CN219572675U - Aluminum nitride ceramic substrate sintering furnace - Google Patents

Aluminum nitride ceramic substrate sintering furnace Download PDF

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Publication number
CN219572675U
CN219572675U CN202320415798.0U CN202320415798U CN219572675U CN 219572675 U CN219572675 U CN 219572675U CN 202320415798 U CN202320415798 U CN 202320415798U CN 219572675 U CN219572675 U CN 219572675U
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China
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furnace
gear
furnace door
rotating shaft
ceramic substrate
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CN202320415798.0U
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Chinese (zh)
Inventor
肖良祥
杨大胜
施纯锡
冯家伟
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FUJIAN HUAQING ELECTRONIC MATERIAL TECHNOLOGY CO LTD
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FUJIAN HUAQING ELECTRONIC MATERIAL TECHNOLOGY CO LTD
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Abstract

The utility model relates to the technical field of aluminum nitride ceramic substrate production equipment, provides an aluminum nitride ceramic substrate sintering furnace, and solves the problems of reduced sintering efficiency, reduced product quality and troublesome furnace door fastening caused by structural defects of existing equipment. The utility model comprises a furnace door and a furnace body, wherein the furnace door is arranged at the front side of the furnace body, an opening mechanism is arranged at the outer side of the furnace door, the furnace further comprises a rotating shaft, one end of the rotating shaft penetrates through the furnace door and is connected with a mounting plate, threads between the rotating shaft and the furnace door and threads between the rotating shaft and the mounting plate are reversely arranged, the connection between the furnace door and the furnace body is changed into one-key control opening and closing through the opening mechanism arranged at the outer side of the furnace door, and the mounting plate connected with the tail end of the rotating shaft is pushed through the threaded sleeve connection between the rotating shaft and the furnace door and the mounting plate, so that sufficient supporting force is provided for a heat insulation graphite plate at the inner side of the furnace door.

