CN219566180U

CN219566180U - Heat preservation layer, source bottle heat preservation device, source bottle heat preservation system and substrate processing equipment

Info

Publication number: CN219566180U
Application number: CN202320220447.4U
Authority: CN
Inventors: 周仁; 王新征
Original assignee: Jiangsu Leadmicro Nano Technology Co Ltd
Current assignee: Jiangsu Leadmicro Nano Technology Co Ltd
Priority date: 2023-02-15
Filing date: 2023-02-15
Publication date: 2023-08-22
Anticipated expiration: 2033-02-15

Abstract

The utility model relates to a heat preservation layer, a source bottle heat preservation device, a source bottle heat preservation system and substrate processing equipment. The heat preservation layer comprises at least one first heat insulation material layer and at least one heat preservation interlayer which are attached to each other, and a heat insulation cavity is formed in the heat preservation interlayer. Under the heat blocking effect of each first heat insulation material layer and each heat insulation interlayer, the heat outward diffusion speed is greatly reduced, on one hand, the heat loss is reduced, and the energy consumption is reduced; on the other hand, when the power is off, the heat is diffused outwards slowly, so that the falling speed of the temperature of the source bottle is greatly reduced, the time for maintaining the source bottle at the process temperature is prolonged, and the time for the temperature in the source bottle to reach the process temperature after the system is powered on is shortened.

Description

Heat preservation layer, source bottle heat preservation device, source bottle heat preservation system and substrate processing equipment

Technical Field

The utility model relates to the technical field of semiconductor manufacturing, in particular to a heat preservation layer, a source bottle heat preservation device, a source bottle heat preservation system and substrate processing equipment.

Background

The source bottle heat preservation device is widely applied to the industries of semiconductor devices, integrated circuits, electronic power, solar photovoltaic cells and the like, is mainly used for storing and supplying coating media to atomic layer deposition, chemical vapor deposition equipment and evaporation coating equipment, and is particularly suitable for the coating media needing to be controlled to be effectively volatilized and conveyed through temperature control. For example: storing the liquid coating medium in a source bottle, wherein the source bottle is communicated with a reaction cavity of the coating equipment through a gas circuit structure. The film plating medium in the source bottle is conveyed into a reaction cavity of the film plating equipment through the gas circuit structure, and gas-solid phase chemical adsorption reaction is carried out on the surface of the matrix to form a film.

The ALD film plating technology has higher requirements on temperature control, the temperature of a source bottle needs to be controlled through a heating device, and the accuracy of the temperature control directly influences the technological effect of the ALD film plating technology. In the prior art, the temperature control of the source bottle is often carried out by placing the source bottle in a vacuum incubator, and vacuumizing the vacuum incubator by using a vacuumizing device so as to maintain constant pressure and further achieve the effect of heat preservation. However, even then, the vacuum thermostat is limited in its effectiveness in maintaining the temperature of the source bottle, which drops rapidly when an abrupt power failure condition is encountered, and does not maintain the temperature for a long period of time, resulting in a longer time required to reach the process temperature upon restarting.

Disclosure of Invention

Based on this, it is necessary to provide a heat insulating layer, a source bottle heat insulating device, a source bottle heat insulating system and a substrate processing apparatus which improve the above-mentioned drawbacks, aiming at the phenomenon that the prior art cannot keep heat for a long time, resulting in a long time required for reaching a process temperature at the time of restarting.

The heat insulation layer comprises at least one first heat insulation material layer and at least one heat insulation interlayer, wherein the first heat insulation material layer and the at least one heat insulation interlayer are attached to each other, and a heat insulation cavity is formed in the heat insulation interlayer.

In one embodiment, the heat-insulating cavity is a vacuum cavity, and the heat-insulating cavity is filled with heat-insulating materials.

In one embodiment, the first insulating material layer is provided in multiple layers, and/or the insulating interlayer is provided in multiple layers.

In one embodiment, the first heat insulating material layer and the heat insulating interlayer are alternately arranged with each other.

