CN219572281U - Heating device - Google Patents
Heating device Download PDFInfo
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- CN219572281U CN219572281U CN202320696493.1U CN202320696493U CN219572281U CN 219572281 U CN219572281 U CN 219572281U CN 202320696493 U CN202320696493 U CN 202320696493U CN 219572281 U CN219572281 U CN 219572281U
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Abstract
The utility model discloses a heating device, which comprises a first container, a second container and a heat source, wherein the first container is used for containing a solution to be heated, the first container is arranged in the second container, an accommodating space for accommodating a heat conducting medium is arranged between the first container and the second container, and the heat conducting medium can be contacted with a plurality of different positions of the first container; the heat source can transfer heat to the heat conducting medium, and the heat is transferred to different positions of the solution to be heated through the heat conducting medium, so that the solution to be heated is heated to a preset temperature. Compared with the prior art, the heating device has the advantages that the heating positions of the container to be heated are increased, the solutions to be heated can be heated respectively from different directions, and the temperature of the solutions to be heated is uniformly controlled, so that the heating device can realize the accurate control of the temperature of the solutions to be heated, and the product quality is effectively improved.
Description
Technical Field
The utility model relates to the technical field of heating equipment, in particular to a heating device.
Background
In the semiconductor production process, a cleaning link of a semiconductor product is required, in order to ensure the product quality, the temperature of a cleaning solution must meet the specified process requirements, and the temperature difference of the cleaning solution is generally required to be controlled within plus or minus 1.5 ℃ in the industry.
Currently, temperature control of the cleaning solution is generally performed by directly heating the cleaning solution in a heating furnace, that is, the heating furnace directly contacts with the bottom of the container for holding the cleaning solution to heat the cleaning solution, but the heating manner can cause the temperature of the bottom of the cleaning solution to rise faster, and the temperature of other positions to rise slower, so that the temperatures of the different positions are different, and therefore, the temperature of the cleaning solution cannot be accurately controlled.
Therefore, how to accurately control the temperature of the cleaning solution, and further improve the quality of the product is a technical problem to be solved by those skilled in the art.
Disclosure of Invention
Accordingly, the present utility model is directed to a heating device capable of precisely controlling the temperature of a cleaning solution, thereby improving the quality of the product.
In order to achieve the above purpose, the present utility model provides the following technical solutions:
a heating device comprising a first container, a second container and a heat source, wherein the first container is used for containing a solution to be heated, the first container is arranged in the second container, a containing space for containing a heat conducting medium is arranged between the first container and the second container, and the heat conducting medium can be contacted with a plurality of different positions of the first container;
the heat source can transfer heat to the heat conducting medium, and the heat is transferred to different positions of the solution to be heated through the heat conducting medium, so that the solution to be heated is heated to a preset temperature.
Preferably, the heat conducting medium is a solid material, and the solid material can be tightly attached to the outer surface of the first container.
Preferably, the heat conducting medium is a flexible heat conducting pad.
Preferably, the heat transfer medium is a liquid, and the liquid is capable of contacting with the outer surface of the first container.
Preferably, the height of the heat transfer medium is at least one half of the height of the solution to be heated.
Preferably, the device further comprises a liquid inlet conveying pipeline and a liquid outlet conveying pipeline, wherein one ends of the liquid inlet conveying pipeline and the liquid outlet conveying pipeline are respectively connected with the heat source, and the other ends of the liquid inlet conveying pipeline and the liquid outlet conveying pipeline are respectively communicated with the heat conducting medium.
Preferably, the device further comprises a pump arranged in the liquid inlet conveying pipeline or the liquid outlet conveying pipeline.
Preferably, the device further comprises heat preservation pieces, wherein the heat preservation pieces are arranged on the liquid inlet conveying pipeline and the liquid outlet conveying pipeline.
Preferably, the device further comprises a temperature sensor for detecting the temperature of the solution to be heated, and the temperature sensor is electrically connected with the heat source.
Preferably, the heat source is a heater.
According to the technical scheme, when the solution to be heated is heated, the heat source is started, the heat source transfers heat to the heat conducting medium, the heat is transferred to a plurality of different positions of the first container through the heat conducting medium, and the heat is transferred to a plurality of different positions of the solution to be heated through the first container, so that the solution to be heated is heated to a preset temperature.
Compared with the prior art, the heating device disclosed by the utility model has the advantages that the heating positions of the container to be heated are increased, so that the solutions to be heated can be heated respectively from different directions, and the temperature of the solutions to be heated can be controlled uniformly, and therefore, the heating device can realize the accurate control of the temperature of the solutions to be heated, and the product quality is improved effectively.
