CN219552521U - Detachable probe for silicon carbide carrier concentration tester - Google Patents
Detachable probe for silicon carbide carrier concentration tester Download PDFInfo
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- CN219552521U CN219552521U CN202223537322.9U CN202223537322U CN219552521U CN 219552521 U CN219552521 U CN 219552521U CN 202223537322 U CN202223537322 U CN 202223537322U CN 219552521 U CN219552521 U CN 219552521U
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- probe body
- cylindrical probe
- carrier concentration
- platform
- detachable
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Abstract
The utility model discloses a detachable probe for a silicon carbide carrier concentration tester, which comprises a cylindrical probe body, wherein steps are arranged at the front edge of the cylindrical probe body, a plurality of screw counter bores are arranged on the steps at intervals, screws are arranged in each screw counter bore, and the screws are locked on a platform. The utility model adopts the movable detachable cylindrical probe body, and the cylindrical probe body and the platform are detachable. When the cylindrical probe body needs to be cleaned, only the screw needs to be loosened, the cylindrical probe body is taken out from the platform, the other cylindrical probe body is replaced, and the taken cylindrical probe body can be cleaned. The utility model has simple structure and convenient disassembly and assembly, and can reduce the influence of the cylindrical probe body on the test result.
Description
Technical Field
The utility model relates to accessories of a silicon carbide carrier concentration tester, in particular to a detachable probe used on the silicon carbide carrier concentration tester.
Background
Silicon carbide has high hardness, and the hardness is only inferior to that of diamond (grade 10) when the carrier concentration is tested, and the silicon carbide contacts with a CV probe, if the surface has defects, the defects can remain pricking on the CV probe, and if the pricking is not processed in time, the surface of a wafer tested later can be sub-damaged, and the sub-damaged area of a flow sheet is possibly invalid. With the technology of the third generation of semiconductors mature, the silicon carbide wafer is produced in mass, and the probe of the integrated platform cannot meet the industrial requirements, so that the probe is independent of the test platform, and the pricking of the surface of the probe is conveniently treated. And can change the probe that has been handled and go up the test in handling to can not influence the productivity, the integrated platform is when handling, and the handling thing drops the pipeline of platform from the probe in easily to pollute the pipeline and even pollute the mercury storehouse, lead to the test result to appear the problem.
Disclosure of Invention
In order to overcome the defects and shortcomings in the prior art, the utility model aims to provide a detachable probe used on a silicon carbide carrier concentration tester.
The aim of the utility model is achieved by the following technical scheme: the utility model provides a detachable probe for on carborundum carrier concentration tester, includes cylindrical probe body, cylindrical probe body front edge is equipped with the step, the interval is equipped with a plurality of screw counter bores on the step, every be provided with the screw in the screw counter bore, the screw lock is on the platform. When the cylindrical probe body needs to be cleaned, only the screw needs to be loosened, the cylindrical probe body is taken out from the platform, the other cylindrical probe body is replaced, and the taken cylindrical probe body can be cleaned.
As an improvement of the detachable probe used on the silicon carbide carrier concentration tester, a rubber pad is arranged between the cylindrical probe body and the platform. The rubber cushion material can be silica gel, plastic cement, etc. The rubber pad can enable the cylindrical probe body and the platform to be more attached.
As an improvement of the detachable probe used on the silicon carbide carrier concentration tester, the middle part of the cylindrical probe body is provided with a boss, the center of the boss is provided with a mercury outlet hole, and the boss is provided with an annular groove around the periphery of the mercury outlet hole. The annular groove is convenient for installing the wafer.
As an improvement of the detachable probe used on the silicon carbide carrier concentration tester, one side of the mercury outlet hole is provided with a vacuumizing hole. The vacuumizing hole is connected with a vacuumizing device, so that the wafer can be adsorbed on the cylindrical probe body, and the wafer is prevented from moving during detection. And when the wafer is taken out, the vacuum equipment is closed.
The utility model has the beneficial effects that: the utility model adopts the movable detachable cylindrical probe body, and the cylindrical probe body and the platform are detachable. When the cylindrical probe body needs to be cleaned, only the screw needs to be loosened, the cylindrical probe body is taken out from the platform, the other cylindrical probe body is replaced, and the taken cylindrical probe body can be cleaned. The utility model has simple structure and convenient disassembly and assembly, and can reduce the influence of the cylindrical probe body on the test result.
