CN219499579U - Coil heat radiation structure and spin-coating drying equipment - Google Patents

Abstract

The utility model provides a coil heat dissipation structure and spin-coating drying equipment, and relates to the technical field of spin-coating. The coil heat dissipation structure comprises a housing and a blocking member, wherein the housing is used for accommodating an electromagnetic coil panel, and the housing is provided with an air inlet. The blocking piece is arranged in the shell and on one side of the electromagnetic coil panel away from the air inlet, so that air entering from the air inlet flows along the direction parallel to the heating plane of the electromagnetic coil panel and is used for radiating heat of the electromagnetic coil panel. The blocking piece plays a role in blocking and guiding air flow, so that air entering from the air inlet flows along the direction parallel to the heating plane of the electromagnetic coil panel, the trend of the air flow is changed, the longitudinal air flow is completely converted into transverse air flow along the horizontal direction, the contact area between the air flow and the electromagnetic coil panel is increased, heat generated by the electromagnetic coil panel is taken away to a greater extent, the heat dissipation effect is good, and the purpose of efficient heat dissipation is achieved.

Description

Coil heat radiation structure and spin-coating drying equipment

Technical Field

The utility model relates to the technical field of spin coating, in particular to a coil heat dissipation structure and spin coating drying equipment.

Background

Electromagnetic induction heating, which may also be referred to as induction heating, is a method of heating a conductive material such as a metal, in which an electric current is generated inside the heated conductive material by means of electromagnetic induction, and the purpose of heating is achieved by means of the energy of these eddy currents, and is mainly used for metal heat processing, heat treatment, welding and melting. The induction heating system comprises an induction coil and an alternating current power supply, wherein the induction coil can be manufactured into different shapes according to different workpieces to be heated, the induction coil is electrically connected with the power supply, the power supply supplies alternating current to the induction coil, the alternating current flowing through the induction coil generates an alternating magnetic field passing through the workpieces to be heated, and the magnetic field enables the workpieces to be heated to generate eddy currents so as to achieve the heating purpose. The flat electromagnetic induction heating is used as one of induction heating, can be applied to household electromagnetic ovens, and heats a flat iron pan through a flat electromagnetic coil panel.

The existing spin-coating drying equipment can realize the function of spin-coating and heating by utilizing an induction heating system. As shown in fig. 1, the spin-coating drying apparatus includes a rotary table 1', an electromagnetic coil panel 2', a rotary shaft 3', and a protective cover 5', the rotary shaft 3' being connected to the rotary table 1', the electromagnetic coil panel 2' being disposed below the rotary table 1' and within the protective cover 5 '. Since electromagnetic heating is non-contact, the rotation process and the heating process do not interfere with each other. However, the existing electromagnetic coil panel 2 'simply takes heat of the electromagnetic coil panel 2' by lateral airflow, for example, the heat dissipation fan is started first every time the household electromagnetic oven is started. However, in the spin-coating electromagnetic heating process, the protective cover 5' is of a convex structure, the electromagnetic coil panel 2' is limited inside the protective cover 5', and the flow of the transverse airflow is difficult to realize structurally, so that the difficulty of heat dissipation is further increased.

Disclosure of Invention

According to the coil heat radiation structure and the spin-coating drying equipment provided by the utility model, the airflow flowing direction is planned, and the heat radiation effect is improved.

According to a first aspect of the present utility model, there is provided a coil heat dissipation structure comprising:

a housing for accommodating the electromagnetic coil plate, the housing being provided with an air inlet;

and the blocking piece is arranged in the shell and on one side of the electromagnetic coil panel away from the air inlet, so that air entering from the air inlet flows along the direction parallel to the heating plane of the electromagnetic coil panel and is used for radiating heat of the electromagnetic coil panel.

In some embodiments, a first space is provided between the electromagnetic coil panel and the inner wall of the housing to form a first heat dissipation air passage, and the first heat dissipation air passage is communicated with the air inlet; and/or the number of the groups of groups,

and a second interval is arranged between the electromagnetic coil panel and the blocking piece so as to form a second heat dissipation air passage, and the second heat dissipation air passage is communicated with the air inlet.

