CN219616269U

CN219616269U - Portable wafer storage box wiper mechanism

Info

Publication number: CN219616269U
Application number: CN202321028202.8U
Authority: CN
Inventors: 刘建蔚
Original assignee: Kunshan Xingyuhong Machinery Technology Co ltd
Current assignee: Kunshan Xingyuhong Machinery Technology Co ltd
Priority date: 2023-05-04
Filing date: 2023-05-04
Publication date: 2023-09-01
Anticipated expiration: 2033-05-04

Abstract

The utility model discloses a movable wafer storage box cleaning mechanism which comprises a cleaning pool, wherein the cleaning pool is arranged below a conveying chain rail, a plurality of wafer storage boxes are hung at the bottom of the conveying chain rail, a base frame is fixed on the bottom end surface of the cleaning pool, a movable assembly is arranged at the bottom of the cleaning pool and comprises a base substrate fixed on the bottom surface of the cleaning pool, and four movable wheels are symmetrically arranged at the bottom of the base substrate; the bottom of the cleaning tank is also provided with two foldable supporting frames; according to the utility model, the cleaning mechanism of the cleaning and drying integrated machine in the prior art is optimized and improved, and the movable assembly and the foldable support frame are designed at the bottom of the cleaning mechanism, so that the position adjustment of the cleaning mechanism and other mechanisms can be facilitated when the cleaning mechanism is assembled, and meanwhile, the cleaning mechanism can be quickly separated from other mechanisms through movement when the cleaning mechanism is required to be cleaned and maintained later, and the use convenience and the maintenance convenience of the whole cleaning mechanism are improved.

Description

Portable wafer storage box wiper mechanism

Technical Field

The utility model belongs to the technical field of processing and cleaning of wafer storage boxes, and particularly relates to a movable wafer storage box cleaning mechanism.

Background

The wafer storage box is a box for storing wafers, and is used for simplifying transportation and reducing the risk of pollution of the wafers as far as possible, a plurality of procedures are needed to be carried out on the wafer storage box during production and processing, corresponding equipment and mechanisms are needed to be used for each procedure, in the cleaning procedure of the wafer storage box, a cleaning and drying integrated machine is needed to be used for cleaning the wafer storage box, and the cleaning and drying integrated machine for the wafer storage box disclosed in the prior patent with the publication number of CN112934841B comprises a supporting mechanism, a conveying mechanism, a cleaning mechanism and a drying mechanism, wherein the upper end of the supporting mechanism is provided with the conveying mechanism, the cleaning mechanism is arranged at the lower side of the conveying mechanism, the drying mechanism is arranged at the rear side … …' of the cleaning mechanism, and the cleaning and drying integrated machine disclosed in the application is mainly composed of the supporting mechanism, the conveying mechanism and the drying mechanism, and the conveying mechanism is used for continuously conveying the wafer storage box into the cleaning mechanism, so that the wafer storage box is cleaned in a cleaning pool, and the cleaning effect is achieved;

however, when the cleaning mechanism of the cleaning and drying integrated machine in the above patent is in actual use, the cleaning mechanism is not easy to adjust the position of the cleaning mechanism when being assembled with other mechanisms in the whole cleaning and drying integrated machine because of the lack of moving function, so that the assembly convenience of the whole equipment is reduced, and meanwhile, when the cleaning mechanism is required to be cleaned and maintained in the later period, certain inconvenience is brought due to the fact that the cleaning mechanism is inconvenient to move, and the use convenience of the cleaning mechanism is reduced.

Disclosure of Invention

The utility model aims to provide a movable wafer storage box cleaning mechanism, which solves the problem that the cleaning mechanism of the cleaning and drying integrated machine in the prior art is inconvenient to move during assembly and later cleaning and maintenance.

In order to achieve the above purpose, the present utility model provides the following technical solutions: the movable wafer storage box cleaning mechanism comprises a cleaning pool arranged below a conveying chain rail, wherein a plurality of wafer storage boxes are hung at the bottom of the conveying chain rail, a base frame is fixed on the bottom surface of the cleaning pool, a movable assembly is arranged at the bottom of the cleaning pool and comprises a base substrate fixed on the bottom surface of the cleaning pool, and four movable wheels are symmetrically arranged at the bottom of the base substrate;

the bottom of wasing the pond still is provided with two collapsible support frames, but collapsible support frame includes U-shaped strut and spacing slewing mechanism, but the both ends of U-shaped strut all rotate with the base frame through spacing slewing mechanism and are connected, but the bottom support of U-shaped strut is on ground, but spacing slewing mechanism is including fixing the axle bed at base frame bottom surface, and one side fixed surface of axle bed has the axle block, but the top rotation cover of U-shaped strut is established on the axle block.