Description

Aluminum nitride ceramic substrate sintering furnace
Technical Field
The utility model relates to the technical field of aluminum nitride ceramic substrate production equipment, in particular to an aluminum nitride ceramic substrate sintering furnace.
Background
The aluminum nitride ceramic substrate needs to be sintered in production, and the sintering process needs to be performed under vacuum condition in order to improve the density of the product and prevent the aluminum nitride from being oxidized.
Chinese patent publication No. CN104084581a discloses a method for vacuum sintering and forming of metal powder, which sequentially comprises the following steps:
(1) Feeding, namely placing a metal powder product to be processed into a hearth of a vacuum degreasing sintering furnace;
(2) Vacuumizing, namely vacuumizing a hearth of the vacuum degreasing sintering furnace;
(3) Degreasing and removing the forming agent in the metal powder product;
(4) And (5) sintering at high temperature.
The sintering furnace comprises a furnace door and a furnace body, wherein the furnace door is connected with the furnace body through a hinge, a handle is arranged on the furnace door, and a plurality of groups of furnace door locking pieces are arranged along the edges of the furnace door and the furnace body.
The sintering furnace is adopted to sinter and mold metal powder products, the sintering furnace comprises a furnace door and a furnace body, the furnace door is connected with the furnace body through hinges, and the furnace door is locked through a plurality of groups of furnace door locking pieces arranged along the edges of the furnace door and the furnace body.
Disclosure of Invention
Therefore, in order to solve the problems, the utility model provides an aluminum nitride ceramic substrate sintering furnace which solves the problems of reduced sintering efficiency, reduced product quality and troublesome furnace door fastening caused by the structural defects of the existing equipment.
In order to achieve the above purpose, the utility model is realized by the following technical scheme:
the utility model provides an aluminum nitride ceramic substrate fritting furnace, includes furnace gate and furnace body, the furnace body front side sets up the furnace gate, the furnace gate outside is equipped with opening mechanism, opening mechanism includes frameless motor, first gear, a plurality of second gears, drive belt, a plurality of third gears and a plurality of extensible member, the frameless motor is located to first gear cover, the second gear distributes along first gear border and with first gear engagement, the second gear passes through the drive belt and is connected with the third gear, the third gear bottom is connected with the dwang, the dwang bottom runs through the extensible member, each the extensible member sets up along the furnace gate border, furnace body front side edge is equipped with a plurality of expansion grooves, the expansion groove corresponds the setting with the extensible member.
Further, the front side of the furnace body is provided with a reinforcing ring, a limiting table is arranged between the furnace door and the furnace body, and the telescopic groove is formed in the side wall of the limiting table.
Further, the furnace door is connected with the furnace body through a hinge.
Further, the extensible member includes flexible piece, fixed frame, rotation piece and screens piece, fixed frame is connected with the furnace gate, flexible piece runs through fixed frame both sides wall, the rotation piece sets up on flexible piece, the dwang runs through rotation piece and flexible piece, the screens piece sets up in the rotation piece both sides.
Further, still include the axis of rotation, axis of rotation one end runs through the furnace gate and is connected with the mounting panel, the axis of rotation other end passes frameless motor and is connected with the turning handle, the mounting panel is equipped with the gag lever post all around, gag lever post one end and furnace gate fixed surface connection, the gag lever post other end activity is pegged graft inside the mounting panel.
Further, the surface of the rotating shaft is provided with threads, and the rotating shaft is in threaded connection with the furnace door and the mounting plate.
Further, the threads between the rotating shaft and the furnace door and the threads between the rotating shaft and the mounting plate are reversely arranged.
Compared with the prior art, the utility model has the beneficial effects that:
1. according to the utility model, the opening mechanism arranged on the outer side of the furnace door drives the second gear to rotate through the rotation of the first gear, so that the rotating rod connected under the second gear drives the telescopic piece to stretch out and draw back, the connection between the furnace door and the furnace body is changed into one-key control on-off, and the problem of troublesome fastening caused by the arrangement of a plurality of fasteners in the existing sintering furnace is solved.
2. According to the utility model, the rotating shaft is arranged, the mounting plate connected with the tail end of the rotating shaft is pushed by sleeving threads between the rotating shaft and the furnace door and the mounting plate, so that sufficient supporting force is provided for the heat insulation graphite plate at the inner side of the furnace door, and the problem that the quality of the aluminum nitride ceramic substrate is affected due to insufficient fastening force between the furnace door and the furnace body after the traditional sintering furnace is used for a long time is solved.
Drawings
FIG. 1 is a schematic diagram of an embodiment of the present utility model;
FIG. 2 is a schematic view of an opening mechanism according to an embodiment of the present utility model;
FIG. 3 is a schematic view of a cross-sectional structure of an oven door according to an embodiment of the present utility model;
FIG. 4 is a schematic view of a telescopic member according to an embodiment of the present utility model;
fig. 5 is a schematic cross-sectional view of a telescopic member according to an embodiment of the present utility model.
Description of the reference numerals
A furnace door 1; a furnace body 2; a hinge 3; a frameless motor 4; a first gear 5; a second gear 6; a drive belt 7;
a third gear 8; a telescoping member 9; a rotating lever 10; a telescopic groove 11; a reinforcing ring 12; a limit table 13;
a telescopic block 14; a fixed frame 15; a rotating block 16; a positioning block 17; a rotation shaft 18; a mounting plate 19;
a stem 20; a stopper rod 21; a thermally insulating graphite sheet 22; an opening mechanism 23.
Detailed Description
The following describes embodiments of the present utility model in detail with reference to specific examples, so as to solve the technical problem by applying the technical means to the present utility model, and the implementation process for achieving the technical effect can be fully understood and implemented accordingly.
Examples
As shown in fig. 1 to 5, an aluminum nitride ceramic substrate sintering furnace comprises a furnace door 1 and a furnace body 2, wherein the furnace door 1 is arranged at the front side of the furnace body 2, the furnace door 1 and the furnace body 2 are connected through a hinge 3, an opening mechanism 23 is arranged at the outer side of the furnace door 1, the opening mechanism 23 comprises a frameless motor 4, a first gear 5, six second gears 6, a driving belt 7, six third gears 8 and six telescopic pieces 9, the first gear 5 is sleeved outside the frameless motor 4, the second gears 6 are distributed along the edge of the first gears 5 and meshed with the first gears 5, the second gears 6 are connected with the third gears 8 through the driving belt 7, a rotating rod 10 is connected at the bottom end of the third gears 8, the bottom end of the rotating rod 10 penetrates through the telescopic pieces 9, the telescopic pieces 9 are arranged along the edge of the furnace door 1, six telescopic grooves 11 are formed in the front edge of the furnace body 2, and the telescopic grooves 11 are correspondingly arranged with the telescopic pieces 9;
specifically, a reinforcing ring 12 is arranged on the front side of the furnace body 2, a limiting table 13 is arranged between the furnace door 1 and the furnace body 2, and the telescopic groove 11 is arranged on the side wall of the limiting table 13;
the telescopic piece 9 comprises a telescopic block 14, a fixed frame 15, a rotating block 16 and a clamping block 17, wherein the fixed frame 15 is connected with the oven door 1, the telescopic block 14 penetrates through two side walls of the fixed frame 15, the rotating block 16 is arranged on the telescopic block 14, the rotating rod 10 penetrates through the rotating block 16 and the telescopic block 14, and the clamping block 17 is arranged on two sides of the rotating block 16;
the opening mechanism 23 arranged on the outer side of the furnace door 1 drives the second gear 6 to rotate through the rotation of the first gear 5, so that the rotating rod 10 connected under the second gear 6 drives the telescopic piece 9 to stretch out and draw back, the connection between the furnace door 1 and the furnace body 2 is changed into one-key control for opening and closing, and the problem of troublesome fastening caused by the arrangement of a plurality of fasteners in the existing sintering furnace is solved;
the furnace door furnace further comprises a rotating shaft 18, one end of the rotating shaft 18 penetrates through the furnace door 1 to be connected with a mounting plate 19, the other end of the rotating shaft 18 penetrates through the frameless motor 4 to be connected with a rotating handle 20, limiting rods 21 are arranged around the mounting plate 19, one end of each limiting rod 21 is fixedly connected with the surface of the furnace door 1, and the other end of each limiting rod 21 is movably inserted into the mounting plate 19;
the surface of the rotating shaft 18 is provided with threads, the rotating shaft 18 is in threaded connection with the furnace door 1 and the mounting plate 19, and the threads between the rotating shaft 18 and the furnace door 1 and the threads between the rotating shaft 18 and the mounting plate 19 are reversely arranged;
through setting up axis of rotation 18, through the screw thread between axis of rotation 18 and furnace gate 1, the mounting panel 19 of installation board 19, promote the terminal connection of axis of rotation 18's mounting panel 19, provide sufficient holding power for the inboard thermal-insulated graphite plate 22 of furnace gate 1, solve traditional fritting furnace and use the back for a long time, the fastening force is not enough between furnace gate and the furnace body influences the problem of aluminium nitride ceramic substrate quality.
While the utility model has been particularly shown and described with reference to a preferred embodiment, it will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the utility model as defined by the appended claims.