In some embodiments, a sealed pressure chamber is provided in the housing, and the electromagnetic coil plate and the blocking member are disposed in the sealed pressure chamber at intervals, so that the gas can enter the sealed pressure chamber through the gas inlet.

In some embodiments, the coil heat dissipation structure further includes a heat dissipation fan, and the heat dissipation fan is disposed in the sealed pressure chamber, so that the sealed pressure chamber generates negative pressure.

In some of these embodiments, the barrier is made of a non-ferromagnetic material and a non-conductive material.

According to a second aspect of the present utility model, an embodiment of the present utility model further provides a spin-coating drying apparatus, including an electromagnetic coil panel and the coil heat dissipation structure described above, where the electromagnetic coil panel is disposed in the housing of the coil heat dissipation structure, and the coil heat dissipation structure is configured to perform heat dissipation treatment on the electromagnetic coil panel.

In some embodiments, the spin-coating drying apparatus further comprises:

the rotating platform is arranged outside the shell, and the electromagnetic coil panel is used for heating the rotating platform;

the output end of the rotary driving source is connected to the rotary platform through a rotary shaft so that the rotary platform rotates relative to the shell;

wherein, the rotation axis wears to locate respectively the barrier with the solenoid dish.

In some of these embodiments, the blocking member is connected to the rotating shaft; or alternatively, the first and second heat exchangers may be,

the blocking member is in interference fit with the rotating shaft.

In some embodiments, the air inlet is disposed at a top of the housing; and/or the number of the groups of groups,

a gap is provided between the rotary shaft and the housing to form the air inlet.

In some of these embodiments, the rotating shaft is made of a non-ferromagnetic material and a non-conductive material.

In some embodiments, the rotary platform is provided with a vacuum suction hole, the rotary shaft is provided with a cavity, and the vacuum suction hole is communicated with the vacuum generator through the cavity.

In some embodiments, the distance between the electromagnetic coil plate and the rotating platform is L, wherein L.ltoreq.50 mm.

In some of these embodiments, the rotating platform is fabricated from a ferromagnetic material.

One embodiment of the present utility model has the following advantages or benefits:

according to the coil radiating structure provided by the embodiment of the utility model, the housing provides an accommodating space for the electromagnetic coil panel and plays a role in protecting the electromagnetic coil panel. The air inlet of shell is used for letting in the air, and the lower gaseous heat exchange of ability and electromagnetic coil dish plays the radiating effect. The blocking piece is arranged in the shell and is arranged on one side, far away from the air inlet, of the electromagnetic coil panel, the effect of blocking and guiding air flow is achieved, air entering from the air inlet flows along the direction parallel to the heating plane of the electromagnetic coil panel, the trend of the air flow is changed, so that longitudinal air flow is completely converted into transverse air flow along the horizontal direction, the contact area between the air flow and the electromagnetic coil panel is increased, heat generated by the electromagnetic coil panel is taken away to a greater degree, the heat dissipation effect is good, and the purpose of efficient heat dissipation is achieved.

According to the spin-coating drying equipment provided by the embodiment of the utility model, the electromagnetic coil panel is arranged in the shell of the coil heat radiation structure, so that the electromagnetic coil panel is protected, and the coil heat radiation structure is used for carrying out heat radiation treatment on the electromagnetic coil panel so as to improve the heat radiation effect of the electromagnetic coil panel.

Drawings

For a better understanding of the utility model, reference may be made to the embodiments illustrated in the following drawings. The components in the drawings are not necessarily to scale and related elements may be omitted in order to emphasize and clearly illustrate the technical features of the present utility model. In addition, the relevant elements or components may have different arrangements as known in the art. Furthermore, in the drawings, like reference numerals designate identical or similar parts throughout the several views. The above and other features and advantages of the present utility model will become more apparent by describing in detail exemplary embodiments thereof with reference to the attached drawings.