Preferably, the spacing rotating mechanism further comprises a spacing baffle fixed on the surface of the shaft seat, and the spacing baffle is positioned on one side of the shaft block and contacted with the U-shaped supporting frame.

Preferably, the spacing rotary mechanism further comprises a rectangular seat fixed on the end surface of the U-shaped supporting frame, a spacing inserting rod is movably arranged in the rectangular seat in a penetrating manner, a spacing inserting hole is formed in the surface of the shaft block in a penetrating manner, the top end of the spacing inserting rod is inserted into the spacing inserting hole, the spacing rotary mechanism further comprises a bottom shifting block and two reset tension springs, the bottom end of the spacing inserting rod penetrates to the bottom of the rectangular seat and is fixedly provided with the bottom shifting block, and two reset tension springs are arranged between the bottom shifting block and the rectangular seat.

Preferably, two cylindrical mounting grooves are symmetrically formed in the bottom surface of the rectangular seat, the reset tension spring is arranged in the cylindrical mounting groove, and the bottom end of the reset tension spring is fixed with the bottom shifting block.

Preferably, the spacing slewing mechanism still includes auxiliary structure, auxiliary structure includes auxiliary structure and takes the seat, the bottom surface slip of bottom shifting block is provided with the slide, take the seat to fix in the side of U-shaped strut, and the position is corresponding with the slide, T shape spout has been seted up to the bottom surface of bottom shifting block, and slides in the T shape spout and be provided with T shape slider, the bottom of T shape slider stretches out to the bottom surface of bottom shifting block to fixed mutually with the slide, auxiliary structure still includes rubber block and circular arch, the bottom surface that takes the seat is fixed with the rubber block, and the bottom surface of rubber block is equipped with the circular arch of integral type, circular draw-in groove has been seted up to the top surface of slide.

Compared with the prior art, the utility model has the beneficial effects that: according to the utility model, the cleaning mechanism of the cleaning and drying integrated machine in the prior art is optimized and improved, the movable assembly and the foldable support frame are designed at the bottom of the cleaning mechanism, so that the position of the cleaning mechanism can be conveniently adjusted when the cleaning mechanism is assembled with other mechanisms, meanwhile, the cleaning mechanism can be quickly separated from other mechanisms through movement when the cleaning mechanism needs to be cleaned and maintained later, the use convenience and the maintenance convenience of the whole cleaning mechanism are improved, and meanwhile, under the action of the foldable support frame, the cleaning mechanism can be stably supported during daily use, and the use stability of the cleaning mechanism is ensured.

Drawings

FIG. 1 is a perspective view of the present utility model;

FIG. 2 is an enlarged view of a portion of the spacing rotary mechanism of FIG. 1 according to the present utility model;

FIG. 3 is a cross-sectional view of the spacing rotary mechanism of the present utility model;

in the figure: 1. a cleaning pool; 11. a base frame; 2. a moving assembly; 21. a base substrate; 22. a moving wheel; 3. a foldable support frame; 31. a U-shaped bracket; 32. a limitable rotating mechanism; 321. a shaft seat; 322. a shaft block; 323. a limit baffle; 324. a rectangular seat; 325. a limit inserted link; 326. limiting jack; 327. a bottom shifting block; 328. an auxiliary structure; 3281. a slide plate; 3282. a lapping seat; 3283. a rubber block; 3284. a circular protrusion; 329. resetting the tension spring; 4. a conveyor chain rail; 5. a wafer storage cassette.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

Example 1

Referring to fig. 1 to 3, a first embodiment of the present utility model provides a technical solution: the utility model provides a portable wafer storage box wiper mechanism, including setting up the cleaning tank 1 in the conveying caterpillar 4 below, the cleaning solution has been deposited in the cleaning tank 1, and the bottom of cleaning tank 1 still is provided with ultrasonic generator, make follow-up wafer storage box 5 submerge and wash after the cleaning solution, the bottom of conveying caterpillar 4 hangs a plurality of wafer storage box 5, wafer storage box 5 can send into the inside of cleaning tank 1 by conveying caterpillar 4, contact with the inside cleaning solution of cleaning tank 1, wash, the bottom surface welding of cleaning tank 1 is fixed with basic frame 11, the bottom of cleaning tank 1 is provided with movable subassembly 2, movable subassembly 2 is including fixing the base plate 21 at cleaning tank 1 bottom surface through the bolt, and the bottom symmetry of base plate 21 is provided with four and removes round 22, make cleaning tank 1 convenient removal when equipment and later stage clearance maintenance;