Claims (7)

1. The utility model provides an aluminium nitride ceramic substrate fritting furnace, includes furnace gate and furnace body, the furnace body front side sets up furnace gate, its characterized in that: the furnace door outside is equipped with opening mechanism, opening mechanism includes frameless motor, first gear, a plurality of second gear, drive belt, a plurality of third gear and a plurality of extensible member, outside the frameless motor is located to first gear cover, the second gear is along first gear border distribution and with first gear engagement, the second gear passes through the drive belt and is connected with the third gear, the third gear bottom is connected with the dwang, the dwang bottom runs through the extensible member, each the extensible member sets up along the furnace door border, the furnace body front side edge is equipped with a plurality of expansion grooves, the expansion groove corresponds the setting with the extensible member.
2. An aluminum nitride ceramic substrate sintering furnace according to claim 1, wherein: the furnace body front side is equipped with the strengthening ring, be equipped with spacing platform between furnace gate and the furnace body, the flexible groove sets up at spacing platform lateral wall.
3. An aluminum nitride ceramic substrate sintering furnace according to claim 1, wherein: the furnace door is connected with the furnace body through a hinge.
4. An aluminum nitride ceramic substrate sintering furnace according to claim 1, wherein: the telescopic piece includes flexible piece, fixed frame, dwang and screens piece, fixed frame is connected with the furnace gate, flexible piece runs through fixed frame both sides wall, the dwang sets up on flexible piece, the dwang runs through dwang and flexible piece, the screens piece sets up in the dwang both sides.
5. An aluminum nitride ceramic substrate sintering furnace according to claim 1, wherein: still include the axis of rotation, axis of rotation one end runs through the furnace gate and is connected with the mounting panel, the axis of rotation other end passes frameless motor and is connected with the turning handle, the mounting panel is equipped with the gag lever post all around, gag lever post one end and furnace gate fixed surface connection, the gag lever post other end activity is pegged graft inside the mounting panel.
6. An aluminum nitride ceramic substrate sintering furnace according to claim 5, wherein: the surface of the rotating shaft is provided with threads, and the rotating shaft is in threaded connection with the furnace door and the mounting plate.
7. An aluminum nitride ceramic substrate sintering furnace according to claim 6, wherein: the threads between the rotating shaft and the furnace door and the threads between the rotating shaft and the mounting plate are reversely arranged.
CN202320415798.0U 2023-03-08 2023-03-08 Aluminum nitride ceramic substrate sintering furnace Active CN219572675U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202320415798.0U CN219572675U (en) 2023-03-08 2023-03-08 Aluminum nitride ceramic substrate sintering furnace

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202320415798.0U CN219572675U (en) 2023-03-08 2023-03-08 Aluminum nitride ceramic substrate sintering furnace

Publications (1)

Publication Number Publication Date
CN219572675U true CN219572675U (en) 2023-08-22

Family

ID=87657918

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202320415798.0U Active CN219572675U (en) 2023-03-08 2023-03-08 Aluminum nitride ceramic substrate sintering furnace

Country Status (1)

Country Link
CN (1) CN219572675U (en)

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