CN219587726U - Central vacuum equipment - Google Patents
Central vacuum equipment Download PDFInfo
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- CN219587726U CN219587726U CN202223280371.9U CN202223280371U CN219587726U CN 219587726 U CN219587726 U CN 219587726U CN 202223280371 U CN202223280371 U CN 202223280371U CN 219587726 U CN219587726 U CN 219587726U
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The present utility model provides a central vacuum apparatus, comprising: the vacuumizing device comprises at least two vacuumizing components which are arranged in parallel; the negative pressure device is connected with the vacuumizing device through a first connecting assembly and comprises at least two negative pressure components which are arranged in parallel; the adsorption device is connected with the negative pressure device through a second connecting component and comprises at least two adsorption components which are arranged in parallel; and one or at least two main devices arranged in parallel and connected with the adsorption device through a third connecting component, wherein the main device comprises one or at least two furnace tubes. The problems of excessive purchase of the vacuum pump, large power supply and the like are mainly solved.
Description
Technical Field
The utility model belongs to the field of equipment, and particularly relates to central vacuum equipment.
Background
The prior vacuum equipment adopts a mode of one driving one (one furnace tube is matched with one independent vacuum pump) at the early stage, so that the capacity requirement is overlarge along with the development of the industry at present, the mode of one driving two (one independent vacuum pump is matched with two furnace tubes) appears in the industry at present, but the quantity of the vacuum pumps is still more, the single machine of the vacuum pump is expensive, the power requirement (secondary matching) cost of the matched vacuum pump is higher, and the vacuum pump mainly uses electricity and sweeps nitrogen, and the vacuum pump is used for cooling water and a silane exhaust system.
Disclosure of Invention
Aiming at the defects of the prior art, the utility model changes the independent vacuum pump mode into the central vacuum equipment, and performs the unified vacuum supply mode on all furnace tubes of the vacuum equipment in the workshop, thereby saving the using area of the workshop, the secondary allocation and installation cost and saving the nitrogen consumption and the power consumption.
The technical proposal is as follows:
the present utility model provides a central vacuum apparatus, comprising:
the vacuumizing device comprises at least two vacuumizing components which are arranged in parallel;
the negative pressure device is connected with the vacuumizing device through a first connecting assembly and comprises at least two negative pressure components which are arranged in parallel;
the adsorption device is connected with the negative pressure device through a second connecting component and comprises at least two adsorption components which are arranged in parallel;
and the main equipment is connected with the adsorption device through a third connecting component.
The vacuum device is connected with the vacuumizing device through a first connecting assembly, and the vacuum device comprises at least two vacuum components which are arranged in parallel; the adsorption device is connected with the negative pressure device through a second connecting component and comprises at least two adsorption components which are arranged in parallel; the arrangement mode that the main equipment is connected with the adsorption device through the third connecting component obtains that the main equipment is used independently when in use and is not limited by the use or the absence of other main equipment. Meanwhile, the negative pressure device provides effective vacuum for at least two machine tables or at least two furnace tubes, the vacuum device provides primary filtration for central vacuum equipment, in the process, various chemical gases are mixed to react to produce white dust, and the dust is required to be filtered, so that the problems of high cost and inconvenient use caused by the mode that one furnace tube is matched with one independent vacuum pump or one independent vacuum pump drags two furnace tubes in the prior art are solved.
Further, wherein the primary device comprises one or at least two furnace tubes. One main device can be provided with one or at least two furnace tubes, and the furnace tubes are connected in parallel. Each furnace tube is independently used when in use, and is not limited by the use or the absence of other furnace tubes.
Further, the master device is one or at least two master devices arranged in parallel.
Further, the first connecting assembly comprises at least two first switch assemblies, one ends of the at least two first switch assemblies are respectively connected with the at least two vacuumizing components in one-to-one correspondence, and the other ends of the at least two first switch assemblies are mutually connected to form a common end to be connected with the negative pressure device.
Further, the second connecting assembly comprises at least two second switch assemblies, one ends of the at least two second switch assemblies are respectively connected with the at least two negative pressure components in a one-to-one correspondence mode, and the other ends of the at least two second switch assemblies are respectively connected with the at least two adsorption components in a one-to-one correspondence mode.