Drawings
In order to more clearly illustrate the embodiments of the present utility model or the technical solutions in the prior art, the drawings that are required to be used in the description of the embodiments or the prior art are briefly introduced below, and it is obvious that the drawings in the following description are only embodiments of the present utility model, and other drawings can be obtained according to the provided drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic diagram of an overall structure of a heating device according to an embodiment of the present utility model;
wherein, each part name is as follows:
100. a first container; 200. a second container; 300. a heat source; 400. a heat-conducting medium; 500. a liquid inlet conveying pipeline; 600. a liquid outlet conveying pipeline; 700. a thermal insulation member; 800. a temperature sensor.
Detailed Description
For a better understanding of the present utility model, reference is made to fig. 1, which is a schematic diagram illustrating the following detailed description of the present utility model, taken in conjunction with the accompanying drawings and detailed description.
The heating device disclosed in the embodiment of the utility model comprises a first container 100, a second container 200 and a heat source 300, wherein the first container 100 is used for containing a solution to be heated, the first container 100 is arranged in the second container 200, an accommodating space for accommodating a heat conducting medium 400 is arranged between the first container 100 and the second container 200, the heat conducting medium 400 can be in contact with a plurality of different positions of the first container 100, the heat source 300 can transfer heat to the heat conducting medium 400, and the heat is respectively transferred to different positions of the solution to be heated through the heat conducting medium 400, so that the solution to be heated is heated to a preset temperature.
When the solution to be heated is heated, the heat source 300 is turned on, the heat source 300 transfers heat to the heat-conducting medium 400, the heat is transferred to a plurality of different positions of the first container 100 through the heat-conducting medium 400, and the heat is transferred to a plurality of different positions of the solution to be heated through the first container 100, so that the solution to be heated is heated to a preset temperature.
Compared with the prior art, the heating device disclosed by the embodiment of the utility model has the advantages that the heating positions of the container to be heated are increased, so that the solutions to be heated can be heated respectively from different directions, and the temperature of the solutions to be heated can be controlled uniformly, and therefore, the heating device can realize the accurate control of the temperature of the solutions to be heated, and the product quality is improved effectively.
The specific arrangement relation of the first container 100 and the second container 200 is not specifically limited in the embodiment of the present utility model, and the structure meeting the use requirement of the present utility model is within the protection scope of the present utility model.
The first container 100 may be directly disposed on the bottom end surface of the second container 200, and the second container 200 may also be disposed on the bottom end surface of the second container 200 through a connection member, which is not particularly limited in the present example,
the embodiment of the present utility model is not limited to the specific form of the heat-conducting medium 400, and forms meeting the use requirements of the present utility model are all within the scope of the present utility model.
The heat conducting medium 400 disclosed in the embodiment of the present utility model may be a solid, a liquid, or any other form, as long as the form satisfying the use requirement of the present utility model is within the scope of the present utility model.
As a preferred embodiment, the heat-conducting medium 400 disclosed in the embodiment of the present utility model is preferably a solid material, and when the heat-conducting medium 400 is a solid material, the solid material can be tightly adhered to the outer surface of the container to be heated. When heating is turned on, the heat transfer medium 400 is heated, and the heat transfer medium 400 indirectly transfers heat to the solution to be heated through the container to be heated.
The embodiment of the utility model does not limit the specific structure of the solid, and the solid can be flexible or rigid, so long as the structure meeting the use requirement of the utility model is within the protection scope of the utility model.
As a preferred embodiment, the solid object disclosed in the embodiment of the utility model is preferably a flexible heat conducting pad, and the arrangement is such that the solid object is better attached to the outer surface of the container to be heated, thereby being capable of heating the solution to be heated more uniformly.
As another preferred embodiment, the heat transfer medium 400 disclosed in the embodiment of the present utility model is preferably a liquid substance, wherein the liquid substance can be in contact with the outer surface of the container to be heated.
The liquid may be water or other liquid, and the structure meeting the use requirement of the present utility model is within the scope of the present utility model. The liquid disclosed in the embodiment of the utility model is preferably water.
When the heat-conducting medium 400 is a liquid, the height of the heat-conducting medium 400 is preferably at least one half of the height of the solution to be heated, so that the heat-conducting area can be increased, the temperature rising speed of the solution to be heated is increased, and the uniformity of the temperature of the solution to be heated can be further controlled.
In order to further accurately control the temperature of the solution to be heated, the heating device disclosed in the embodiment of the utility model further includes a liquid inlet conveying pipeline 500 and a liquid outlet conveying pipeline 600, wherein one ends of the liquid inlet conveying pipeline 500 and the liquid outlet conveying pipeline 600 are respectively connected with the heat source 300, and the other ends of the liquid inlet conveying pipeline 500 and the liquid outlet conveying pipeline 600 are respectively communicated with the heat conducting medium 400.