Wherein:

FIG. 1 is a schematic view showing the structure of a spin-coating and drying apparatus of the prior art;

fig. 2 is a schematic structural view of a spin-coating drying apparatus according to an embodiment of the present utility model;

fig. 3 shows a second schematic structural diagram of a spin-coating drying apparatus according to an embodiment of the present utility model;

FIG. 4 shows a schematic airflow of a spin-coating drying apparatus according to an embodiment of the utility model

Wherein reference numerals are as follows:

1', a rotating platform; 2', an electromagnetic coil plate; 3', a rotation shaft; 5', a protective cover;

1. rotating the platform; 11. vacuum adsorption holes;

2. an electromagnetic coil panel;

3. a rotation shaft; 31. a cavity;

4. a first heat dissipation air passage;

5. a housing; 51. an air inlet; 52. sealing the pressure chamber;

6. a blocking member;

7. and the second heat dissipation air passage.

Detailed Description

The technical solutions in the exemplary embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the exemplary embodiments of the present utility model. The example embodiments described herein are for illustrative purposes only and are not intended to limit the scope of the present utility model, and it should be understood that various modifications and changes can be made to the example embodiments without departing from the scope of the utility model.

In the description of the present utility model, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying relative importance unless explicitly specified or limited otherwise; the term "plurality" refers to two or more than two; the term "and/or" includes any and all combinations of one or more of the associated listed items. In particular, references to "the/the" object or "an" object are likewise intended to mean one of a possible plurality of such objects.

Unless specified or indicated otherwise, the terms "connected," "fixed," and the like are to be construed broadly and are, for example, capable of being fixedly connected, detachably connected, or integrally connected, electrically connected, or signally connected; "coupled" may be directly coupled or indirectly coupled through intermediaries. The specific meaning of the above terms in the present utility model can be understood by those skilled in the art according to the specific circumstances.

Further, in the description of the present utility model, it should be understood that the terms "upper", "lower", "inner", "outer", and the like in the exemplary embodiments of the present utility model are described in terms of the drawings, and should not be construed as limiting the exemplary embodiments of the present utility model. It will also be understood that in the context of an element or feature being connected to another element(s) "upper," "lower," or "inner," "outer," it can be directly connected to the other element(s) "upper," "lower," or "inner," "outer," or indirectly connected to the other element(s) "upper," "lower," or "inner," "outer" via intervening elements.

Example embodiments will now be described more fully with reference to the accompanying drawings. However, the exemplary embodiments can be embodied in many forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the concept of the example embodiments to those skilled in the art. The same reference numerals in the drawings denote the same or similar structures, and thus detailed descriptions thereof will be omitted.

The present embodiment provides a coil heat dissipation structure, as shown in fig. 2, which includes a housing 5, the housing 5 being for accommodating an electromagnetic coil panel 2, the housing 5 being provided with an air inlet 51. The housing 5 provides a housing space for the electromagnetic coil panel 2 and also serves as a protection for the electromagnetic coil panel 2. The air inlet 51 of the housing 5 is used for introducing air, and the air with low temperature can exchange heat with the electromagnetic coil panel 2, so as to play a role in heat dissipation.

Since the air flows mainly in the axial direction of the electromagnetic coil panel 2 to form a longitudinal air flow after entering from the air inlet 51, the contact area between the air flow and the electromagnetic coil panel 2 is relatively small, and thus, a good heat dissipation effect on the electromagnetic coil panel 2 is not achieved. Meanwhile, since the electromagnetic coil panel 2 is disposed in the housing 5, the electromagnetic coil panel 2 is limited in the housing 5, so that the electromagnetic coil panel 2 is in a relatively closed environment, and it is difficult to realize the flow of the air current along the radial direction of the electromagnetic coil panel 2, thereby further increasing the difficulty of heat dissipation.