Further, the third connecting assembly comprises at least two third switch assemblies, one ends of the at least two third switch assemblies are respectively connected with the at least two adsorption components in a one-to-one correspondence mode, and the other ends of the at least two third switch assemblies are connected with each other to form a public end to be connected with the main equipment.
Further, the third connecting component comprises at least two fourth switching components, the number of the fourth switching components is the number of the third switching components minus 1, and two ends of the fourth switching components are respectively connected with the third switching components.
Further, the third connecting component comprises at least two fifth switch components, and the fifth switch components are used for connecting a public end formed after the main equipment and the third switch components are connected with each other;
preferably, a fifth switch assembly comprises an angle valve, a butterfly valve and a main valve, the butterfly valve being located intermediate the angle valve and the main valve, wherein the angle valve is adapted to connect to the main device and the main valve is adapted to connect to a common port formed by the interconnection of the third switch assembly.
The first connecting component, the second connecting component and the third connecting component are arranged, so that the situation that the vacuum pump is too much in purchase and large in power supply amount, the whole vacuum pump is not paralyzed, the number of valves in the central vacuum equipment is large, the machine is subjected to maintenance or blockage of the adsorption cylinder, and the like, and the valve switch can be controlled to maintain in time without stopping the machine.
Further, the vacuumizing device further comprises at least two vacuumizing standby parts which are arranged in parallel with the vacuumizing parts.
Further, each furnace tube is connected with a vacuum gauge, or,
the vacuumizing part and the vacuumizing standby part are selected from one of a Roots vacuum pump, a screw vacuum pump, a claw vacuum pump and an oil seal vacuum pump.
Further, the central vacuum equipment also comprises a filtering device, the filtering device comprises filtering components, each vacuumizing component and each vacuumizing standby component are connected with the filtering components, and one ends of at least two first switch assemblies are respectively connected with at least two filtering components in one-to-one correspondence. The dust can be filtered by the filtering device, so that each vacuumizing component and each vacuumizing spare component are protected from operating normally, the service life is prolonged, and each vacuumizing component and each vacuumizing spare component are prevented from being blocked.
Further, the filter element is one or at least two filter elements arranged in parallel.
Further, the first connecting component, the second connecting component and the third connecting component all comprise pipelines, and the first switch component, the second switch component, the third switch component, the fourth switch component and the fifth switch component are all connected to the pipelines.
The technical effects are as follows:
the central vacuum equipment provided by the utility model mainly solves the problems of excessive purchase of a vacuum pump, large power supply and the like. In order to prevent the whole system from being paralyzed, the system is provided with more connecting components, the machine is maintained or the adsorption cylinder is blocked, and the valve can be controlled to be opened and closed for timely maintenance without stopping the machine. In the operation process of the vacuum pump, abnormal conditions such as blocking and maintenance and the like are inevitably caused, and the vacuumizing standby part is mainly used for solving the standby unit which has the problems, so that the stable pressure and the vacuumizing speed of the whole vacuum system are ensured. Each vacuumizing part and each vacuumizing spare part are in a plurality of parallel modes, the locking condition occurs during operation, the valve is closed, and the vacuumizing spare parts can be directly removed and replaced without affecting the operation of the whole vacuum equipment.
Drawings
Fig. 1 shows a schematic structural diagram of a central vacuum apparatus.
Wherein, 1: a film vacuum gauge 1;2: a furnace tube; 3: an angle valve; 4: butterfly valve; 5: a fourth switch assembly; 6: a third switch assembly; 7: an adsorption member; 8: a negative pressure member; 9: vacuumizing a spare part; 10: a filter member; 11: a vacuum pumping part; 12: a corrugated pipe; 13: a main valve; 14: a first connection assembly; 15: a second connection assembly; 16: and a third connection assembly.
Detailed Description
As shown in fig. 1, the present utility model provides a central vacuum apparatus, comprising: the vacuumizing device comprises at least two vacuumizing parts 11 which are arranged in parallel; the negative pressure device is connected with the vacuumizing device through a first connecting assembly 14 and comprises at least two negative pressure components 8 which are arranged in parallel; the adsorption device is connected with the negative pressure device through a second connecting component 15 and comprises at least two adsorption components 7 which are arranged in parallel; one or at least two main units arranged in parallel, which are connected to the adsorption device by a third connection assembly 16, wherein the main units comprise one or at least two furnace tubes 2.
