CN219566935U - High-purity rare earth target material oxidation preventing device - Google Patents

Abstract

The utility model discloses a high-purity rare earth target oxidation prevention device, which comprises a roller conveyor, wherein an upper heat preservation cover is arranged on the roller conveyor, a connecting pipe for conveying inert protective gas into the upper heat preservation cover is arranged in the middle of the upper heat preservation cover, a guide plate for guiding the inert protective gas is arranged on the upper end face of the inner part of the upper heat preservation cover, which corresponds to the air outlet of the connecting pipe, a preheating heat preservation device is arranged at the bottom of the roller conveyor and comprises a heat conducting plate arranged at the bottom of the roller conveyor, and a heater is arranged on the upper surface of the heat conducting plate. The high-purity rare earth target oxidation preventing device can be aligned to preserve heat in the conveying process of the high-purity rare earth target blank, can reduce the heat loss speed of the high-purity rare earth target blank, is beneficial to rolling of the high-purity rare earth target blank, can keep the high-purity rare earth target blank in inert protective gas in the conveying process, and reduces the contact between the high-purity rare earth target blank and air, so that the excellent performance of the high-purity rare earth target blank is ensured.

Description

High-purity rare earth target material oxidation preventing device

Technical Field

The utility model relates to the technical field of target processing, in particular to a high-purity rare earth target oxidation preventing device.

Background

Rare earth materials have wide application in the fields of optics, magnetism, electronics and the like. Rare earth targets are one of the very important raw materials in the process of preparing functional films and devices. Because the rare earth element has higher chemical activity, the rare earth element is easily oxidized in the processing process, thereby influencing the performance of the prepared film or device, such as reducing the sputtering efficiency, increasing the impedance and the like. Therefore, there is a need for protection against oxidation during and after processing to ensure that the target surface is not oxidized.

At present, when a high-purity rare earth target is processed, a common oxidation prevention method is to use inert gases such as argon and the like to replace air so as to reduce the contact between the target and oxygen. However, the above method only uses argon gas for protection in the heating furnace and the annealing furnace, and when the target is transported to the rolling mill by the roller conveyor for rolling, the target is completely exposed to air, and no oxidation protection treatment is performed on the target. Therefore, the utility model provides the high-purity rare earth target oxidation preventing device which is used for reducing the contact between the target and oxygen, thereby ensuring the excellent performance of the target.

Disclosure of Invention

The utility model aims to overcome the existing defects, and provides the high-purity rare earth target oxidation prevention device which can be aligned to preserve heat in the conveying process of the high-purity rare earth target blank, can reduce the heat loss speed of the high-purity rare earth target blank, is beneficial to rolling of the high-purity rare earth target blank, can keep the high-purity rare earth target blank in inert protective gas in the conveying process, and can reduce the contact between the high-purity rare earth target blank and air, thereby ensuring the excellent performance of the high-purity rare earth target blank and effectively solving the problems in the background art.

In order to achieve the above purpose, the present utility model provides the following technical solutions: the utility model provides a high-purity rare earth target antioxidation device, includes roller conveyor, install the heat preservation cover on the roller conveyor, the middle part of going up the heat preservation cover is equipped with the connecting pipe that is used for carrying inert protection gas to the inside of last heat preservation cover, the inside up end that goes up heat preservation cover and connecting pipe gas outlet correspond is equipped with the guide plate that carries out the water conservancy diversion to inert protection gas.

As a preferable technical scheme of the utility model, the longitudinal section of the guide plate is of an isosceles triangle structure, and the top tip of the guide plate is connected with the upper heat insulation cover.

As a preferable technical scheme of the utility model, a preheating and heat-preserving device is arranged at the bottom of the roller conveyor.

As a preferable technical scheme of the utility model, the preheating heat preservation device comprises a heat conduction plate arranged at the bottom of the roller conveyor, and a heater is arranged on the upper surface of the heat conduction plate.

As a preferable technical scheme of the utility model, the bottom of the heat-conducting plate is provided with a lower heat-insulating cover, a plurality of heat-conducting partition boards are arranged in the lower heat-insulating cover, the inner cavity of the lower heat-insulating cover is divided into an S-shaped ventilation cavity by the plurality of heat-conducting partition boards, the side surface of the lower heat-insulating cover corresponding to one end of the ventilation cavity is provided with an inert gas inlet pipe, the side surface of the lower heat-insulating cover corresponding to the other end of the ventilation cavity is communicated with a connecting pipe, and inert protective gas is preheated in the ventilation cavity.

