CN219526867U - Safe explosion-proof device with good protection effect for Czochralski single crystal furnace - Google Patents
Safe explosion-proof device with good protection effect for Czochralski single crystal furnace Download PDFInfo
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- CN219526867U CN219526867U CN202320776506.6U CN202320776506U CN219526867U CN 219526867 U CN219526867 U CN 219526867U CN 202320776506 U CN202320776506 U CN 202320776506U CN 219526867 U CN219526867 U CN 219526867U
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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Abstract
The utility model belongs to the technical field of single crystal furnace use, in particular to a safe explosion-proof device with good protection effect for a Czochralski single crystal furnace, which comprises a tank body; the utility model discloses a single crystal furnace, including jar body, fixed subassembly, protection subassembly, limiting seat, connecting rod, protection subassembly, limiting seat, protection subassembly and limiting seat are provided with the outside of jar body, the outside of jar body is provided with protection subassembly and fixed unit, the inside wall rigid coupling of fixed plate is in the outside of jar body, the inner wall of movable plate is seted up flutedly, the movable plate passes through recess sliding connection in the inside of fixed plate, the lateral wall of fixed plate is provided with the telescopic link, the lateral wall rigid coupling of telescopic link is at the lateral wall of fixed plate, the lateral wall of movable plate is provided with the connecting rod, be provided with spacing seat between telescopic link and the connecting rod, this kind of device makes the single crystal furnace be in the protection state when using, avoids causing the injury to technical staff.
Description
Technical Field
The utility model relates to the technical field of single crystal furnace use, in particular to a safe explosion-proof device with good protection effect for a Czochralski single crystal furnace.
Background
The single crystal furnace is a device for growing dislocation-free single crystals by using a Czochralski method in an inert gas environment by using a graphite heater to melt polycrystalline materials such as polysilicon.
Melting it by the high temperature generated by the graphite heater; then slightly cooling the molten silicon liquid to generate a certain supercooling degree, and then fixing a silicon single crystal on a seed crystal shaft;
when the existing single crystal furnace is used, raw materials burn out corrugated pipes or vacuum pipes at high temperature, so that water pipes are burnt out, water flows in the water pipes are splashed everywhere, production accidents are easy to cause, and potential safety hazards exist for technicians, therefore, the safe explosion-proof device with good protection effect for the straight-pull single crystal furnace is provided for the problems.
Disclosure of Invention
In order to make up the defects of the prior art, the utility model provides a safe explosion-proof device with good protection effect for a Czochralski single crystal furnace.
The technical scheme adopted for solving the technical problems is as follows: the utility model relates to a safe explosion-proof device with good protection effect for a Czochralski single crystal furnace, which comprises a tank body; the outside of the tank body is provided with a protection component and a fixing unit, the protection component is connected with the outside of the tank body in a sliding way, the fixing unit is fixedly connected with the side wall of the tank body through the protection component, the protection component comprises a movable plate, the outside of the movable plate is provided with a fixing plate, the inner wall of the fixing plate is connected with the outside of the tank body, the inner wall of the movable plate is provided with a groove, the movable plate is connected inside the fixed plate through a groove in a sliding mode, a telescopic rod is arranged on the side wall of the fixed plate, the side wall of the telescopic rod is fixedly connected to the side wall of the fixed plate, a connecting rod is arranged on the side wall of the movable plate, a limiting seat is arranged between the telescopic rod and the connecting rod, the outer portion of the connecting rod is connected inside the limiting seat in a sliding mode, and one end of the connecting rod is fixedly connected to the side wall of the movable plate.
Preferably, the fixing unit comprises a baffle, the both sides of baffle are all rotated and are connected the lateral wall at the fixed plate, the top of baffle is provided with the handle, the handle rigid coupling is at the top of baffle, the outside of fixed plate is provided with the bull stick, the bottom of bull stick rotates the lateral wall of connecting at the fixed plate, the lateral wall of jar body is provided with the observation window, the observation window is located the inside of baffle.
Preferably, the inside of fixed plate is provided with arc and spring post, the bottom rigid coupling of arc is in the one end of spring post, the other end of spring post runs through the inside of fixed plate, the arc is located the inside of recess.
Preferably, the top of the tank body is provided with a discharging pipe and a feeding pipe, the discharging pipe and the feeding pipe are fixedly connected to the top of the tank body, and the top of the discharging pipe and the top of the feeding pipe are fixedly connected.
The preferred outside of the jar body is provided with the support frame, the top of support frame is provided with the protection casing, the bottom rigid coupling of protection casing is at the top of support frame.
Preferably, the circular groove is formed in the side wall of the protective cover, a limiting plate and a handle are arranged at the top of the supporting frame, the bottom of the limiting plate is slidably connected to the top of the supporting frame, and the side wall of the handle is fixedly connected to the side wall of the limiting plate.
