CN219572999U - High-precision film thickness detector - Google Patents

Abstract

The utility model belongs to the technical field of film thickness detection, in particular to a high-precision film thickness detector, which comprises a machine body and a lifting mechanism arranged on the outer wall of the machine body, wherein the lifting mechanism comprises a transmission assembly and a lifting assembly, the transmission assembly comprises a fixing frame, a transmission column, a rotating rod, a sliding rod and a sliding groove block, the outer wall of the machine body is fixedly connected with the fixing frame, the outer wall of the fixing frame is provided with the transmission column, the output end of the transmission column is fixedly connected with the rotating rod, the outer wall of the rotating rod is fixedly connected with the sliding rod, the outer wall of the sliding rod is slidingly connected with the sliding groove block, the lifting assembly comprises the lifting rod, a limiting frame, a lifting plate and the sliding column, the first buffer rod and the second buffer rod form a buffer structure with the machine body through the connecting plate, the connecting plate and the machine body form a buffer structure through springs, and the machine body reduces the influence on internal parts of the machine body caused by shaking and collision through buffering, and the service life of the machine body is prolonged.

Description

High-precision film thickness detector

Technical Field

The utility model relates to the technical field of film thickness detection, in particular to a high-precision film thickness detector.

Background

The film thickness detection system is also called a film detection system and is used for measuring the thickness of the film. In the existing film thickness measurement technology, the optical thickness measurement technology has high measurement precision, but large-thickness film measurement is difficult to realize; non-optical thickness measurement techniques can achieve large thickness film measurements, but with large measurement errors.

At present, when conventional equipment in the market is used, the protection of the equipment body is insufficient, the internal parts of the equipment body are easy to damage, and meanwhile, gaps exist between the detection head and the detection materials, so that the detection is inaccurate, and therefore, the high-precision film thickness detector is provided.

Disclosure of Invention

The utility model solves the problems that the protection of the machine body of the equipment is insufficient, the internal parts of the machine body are easy to be damaged, and meanwhile, gaps exist between the detection head and the detection material, so that the detection is inaccurate in the prior art.

In order to achieve the above purpose, the present utility model adopts the following technical scheme: the high-precision film thickness detector comprises a machine body and a lifting mechanism arranged on the outer wall of the machine body, wherein the lifting mechanism comprises a transmission assembly and a lifting assembly;

the transmission assembly comprises a fixing frame, a transmission column, a rotating rod, a sliding rod and a sliding groove block, wherein the fixing frame is fixedly connected to the outer wall of the machine body, the transmission column is arranged on the outer wall of the fixing frame, the rotating rod is fixedly connected to the output end of the transmission column, the sliding rod is fixedly connected to the outer wall of the rotating rod, and the sliding groove block is slidably connected to the outer wall of the sliding rod;

the lifting assembly comprises a lifting rod, a limiting frame, a lifting plate and a sliding column, wherein the lifting rod is fixedly connected to the top end of the sliding groove block, the limiting frame penetrates through the outer wall of the lifting rod, and the sliding column is slidably connected to the inner wall of the lifting plate.

The inner wall of organism is provided with first buffer rod, the one end that first buffer rod was kept away from to the organism is provided with the second buffer rod, the one end that first buffer rod and second buffer rod kept away from the organism inner wall rotates and is connected with the connecting plate, the back of connecting plate is provided with the spring, the bottom of lifter plate is provided with the measuring head.

Preferably, the rotating rod and the sliding rod form a rotating structure through a transmission column, and the sliding rod and the sliding groove block form a sliding structure through the rotating rod.

Preferably, the sliding groove block and the lifting rod form a lifting structure through the sliding rod, and the lifting rod and the lifting plate form a lifting structure through the sliding groove block and the limiting frame.

Preferably, the lifting plate and the sliding column form a sliding structure through the lifting rod.

Preferably, the first buffer rod and the second buffer rod form a buffer structure with the machine body through the connecting plate.

Preferably, the connecting plate and the machine body form a buffer structure through a spring.

The utility model has the following beneficial effects:

1. through setting up the lifter plate, the dwang drives the slide bar through the transmission post and rotates the operation, and the slide bar carries out sliding operation along the sliding tray piece through the dwang, then the sliding tray piece passes through the slide bar and drives the lifter plate through sliding tray piece and locating rack and carry out lifting operation, and the lifter plate carries out sliding operation along the sliding post through the lifter plate, through the lift of lifter plate, the measuring head adjustment height measurement that the bottom of lifter plate set up reduces with measuring the clearance between the object, improves the precision.