Drawings
FIG. 1 is a perspective view of the present utility model;
FIG. 2 is a front view of the present utility model;
FIG. 3 is a cross-sectional view of the present utility model;
the reference numerals are: 1. the cylindrical probe body 2, the step 3, the screw counter bore 4, the platform 5, the rubber pad 6, the boss 7, the mercury outlet hole 8, the annular groove 9 and the vacuumizing hole.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
It should be noted that, in the embodiments of the present utility model, all directional indicators (such as up, down, left, right, front, and rear … …) are merely used to explain the relative positional relationship, movement conditions, and the like between the components in a specific posture (as shown in the drawings), and if the specific posture is changed, the directional indicators are correspondingly changed.
Furthermore, the description of "first," "second," etc. in this disclosure is for descriptive purposes only and is not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In addition, the technical solutions of the embodiments may be combined with each other, but it is necessary to base that the technical solutions can be realized by those skilled in the art, and when the technical solutions are contradictory or cannot be realized, the combination of the technical solutions should be regarded as not exist and not within the protection scope of the present utility model.
As shown in fig. 1-3, a detachable probe for a silicon carbide carrier concentration tester comprises a cylindrical probe body 1, wherein steps 2 are arranged on the front edge of the cylindrical probe body 1, a plurality of screw counter bores 3 are arranged on the steps 2 at intervals, screws are arranged in each screw counter bore 3, and the screws are locked on a platform 4. When the cylindrical probe body 1 needs to be cleaned, only the screw needs to be loosened, the cylindrical probe body 1 is taken out from the platform 4, the other cylindrical probe body 1 is replaced, and the taken cylindrical probe body 1 can be cleaned.
Preferably, a rubber pad 5 is arranged between the cylindrical probe body 1 and the platform 4. The rubber cushion material can be silica gel, plastic cement, etc. The rubber pad can enable the cylindrical probe body and the platform to be more attached.
Preferably, the middle part of the cylindrical probe body 1 is provided with a boss 6, the center of the boss 6 is provided with a mercury outlet 7, and the boss 6 is provided with an annular groove 8 around the periphery of the mercury outlet 7. The annular groove 8 facilitates wafer mounting.
Preferably, one side of the mercury outlet 7 is provided with a vacuum-pumping hole 9. The vacuumizing hole 9 is connected with vacuumizing equipment, so that the wafer can be adsorbed on the cylindrical probe body 1, and the wafer is prevented from moving during detection. And when the wafer is taken out, the vacuum equipment is closed.
The utility model adopts the movable detachable cylindrical probe body, and the cylindrical probe body and the platform are detachable. When the cylindrical probe body needs to be cleaned, only the screw needs to be loosened, the cylindrical probe body is taken out from the platform, the other cylindrical probe body is replaced, and the taken cylindrical probe body can be cleaned. The utility model has simple structure and convenient disassembly and assembly, and can reduce the influence of the cylindrical probe body on the test result.
Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations may be made therein without departing from the principles and structure of the utility model, the scope of which is defined in the appended claims and their equivalents.
Claims (4)
1. A detachable probe for on carborundum carrier concentration tester, its characterized in that includes cylindrical probe body, cylindrical probe body front edge is equipped with the step, the interval is equipped with a plurality of screw counter bores on the step, every be provided with the screw in the screw counter bore, the screw lock is on the platform.
2. The detachable probe head for use on a silicon carbide carrier concentration tester according to claim 1, wherein a rubber pad is padded between the cylindrical probe head body and the platform.
3. The detachable probe for a silicon carbide carrier concentration tester according to claim 1, wherein a boss is provided in the middle of the cylindrical probe body, a mercury outlet hole is provided in the center of the boss, and an annular groove is provided around the periphery of the mercury outlet hole.
4. A detachable probe for use in a silicon carbide carrier concentration meter according to claim 3, wherein a vacuum hole is provided on one side of the mercury outlet hole.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223537322.9U CN219552521U (en) | 2022-12-28 | 2022-12-28 | Detachable probe for silicon carbide carrier concentration tester |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202223537322.9U CN219552521U (en) | 2022-12-28 | 2022-12-28 | Detachable probe for silicon carbide carrier concentration tester |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219552521U true CN219552521U (en) | 2023-08-18 |
Family
ID=87706240
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202223537322.9U Active CN219552521U (en) | 2022-12-28 | 2022-12-28 | Detachable probe for silicon carbide carrier concentration tester |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219552521U (en) |
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2022
- 2022-12-28 CN CN202223537322.9U patent/CN219552521U/en active Active
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