A source bottle heat preservation device, comprising a box body, a first heating layer, a heat preservation cover and any one of the heat preservation layers;

the box body is provided with a first inner cavity and an opening communicated with the first inner cavity, the first inner cavity is used for accommodating a bottle body part of a source bottle, the heat preservation cover is covered on the opening and is provided with a second inner cavity communicated with the first inner cavity through the opening, and the second inner cavity is used for accommodating a bottle mouth part of the source bottle;

the heat preservation laminating in on the inner wall of box, first zone of heating laminating in on the inner wall of heat preservation.

In one embodiment, the source bottle heat preservation device further comprises a second heat insulation material layer and a second heating layer, wherein the second heat insulation material layer is attached to the inner wall of the periphery side and the inner wall of the top of the heat preservation cover, and the second heating layer is attached to the inner wall of the second heat insulation material layer located on the inner wall of the periphery side.

In one embodiment, a locking movable part is arranged on the box body, a locking fixed part is arranged on the heat preservation cover, and the locking movable part and the locking fixed part can be in locking fit so as to lock and fix the heat preservation cover on the box body.

In one embodiment, the heat-insulating cover is provided with a male connector and a female connector, the female connector is connected with the ingress pipe, and the male connector is connected with the egress pipe.

A source bottle insulating system comprising a source bottle and a source bottle insulating device as described in any one of the embodiments above.

A substrate processing apparatus comprising a source vial soak system as in any one of the embodiments above.

According to the heat preservation layer, the source bottle heat preservation device, the source bottle heat preservation system and the substrate processing equipment, when in actual use, for example, in an atomic layer deposition process, the first heating layer is used for heating the source bottle accommodated in the first inner cavity, so that the temperature of the source bottle is kept stable, and the uniformity of the temperature of a coating medium output from the source bottle is ensured. Further, set up the heat preservation between first zone of heating and box, and this heat preservation includes at least one deck first insulating material layer and at least one deck heat preservation intermediate layer, and when the heat that first zone of heating produced was outwards conducted to first insulating material layer, first insulating material layer was carried out the separation to the heat to weaken the speed of heat out diffusion. When the heat generated by the first heating layer is conducted outwards to the heat-preserving interlayer, the heat is blocked by the heat-insulating cavity of the heat-preserving interlayer, and the speed of outwards diffusing the heat is further reduced.

Under the heat blocking effect of each first heat insulation material layer and each heat insulation interlayer, the heat diffusion speed to the outside of the box body is greatly reduced, on one hand, the heat loss is reduced, and the energy consumption is reduced; on the other hand, when the power is off (namely the first heating layer cannot generate heat), the heat diffuses out of the box body at a relatively low speed, so that the falling speed of the temperature of the source bottle is greatly reduced, the time for maintaining the source bottle at the process temperature is prolonged, and the time for the temperature in the source bottle to reach the process temperature after the system is powered on is shortened.

Drawings

FIG. 1 is a front view of a source bottle warmer, according to an embodiment of the present utility model;

FIG. 2 is a top view of the source bottle warmer of FIG. 1;

FIG. 3 is a cross-sectional view of the source bottle warmer of FIG. 1;

FIG. 4 is a cross-sectional view of the housing of the source bottle warmer of FIG. 3;

FIG. 5 is a cross-sectional view of a thermal cap of the source bottle thermal device shown in FIG. 3;

FIG. 6 is a cross-sectional view of a thermal insulation layer according to an embodiment of the present utility model;

FIG. 7 is a cross-sectional view of a thermal insulation layer according to another embodiment of the present utility model;

fig. 8 is a cross-sectional view of a thermal insulation layer according to yet another embodiment of the present utility model.

Detailed Description

In order that the above objects, features and advantages of the utility model will be readily understood, a more particular description of the utility model will be rendered by reference to the appended drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present utility model. The present utility model may be embodied in many other forms than described herein and similarly modified by those skilled in the art without departing from the spirit of the utility model, whereby the utility model is not limited to the specific embodiments disclosed below.

In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings are merely for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the device or element being referred to must have a specific orientation, be configured and operated in a specific orientation, and therefore should not be construed as limiting the present utility model.

Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In the description of the present utility model, the meaning of "plurality" means at least two, for example, two, three, etc., unless specifically defined otherwise.

In the present utility model, unless explicitly specified and limited otherwise, the terms "mounted," "connected," "secured," and the like are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; either directly or indirectly, through intermediaries, or both, may be in communication with each other or in interaction with each other, unless expressly defined otherwise. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art according to the specific circumstances.