2. Through setting up the connecting plate, first buffer rod and second buffer rod pass through the connecting plate and constitute buffer structure with the organism, and the connecting plate passes through spring and constitutes buffer structure with the organism, and the organism passes through the buffering, reduces the influence that rocks and collide to organism internals and cause, extension organism life.

Drawings

FIG. 1 is a schematic diagram of a front view of a high-precision film thickness detector according to the present utility model;

FIG. 2 is a schematic diagram of a rear view of a high-precision film thickness detector according to the present utility model;

FIG. 3 is a schematic diagram of a lifting structure of a high-precision film thickness detector according to the present utility model;

fig. 4 is a schematic diagram of a buffer structure of a high-precision film thickness detector according to the present utility model.

In the figure: 1. a body; 2. a fixing frame; 3. a drive column; 4. a rotating lever; 5. sliding rod; 6. a sliding groove block; 7. a lifting rod; 8. a limiting frame; 9. a lifting plate; 10. a sliding column; 11. a first buffer rod; 12. a second buffer rod; 13. a connecting plate; 14. a spring; 15. a measuring head.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments.

Example 1

Referring to fig. 1, 2 and 3, a high-precision film thickness detector comprises a machine body 1 and a lifting mechanism arranged on the outer wall of the machine body 1, wherein the lifting mechanism comprises a transmission component and a lifting component;

the transmission assembly comprises a fixed frame 2, a transmission column 3, a rotating rod 4, a sliding rod 5 and a sliding groove block 6, wherein the fixed frame 2 is fixedly connected to the outer wall of the machine body 1, the transmission column 3 is arranged on the outer wall of the fixed frame 2, the rotating rod 4 is fixedly connected to the output end of the transmission column 3, the sliding rod 5 is fixedly connected to the outer wall of the rotating rod 4, and the sliding groove block 6 is slidably connected to the outer wall of the sliding rod 5;

the lifting assembly comprises a lifting rod 7, a limiting frame 8, a lifting plate 9 and a sliding column 10, wherein the lifting rod 7 is fixedly connected to the top end of the sliding groove block 6, the limiting frame 8 penetrates through the outer wall of the lifting rod 7, and the sliding column 10 is slidably connected to the inner wall of the lifting plate 9.

Further, the rotating rod 4 forms a rotating structure with the sliding rod 5 through the transmission column 3, the sliding rod 5 forms a sliding structure with the sliding groove block 6 through the rotating rod 4, the rotating structure is formed by the rotating rod 4 and the sliding rod 5 through the transmission column 3, the sliding rod 5 forms a sliding structure with the sliding groove block 6 through the rotating rod 4, and the sliding operation of the sliding rod 5 is realized.

Further, the sliding groove block 6 forms a lifting structure with the lifting rod 7 through the sliding groove block 5, the lifting rod 7 forms a lifting structure with the lifting plate 9 through the sliding groove block 6 and the limiting frame 8, the sliding groove block 6 is beneficial to forming the lifting structure with the lifting rod 7 through the sliding groove block 5, the lifting rod 7 forms a lifting structure with the lifting plate 9 through the sliding groove block 6 and the limiting frame 8, and lifting operation of the lifting plate 9 is achieved.

Further, the lifting plate 9 forms a sliding structure with the sliding column 10 through the lifting rod 7, so that the lifting plate 9 forms a sliding structure with the sliding column 10 through the lifting rod 7, and the sliding operation of the lifting plate 9 is realized.

Example two

Referring to fig. 1, 2 and 4, in a first comparative example, as another embodiment of the present utility model, a first buffer rod 11 is disposed on an inner wall of a machine body 1, a second buffer rod 12 is disposed at an end of the machine body 1 away from the first buffer rod 11, a connecting plate 13 is rotatably connected to an end of the first buffer rod 11 and the second buffer rod 12 away from the inner wall of the machine body 1, a spring 14 is disposed on a back surface of the connecting plate 13, and a measuring head 15 is disposed at a bottom end of the lifting plate 9.

Further, the first buffer rod 11 and the second buffer rod 12 form a buffer structure with the machine body 1 through the connecting plate 13, so that the buffer structure is formed by the first buffer rod 11 and the second buffer rod 12 with the machine body 1 through the connecting plate 13, and the buffer operation of the machine body 1 is realized.