When the heat source 300 is activated, the heat transfer medium 400 is heated, and the heat transfer medium 400 enters the accommodating space between the first container 100 and the second container 200 from the liquid inlet transfer pipe 500, transfers heat to the first container 100, and heats the solution to be heated through the first container 100.
In order to realize the circulation of the heat conducting medium 400, the heating device disclosed in the embodiment of the present utility model further includes a pump disposed in the liquid inlet conveying pipeline 500 or the liquid outlet conveying pipeline 600. The heat transfer medium 400 may be circulated between the receiving space and the heat source 300 through the liquid inlet transfer pipe 500 and the liquid outlet transfer pipe 600 by pumping.
In order to reduce heat loss, the heating device disclosed in the embodiments of the present utility model, the heat insulation members 700 are disposed on the liquid inlet conveying pipeline 500 and the liquid outlet conveying pipeline 600.
The heat preservation member 700 may be heat preservation cotton, a heat preservation belt, or other structural materials, so long as the structure meeting the use requirement of the present utility model is within the protection scope of the present utility model.
In order to detect the temperature, the heating device disclosed in the embodiment of the present utility model further includes a temperature sensor 800 for detecting the temperature of the solution to be heated, where the temperature sensor 800 is electrically connected to the heat source 300.
So configured, the temperature sensor 800 detects the temperature of the container to be heated and transmits the detection result to the heat source 300, and the heat source 300 automatically turns on the heating or stopping button according to the detection result, so that the temperature of the solution to be heated is within a preset temperature range.
Of course, the specific type of the heat source 300 is not limited in the embodiment of the present utility model, and the heat source 300 may be a gas furnace, an oil furnace, a heat pump, solar energy, etc., as long as the type meeting the use requirement of the present utility model is within the protection scope of the present utility model.
As a preferred embodiment, the heat source 300 disclosed in the embodiment of the present utility model preferably employs a heater.
When the heat source 300 is a heater, the temperature displayed in real time on the heater can set the upper and lower limit values of the temperature, and when the temperature fed back by the temperature sensor 800 is lower than the lower limit value of the set temperature, the heater automatically starts the heating function; when the temperature fed back by the temperature sensor 800 is higher than the upper limit value of the set temperature, the heater automatically starts the stopping function so that the temperature of the solution to be heated is within the preset temperature range.
In the description of the present utility model, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present utility model and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
Unless specifically stated or limited otherwise, the terms "mounted," "connected," and "coupled" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present utility model. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the utility model. Thus, the present utility model is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (10)
1. A heating device, characterized by comprising a first container, a second container and a heat source, wherein the first container is used for containing a solution to be heated, the first container is arranged in the second container, a containing space for containing a heat conducting medium is arranged between the first container and the second container, and the heat conducting medium can be contacted with a plurality of different positions of the first container;
the heat source can transfer heat to the heat conducting medium, and the heat is transferred to different positions of the solution to be heated through the heat conducting medium, so that the solution to be heated is heated to a preset temperature.
2. The heating device of claim 1, wherein the thermally conductive medium is a solid object capable of being abutted against an outer surface of the first container.
3. The heating device of claim 2, wherein the thermally conductive medium is a flexible thermally conductive pad.
4. The heating device of claim 1, wherein the thermally conductive medium is a liquid capable of contacting an outer surface of the first container.
5. The heating device of claim 4, wherein the thermally conductive medium has a height at least one-half the height of the solution to be heated.
6. The heating device of claim 4, further comprising a liquid inlet delivery conduit and a liquid outlet delivery conduit, wherein one end of the liquid inlet delivery conduit and one end of the liquid outlet delivery conduit are respectively connected to the heat source, and wherein the other ends of the liquid inlet delivery conduit and the liquid outlet delivery conduit are respectively connected to the heat transfer medium.
7. The heating device of claim 6, further comprising a pump disposed within the liquid inlet delivery conduit or the liquid outlet delivery conduit.
8. The heating device of claim 6, further comprising insulation members disposed on both the liquid inlet and outlet delivery conduits.
9. The heating device of claim 1, further comprising a temperature sensor for detecting a temperature of the solution to be heated, the temperature sensor being electrically connected to the heat source.
10. The heating device of claim 1, wherein the heat source is a heater.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320696493.1U CN219572281U (en) | 2023-03-31 | 2023-03-31 | Heating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320696493.1U CN219572281U (en) | 2023-03-31 | 2023-03-31 | Heating device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219572281U true CN219572281U (en) | 2023-08-22 |
Family
ID=87663407
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202320696493.1U Active CN219572281U (en) | 2023-03-31 | 2023-03-31 | Heating device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219572281U (en) |
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2023
- 2023-03-31 CN CN202320696493.1U patent/CN219572281U/en active Active
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