In a specific embodiment, the main device may be a PECVD tubular coating device, for example, a PECVD tubular coating device that may be selected from the group consisting of sejiavica, laplace, and north huawa. All the main devices are connected in parallel, and each main device is independently used when in use and is not limited by the use or the absence of other main devices.
The utility model does not limit the number of the main equipment, and the number of the main equipment is set according to the production requirement. In other embodiments, the number of master devices may be three, four, or more.
In a specific embodiment, one main device may be provided with one or at least two furnace tubes, and each furnace tube is connected in parallel. Each furnace tube is independently used when in use, and is not limited by the use or the absence of other furnace tubes.
It will be appreciated that the number of furnace tubes 2 is not limited herein, and in other embodiments, the number of furnace tubes 2 in each host device may be three, four, or more.
In the specific embodiment, the furnace tube is made of quartz, is cylindrical, and is sealed by stainless steel flanges and furnace doors at the front and back of the furnace tube; in one embodiment, the model of the furnace tube is not limited, and the capacity requirement is mainly satisfied.
As shown in fig. 1, the first connection assembly includes at least two first switch assemblies, one ends of the at least two first switch assemblies are respectively connected with the at least two vacuumizing components in a one-to-one correspondence manner, and the other ends of the at least two first switch assemblies are mutually connected to form a common end to be connected with the negative pressure device.
As shown in fig. 1, the second connection assembly includes at least two second switch assemblies, one ends of the at least two second switch assemblies are respectively connected with the at least two negative pressure components in a one-to-one correspondence manner, and the other ends of the at least two second switch assemblies are respectively connected with the at least two adsorption components in a one-to-one correspondence manner.
As shown in fig. 1, the third connection assembly includes at least two third switch assemblies 6, one ends of the at least two third switch assemblies 6 are respectively connected with the at least two adsorption components in a one-to-one correspondence manner, and the other ends of the at least two third switch assemblies 6 are connected with each other to form a common end to be connected with the main device.
As shown in fig. 1, the third connection component includes at least two fourth switch components 5, the number of the fourth switch components 5 is the number of the third switch components 6 minus 1, and two ends of the fourth switch components 5 are respectively connected with the third switch components 6. The fourth switch component 5 and the third switch component 6 are pipeline intercommunication valves, and mainly ensure that the adsorption component 7 is normally used, and after the use is finished or a fault is encountered, the valves are moved to enable gas to flow through the adsorption component 7 again.
As shown in fig. 1, the third connection component includes at least two fifth switch components, which are used for connecting the common terminal formed by the interconnection of the main device and the third switch component 6; a fifth switch assembly comprises an angle valve 3, a butterfly valve 4 and a main valve 13, wherein the butterfly valve 4 is arranged between the angle valve 3 and the main valve 13, the angle valve 3 is used for connecting a main device, and the main valve 13 is used for connecting a public end formed by the interconnection of the third switch assembly. The butterfly valve 4 mainly controls the cavity pressure, ensures normal operation of the process under constant pressure, and the opening and closing degree of the butterfly valve 4 mainly depends on the pumping speed of the central vacuum equipment, the opening of the butterfly valve with overlarge pumping speed is reduced, and the opening of the butterfly valve with overlarge pumping speed is increased; the main function of the angle valve 3 is to ensure that the furnace tube 2 is in a vacuum state when the furnace tube 2 is closed. The main valve 13 is in an open mode in a normal state, and can be closed for operation if maintenance is required for the corresponding furnace tube 2. The pipeline connected with the main valve 13 is a corrugated pipeline. As shown in fig. 1, the evacuation device further comprises at least two evacuation backup members 9 arranged in parallel with the evacuation members. The standby vacuumizing part 9 is in a closed standby mode in a normal state, and if the vacuumizing part 11 is damaged, the standby vacuumizing part 9 is started to vacuumize, so that the system stability and the sufficient air displacement are ensured.
