sequence, and each relay is connected with the calibration source meter one by one, so that electric signal measurement and calibration are carried out one by one.
However, this way of using the relay wiring requires multiple wires to be connected before testing, and, since the relay and the control circuit themselves also act on additional leakage currents, the degree of insulation may be reduced, and especially the influence of the relay on the weak circuit is very large, which may lead to difficult calibration or greatly reduced calibration accuracy.
Disclosure of Invention
The utility model aims to provide a low leakage current calibration device which is simple in wiring mode and capable of ensuring smooth calibration and calibration accuracy.
A further object of the present utility model is to ensure smooth extraction of the transmission line while achieving a secure connection of the rotating arm and the hollow output shaft.
Particularly, the utility model provides a low leakage current calibration device, which comprises a clamping installation seat, a rotary connecting line assembly, a driving piece and a calibration source meter;
the clamping mounting seat is provided with a plurality of mounting ports which are arranged along the same circumference, and each mounting port is used for placing a probe box to be calibrated;
the rotating connecting line component comprises a transmission line, one end of the transmission line is connected with the calibration source meter, the other end of the transmission line is a butt joint end arranged above a probe head of the probe box to be calibrated, and the rotating connecting line component rotates along the circumference under the drive of the driving piece and is pressed down when the butt joint end of the transmission line is aligned with the probe head so as to be effectively connected with the transmission line and the probe head.
Optionally, the rotary connection assembly further includes a rotary arm, one end of which is connected to the driving member, and the other end of which is used for fixing the abutting end of the transmission line.
Optionally, the driving piece includes the motor, be equipped with the hollow output shaft that runs through its own, hollow output shaft with the rotor arm links to each other, the inside of hollow output shaft is equipped with the through-hole for wear to establish the transmission line.
Optionally, the rotating arm is provided with a mounting hole, and the rotating arm is fixedly sleeved on the outer surface of the hollow output shaft.
Optionally, a clamping groove is formed in the bottom surface of the rotating arm, and one end of the clamping groove is communicated with the mounting hole and used for clamping the transmission line.
Optionally, the clamping groove is strip-shaped and extends along the length direction of the rotating arm.
Optionally, the bottom surface department of rotor arm still is equipped with the butt joint recess, the butt joint recess with joint recess interval arrangement, and with the joint recess is kept away from the one end intercommunication of installation trompil, the butt joint recess is used for fixing the butt joint end of transmission line.
Optionally, the docking end of the transmission line is a PCB transfer end and includes a plurality of ports, and the docking groove includes a plurality of openings matched with the docking end.
Optionally, the driving piece further comprises an air cylinder, and the output end of the air cylinder is fixedly connected with the rotating connecting line assembly and used for driving the rotating connecting line assembly to move up and down.
Optionally, the mounting openings are uniformly arranged along the circumference.
According to one embodiment of the utility model, a low leakage current calibration device is provided, and the rotation wiring assembly can rotate around the center of the circumference, so that a transmission line on the rotation wiring assembly can be sequentially connected with the probe heads of each probe box to be calibrated in the rotation process, and electric signals can be transmitted to a test source meter. The connection structure can realize connection of each probe box to be calibrated and the calibration source meter only by arranging one transmission line on the rotary connecting line assembly without connecting the transmission lines to each probe box to be calibrated, so that the wiring mode is simpler. And the additional leakage current caused by the arrangement of a plurality of relays, relay control circuits and the like can not be generated as in the prior art, namely, the leakage current can be reduced by the connection mode of the embodiment, and the smooth calibration and the calibration precision are ensured.
According to one embodiment of the utility model, the motor with the hollow output shaft is used for connecting the rotating arm, so that a transmission line on the rotating arm can pass through a through hole of the hollow output shaft and pass from the output end of the motor to the other end, and the transmission line is not influenced in the process of driving the rotating arm to rotate by the hollow output shaft, such as winding and the like.
According to one embodiment of the utility model, the rotating arm is fixedly connected with the hollow output shaft through arranging the mounting opening at the rotating arm and sleeving the mounting opening on the outer surface of the hollow output shaft, and the connecting mode can ensure the smooth leading-out of the transmission line while realizing the fixedly connection of the rotating arm and the hollow output shaft.