Compared with the prior art, the utility model has the beneficial effects that:

according to the high-purity rare earth target oxidation preventing device, a lower heat preservation cover and an upper heat preservation cover form a heat preservation chamber with two open sides; the heater preheats the heat-preserving chamber, and reduces the temperature difference between the heat-preserving chamber and the high-purity rare earth target blank to be rolled.

According to the high-purity rare earth target oxidation preventing device, the heater heats the ventilation cavity through the heat conducting plate; the inert shielding gas conveying equipment for external drying conveys inert shielding gas into the ventilation cavity through the inert gas inlet pipe for preheating, and discharges the inert shielding gas into the heat preservation cavity through the connecting pipe, so that original air in the heat preservation cavity is conveniently discharged.

The high-purity rare earth target material oxidation prevention device can be aligned to perform heat preservation in the conveying process of the high-purity rare earth target blank, can reduce the heat loss speed of the high-purity rare earth target blank, is beneficial to rolling of the high-purity rare earth target blank, can keep the high-purity rare earth target blank in inert protective gas in the conveying process, and reduces the contact between the high-purity rare earth target blank and air, so that the excellent performance of the high-purity rare earth target blank is ensured.

Drawings

FIG. 1 is a schematic diagram of the structure of the present utility model;

FIG. 2 is a schematic left-hand view of FIG. 1;

FIG. 3 is a schematic cross-sectional view of the upper thermal shield of the present utility model;

FIG. 4 is a schematic diagram of a preheating and thermal insulating device according to the present utility model;

fig. 5 is a schematic diagram of the left-hand structure of fig. 4.

In the figure: the device comprises a roller conveyor 1, an upper heat insulation cover 2, a guide plate 21, a heat conduction plate 3, a heater 31, a lower heat insulation cover 4, an inert gas inlet pipe 41, a connecting pipe 42 and a heat conduction partition plate 5.

Detailed Description

The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.

Example 1:

referring to fig. 1-3, the present embodiment provides a technical solution:

the utility model provides a high-purity rare earth target antioxidation device, including roller conveyor 1, install heat preservation cover 2 on roller conveyor 1, the middle part of going up heat preservation cover 2 is equipped with and is used for carrying the inside connecting pipe 42 of heat preservation cover 2 with inert shielding gas, the inside up end that goes up heat preservation cover 2 and connecting pipe 42 gas outlet correspond is equipped with the guide plate 21 that carries out the water conservancy diversion to inert shielding gas, inert shielding gas enters into heat preservation cover 2 through connecting pipe 42, and move along last heat preservation cover 2 length direction, when roller conveyor 1 drives high-purity rare earth target blank and removes, the inside inert shielding gas of heat preservation cover 2 protects high-purity rare earth target blank, reduce the contact of high-purity rare earth target blank and air.

Further, the longitudinal section of the guide plate 21 is in an isosceles triangle structure, the top tip of the guide plate 21 is connected with the upper heat insulation cover 2, and the guide plate 21 guides the inert protective gas to move towards the two ends of the roller conveyor 1.

Example 2:

referring to fig. 1-5, the present embodiment provides a high purity rare earth target oxidation preventing device, which is different from embodiment 1 in that: the bottom of the roller conveyor 1 is provided with a preheating and heat-preserving device which can preheat the space preserved by the upper heat-preserving cover 2.

Further, the preheating and heat preserving device comprises a heat conducting plate 3 arranged at the bottom of the roller conveyor 1, a heater 31 is arranged on the upper surface of the heat conducting plate 3, the heater 31 can heat the lower side of the upper heat preserving cover 2, and heat loss of the high-purity rare earth target blank during movement of the roller conveyor 1 can be reduced.