The utility model has the advantages that:
1. according to the utility model, the limiting seat is moved through the telescopic rod, meanwhile, the telescopic rod drives the connecting rod to move when moving, one end of the connecting rod is fixedly connected to the side wall of the movable plate, so that the movable plate slides under the action of the connecting rod, the movable plate is far away from the inside of the fixed plate, the movable plate is matched with the fixed plate, the whole tank body is protected inside the movable plate and the fixed plate, the movable plate is pushed to move by the telescopic rod, and the operation of technicians is avoided, and the damage to the technicians is caused;
2. according to the utility model, the baffle is rotated through the rotation connection between the baffle and the fixed plate, meanwhile, the side wall of the tank body is provided with the observation window, so that a technician can observe the tank body more conveniently through the observation window, and meanwhile, the baffle is fixed outside the fixed plate through the cooperation between the rotating rod and the handle, so that the damage to the technician caused by leakage of the tank body is avoided.
Drawings
In order to more clearly illustrate the embodiments of the utility model or the technical solutions of the prior art, the drawings which are used in the description of the embodiments or the prior art will be briefly described, it being obvious that the drawings in the description below are only some embodiments of the utility model, and that other drawings can be obtained from these drawings without inventive faculty for a person skilled in the art.
FIG. 1 is a schematic view of a tank body according to an embodiment;
FIG. 2 is a schematic diagram of a tank in cross-section;
FIG. 3 is a schematic sectional view of a fixing plate according to an embodiment;
FIG. 4 is an enlarged view of embodiment A of FIG. 3;
FIG. 5 is a mating view of a second handle and a protective sleeve according to an embodiment.
In the figure: 1. a tank body; 2. a support frame; 3. a handle; 4. a limiting plate; 51. a movable plate; 52. a connecting rod; 53. a limit seat; 54. a fixing plate; 55. a groove; 56. a telescopic rod; 6. a feed pipe; 7. a discharge pipe; 81. a baffle; 82. an observation window; 83. a grip; 84. a rotating rod; 9. a protective cover; 10. a circular groove; 11. a spring post; 12. an arc-shaped plate; 13. and (5) a protective sleeve.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
Example 1
Referring to fig. 1-4, a safe explosion-proof device with good protection effect for a Czochralski single crystal furnace comprises a tank body 1; the external part of the tank body 1 is provided with a protection component and a fixing unit, the protection component is connected with the external part of the tank body 1 in a sliding way, and the fixing unit is fixedly connected with the side wall of the tank body 1 through the protection component;
the protection assembly comprises a movable plate 51, a fixed plate 54 is arranged outside the movable plate 51, the inner wall of the fixed plate 54 is connected to the outside of the tank body 1, a groove 55 is formed in the inner wall of the movable plate 51, the movable plate 51 is slidably connected to the inside of the fixed plate 54 through the groove 55, a telescopic rod 56 is arranged on the side wall of the fixed plate 54, the side wall of the telescopic rod 56 is fixedly connected to the side wall of the fixed plate 54, a connecting rod 52 is arranged on the side wall of the movable plate 51, a limiting seat 53 is arranged between the telescopic rod 56 and the connecting rod 52, the outside of the connecting rod 52 is slidably connected to the inside of the limiting seat 53, and one end of the connecting rod 52 is fixedly connected to the side wall of the movable plate 51;
when the single crystal furnace is in use, the raw materials are burnt out of the corrugated pipe or the vacuum pipe at high temperature, so that the water pipe is burnt out, water flow inside the water pipe is splashed everywhere, production accidents are easy to cause, potential safety hazards exist for technicians, the fixing plate 54 is fixed outside the tank 1 through the tank 1, meanwhile, the groove 55 is formed in the fixing plate 54, the movable plate 51 slides in the groove 55, the limiting seat 53 is moved through the telescopic rod 56, meanwhile, the connecting rod 52 is moved in the limiting seat 53 when the limiting seat 53 is moved, the connecting rod 52 is limited through the limiting seat 53, and the connecting rod 52 is prevented from being separated from the limiting seat 53.
The fixing unit comprises a baffle 81, two sides of the baffle 81 are rotatably connected to the side wall of the fixing plate 54, a handle 83 is arranged at the top of the baffle 81, the handle 83 is fixedly connected to the top of the baffle 81, a rotating rod 84 is arranged outside the fixing plate 54, the bottom of the rotating rod 84 is rotatably connected to the side wall of the fixing plate 54, an observation window 82 is arranged on the side wall of the tank body 1, and the observation window 82 is located inside the baffle 81;
in operation, by rotating the rotating lever 84, the rotating lever 84 is far away from the inside of the grip 83, and the baffle 81 is rotated, so that a technician can observe the situation inside the tank 1 through the observation window 82.