In the present utility model, unless expressly stated or limited otherwise, a first feature "up" or "down" a second feature may be the first and second features in direct contact, or the first and second features in indirect contact via an intervening medium. Moreover, a first feature being "above," "over" and "on" a second feature may be a first feature being directly above or obliquely above the second feature, or simply indicating that the first feature is level higher than the second feature. The first feature being "under", "below" and "beneath" the second feature may be the first feature being directly under or obliquely below the second feature, or simply indicating that the first feature is less level than the second feature.

It will be understood that when an element is referred to as being "fixed" or "disposed" on another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "upper," "lower," "left," "right," and the like are used herein for illustrative purposes only and are not meant to be the only embodiment.

Referring to fig. 1, 2 and 3, a source bottle thermos system is provided according to an embodiment of the present utility model, which includes a source bottle 10 and a source bottle thermos device. The source bottle 10 is used for storing a plating medium. The source bottle heat preservation device is used for accommodating the source bottle 10 and preserving heat of the source bottle 10, so that the temperature of a coating medium in the source bottle 10 is kept stable.

The source bottle heat preservation device comprises a box body 20, a first heating layer 21 and a heat preservation layer 22. The housing 20 has a first cavity A1 (see fig. 4), and the source bottle 10 is accommodated in the first cavity A1. The heat preservation layer 22 is attached to the inner wall of the first inner cavity A1, the first heating layer 21 is attached to the inner wall of the heat preservation layer 22, so that the first heating layer 21 heats the source bottle 10 in the first inner cavity A1, and the heat preservation layer 22 keeps the source bottle 10 in the first inner cavity A1 warm. The insulation layer 22 comprises at least one first insulation layer 221 and at least one insulation interlayer 223, and the insulation interlayer 223 has an insulation cavity A3 inside.

In practical use, for example, in an atomic layer deposition process, the source bottle 10 accommodated in the first inner cavity A1 is heated by the first heating layer 21, so that the temperature of the source bottle 10 is kept stable, and uniformity of the temperature of the coating medium output from the source bottle 10 is ensured. Further, an insulation layer 22 is disposed between the first heating layer 21 and the case 20, and the insulation layer 22 includes at least one first insulation material layer 221 and at least one insulation interlayer 223, and when heat generated by the first heating layer 21 is conducted to the first insulation material layer 221, the first insulation material layer 221 blocks the heat to reduce the speed of heat diffusion. When the heat generated by the first heating layer 21 is conducted to the heat-insulating interlayer 223, the heat is blocked by the heat-insulating cavity A3 of the heat-insulating interlayer 223, so that the outward diffusion speed of the heat is further reduced.

Under the heat blocking effect of each first heat insulation material layer 221 and each heat insulation interlayer 223, the heat diffusion speed to the outside of the box body 20 is greatly reduced, on one hand, the heat loss is reduced, and the energy consumption is reduced; on the other hand, when the power is off (i.e. the first heating layer 21 cannot generate heat), the heat diffuses out of the box 20 at a slower speed, so that the falling speed of the temperature of the source bottle 10 is greatly reduced, the time for maintaining the source bottle 10 at the process temperature is prolonged, and the time for the temperature in the source bottle 10 to reach the process temperature after the system is powered on is shortened.

It should be further noted that, by providing the heat insulation layer 22 composed of at least one first heat insulation material layer 221 and at least one heat insulation interlayer 223, the speed of heat diffusing to the outside of the box 20 is greatly reduced, heat loss is reduced, the temperature fluctuation range of the source bottle 10 is smaller, and the difficulty of controlling the temperature of the source bottle 10 to keep stable is reduced.

In particular embodiments, the first insulating material layer 221 may be provided in multiple layers, and/or the insulating interlayer 223 may be provided in multiple layers. In the direction from inside to outside of the case 20, a plurality of first heat insulating material layers 221 and a plurality of heat insulating interlayers 223 are alternately arranged, for example, in such a manner that the first heat insulating material layers 221, the heat insulating interlayers 223, the first heat insulating material layers 221, and the heat insulating interlayers 223 and … … are sequentially arranged. Thus, heat is blocked layer by using the first heat insulation material layers 221 and the heat insulation interlayer 223 which are alternately arranged, so that the heat insulation effect is greatly improved. Further, the alternately arranged first heat insulating material layers 221 are closely attached to the heat insulating interlayer 223, so that the external dimension of the source bottle heat insulating device is reduced, namely the volume of the source bottle heat insulating device is reduced.