Further, the bottom of the heat conducting plate 3 is provided with a lower heat insulating cover 4, a plurality of heat conducting partition boards 5 are arranged in the lower heat insulating cover 4, the inner cavity of the lower heat insulating cover 4 is divided into an S-shaped ventilation cavity by the plurality of heat conducting partition boards 5, the moving time of inert protective gas in the ventilation cavity can be increased, the heating effect of the inert protective gas is improved, the side surface of the lower heat insulating cover 4 corresponding to one end of the ventilation cavity is provided with an inert gas inlet pipe 41, the side surface of the lower heat insulating cover 4 corresponding to the other end of the ventilation cavity is communicated with a connecting pipe 42, and inert protective gas is conveyed to the inside of the ventilation cavity by external dry inert protective gas conveying equipment through the inert gas inlet pipe 41 to be preheated, and is discharged to the inside of the heat insulating cavity through the connecting pipe 42.

When the embodiment is used, the following steps are adopted:

the lower heat-insulating cover 4 and the upper heat-insulating cover 2 form a heat-insulating chamber with two sides open; the heater 31 preheats the heat-preserving chamber, and reduces the temperature difference between the heat-preserving chamber and the high-purity rare earth target blank to be rolled; the heater 31 heats the ventilation cavity through the heat-conducting plate 3; the inert shielding gas conveying equipment for external drying conveys inert shielding gas into the ventilation cavity through the inert gas inlet pipe 41 for preheating, and discharges the inert shielding gas into the heat preservation cavity through the connecting pipe 42, and under the action of the guide plate 21, the inert shielding gas moves to the openings at two ends of the heat preservation cavity and is discharged, so that the original air in the heat preservation cavity is discharged; when the roller conveyor 1 drives the high-purity rare earth target blank to move in the heat preservation chamber, the inert protective gas protects the high-purity rare earth target blank, and reduces the contact between the high-purity rare earth target blank and air, thereby avoiding the oxidation of the high-purity rare earth target blank.

The roller conveyor 1 and the heater 31 used in the present utility model are common electronic components in the prior art, and the working manner and the circuit structure thereof are well known techniques and are not described herein.

The utility model can keep the temperature in alignment in the conveying process of the high-purity rare earth target blank, can reduce the heat loss speed of the high-purity rare earth target blank, is beneficial to rolling the high-purity rare earth target blank, can keep the high-purity rare earth target blank in inert protective gas in the conveying process, and reduces the contact between the high-purity rare earth target blank and air, thereby ensuring the excellent performance of the high-purity rare earth target blank.

The non-disclosed parts of the utility model are all prior art, and the specific structure, materials and working principle thereof are not described in detail. Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.

Claims (5)

1. The utility model provides a high-purity rare earth target antioxidation device, includes roller conveyor (1), its characterized in that: the roller conveyor (1) is provided with an upper heat preservation cover (2), the middle part of the upper heat preservation cover (2) is provided with a connecting pipe (42) for conveying inert protective gas into the upper heat preservation cover (2), and the upper end face of the inner part of the upper heat preservation cover (2) corresponding to the air outlet of the connecting pipe (42) is provided with a guide plate (21) for guiding the inert protective gas.

2. The high purity rare earth target oxidation preventing device according to claim 1, wherein: the longitudinal section of the guide plate (21) is of an isosceles triangle structure, and the top tip of the guide plate (21) is connected with the upper heat insulation cover (2).

3. The high purity rare earth target oxidation preventing device according to claim 1, wherein: the bottom of the roller conveyor (1) is provided with a preheating and heat preserving device.

4. The high purity rare earth target oxidation preventing device according to claim 3, wherein: the preheating heat preservation device comprises a heat conduction plate (3) arranged at the bottom of the roller conveyor (1), and a heater (31) is arranged on the upper surface of the heat conduction plate (3).

5. The high purity rare earth target oxidation preventing device according to claim 4, wherein: the bottom of heat conduction board (3) is equipped with down heat preservation cover (4), the inside of heat preservation cover (4) is equipped with a plurality of heat conduction baffle (5) down, and a plurality of heat conduction baffle (5) cut apart the inner chamber of heat preservation cover (4) down and be the S type ventilation chamber, the side that heat preservation cover (4) and ventilation chamber one end correspond down is equipped with inert gas intake pipe (41), the side that heat preservation cover (4) and ventilation chamber other end correspond and connecting pipe (42) intercommunication down, inert shielding gas preheats at ventilation intracavity portion.