The inside of the fixed plate 54 is provided with an arc-shaped plate 12 and a spring column 11, the bottom of the arc-shaped plate 12 is fixedly connected with one end of the spring column 11, the other end of the spring column 11 penetrates through the inside of the fixed plate 54, and the arc-shaped plate 12 is positioned in the groove 55;
when the movable plate 51 is in operation, the movable plate 51 is used for pushing the arc plate 12 to move downwards, meanwhile, when the arc plate 12 moves downwards, the spring column 11 is pushed to move downwards, when the bottom of the movable plate 51 passes through the arc plate 12, the arc plate 12 is enabled to move upwards through the elasticity of the spring column 11, so that the arc plate 12 is enabled to fix the movable plate 51, and the movable plate 51 is enabled to be fixed firmly by using between the arc plate 12 and the spring column 11.
The top of the tank body 1 is provided with a discharging pipe 7 and a feeding pipe 6, the discharging pipe 7 and the feeding pipe 6 are fixedly connected to the top of the tank body 1, and the top of the discharging pipe 7 and the top of the feeding pipe 6 are fixedly connected with each other;
during operation, the single crystal furnace is more convenient to discharge and feed by utilizing the cooperation between the discharge pipe 7 and the feed pipe 6.
The outside of the tank body 1 is provided with a support frame 2, the top of the support frame 2 is provided with a protective cover 9, and the bottom of the protective cover 9 is fixedly connected to the top of the support frame 2;
during operation, through the cooperation between protection casing 9 and the support frame 2, make jar body 1 wholly be in the protection state, avoid causing the injury to technical staff.
The side wall of the protective cover 9 is provided with a circular groove 10, the top of the supporting frame 2 is provided with a limiting plate 4 and a handle 3, the bottom of the limiting plate 4 is connected to the top of the supporting frame 2 in a sliding manner, and the side wall of the handle 3 is fixedly connected to the side wall of the limiting plate 4;
when the gas tank is in operation, generated heat and inflammable substances are in the movable plate 51 and the fixed plate 54 when the tank body 1 leaks, after the temperature in the movable plate 51 and the fixed plate 54 is reduced, a technician pulls the handle 3 to enable the limiting plate 4 to be slowly far away from the inside of the protective cover 9, and gas in the movable plate 51 and the fixed plate 54 slowly flows out through the circular groove 10, so that the technician can operate timely.
Example two
Referring to fig. 5, in a first comparative example, as another embodiment of the present utility model, a protecting sleeve 13 is disposed on the outside of the handle 3; during operation, the protecting sleeve 13 is used for protecting technicians from being hurt by overhigh temperature.
The working principle is that when the existing single crystal furnace is used, raw materials burn out corrugated pipes or vacuum pipes at high temperature, so that water pipes are burnt out, water flow in the water pipes is splashed everywhere, production accidents are easy to cause, potential safety hazards exist for technicians, a fixed plate 54 is fixed outside a tank body 1 through the tank body 1, meanwhile, a groove 55 is formed in the fixed plate 54, a movable plate 51 slides in the groove 55, a limit seat 53 is moved through a telescopic rod 56, meanwhile, a connecting rod 52 is moved in the limit seat 53 when the limit seat 53 is moved, the connecting rod 52 is limited through the limit seat 53, the connecting rod 52 is prevented from being separated from the limit seat 53, the tank body 1 is protected by utilizing the cooperation between the movable plate 51 and the fixed plate 54, the bottom of the movable plate 51 enters the groove 55 when the movable plate 51 moves, and the movable plate 51 moves, when the movable plate 51 pushes the arc plate 12 to move downwards, and the arc plate 12 moves downwards, the spring column 11 is pushed to move downwards, after the bottom of the movable plate 51 passes through the arc plate 12, the arc plate 12 moves upwards through the elastic force of the spring column 11, so that the movable plate 51 is fixed by the arc plate 12, the movable plate 51 is fixed more firmly by using the arc plate 12 and the spring column 11, the rotating rod 84 is far away from the inside of the handle 83 by rotating the rotating rod 84, and meanwhile, the baffle 81 is rotated, so that a technician can observe the condition inside the tank 1 by using the observation window 82, the condition inside the tank 1 is more convenient to know, the tank 1 is in a protection state as a whole by the cooperation between the protective cover 9 and the supporting frame 2, the injury to the technician is avoided, meanwhile, the limiting plate 4 and the circular groove 10 on the side wall of the protective cover 9 are arranged, when the leakage occurs in the tank body 1, generated heat and inflammable substances are in the movable plate 51 and the fixed plate 54, after the temperature in the movable plate 51 and the fixed plate 54 is reduced, a technician pulls the handle 3 to enable the limiting plate 4 to be slowly far away from the inside of the protective cover 9, so that gas in the movable plate 51 and the fixed plate 54 slowly flows out through the circular groove 10, and the technician can conveniently operate in time.