According to one embodiment of the utility model, the butt joint groove is used for fixing the butt joint end of the transmission line, and the butt joint groove and the clamping groove are arranged at intervals, so that part of the transmission line is arranged inside the rotating arm in a penetrating way, and the adapter line can be better fixed.
According to the embodiment of the utility model, the accuracy of the mode of driving the rotary connecting wire assembly to move up and down by adopting the air cylinder is high.
The above, as well as additional objectives, advantages, and features of the present utility model will become apparent to those skilled in the art from the following detailed description of a specific embodiment of the present utility model when read in conjunction with the accompanying drawings.
Drawings
Some specific embodiments of the utility model will be described in detail hereinafter by way of example and not by way of limitation with reference to the accompanying drawings. The same reference numbers will be used throughout the drawings to refer to the same or like parts or portions. It will be appreciated by those skilled in the art that the drawings are not necessarily drawn to scale. In the accompanying drawings:
FIG. 1 is a schematic diagram of a low leakage current calibration device according to one embodiment of the present utility model;
FIG. 2 is a schematic diagram of the assembly of the rotary wire assembly and the driving member of the low leakage current calibration device according to one embodiment of the present utility model;
fig. 3 is a schematic structural diagram of a rotary wire assembly of the low leakage current calibration device according to an embodiment of the present utility model.
Reference numerals:
100-low leakage current calibration device, 10-clamping installation seat, 20-rotation connecting line component, 21-transmission line, 211-connection end, 212-butt end, 22-rotation arm, 221-installation opening, 222-clamping groove, 223-butt groove, 30-driving piece, 31-motor, 311-hollow output shaft and 301-through hole;
200-probe box to be calibrated, 210-probe head.
Detailed Description
Fig. 1 is a schematic diagram of a low leakage current calibration device 100 according to an embodiment of the utility model. Fig. 2 is a schematic diagram illustrating an assembly structure of the rotary wire assembly 20 and the driving member 30 of the low leakage current calibration device 100 according to an embodiment of the present utility model. As shown in fig. 1, in one embodiment, the low leakage current calibration device 100 includes a snap-fit mount 10, a rotational wiring assembly 20, a driver 30, and a calibration source meter (not shown). The clamping mounting base 10 is provided with a plurality of mounting openings arranged along the same circumference, and each mounting opening is used for placing one probe box 200 to be calibrated (also referred to as wafer test head or chip test head in the prior art), for example, in one embodiment, 48 probe boxes 200 to be calibrated are arranged on the circumference, the probe head 210 of each probe box 200 to be calibrated extends upwards, and the test input end of each probe box 200 to be calibrated can be arranged below the clamping mounting base 10 and connected with the test source meter so that the test source meter can apply test electrical signals, such as voltage signals. The rotary harness assembly 20 includes a transmission line 21, one end (i.e., connection end 211 in fig. 1) of the transmission line 21 being connected to the calibration source meter, and the other end being a docking end 212 (see fig. 2) disposed above the probe head 210 of the probe cassette 200 to be calibrated. The rotary wire assembly 20 is rotated circumferentially by the drive member 30 and depressed when the butt end 212 of the transmission wire 21 is aligned with the probe head 210 to operatively connect the transmission wire 21 with the probe head 210. It is obvious that the driving member 30 includes both a rotational output function and a movement output function, and may be a combination of several driving devices, or may be a driving assembly formed by connecting a driving source and a plurality of transmission members, and capable of outputting rotation and movement. The drive 30 can be arranged on a fastening element, which is supported, for example, by a bracket fixedly connected to the clamping mount 10.
The low leakage current calibration device 100 of this embodiment can rotate around the center of the circumference by setting the rotating wire assembly 20, so that the transmission line 21 on the rotating wire assembly 20 can be sequentially connected with the probe heads 210 of each probe box 200 to be calibrated in turn in the rotating process, so as to transmit the electrical signals to the test source meter. Such a connection structure can realize connection of each probe box 200 to be calibrated with the calibration source meter by only setting one transmission line 21 on the rotary connection assembly 20 without connecting the transmission line 21 to each probe box 200 to be calibrated, so that the connection mode is simpler. And the additional leakage current caused by the arrangement of a plurality of relays, relay control circuits and the like can not be generated as in the prior art, namely, the leakage current can be reduced by the connection mode of the embodiment, and the smooth calibration and the calibration precision are ensured.