In order to solve this problem, as shown in fig. 2-3, the coil heat dissipation structure provided in this embodiment further includes a blocking member 6, where the blocking member 6 is disposed in the housing 5 and on a side of the electromagnetic coil panel 2 away from the air inlet 51, so that the air entering from the air inlet 51 flows in a direction parallel to the heating plane of the electromagnetic coil panel 2 for heat dissipation of the electromagnetic coil panel 2.

The heating plane of the electromagnetic coil panel 2 is specifically the upper and lower surfaces of the electromagnetic coil panel 2.

According to the coil radiating structure provided by the embodiment, the blocking piece 6 is arranged in the shell 5 and is arranged on one side, far away from the air inlet 51, of the electromagnetic coil panel 2, the effect of blocking and guiding air flow is achieved, air entering from the air inlet 51 flows along the direction parallel to the heating plane of the electromagnetic coil panel 2, the change of the trend of the air flow is achieved, so that longitudinal air flow is completely converted into transverse air flow along the horizontal direction, the contact area between the air flow and the electromagnetic coil panel 2 is increased, heat generated by the electromagnetic coil panel 2 is taken away to a greater extent, the radiating effect is good, and the purpose of efficient radiating is achieved.

In one embodiment, a first space is provided between the electromagnetic coil panel 2 and the inner wall of the housing 5 to form a first heat dissipation air passage 4, and the first heat dissipation air passage 4 is communicated with the air inlet 51; and/or a second interval is provided between the electromagnetic coil panel 2 and the blocking member 6 to form a second heat dissipation air passage 7, and the second heat dissipation air passage 7 communicates with the air inlet 51.

Specifically, the upper surface of the electromagnetic coil panel 2 and the inner wall of the housing 5 are not completely adhered to each other, and a first space is provided between the electromagnetic coil panel 2 and the inner wall of the housing 5, the first space provides a flow space for air flow, and the first heat dissipation air passage 4 is communicated with the air inlet 51, so that air introduced from the air inlet 51 enters the first heat dissipation air passage 4 to perform heat dissipation treatment on the upper surface of the electromagnetic coil panel 2.

Specifically, the lower surface of the electromagnetic coil panel 2 and the blocking member 6 are not completely adhered to each other, a second space is provided between the electromagnetic coil panel 2 and the blocking member 6, the second space provides a flow space for air flow, and the second heat dissipation air passage 7 is communicated with the air inlet 51, so that air introduced from the air inlet 51 enters the second heat dissipation air passage 7 to perform heat dissipation treatment on the lower surface of the electromagnetic coil panel 2.

In one embodiment, the blocking member 6 is of a thin plate structure, and has a simple structure and low production cost. The shape of the blocking member 6 may be any one of a circular, oval, and polygonal structure, and the polygonal structure includes, but is not limited to, triangle, quadrangle, pentagon, hexagon, etc., and the shape of the blocking member 6 is not limited in this embodiment, and may be adjusted according to actual production conditions.

In one embodiment, the barrier 6 is made of a non-ferromagnetic material and a non-conductive material.

Since the blocking member 6 is also within the electromagnetic induction range of the electromagnetic coil panel 2, the blocking member 6 is made of a non-ferromagnetic material and a non-conductive material, so that the influence of the blocking member 6 on the electromagnetic coil panel 2 due to self-heating can be reduced.

In one embodiment, as shown in fig. 2-3, a sealed pressure chamber 52 is provided in the housing 5, and the electromagnetic coil plate 2 and the blocking member 6 are disposed in the sealed pressure chamber 52 at a distance so that gas can enter the sealed pressure chamber 52 through the gas inlet 51.

Through being provided with sealed pressure chamber 52 in shell 5 for the inner chamber of shell 5 is a relatively airtight cavity, and has certain pressure, and when solenoid dish 2 and barrier 6 interval set up in sealed pressure chamber 52, because there is certain atmospheric pressure difference between sealed pressure chamber 52 and the outside atmosphere, under the effect of atmospheric pressure difference, can realize that continuous air current gets into sealed pressure chamber 52 through air inlet 51 constantly, guarantees good air inlet effect, thereby improves solenoid dish 2's radiating effect.