Further, the connecting plate 13 and the machine body 1 form a buffer structure through the springs 14, so that the connecting plate 13 and the machine body 1 form the buffer structure through the springs 14, and the buffer operation of the machine body 1 is realized.

Working principle: firstly, the transmission column 3 rotates through a motor fixedly connected to the outer wall of the fixed frame 2, the rotation rod 4 forms a rotation structure with the sliding rod 5 through the transmission column 3, the sliding rod 5 forms a sliding structure through the rotation rod 4 and the sliding groove block 6, so the rotation rod 4 drives the sliding rod 5 to rotate through the transmission column 3, the sliding rod 5 slides along the sliding groove block 6 through the rotation rod 4, then the sliding groove block 6 drives the lifting rod 7 to lift through the sliding rod 5, the lifting rod 7 drives the lifting plate 9 to lift through the sliding groove block 6 and the limiting frame 8, the lifting plate 9 slides along the sliding column 10 through the lifting rod 7, the height measurement is adjusted through the measuring head 15 arranged at the bottom end of the lifting plate 9, the gap between the sliding rod and a measured object is reduced, and the accuracy is improved;

finally, the first buffer rod 11 and the second buffer rod 12 form a buffer structure with the machine body 1 through the connecting plate 13, the connecting plate 13 forms a buffer structure with the machine body 1 through the spring 14, the machine body 1 reduces the influence of shaking and collision on the internal parts of the machine body 1 through buffering, and the service life of the machine body is prolonged.

In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the apparatus or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model.

Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature. In the description of the present utility model, the meaning of "a plurality" is two or more, unless explicitly defined otherwise.

The foregoing is only a preferred embodiment of the present utility model, but the scope of the present utility model is not limited thereto, and any person skilled in the art, who is within the scope of the present utility model, should make equivalent substitutions or modifications according to the technical scheme of the present utility model and the inventive concept thereof, and should be covered by the scope of the present utility model.

Claims (7)

1. The utility model provides a thick detector of high accuracy, includes organism (1) and sets up the elevating system of installing at organism (1) outer wall, its characterized in that: the lifting mechanism comprises a transmission assembly and a lifting assembly;

the transmission assembly comprises a fixing frame (2), a transmission column (3), a rotating rod (4), a sliding rod (5) and a sliding groove block (6), wherein the fixing frame (2) is fixedly connected to the outer wall of the machine body (1), the transmission column (3) is arranged on the outer wall of the fixing frame (2), the rotating rod (4) is fixedly connected to the output end of the transmission column (3), the sliding rod (5) is fixedly connected to the outer wall of the rotating rod (4), and the sliding groove block (6) is slidably connected to the outer wall of the sliding rod (5);

the lifting assembly comprises a lifting rod (7), a limiting frame (8), a lifting plate (9) and a sliding column (10), wherein the lifting rod (7) is fixedly connected to the top end of the sliding groove block (6), the limiting frame (8) penetrates through the outer wall of the lifting rod (7), and the sliding column (10) is slidably connected to the inner wall of the lifting plate (9).

2. The high-precision film thickness measuring instrument according to claim 1, wherein: the inner wall of organism (1) is provided with first buffer rod (11), the one end that first buffer rod (11) was kept away from to organism (1) is provided with second buffer rod (12), the one end that first buffer rod (11) and second buffer rod (12) kept away from the inner wall of organism (1) rotates and is connected with connecting plate (13), the back of connecting plate (13) is provided with spring (14), the bottom of lifter plate (9) is provided with measuring head (15).

3. The high-precision film thickness measuring instrument according to claim 1, wherein: the rotating rod (4) and the sliding rod (5) form a rotating structure through the transmission column (3), and the sliding rod (5) and the sliding groove block (6) form a sliding structure through the rotating rod (4).

4. The high-precision film thickness measuring instrument according to claim 1, wherein: the sliding groove block (6) and the lifting rod (7) form a lifting structure through the sliding rod (5), and the lifting rod (7) and the lifting plate (9) form a lifting structure through the sliding groove block (6) and the limiting frame (8).

5. The high-precision film thickness measuring instrument according to claim 1, wherein: the lifting plate (9) and the sliding column (10) form a sliding structure through the lifting rod (7).

6. The high-precision film thickness measuring instrument according to claim 2, wherein: the first buffer rod (11) and the second buffer rod (12) form a buffer structure with the machine body (1) through the connecting plate (13).

7. The high-precision film thickness measuring instrument according to claim 2, wherein: the connecting plate (13) and the machine body (1) form a buffer structure through a spring (14).