In the description of the present specification, the descriptions of the terms "one embodiment," "example," "specific example," and the like, mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the present utility model. In this specification, schematic representations of the above terms do not necessarily refer to the same embodiments or examples. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
The foregoing has shown and described the basic principles, principal features and advantages of the utility model. It will be understood by those skilled in the art that the present utility model is not limited to the embodiments described above, and that the above embodiments and descriptions are merely illustrative of the principles of the present utility model, and various changes and modifications may be made without departing from the spirit and scope of the utility model, which is defined in the appended claims.
Claims (6)
1. A safe explosion-proof device with good protection effect for a Czochralski single crystal furnace is characterized in that: comprises a tank body (1); the external part of the tank body (1) is provided with a protection component and a fixing unit, the protection component is connected with the external part of the tank body (1) in a sliding way, and the fixing unit is fixedly connected with the side wall of the tank body (1) through the protection component;
the protection assembly comprises a movable plate (51), a fixed plate (54) is arranged outside the movable plate (51), the inner wall of the fixed plate (54) is connected to the outside of the tank body (1), a groove (55) is formed in the inner wall of the movable plate (51), the movable plate (51) is connected to the inside of the fixed plate (54) in a sliding mode through the groove (55), a telescopic rod (56) is arranged on the side wall of the fixed plate (54), a connecting rod (52) is arranged on the side wall of the movable plate (51) in a fixedly connected mode, a limiting seat (53) is arranged between the telescopic rod (56) and the connecting rod (52), and one end of the connecting rod (52) is fixedly connected to the side wall of the movable plate (51) in a sliding mode.
2. The safe explosion-proof device with good protection effect for a Czochralski single crystal furnace according to claim 1, wherein: the utility model discloses a jar, including fixed unit, fixed unit includes baffle (81), the lateral wall at fixed plate (54) is all rotated to the both sides of baffle (81), the top of baffle (81) is provided with handle (83), handle (83) rigid coupling is at the top of baffle (81), the outside of fixed plate (54) is provided with bull stick (84), the lateral wall at fixed plate (54) is connected in the bottom rotation of bull stick (84), the lateral wall of jar body (1) is provided with observation window (82), observation window (82) are located the inside of baffle (81).
3. The safe explosion-proof device with good protection effect for a Czochralski single crystal furnace according to claim 2, wherein: the inside of fixed plate (54) is provided with arc (12) and spring post (11), the bottom rigid coupling of arc (12) is in the one end of spring post (11), the inside of fixed plate (54) is run through to the other end of spring post (11), arc (12) are located the inside of recess (55).
4. The safe explosion-proof device with good protection effect for a Czochralski single crystal furnace according to claim 3, wherein: the top of the tank body (1) is provided with a discharging pipe (7) and a feeding pipe (6), the discharging pipe (7) and the feeding pipe (6) are fixedly connected to the top of the tank body (1), and the top of the discharging pipe (7) and the top of the feeding pipe (6) are fixedly connected.
5. The safe explosion-proof device with good protection effect for a Czochralski single crystal furnace according to claim 4, wherein: the novel tank is characterized in that a supporting frame (2) is arranged outside the tank body (1), a protective cover (9) is arranged at the top of the supporting frame (2), and the bottom of the protective cover (9) is fixedly connected to the top of the supporting frame (2).
6. The safe explosion-proof device with good protection effect for a Czochralski single crystal furnace according to claim 5, wherein: circular slot (10) have been seted up to the lateral wall of protection casing (9), the top of support frame (2) is provided with limiting plate (4) and handle (3), the bottom sliding connection of limiting plate (4) is at the top of support frame (2), the lateral wall rigid coupling of handle (3) is at the lateral wall of limiting plate (4).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320776506.6U CN219526867U (en) | 2023-04-10 | 2023-04-10 | Safe explosion-proof device with good protection effect for Czochralski single crystal furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320776506.6U CN219526867U (en) | 2023-04-10 | 2023-04-10 | Safe explosion-proof device with good protection effect for Czochralski single crystal furnace |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219526867U true CN219526867U (en) | 2023-08-15 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202320776506.6U Active CN219526867U (en) | 2023-04-10 | 2023-04-10 | Safe explosion-proof device with good protection effect for Czochralski single crystal furnace |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219526867U (en) |
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2023
- 2023-04-10 CN CN202320776506.6U patent/CN219526867U/en active Active
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