the bottom of the cleaning tank 1 is further provided with two foldable supporting frames 3, the foldable supporting frames 3 comprise a U-shaped supporting frame 31 and a limiting rotating mechanism 32, two ends of the U-shaped supporting frame 31 are rotatably connected with the base frame 11 through the limiting rotating mechanism 32, the bottom end of the U-shaped supporting frame 31 is supported on the ground and used for stably supporting the cleaning mechanism in daily use, the limiting rotating mechanism 32 comprises an axle seat 321 fixedly welded on the bottom surface of the base frame 11, an axle block 322 is fixedly arranged on one side surface of the axle seat 321, the top end of the U-shaped supporting frame 31 is rotatably sleeved on the axle block 322, and if the cleaning tank 1 is required to be pushed in the later stage, the cleaning tank 1 is only required to be slightly lifted, then the U-shaped supporting frame 31 is rotated to one side of the cleaning tank 1, so that the movable wheel 22 is not contacted with the ground, pushing of the cleaning tank 1 is realized, and the U-shaped supporting frame 31 after being laterally rotated can be further realized as a pull handle, so that pushing of the cleaning tank 1 is convenient.

Wherein, but spacing slewing mechanism 32 still includes the limit baffle 323 of fixing on axle bed 321 surface, and limit baffle 323 is located one side of axle piece 322 to contact with U-shaped strut 31, make U-shaped strut 31 can not be to the center department rotation of cleaning tank 1, guarantee daily supporting stability.

The limiting rotating mechanism 32 further comprises a rectangular seat 324 welded and fixed on the end surface of the U-shaped supporting frame 31, a limiting inserting rod 325 is movably arranged in the rectangular seat 324 in a penetrating mode, a limiting inserting hole 326 corresponding to the limiting inserting rod 325 is formed in the surface of the shaft block 322 in a penetrating mode, the top end of the limiting inserting rod 325 is inserted into the limiting inserting hole 326, stable limiting of the U-shaped supporting frame 31 in daily use is achieved, the limiting rotating mechanism 32 further comprises a bottom shifting block 327 and two reset tension springs 329, the bottom end of the limiting inserting rod 325 penetrates through the bottom of the rectangular seat 324 and is fixedly provided with the bottom shifting block 327, the two reset tension springs 329 are arranged between the bottom shifting block 327 and the rectangular seat 324, the bottom shifting block 327 is only required to be pulled downwards subsequently, the top end of the limiting inserting rod 325 moves out of the limiting inserting hole 326, limiting of the U-shaped supporting frame 31 can be omitted, lateral rotation operation of the U-shaped supporting frame 31 can be achieved at the moment, meanwhile, the bottom shifting block 327 can be guaranteed to be tightly attached to the bottom surface of the rectangular seat 324 in daily use, and the limiting inserting rod 325 can be stably clamped in the U-shaped supporting frame 31 in daily use.

Wherein, two tube-shape mounting grooves have been seted up to the bottom surface symmetry of rectangle seat 324, and extension spring 329 installs in tube-shape mounting groove, and extension spring 329's that resets bottom is fixed mutually with end dial 327, guarantees extension spring 329's stable installation.

Example 2

Referring to fig. 1 to 3, in a second embodiment of the present utility model, the difference between the above embodiment is that, by the aid of the auxiliary structure 328, after the bottom shifting block 327 is pulled down, the sliding plate 3281 is slid by the side of the sliding plate 3281, so that the sliding plate 3281 is put on the base 3282 to support the bottom shifting block 327, preventing the bottom shifting block 327 from rebounding, and further facilitating the rotation operation of the U-shaped bracket 31.

Specifically, but spacing rotary mechanism 32 still includes auxiliary structure 328, auxiliary structure 328 includes auxiliary structure 328 and takes seat 3282, the bottom surface slip of bottom shifting block 327 is provided with slide 3281, take seat 3282 welded fastening in the side of U-shaped strut 31, and the position corresponds with slide 3281, after operating personnel pulls down bottom shifting block 327, can push up slide 3281 side for the tip of slide 3281 takes the bottom surface of taking seat 3282, can prevent the resilience of bottom shifting block 327, further brings convenience for the side-spinning operation of follow-up U-shaped strut 31, make operating personnel need not to keep the state of pulling down bottom shifting block 327 always, liberate operating personnel's both hands.