In one embodiment, the coil heat dissipation structure further includes a heat dissipation fan (not shown) disposed in the sealed pressure chamber 52, so that the sealed pressure chamber 52 generates negative pressure.

Because the sealed pressure cavity 52 of the shell 5 is a closed cavity, a cooling fan is additionally arranged in the inner cavity of the shell 5, so that negative pressure can be generated in the inner cavity of the shell 5, the sealed pressure cavity 52 is formed, and the structure is simple and the use is convenient.

It will be appreciated that in some other embodiments positive pressure means may also be provided on the outside of the housing 5 to cause the external air pressure of the housing 5 to be greater than the air pressure of the internal cavity of the housing 5. The sealed pressure chamber 52 of the housing 5 is not limited by the positive pressure chamber or the negative pressure chamber in this embodiment, and it is within the scope of this embodiment to achieve smooth air flow entering the sealed pressure chamber 52 through the air inlet 51 as long as there is an air pressure difference with the outside atmosphere.

The embodiment also provides spin-coating drying equipment, as shown in fig. 2-3, which comprises the electromagnetic coil panel 2 and the coil heat dissipation structure, wherein the electromagnetic coil panel 2 is arranged in the shell 5 of the coil heat dissipation structure, and the coil heat dissipation structure is used for performing heat dissipation treatment on the electromagnetic coil panel 2.

The spin-coating drying equipment provided by the embodiment, the electromagnetic coil panel 2 is arranged in the shell 5 of the coil heat radiation structure, so as to play a role in protecting the electromagnetic coil panel 2, and the coil heat radiation structure is used for carrying out heat radiation treatment on the electromagnetic coil panel 2 so as to improve the heat radiation effect of the electromagnetic coil panel 2.

In one embodiment, the spin-coating drying device further comprises a control unit, wherein the control unit is electrically connected with the electromagnetic coil panel 2, and the control unit controls alternating current in the electromagnetic coil panel 2 so as to further realize temperature control of the rotary platform 1, improve heating uniformity of spin-coating drying, and is high in efficiency, safe and controllable.

In one embodiment, as shown in fig. 2 to 3, the spin-coating drying apparatus further includes a rotary stage 1, a rotary shaft 3, and a rotary driving source, the rotary stage 1 being disposed outside the housing 5, and the electromagnetic coil panel 2 for heating the rotary stage 1. One end of the rotating shaft 3 is connected with the rotating driving source, the other end of the rotating shaft is connected with the rotating platform 1, the rotating driving source is a specific optional driving motor, the output end of the rotating driving source is connected with the rotating platform 1 through the rotating shaft 3, the rotating platform 1 rotates relative to the shell 5, and after a workpiece to be processed is placed on the rotating platform 1, the workpiece to be processed can rotate along with the rotating platform 1. Because the rotating shaft 3 is arranged between the rotating platform 1 and the motor shaft of the rotating driving source, the influence of the motor shaft of the rotating driving source on the electromagnetic coil panel 2 can be eliminated, and the use reliability of the electromagnetic coil panel 2 is improved.

In one embodiment, the rotary platform 1 is made of ferromagnetic material.

For example, the rotary table 1 may be made of ferromagnetic materials such as iron, cobalt, nickel, and the like, and the ferromagnetic materials have good electromagnetic induction heating characteristics. When the electromagnetic coil 2 is supplied with an alternating current, an alternating magnetic field is generated around the electromagnetic coil 2, particularly, at the upper and lower surfaces of the electromagnetic coil 2, in a certain range. Because the rotary platform 1 is in the alternating magnetic field range of the electromagnetic coil panel 2, and the material of the rotary platform 1 is a material with higher ferromagnetism, vortex can be generated in the rotary platform 1, the temperature can be raised, and then the workpiece to be processed placed in the rotary platform 1 can be heated and dried. Due to the distribution characteristics of the alternating magnetic field, the rotary table 1 can be heated uniformly.