As shown in FIG. 1, a vacuum gauge, specifically a film vacuum gauge 1, is connected to each furnace tube, and is mainly used for detecting the pressure value in the furnace tube.
In a specific embodiment, the vacuumizing component and the vacuumizing spare component are vacuum pumps, and are selected from one of a Roots vacuum pump, a screw vacuum pump, a claw vacuum pump and an oil seal vacuum pump.
As shown in fig. 1, the central vacuum apparatus further comprises a filtering device, the filtering device comprises one or at least two filtering components 10, each vacuumizing component 11 and each vacuumizing spare component 9 are connected with the filtering component 10, and one ends of at least two first switch assemblies are respectively connected with at least two filtering components in a one-to-one correspondence. The filter component 10 can filter dust, protects each vacuumizing component 11 and each vacuumizing spare component 9 from normal operation, prolongs the service life, and prevents each vacuumizing component 11 and each vacuumizing spare component 9 from being blocked.
In particular embodiments, the filter element 10 is a vacuum filter element. The vacuum pump filter part is a vacuum pump pre-filter part, and is used for carrying out secondary filtration on central vacuum equipment, and the vacuum pump filter part can be used for filtering white dust produced by reaction due to mixing of various chemical gases in the process.
In a specific embodiment, each of the evacuation components 11 and each of the evacuation standby components 9 is a vacuum pump.
In a specific embodiment, the negative pressure component 8 is a vacuum negative pressure cylinder. The vacuum negative pressure cylinder provides effective vacuum for at least two machine tables or at least two furnace tubes, and is provided with an observation window which is mainly used for checking the condition of dust in the vacuum negative pressure cylinder, is provided with a vacuum gauge and is mainly used for displaying the vacuum value in the barrel.
In a specific embodiment, the adsorbing member 7 is a vacuum adsorbing cylinder. The vacuum adsorption cylinder provides first filtering for the central vacuum equipment, and in the process, various chemical gases are mixed to react to produce white dust, and the dust needs to be filtered.
As shown in fig. 1, the first connection component, the second connection component and the third connection component all comprise pipelines, and the first switch component, the second switch component, the third switch component, the fourth switch component and the fifth switch component are all connected to the pipelines.
As shown in fig. 1, the first connection assembly includes a pipeline, at least two first switch assemblies are provided in the pipeline, the number of the first switch assemblies is not limited, and corresponds to the number of the vacuum pumps and the negative pressure member 8. In a specific embodiment, each vacuum pump 9 is connected to the negative pressure member 8 by a first connection assembly. Each vacuum pump 11 and each backup vacuum pump 9 share the piping of the first connection assembly.
In a specific embodiment, the first connection assembly includes at least two electrically operated valves, and part of the electrically operated valves in the first connection assembly are respectively connected with the filter elements 10 in a one-to-one correspondence, and the remaining electrically operated valves in the first connection assembly are connected to a common end formed in the first connection assembly. The number of remaining electrically operated valves in the first connection assembly corresponds to the number of negative pressure parts 8.
In a specific embodiment, the electrically operated valve in the first connection assembly is a valve that connects the filter element 10; when the vacuum pump is blocked or maintained, the electric valve in the first connecting assembly is closed, so that the vacuum pump can be disassembled and replaced, the operation of the whole system is not influenced, and after the replacement is finished, the valve is opened to normally work.
In a specific embodiment, the diameters of the vacuum pipelines of the first connecting components are all ISO200 diameters, and the materials are 316 stainless steel.
As shown in fig. 1, the second connecting component comprises at least two second switch components and pipelines, the number of the negative pressure component 8, the adsorption component 7 and the second switch components is the same, and the negative pressure component 8 and the adsorption component 7 are connected through the second switch components.
In a specific embodiment, the second switch component is an electric valve and is arranged on the pipeline. The electric valve in the second connecting assembly is a valve positioned between the negative pressure component 8 and the adsorption component 7, and is closed in a bidirectional manner when the negative pressure component 8 or the adsorption component 7 is damaged or needs maintenance, so that the negative pressure component 8 and the adsorption component 7 are repaired or maintained in time.
In a specific embodiment, the diameters of the vacuum pipelines of the second connecting components are all ISO200 diameters, and the materials are 316 stainless steel.