In one embodiment, the mounting openings are uniformly circumferentially disposed so that the individual probe cassettes 200 to be calibrated are also uniformly circumferentially disposed so that the rotation angle of each rotation is the same when the rotation energy linkage assembly is driven to rotate by the drive member 30.
As shown in fig. 2, in one embodiment, the rotary connection assembly further includes a rotary arm 22, one end of which is connected to the driving member 30, and the other end of which is used to fix the docking end 212 of the transmission line 21, and the docking end 212 may be formed as a flat PCB transferring end, i.e., in the form of fig. 2.
In one embodiment, as shown in fig. 2, the driving member 30 includes a motor 31, the motor 31 is provided with a hollow output shaft 311 penetrating through itself, the hollow output shaft 311 is connected to the rotating arm 22, a through hole 301 is provided inside the hollow output shaft 311 for penetrating the transmission line 21, that is, for guiding the transmission line 21 from one end of the rotating arm 22 to the other end of the motor 31, that is, the upper end in fig. 2, through the through hole 301 of the hollow output shaft 311, and then is connected to the calibration source table, so that the hollow output shaft 311 does not affect the transmission line 21 when rotating.
The present embodiment connects the rotating arm 22 by using the motor 31 having the hollow output shaft 311, so that the transmission line 21 on the rotating arm 22 can pass through the through hole 301 of the hollow output shaft 311, and pass from the output end of the motor 31 to the other end, so that the transmission line 21 is not affected, for example, a winding problem occurs in the process that the hollow output shaft 311 drives the rotating arm 22 to rotate.
Fig. 3 is a schematic diagram of the rotational wiring assembly 20 of the low leakage current calibration device 100 according to an embodiment of the present utility model. As shown in fig. 3, in one embodiment, the rotating arm 22 is provided with a mounting opening 221, and is fixedly sleeved at the outer surface of the hollow output shaft 311.
In the embodiment, the installation hole 221 is formed in the position of the rotating arm 22, and the rotating arm 22 and the hollow output shaft 311 are fixedly connected in a mode that the installation hole 221 is sleeved on the outer surface of the hollow output shaft 311, so that the smooth extraction of the transmission line 21 can be ensured while the rotating arm 22 and the hollow output shaft 311 are fixedly connected.
In one embodiment, as shown in fig. 3, a clamping groove 222 is disposed at the bottom surface of the rotating arm 22, and one end of the clamping groove 222 is communicated with the mounting hole 221 for clamping the transmission line 21. The size of the clamping groove 222 may be slightly smaller than the outer diameter of the transmission line 21, so that the transmission line 21 can be fixed in the clamping groove 222, however, in other embodiments, a plurality of blocking members such as hooks may be disposed at the clamping groove 222 to block the transmission line 21 from falling out, and the fixing of the transmission line 21 is not necessarily achieved through size limitation.
In one embodiment, as shown in fig. 3, the clamping groove 222 is elongated and extends along the length direction of the rotating arm 22.
As shown in fig. 3, in one embodiment, a docking groove 223 is further disposed at the bottom surface of the rotating arm 22, and the docking groove 223 is spaced from the clamping groove 222, and is communicated with one end of the clamping groove 222 away from the mounting hole 221, and the docking groove 223 is used for fixing the docking end 212 of the transmission line 21. When the butt-joint end 212 of the transmission line 21 is a PCB transfer end, the butt-joint groove 223 is a groove with a small depth, and can accommodate the PCB transfer end.
The docking groove 223 in this embodiment is used for fixing the docking end 212 of the transmission line 21, and the docking groove 223 and the clamping groove 222 are arranged at intervals, so that part of the transmission line 21 is penetrated inside the rotating arm 22, and the patch cord can be better fixed.
In one embodiment, as shown in fig. 3, the mating end 212 of the transmission line 21 is a PCB mating end and includes a plurality of ports, and the mating recess 223 includes a plurality of openings that mate with the mating end 212. For example, when the probe head 210 of the probe cassette 200 to be calibrated includes 3 (e.g., includes a test output, a compensation monitor and a shield output), the butt end 212 of the corresponding transmission line 21 also includes 3, for example, ports at two circles in fig. 3, and a region where the boundary of the small oblong hole and the boundary of the large oblong hole are formed together.