Alternatively, as shown in fig. 6, the insulating layer 22 adopts a two-layer structure of a first insulating material layer 221 and an insulating interlayer 223. Of course, in another embodiment, referring to fig. 7, the heat insulation layer 22 may also adopt a three-layer structure of the first heat insulation material layer 221, the heat insulation interlayer 223 and the first heat insulation material layer 221. In yet another embodiment, referring to fig. 8, the insulating layer 22 may also have a five-layer structure of a first insulating material layer 221, an insulating interlayer 223, and a first insulating material layer 221. The number of layers of the first heat insulating material layer 221 and the heat insulating interlayer 223 may be designed according to a specific process, and is not limited herein.

Alternatively, the first heat insulating material layer 221 may be one or more of materials having a heat insulating function, such as heat insulating cotton, heat insulating foam, heat insulating silica gel, and the like.

The insulating interlayer 223 is a case structure having a heat insulating cavity A3 therein, and the heat insulating cavity A3 has a low heat transfer coefficient to block heat from diffusing out of the case 20.

In the embodiment, the heat insulation cavity A3 of the heat insulation interlayer 223 is a vacuum cavity, that is, the heat insulation cavity A3 inside the heat insulation interlayer 223 is in a vacuum state, so that the heat transfer coefficient of the heat insulation interlayer 223 is further reduced, and the heat insulation effect is improved.

Further, the heat insulation cavity A3 of the heat insulation interlayer 223 is filled with heat insulation material, so that the heat transfer coefficient of the heat insulation interlayer 223 is further reduced, and the heat insulation effect is improved.

In particular embodiments, the inner walls of the insulating cavity A3 of the insulating interlayer 223 are provided with a thermally reflective coating. Thus, when the heat radiation generated by the first heating layer 21 is conducted to the heat insulation interlayer 223, the heat reflection coating on the inner wall of the heat insulation cavity A3 emits the heat radiation to the inside of the first inner cavity A1, and plays a role in blocking the heat from diffusing to the outside of the box 20. Alternatively, the material of the heat reflective coating may be one or more of metal materials having a heat reflective function, such as silver, aluminum, and the like.

In particular, in the embodiment, the inner wall of the first heating layer 21 is closely attached to the source bottle 10, and the outer wall of the first heating layer 21 is closely attached to the heat insulation layer 22, so that the external dimension of the source bottle heat insulation device is reduced, that is, the volume of the source bottle heat insulation device is reduced.

Referring to fig. 3 to 5, in the embodiment of the present utility model, the case 20 has an opening a communicating with the first cavity A1. The source bottle warmer also includes a warmer cover 30 that covers the opening a of the case 20. Thus, when it is necessary to take and place the source bottle 10, the heat-retaining cover 30 is opened, and then the source bottle 10 is placed into the first cavity A1 of the case 20 through the opening a, or the source bottle 10 in the first cavity A1 is taken out through the opening a. Further, the heat-insulating cover 30 also has a heat-insulating function, and can block heat from being outwardly diffused, thereby ensuring a heat-insulating effect on the source bottle 10.

In particular, in the embodiment, the insulating cover 30 has a second cavity A2, and the second cavity A2 communicates with the first cavity A1 through the opening a. The source bottle 10 has a body portion 11 and a finish portion 12, the body portion 11 being accommodated in the first cavity A1 and the finish portion 12 being accommodated in the second cavity A2. In this way, when it is necessary to place the source bottle 10, first, the heat-insulating cover 30 is opened, and the source bottle 10 is placed in the first cavity A1 of the case 20, and at this time, the body portion 11 of the source bottle 10 is accommodated in the first cavity A1, and the mouth portion 12 of the source bottle 10 protrudes from the opening a. Then, the thermal cover 30 is capped at the opening a of the case 20 such that the bottleneck portion 12 of the source bottle 10 is accommodated in the second inner cavity A2 of the thermal cover 30.