As shown in fig. 1, the third connection assembly includes a pipeline, in the third connection assembly, the third switch assemblies 6 are connected in parallel, the number of the third switch assemblies 6 corresponds to the number of the adsorption components 7, the number of the fourth switch assemblies 5 is the number of the third switch assemblies 6 minus 1, and two ends of the fourth switch assemblies 5 are respectively connected with the third switch assemblies 6; the fourth switch components 5 do not affect each other.
In a specific embodiment, the fourth switch assembly 5 and the third switch assembly 6 are both connected to the piping of the third connection assembly, and the third switch assembly 6 is connected to a common terminal in the third connection assembly.
In a specific embodiment, the fourth switch component 5 is an electric valve, and is in a normally closed state in normal operation.
In a specific embodiment, the third switch component 6 is an electric valve and is in a normally open state in normal operation; in the normal process, if the No. 7 dust adsorption component is blocked, the pressure fluctuation or the poor vacuum state can be caused, and the No. 7 adsorption component needs to be maintained or replaced.
In some embodiments, the plugged vacuum is transferred to the adjacent adsorbent member 7 for normal operation by opening the fourth switch assembly 5 and closing the third switch assembly 6, and then replacing the plugged adsorbent member 7 for recovery.
As shown in fig. 1, each furnace pipe is connected to a common end in a third connection assembly through an angle valve 3, a butterfly valve 4 and a main valve 13 in sequence; and the main valve 13 is connected by a bellows line to a common end in the third connection assembly. A detachable flange is arranged between the butterfly valve 4 and the main valve 13.
In the specific embodiment, the angle valve 3 is mainly responsible for the switching operation of the furnace tube and the central vacuum equipment.
In a specific embodiment, the butterfly valve 4 is mainly responsible for controlling the process pressure value in the furnace tube by the opening and closing size of the butterfly valve No. 4 in order to stabilize the process vacuum required by the process because the limiting pressure of the central vacuum equipment is low and far exceeds the required vacuum.
In some embodiments, the angle valve 3 and the butterfly valve 4 belong to original valves inside the device.
In a specific embodiment, the main valve 13 is a valve for the whole vacuum system to be in butt joint with equipment; when the equipment fails or maintenance is performed, the equipment before the main valve 13 can be repaired and maintained by closing the main valve 13.
In a specific embodiment, the detachable flange is a vacuum flange which is quickly detached and installed, and the vacuum flange is made of 316 stainless steel.
In a specific embodiment, the corrugated pipeline is a vacuum pipeline and is in soft connection with the whole central vacuum equipment, so that the influence of vibration of the system pipeline on the main equipment is prevented, and the damping effect is achieved. In addition, because of the pipeline in-process always there is certain size difference, if all use hard tube to connect, probably can cause the dislocation, finally unable effective closed system, the bellows is soft-connected, can effectively solve above problem.
In one embodiment, the corrugated pipe is made of 316 stainless steel, and the model is ISO100 or ISO60.
In a specific embodiment, in the third connecting assembly, the diameter from the furnace tube 2 to the corrugated pipeline is ISO100 or ISO60, and the material is 316 stainless steel. The diameter of the pipeline from the corrugated pipeline to the third switch assembly 6 is ISO200 diameter, and the material is 316 stainless steel.
When the vacuum central equipment is used, the negative pressure component 8 is evacuated, a certain negative pressure value is maintained, then the furnace tube is evacuated, and the effective pressure stabilization and process are carried out through the control of each valve in the system; in the process, process dust is generated, so that the first filtering of the adsorption component 7 and the second filtering of the filtering component 10 are set, and the system blockage paralysis and the service life extension of the vacuum pump are prevented. Most valves in the vacuum central equipment are mainly used in maintenance, and in a normal working state, all the valves except the fourth switch assembly 5 are kept in an open state.