In one embodiment, the distance between the electromagnetic coil plate 2 and the rotary platform 1 is L, where L.ltoreq.50 mm.

The distance L between the electromagnetic coil panel 2 and the rotary platform 1 may be selected from 10mm, 15mm, 20mm, 25mm, 30mm, 35mm, 40mm, 45mm, 50mm, etc. to ensure that the rotary platform 1 is within the magnetic field of the electromagnetic coil panel 2, so that uniform heating of the rotary platform 1 can be achieved, and the heating efficiency is high and the heat loss is small.

It will be appreciated that the electromagnetic coil panel 2 is fixed above or below the rotary platform 1 by a fixed bracket.

In one embodiment, the rotating shaft 3 is respectively arranged through the blocking piece 6 and the electromagnetic coil panel 2, so that the rotating shaft 3, the blocking piece 6 and the electromagnetic coil panel 2 are coaxially arranged, and the attractive appearance and the uniformity are high.

It should be noted that, there is a certain gap between the electromagnetic coil panel 2 and the rotation shaft 3, so that the electromagnetic coil panel 2 does not rotate with the rotation of the rotation shaft 3, and the situation that the electromagnetic coil panel 2 is wound with electric wires is avoided.

In one embodiment, as shown in fig. 2-3, the blocking member 6 is connected to the rotating shaft 3; or, an interference fit between the blocking member 6 and the rotary shaft 3.

Specifically, the blocking member 6 may be connected to the rotation shaft 3 by welding, screwing, clamping, or the like, or the blocking member 6 may be fixed to the rotation shaft 3 by press-fitting, and the rotation shaft 3 provides a fixing and mounting position for the blocking member 6, and no positional deviation of the blocking member 6 may occur even if the rotation shaft 3 rotates. Simultaneously, the blocking piece 6 is fixed with the rotating shaft 3, and along with the rotation of the rotating shaft 3, the blocking piece 6 also rotates, and at the moment, the blocking piece 6 plays a role of a fan blade of a fan to accelerate the stirring effect of air flow, so that the heat dissipation effect of the electromagnetic coil panel 2 is further improved.

In one embodiment, as shown in fig. 2 to 3, the rotary table 1 is provided with a vacuum suction hole 11, the rotary shaft 3 is provided with a cavity 31, and the vacuum suction hole 11 is communicated with a vacuum generator through the cavity 31.

Because rotation axis 3 rotates with rotary platform 1, be provided with the cavity 31 that is used for the evacuation in rotation axis 3 inside, vacuum generator passes through cavity 31 and draws the air to vacuum absorption hole 11, makes vacuum absorption hole 11 be in the negative pressure state, and the evacuation is effectual, is convenient for firmly fix the work piece of waiting to process on rotary platform 1's upper surface, realizes simple structure. A vacuum exhaust pipe (not shown in the figure) can be arranged in the cavity 31, and is externally connected with a vacuum source such as a vacuum generator and the like, so that the installation is convenient.

In other embodiments, a vacuum chuck may be provided above the rotary table 1, the vacuum chuck being in communication with the vacuum chucking holes 11. The vacuum chuck is arranged on the surface of the rotary platform 1, so that the adsorption and fixation of the substrate can be realized, the processing requirement of the upper surface of the rotary platform 1 can be reduced, and the production cost can be saved.

It should be noted that, vacuum adsorption is a common way to fix a substrate waiting for processing a workpiece, and other ways of fixing the substrate, such as mechanical clamping, may be used.

In one embodiment, the rotating shaft 3 is made of a non-ferromagnetic material and a non-conductive material.