It should be noted that, when the thermal insulation cover 30 is opened, the bottle mouth portion 12 of the source bottle 10 protrudes out of the opening a, so that the operator can conveniently clamp the bottle, which is beneficial to saving the operation time of picking and placing the source bottle 10.

In particular embodiments, the source bottle warmer further comprises a second layer of insulating material 31, the second layer of insulating material 31 being attached to the circumferential inner wall and the top interior (i.e., the inner wall of the second cavity A2) of the warmer 30. In this way, when the thermal insulation cover 30 is provided at the opening a, the second thermal insulation material layer 31 of the thermal insulation cover 30 wraps the bottleneck portion 12 of the source bottle 10, thereby playing a role of blocking heat from being out-diffused. Alternatively, the second heat insulating material layer 31 may be one or more of materials having a heat insulating function, such as heat insulating cotton, heat insulating foam, heat insulating silica gel, and the like.

Further, the source bottle heat preservation device further comprises a second heating layer 33 disposed between the second heat insulation material layer 31 and the bottle mouth portion 12 (i.e. the second heating layer 33 is attached to the inner wall of the second heat insulation material layer 31 located on the inner wall of the peripheral side), so that the bottle mouth portion 12 of the source bottle 10 is heated by the second heating layer 33, and the body portion 11 of the source bottle 10 is heated by the first heating layer 21, so as to ensure that the temperatures of the body portion 11 and the bottle mouth portion 12 of the source bottle 10 are kept consistent. Optionally, a second heating layer 33 is provided around the circumference of the finish portion 12, such that the entire circumference of the finish portion 12 is heated by the second heating layer 33, such that the heating of the finish portion 12 of the source bottle 10 is more uniform.

In particular to the embodiment, the insulating cover 30 has a source bottle interface 34, the source bottle interface 34 extending through the insulating cover 30 and the second insulating material layer 31. The source bottle port 34 is configured for passage of a conduit therethrough. Thus, the coating medium in the source bottle 10 can be output to the outside through the pipeline penetrating through the source bottle interface 34, or the external coating medium can be input into the source bottle 10 for storage through the pipeline penetrating through the source bottle interface 34.

Optionally, two source bottle interfaces 34 are provided on the heat insulation cover 30, one of the two source bottle interfaces 34 is used for penetrating a pipeline for inputting the coating medium into the source bottle 10, and the other is used for penetrating a pipeline for outputting the coating medium in the source bottle 10. Of course, in other embodiments, the pipe penetrating one of the source bottle interfaces 34 inputs a driving gas into the source bottle 10, and the driving gas is used to apply pressure to the coating medium in the source bottle 10, so that the coating medium in the source bottle 10 is output by the pipe penetrating the other source bottle interface 34 under the action of the pressure. Further, one of the two source bottle interfaces 34 is a male interface and the other is a female interface. The female connector is used for being connected with the ingress pipe, and the male connector is connected with the egress pipe.

Of course, the number of source bottle interfaces 34 on the insulating cover 30 may be designed according to actual use conditions, and is not limited herein.

In the embodiment, the heat-preserving cover 30 is further provided with a power interface 35, and the power interface 35 is electrically connected with the first heating layer 21 and the second heating layer 33. The power interface 35 is configured to be connected to an external power source, so that the external power source can provide electric power to the first heating layer 21 and the second heating layer 33 through the power interface 35, and further, the first heating layer 21 and the second heating layer 33 heat the source bottle 10.

In particular embodiments, the source vial warmer further includes a locking mechanism 40 (see fig. 1 or 2), the locking mechanism 40 being removably coupled between the housing 20 and the warmer 30 to lock the warmer 30 to the housing 20. Thus, the locking mechanism 40 can be operated to lock or unlock the box 20 and the thermal insulation cover 30, so as to realize the closing or opening of the thermal insulation cover 30, thereby facilitating the taking and placing of the source bottle 10.

Further, the locking mechanism 40 includes a locking movable portion provided on the case 20 and a locking fixed portion provided on the heat-retaining cover 30. The latch movable portion and the latch fixed portion can be in locking engagement to lock the thermal cover 30 to the case 20. Alternatively, the locking mechanism 40 may employ a quick-release locking device such as a buckle.