The central vacuum equipment provided by the utility model mainly solves the problems of excessive purchase of a vacuum pump, large power supply and the like. In order to prevent the whole system from being paralyzed, the system is provided with more valves, the machine is maintained or the adsorption cylinder is blocked, and the valve can be controlled to be opened or closed for timely maintenance without stopping the machine. In the operation process of the vacuum pump, abnormal conditions such as blocking and maintenance are unavoidable, and the online standby device is mainly used for solving the standby unit which has the problems, so that the stable pressure and pumping speed of the whole vacuum system are ensured. The vacuum pump is in a plurality of parallel modes, the operation is blocked, the valve is closed, and the vacuum pump can be directly removed and replaced without affecting the operation of the whole vacuum equipment.
The central vacuum equipment provided by the utility model can be used for any work completed under a vacuum process, such as a semiconductor industry, a food vacuum packaging industry, a photovoltaic crystal pulling industry, an LED liquid crystal display industry and the like.
Examples
As shown in fig. 1, the present utility model provides a central vacuum apparatus, comprising:
the vacuumizing device comprises at least two vacuumizing pumps 11 which are arranged in parallel and at least two standby vacuumizing pumps 9 which are arranged in parallel with the vacuumizing component, and each vacuumizing pump 11 and each standby vacuumizing pump 9 are connected with the filtering component 10; the negative pressure device is connected with the vacuumizing device through a first connecting component and comprises at least two vacuum negative pressure cylinders 8 which are arranged in parallel; the adsorption device is connected with the negative pressure device through a second connecting component and comprises at least two vacuum adsorption cylinders 7 which are arranged in parallel; one or at least two main devices arranged in parallel, which are connected with the adsorption device through a third connecting component, wherein the main devices comprise one or at least two furnace tubes 2. The first connecting assembly comprises at least two first switch assemblies, one ends of the at least two first switch assemblies are respectively connected with the at least two vacuumizing components in one-to-one correspondence, and the other ends of the at least two first switch assemblies are mutually connected to form a common end to be connected with the negative pressure device. The second connecting assembly comprises at least two second switch assemblies, one ends of the at least two second switch assemblies are respectively connected with the at least two negative pressure components in a one-to-one correspondence mode, the other ends of the at least two second switch assemblies are respectively connected with the at least two adsorption components in a one-to-one correspondence mode, the third connecting assembly comprises at least two third switch assemblies 6, one ends of the at least two third switch assemblies 6 are respectively connected with the at least two adsorption components in a one-to-one correspondence mode, and a public end is formed after the other ends of the at least two third switch assemblies 6 are connected with each other to be connected with the main equipment. The third connecting assembly comprises at least two fourth switch assemblies 5 and at least two fifth switch assemblies, the number of the fourth switch assemblies 5 is 1 less than the number of the third switch assemblies 6, and two ends of the fourth switch assemblies 5 are respectively connected with the third switch assemblies 6 and are used for connecting a public end formed after the main equipment and the third switch assemblies 6 are connected with each other; a fifth switch assembly comprises an angle valve 3, a butterfly valve 4 and a main valve 13, wherein the butterfly valve 4 is arranged between the angle valve 3 and the main valve 13, the angle valve 3 is used for connecting a main device, and the main valve 13 is used for connecting a public end formed by the interconnection of the third switch assembly.
When the central vacuum equipment is used, the whole vacuum system is a closed system, air leakage cannot occur, if air leaks in, chemical reaction can be generated with process gas, blocking of a filtering component can be accelerated, the service life is seriously shortened, the vacuum value also fluctuates, and the phenomena of poor process, reworking of produced products and the like can be possibly caused.
By using the vacuum equipment, the problems of excessive purchase of the vacuum pump, large power supply amount and the like can be solved. In order to prevent the whole system from being paralyzed, the system is provided with more valves, the machine is maintained or the adsorption cylinder is blocked, and the valve can be controlled to be opened or closed for timely maintenance without stopping the machine. The on-line standby device is also arranged, so that the standby unit is started when the abnormal situation can not be used, and the stable pressure and the pumping speed of the whole vacuum system are ensured. The vacuum pump is in a plurality of parallel modes, the operation is blocked, the valve is closed, and the vacuum pump can be directly removed and replaced without affecting the operation of the whole vacuum equipment. Although the present utility model has been described with reference to the above embodiments, it should be understood that the utility model is not limited thereto, but rather is capable of modification and variation without departing from the spirit and scope of the present utility model as defined in the following claims.