In one embodiment, the driving member 30 further includes a cylinder (not shown), and an output end of the cylinder is fixedly connected to the rotary link assembly 20, so as to drive the rotary link assembly 20 to move up and down. In other embodiments, other driving sources may be used to drive the rotary link assembly 20 up and down, such as a linear motor outputting linear motion, a hydraulic telescopic rod, etc., which are not limited herein. Here, since the motor 31 is fixedly connected to the rotary wire assembly 20, a cylinder may be connected to the motor 31 so as to move the motor 31 together with the rotary wire assembly 20.
The accuracy of the mode of driving the rotary link assembly 20 to move up and down by using the air cylinder is high in this embodiment.
By now it should be appreciated by those skilled in the art that while a number of exemplary embodiments of the utility model have been shown and described herein in detail, many other variations or modifications of the utility model consistent with the principles of the utility model may be directly ascertained or inferred from the present disclosure without departing from the spirit and scope of the utility model. Accordingly, the scope of the present utility model should be understood and deemed to cover all such other variations or modifications.
Claims (10)
1. The low leakage current calibrating device is characterized by comprising a clamping installation seat, a rotating connecting line assembly, a driving piece and a calibrating source meter;
the clamping mounting seat is provided with a plurality of mounting ports which are arranged along the same circumference, and each mounting port is used for placing a probe box to be calibrated;
the rotating connecting line component comprises a transmission line, one end of the transmission line is connected with the calibration source meter, the other end of the transmission line is a butt joint end arranged above a probe head of the probe box to be calibrated, and the rotating connecting line component rotates along the circumference under the drive of the driving piece and is pressed down when the butt joint end of the transmission line is aligned with the probe head so as to be effectively connected with the transmission line and the probe head.
2. The low leakage current calibration device according to claim 1, wherein the rotary wire assembly further comprises a rotary arm having one end connected to the driving member and the other end for fixing the abutting end of the transmission wire.
3. The low leakage current calibration device according to claim 2, wherein the driving member comprises a motor provided with a hollow output shaft penetrating through the motor, the hollow output shaft being connected to the rotating arm, and a through hole being provided inside the hollow output shaft for penetrating the transmission line.
4. The low leakage current calibration device according to claim 3, wherein,
the rotating arm is provided with a mounting opening, and the rotating arm is fixedly sleeved on the outer surface of the hollow output shaft.
5. The low leakage current calibration device according to claim 4, wherein,
the bottom surface department of rotor arm is equipped with the joint recess, the one end of joint recess with the installation trompil intercommunication is used for the joint the transmission line.
6. The low leakage current calibration device according to claim 5, wherein,
the clamping groove is in a strip shape and extends along the length direction of the rotating arm.
7. The low leakage current calibration device according to claim 5, wherein,
the bottom surface department of rotor arm still is equipped with the butt joint recess, the butt joint recess with joint recess interval arrangement, and with the joint recess is kept away from the one end intercommunication of installation trompil, the butt joint recess is used for fixing the butt joint end of transmission line.
8. The low leakage current calibration device according to claim 7,
the butt joint end of the transmission line is a PCB switching end and comprises a plurality of ports, and the butt joint groove comprises a plurality of openings matched with the butt joint end.
9. The low leakage current calibration device according to any one of claims 1 to 8, wherein the driving member further comprises a cylinder, and an output end of the cylinder is fixedly connected to the rotary wire assembly, for driving the rotary wire assembly to move up and down.
10. The low leakage current calibration device according to claim 1, wherein,
the mounting openings are uniformly arranged along the circumference.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CN202320168917.7U CN219625570U (en) | 2023-02-09 | 2023-02-09 | Low leakage current calibrating device |
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CN202320168917.7U CN219625570U (en) | 2023-02-09 | 2023-02-09 | Low leakage current calibrating device |
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CN219625570U true CN219625570U (en) | 2023-09-01 |
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CN202320168917.7U Active CN219625570U (en) | 2023-02-09 | 2023-02-09 | Low leakage current calibrating device |
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CN (1) | CN219625570U (en) |
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2023
- 2023-02-09 CN CN202320168917.7U patent/CN219625570U/en active Active
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