In order to illustrate the beneficial effects of the present utility model, the inventors of the present utility model conducted two sets of experiments, namely, the illustrated examples and comparative examples. The illustrated embodiment adopts a source bottle heat preservation device as shown in fig. 3, and the comparative embodiment adopts a source bottle heat preservation device in the prior art. The same source bottle 10 is incubated in both the illustrated embodiment and the comparative example, and the chemical source contained in the source bottle 10 is hafnium. After power failure, the temperature of the source bottle 10 in the comparative example was lowered from 200 ℃ to 100 ℃ for 1.5 hours. After power failure, the temperature of the source bottle 10 in the illustrated embodiment is reduced from 200 ℃ to 100 ℃ for 11 hours. Compared with the prior art, the source bottle heat preservation device greatly reduces heat loss and remarkably improves heat preservation effect.

Based on the source bottle heat preservation system, the utility model further provides substrate processing equipment. The substrate processing apparatus comprises a source vial soak system as described in any of the embodiments above. Further, the substrate processing apparatus further comprises a vacuum reaction chamber, and the source bottle thermal insulation system is used for providing a coating medium (source) for the vacuum reaction chamber so as to coat the substrate in the vacuum reaction chamber and form a preset film layer structure on the surface of the substrate.

The technical features of the above-described embodiments may be arbitrarily combined, and all possible combinations of the technical features in the above-described embodiments are not described for brevity of description, however, as long as there is no contradiction between the combinations of the technical features, they should be considered as the scope of the description.

The above examples merely represent a few embodiments of the present utility model, which are described in more detail and are not to be construed as limiting the scope of the utility model. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the utility model, which are all within the scope of the utility model. Accordingly, the scope of the utility model should be assessed as that of the appended claims.

Claims

1. The heat insulation layer is characterized by comprising at least one first heat insulation material layer (221) and at least one heat insulation interlayer (223) which are adhered to each other, wherein a heat insulation cavity (A3) is formed in the heat insulation interlayer (223).

2. The insulation layer according to claim 1, characterized in that the insulation cavity (A3) is a vacuum cavity, and the insulation cavity (A3) is filled with an insulation material.

3. Insulation according to claim 1, characterized in that the first insulation layer (221) is provided in multiple layers and/or the insulation interlayer (223) is provided in multiple layers.

4. A thermal insulation layer according to claim 3, characterized in that the first thermal insulation material layer (221) and the thermal insulation interlayer (223) are arranged alternately with each other.

5. A source bottle insulating device, characterized by comprising a box (20), a first heating layer (21), an insulating cover (30) and an insulating layer (22) according to any one of claims 1 to 4;

the box body (20) is provided with a first inner cavity (A1) and an opening (a) communicated with the first inner cavity (A1), wherein the first inner cavity (A1) is used for accommodating a bottle body part (11) of a source bottle (10); the heat preservation cover (30) is covered on the opening (a) and is provided with a second inner cavity (A2) communicated with the first inner cavity (A1) through the opening (a), and the second inner cavity (A2) is used for accommodating a bottleneck part (12) of the source bottle (10); the heat preservation (22) is attached to the inner wall of the box body (20), and the first heating layer (21) is attached to the inner wall of the heat preservation (22).

6. The source bottle warmer of claim 5, further comprising a second layer of insulating material (31) and a second heating layer (33), wherein the second layer of insulating material (31) is attached to the peripheral side inner wall and the top inner wall of the warmer cover (30), and wherein the second heating layer (33) is attached to the inner wall of the second layer of insulating material (31) located on the peripheral side inner wall.

7. The source bottle heat preservation apparatus according to claim 5, wherein a latch movable portion is provided on the case (20), and a latch fixed portion is provided on the heat preservation cover (30), the latch movable portion being capable of being latch-engaged with the latch fixed portion to latch-fix the heat preservation cover (30) on the case (20).

8. The source bottle heat preservation apparatus according to claim 5, wherein a male connector and a female connector are provided on the heat preservation cover (30), the female connector is connected with the ingress pipe, and the male connector is connected with the egress pipe.

9. A source bottle thermos system, characterized by comprising a source bottle (10) and a source bottle thermos device according to any of claims 5-8.

10. A substrate processing apparatus comprising the source vial soak system of claim 9.