Claims (13)
1. A central vacuum apparatus, comprising:
the vacuumizing device comprises at least two vacuumizing components which are arranged in parallel;
the negative pressure device is connected with the vacuumizing device through a first connecting assembly and comprises at least two negative pressure components which are arranged in parallel;
the adsorption device is connected with the negative pressure device through a second connecting component and comprises at least two adsorption components which are arranged in parallel;
the main equipment is connected with the adsorption device through a third connecting component, wherein the main equipment comprises one or at least two furnace tubes.
2. The central vacuum apparatus according to claim 1, wherein,
the first connecting assembly comprises at least two first switch assemblies, one ends of the at least two first switch assemblies are respectively connected with the at least two vacuumizing components in one-to-one correspondence, and the other ends of the at least two first switch assemblies are mutually connected to form a common end to be connected with the negative pressure device.
3. A central vacuum apparatus according to claim 2, wherein,
the second connecting assembly comprises at least two second switch assemblies, one ends of the at least two second switch assemblies are respectively connected with the at least two negative pressure components in a one-to-one correspondence manner, and the other ends of the at least two second switch assemblies are respectively connected with the at least two adsorption components in a one-to-one correspondence manner.
4. A central vacuum apparatus according to claim 3, wherein,
the third connecting assembly comprises at least two third switch assemblies, one ends of the at least two third switch assemblies are respectively connected with the at least two adsorption components in one-to-one correspondence, and the other ends of the at least two third switch assemblies are mutually connected to form a common end to be connected with the main equipment.
5. A central vacuum apparatus according to claim 4, wherein,
the third connecting assembly comprises at least two fourth switching assemblies, the number of the fourth switching assemblies is the number of the third switching assemblies minus 1, and two ends of the fourth switching assemblies are respectively connected with the third switching assemblies.
6. A central vacuum apparatus according to claim 5, wherein,
the third connecting assembly comprises at least two fifth switch assemblies and is used for connecting the public end formed after the main equipment and the third switch assemblies are connected with each other.
7. A central vacuum apparatus according to claim 6, wherein,
a fifth switch assembly includes an angle valve, a butterfly valve and a main valve, the butterfly valve is located between the angle valve and the main valve, wherein the angle valve is used for connecting with a main device, and the main valve is used for connecting with a common end formed by the third switch assembly after being connected with each other.
8. The central vacuum apparatus according to claim 1, wherein,
the vacuumizing device further comprises at least two vacuumizing standby parts which are arranged in parallel with the vacuumizing parts.
9. The central vacuum apparatus according to claim 1, wherein,
each furnace tube is connected with a vacuum gauge, or,
the vacuumizing part and the vacuumizing standby part are selected from one of a Roots vacuum pump, a screw vacuum pump, a claw vacuum pump and an oil seal vacuum pump.
10. A central vacuum apparatus according to claim 2, wherein,
the central vacuum equipment further comprises a filtering device, the filtering device comprises filtering components, each vacuumizing component and each vacuumizing standby component are connected with the filtering components, and one ends of at least two first switch assemblies are respectively connected with at least two filtering components in one-to-one correspondence.
11. A central vacuum apparatus according to claim 6, wherein,
the first connecting component, the second connecting component and the third connecting component all comprise pipelines, and the first switch component, the second switch component, the third switch component, the fourth switch component and the fifth switch component are all connected to the pipelines.
12. The central vacuum apparatus according to claim 1, wherein,
the master device is one or at least two master devices arranged in parallel.
13. The central vacuum apparatus according to claim 10, wherein,
the filter element is one or at least two filter elements arranged in parallel.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223280371.9U CN219587726U (en) | 2022-12-07 | 2022-12-07 | Central vacuum equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223280371.9U CN219587726U (en) | 2022-12-07 | 2022-12-07 | Central vacuum equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219587726U true CN219587726U (en) | 2023-08-25 |
Family
ID=87689002
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202223280371.9U Active CN219587726U (en) | 2022-12-07 | 2022-12-07 | Central vacuum equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219587726U (en) |
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2022
- 2022-12-07 CN CN202223280371.9U patent/CN219587726U/en active Active
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