For example, the rotary shaft 3 may be made of ceramics, PEEK, or the like. Because the rotating shaft 3 is connected with the rotating platform 1 and the motor output shaft, the rotating shaft 3 can pass through the action range of magnetic force lines, and the distribution of the magnetic force lines can be changed when any conductor enters the range of an alternating magnetic field, so that alternating current, namely vortex, is generated. Changing the distribution of the magnetic lines of force is detrimental to adjusting the uniformity of heating of the rotating platform 1 and the additional eddy currents can lead to elevated temperatures of the rotating shaft 3, especially of the rotating shaft 3 with high ferromagnetism. In order to reduce this effect, the material of the rotating shaft 3 is selected from nonferromagnetic and nonconductive materials, and the adverse effect of the rotating shaft 3 on magnetic lines and the damage caused by self-eddy heating are completely avoided.

In one embodiment, as shown in fig. 2-4, the air inlet 51 is provided at the top of the housing 5; and/or a gap is provided between the rotary shaft 3 and the housing 5 to form the air inlet 51.

Specifically, the air inlets 51 may be directly disposed at the top of the housing 5, the number of the air inlets 51 may be plural, and the plurality of air inlets may be uniformly disposed along the circumferential direction of the rotary shaft 3, so that the structure is simple, and the production cost is low.

Specifically, since the rotating shaft 3 is always in a rotating state, a gap is provided between the rotating shaft 3 and the housing 5 to reduce interference generated by the rotation of the rotating shaft 3 by the housing 5, the gap can directly serve as the air inlet 51, and continuous air flow can be realized to enter the first heat dissipation air passage 4 and the second heat dissipation air passage 7 through the gap between the rotating shaft 33 and the protective housing 55, so that the air flow direction is consistent with the radial direction of the electromagnetic coil 2, and the heat of the electromagnetic coil 2 can be taken away with maximum effectiveness.

The working process of the spin-coating and drying device provided in this embodiment is as follows:

1. the electromagnetic coil panel 2 is fixed through a fixed bracket, the rotating shaft 3 passes through the electromagnetic coil panel 2 and is connected with the rotating platform 1, so that the rotating platform 1 is arranged above the electromagnetic coil panel 2, then the electromagnetic coil panel 2 is connected with the electric control unit, the rotating shaft 3 is connected with the rotating driving source, and the cavity 31 of the rotating shaft 3 is connected with the vacuum generator;

2. placing a substrate waiting for processing a workpiece on the upper surface of the rotary platform 1, starting a vacuum generator to extract vacuum through the cavity 31 so as to adsorb the substrate on the upper surface of the rotary platform 1, and setting a film forming material on the substrate after the substrate is fixed;

3. starting a rotating motor, wherein a motor shaft of a rotating driving source is connected to the lower end of a rotating shaft 3, and the rotating shaft 3 drives the rotating platform 1 to rotate by rotating moment to the rotating platform 1, so that a film forming material on a substrate forms a film;

4. the control unit controls the electromagnetic coil panel 2 to input alternating current, an alternating magnetic field is generated around the electromagnetic coil panel 2, particularly in a certain range of the upper surface and the lower surface of the electromagnetic coil panel, the rotary platform 1 is in the range of the alternating magnetic field, and the rotary platform 1 is made of a material with high ferromagnetism, so that eddy current is generated in the rotary platform 1, the temperature is further increased, and the bearing substrate can be heated and dried, so that a drying film is realized. Due to the distribution characteristics of the alternating magnetic field, it is possible to uniformly heat the rotary table 1.

5. Under the action of the cooling fan, the negative pressure is generated in the sealed pressure cavity 52 of the shell 5, the air inlet 51 is formed in the gap between the rotating shaft 3 and the protective shell 5, continuous air flow can be enabled to enter the first cooling air passage 4 and the second cooling air passage 7 through the air inlet 51, the air flow direction is consistent with the radial direction of the electromagnetic coil panel 2, and the heat of the electromagnetic coil panel 2 can be taken away with maximum effectiveness.