Wherein, the bottom surface of bottom shifting block 327 has seted up T shape spout, and the slip is provided with T shape slider in the T shape spout, the bottom of T shape slider stretches out to the bottom surface of bottom shifting block 327, and fixed mutually with slide 3281, supply the smooth sideslip of slide 3281, auxiliary structure 328 still includes rubber block 3283 and circular protruding 3284, the bottom surface cementing of taking seat 3282 is fixed with rubber block 3283, and the bottom surface of rubber block 3283 is equipped with the circular protruding 3284 of integral type, circular protruding 3284 is made for the rubber material equally, the circular draw-in groove corresponding with circular protruding 3284 has been seted up on the top surface of slide 3281, when making the tip of slide 3281 slide to taking the bottom of seat 3282, circular protruding 3284 can block into circular draw-in groove, play certain supplementary spacing effect.

Although embodiments of the present utility model have been shown and described in detail with reference to the foregoing detailed description, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations may be made therein without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.

Claims

1. The utility model provides a portable wafer storage box wiper mechanism, includes washs pond (1) of setting in conveying caterpillar (4) below, and the bottom of conveying caterpillar (4) has hung a plurality of wafer storage box (5), the bottom surface mounting in wasing pond (1) has base frame (11), its characterized in that: the bottom of the cleaning tank (1) is provided with a moving assembly (2), the moving assembly (2) comprises a bottom base plate (21) fixed on the bottom surface of the cleaning tank (1), and four moving wheels (22) are symmetrically arranged at the bottom of the bottom base plate (21);

the bottom of washpond (1) still is provided with two collapsible support frames (3), but collapsible support frame (3) are including U-shaped strut (31) and spacing rotary mechanism (32), but all be connected with basic frame (11) rotation through spacing rotary mechanism (32) in the both ends of U-shaped strut (31), but the bottom support of U-shaped strut (31) is on ground, but spacing rotary mechanism (32) are including fixing axle bed (321) at basic frame (11) bottom surface, and one side fixed surface of axle bed (321) has axle piece (322), the top rotation cover of U-shaped strut (31) is established on axle piece (322).

2. The portable wafer storage cassette cleaning mechanism of claim 1, wherein: the limiting rotating mechanism (32) further comprises a limiting baffle (323) fixed on the surface of the shaft seat (321), and the limiting baffle (323) is positioned on one side of the shaft block (322) and is contacted with the U-shaped supporting frame (31).

3. The portable wafer storage cassette cleaning mechanism of claim 1, wherein: but spacing rotary mechanism (32) still include fix rectangular seat (324) at U-shaped strut (31) tip surface, movable run-through is provided with spacing inserted bar (325) in rectangular seat (324), spacing jack (326) have been seted up in the surface run-through of axle piece (322), the top of spacing inserted bar (325) inserts in spacing jack (326).

4. A portable wafer storage cassette cleaning mechanism according to claim 3, wherein: but spacing rotary mechanism (32) still includes end shifting block (327) and two extension springs (329) that reset, the bottom of spacing inserted bar (325) runs through to the bottom of rectangle seat (324) to be fixed with end shifting block (327), install two extension springs (329) that reset between end shifting block (327) and rectangle seat (324).

5. The portable wafer storage cassette cleaning mechanism of claim 4, wherein: two cylindrical mounting grooves are symmetrically formed in the bottom surface of the rectangular base (324), the reset tension springs (329) are mounted in the cylindrical mounting grooves, and the bottom ends of the reset tension springs (329) are fixed with the bottom shifting blocks (327).

6. The portable wafer storage cassette cleaning mechanism of claim 4, wherein: the limiting rotating mechanism (32) further comprises an auxiliary structure (328), the auxiliary structure (328) comprises an auxiliary structure (328) and a base (3282), a sliding plate (3281) is arranged on the bottom surface of the bottom shifting block (327) in a sliding mode, the base (3282) is fixed on the side face of the U-shaped supporting frame (31), and the position of the base corresponds to the position of the sliding plate (3281).

7. The portable wafer storage cassette cleaning mechanism of claim 6, wherein: the bottom surface of bottom shifting block (327) has seted up T shape spout, and slides in the T shape spout and be provided with T shape slider, the bottom of T shape slider stretches out to the bottom surface of bottom shifting block (327) to fixed mutually with slide (3281).

8. The portable wafer storage cassette cleaning mechanism of claim 6, wherein: the auxiliary structure (328) further comprises a rubber block (3283) and a circular protrusion (3284), the rubber block (3283) is fixed on the bottom surface of the lap seat (3282), the integrated circular protrusion (3284) is arranged on the bottom surface of the rubber block (3283), and a circular clamping groove is formed in the top surface of the sliding plate (3281).