It should be noted herein that the coil heat dissipation structure shown in the drawings and described in this specification is merely one example of the principles of the present utility model. It will be clearly understood by those of ordinary skill in the art that the principles of the present utility model are not limited to any details or any components of the devices shown in the drawings or described in the specification.

It should be understood that the utility model is not limited in its application to the details of construction and the arrangement of components set forth in the specification. The utility model is capable of other embodiments and of being practiced and carried out in various ways. The foregoing variations and modifications are intended to fall within the scope of the present utility model. It should be understood that the utility model disclosed and defined in this specification extends to all alternative combinations of two or more of the individual features mentioned or evident from the text and/or drawings. All of these different combinations constitute various alternative aspects of the present utility model. The embodiments described in this specification illustrate the best mode known for carrying out the utility model and will enable those skilled in the art to make and use the utility model.

Other embodiments of the utility model will be apparent to those skilled in the art from consideration of the specification and practice of the utility model disclosed herein. This utility model is intended to cover any variations, uses, or adaptations of the utility model following, in general, the principles of the utility model and including such departures from the present disclosure as come within known or customary practice within the art to which the utility model pertains. The specification and example embodiments are to be considered exemplary only, with a true scope and spirit of the utility model being indicated by the following claims.

It is to be understood that the utility model is not limited to the precise arrangements and instrumentalities shown in the drawings, which have been described above, and that various modifications and changes may be effected without departing from the scope thereof. The scope of the utility model is limited only by the appended claims.

Claims (10)

1. A coil heat dissipation structure, comprising:

a housing for accommodating the electromagnetic coil plate, the housing being provided with an air inlet;

and the blocking piece is arranged in the shell and on one side of the electromagnetic coil panel away from the air inlet, so that air entering from the air inlet flows along the direction parallel to the heating plane of the electromagnetic coil panel and is used for radiating heat of the electromagnetic coil panel.

2. The coil heat dissipating structure of claim 1, wherein a first space is provided between the electromagnetic coil panel and an inner wall of the housing to form a first heat dissipating air passage, the first heat dissipating air passage being in communication with the air inlet; and/or the number of the groups of groups,

and a second interval is arranged between the electromagnetic coil panel and the blocking piece so as to form a second heat dissipation air passage, and the second heat dissipation air passage is communicated with the air inlet.

3. The coil heat dissipating structure of claim 1, wherein a sealed pressure chamber is provided in said housing, said electromagnetic coil disk and said barrier being disposed in said sealed pressure chamber at a distance such that said gas can enter said sealed pressure chamber through said gas inlet.

4. The coil heat dissipating structure of claim 3, further comprising a heat dissipating fan disposed within the sealed pressure chamber to create a negative pressure in the sealed pressure chamber.

5. The coil heat dissipating structure of claim 1, wherein said barrier is made of a non-ferromagnetic material and a non-conductive material.

6. A spin-on drying apparatus comprising an electromagnetic coil panel and the coil heat dissipation structure of any one of claims 1 to 5, the electromagnetic coil panel being disposed within the housing of the coil heat dissipation structure, the coil heat dissipation structure being configured to perform a heat dissipation process on the electromagnetic coil panel.

7. The spin-coating drying apparatus according to claim 6, further comprising:

the rotating platform is arranged outside the shell, and the electromagnetic coil panel is used for heating the rotating platform;

the output end of the rotary driving source is connected to the rotary platform through a rotary shaft so that the rotary platform rotates relative to the shell;

wherein, the rotation axis wears to locate respectively the barrier with the solenoid dish.

8. The spin-coating drying apparatus of claim 7, wherein the blocking member is connected to the rotation shaft; or alternatively, the first and second heat exchangers may be,

the blocking member is in interference fit with the rotating shaft.

9. The spin-on drying apparatus of claim 7, wherein the air inlet is provided at a top of the housing; and/or the number of the groups of groups,

a gap is provided between the rotary shaft and the housing to form the air inlet.

10. The spin-on drying apparatus of claim 7, wherein the rotating shaft is made of a non-ferromagnetic material and a non-conductive material.