CN219496145U

CN219496145U - Flow cell structure for concentration measurement

Info

Publication number: CN219496145U
Application number: CN202320771705.8U
Authority: CN
Inventors: 钟立华; 刘苏伟; 李素华; 袁亚鸿
Original assignee: Jiangsu Fulate Automation Equipment Co ltd
Current assignee: Jiangsu Fulate Automation Equipment Co ltd
Priority date: 2023-04-10
Filing date: 2023-04-10
Publication date: 2023-08-08
Anticipated expiration: 2033-04-10

Abstract

The utility model discloses a flow cell structure for concentration measurement, which is characterized in that a liquid medicine flow channel is arranged on a flow cell body, mounting cavities which are symmetrically arranged at two sides of the liquid medicine flow channel and are communicated with the liquid medicine flow channel are arranged in each mounting cavity from inside to outside, a sapphire lens, a pressing block and a lens adjusting seat are arranged in each mounting cavity, the pressing block is fixedly connected with the flow cell body, the sapphire lens is abutted in the mounting cavity by the pressing block, two end covers are fixed on the outer walls of two sides of the flow cell body, the lens adjusting seat is axially positioned in the mounting cavities by the end covers, an adjusting gap for radial displacement of the lens adjusting seat is formed between the lens adjusting seat and the end covers, and a lens piece is fixedly connected with the lens adjusting seat. The utility model utilizes the difference of the absorbance of solutions with different concentrations to near infrared light to obtain the concentration of the liquid medicine, and the liquid medicine to be tested is introduced into the flow cell, and the concentration of the liquid medicine is obtained according to the difference of the absorbance.

Description

Flow cell structure for concentration measurement

Technical Field

The present utility model relates to a flow cell structure for concentration measurement.

Background

In the process of the semiconductor and display industry, liquid medicines such as stripping liquid and etching liquid are usually used for forming a driving circuit, and the concentration of the liquid medicines is usually required to be detected so as to ensure the process effect. The current concentration detection mode commonly used in the industry is an acid-base titration mode or a mode of ultraviolet light splitting to measure the concentration of the liquid medicine, however, the two modes have a plurality of inherent problems. For example, the acid-base titration reaction time is longer, the output of the result is slower, and the real-time detection cannot be realized; the ultraviolet light splitting mode needs to detect the concentration of the liquid medicine in a cuvette through fixing, and the concentration is different according to the different principles of the dispersion effect of the liquid medicine.

Disclosure of Invention

The present utility model is to solve the above-mentioned problems of the prior art and to provide a flow cell structure for concentration measurement.

The utility model adopts the technical scheme that:

the utility model provides a flow cell structure for concentration measurement, includes lens adjustment seat, briquetting, sapphire lens, flow cell body, end cover and contains the lens spare of focusing lens and lens casing, be equipped with on the flow cell body and run through in the liquid medicine runner of flow cell body, be equipped with symmetrical arrangement in the liquid medicine runner both sides and the installation cavity that is linked together with the liquid medicine runner, arrange sapphire lens from inside to outside at every installation intracavity, briquetting and flow cell body fixed connection, the briquetting is contradicted the sapphire lens at the installation intracavity, two end covers are fixed on the both sides outer wall of flow cell body, the end cover is with lens adjustment seat axial positioning at the installation intracavity, be formed with the adjustment clearance that is used for lens adjustment seat to carry out radial displacement between lens adjustment seat and the end cover, lens spare and lens adjustment seat fixed connection.

Further, a step surface for axially positioning the sapphire lens is arranged in the mounting cavity, and a sealing ring is arranged between the sapphire lens and the step surface.

Furthermore, the sealing ring is made of perfluorinated materials.

Further, the lens adjusting seat is a T-shaped seat, after the end cover is fixed with the flow cell body, the T-shaped table of the lens adjusting seat is pressed between the end cover and the pressing block, and the adjusting gap is formed between the outer wall surface of the T-shaped table of the lens adjusting seat and the hole surface in the end cover.

Further, a measuring hole for installing a sensor is formed in the flow cell body.

Further, the flow cell body is made of FPA material.

The utility model has the following beneficial effects:

the utility model utilizes the difference of the absorbance of solutions with different concentrations to near infrared light to obtain the concentration of the liquid medicine, and the liquid medicine to be tested is introduced into the flow cell, and the concentration of the liquid medicine is obtained according to the difference of the absorbance.

Drawings

Fig. 1 is a three-dimensional block diagram of the present utility model.

Fig. 2 is a plan view of the structure of the present utility model.

Fig. 3 is a plan sectional view of the present utility model.

Fig. 4 is a three-dimensional cross-sectional view of the present utility model (the cross-sectional line is omitted from this view).

Fig. 5 is an assembly view of the lens adjustment base and the end cap.

Detailed Description

The utility model is further described below with reference to the accompanying drawings.

Referring to fig. 1 to 5, a flow cell structure for concentration measurement according to the present utility model includes a lens adjustment base 2, a press block 3, a sapphire lens 4, a flow cell body 6, an end cap 7, and a lens member 1 including a focusing lens and a lens housing.

The flow cell body 6 is provided with a liquid medicine flow passage 61 penetrating through the flow cell body, and mounting cavities 62 which are symmetrically arranged on two sides of the liquid medicine flow passage 61 and are communicated with the liquid medicine flow passage 61 are arranged on two sides of the liquid medicine flow passage 61, and the mounting cavities 62 are perpendicular to the liquid medicine flow passage 61. The sapphire lenses 4, the pressing blocks 3 and the lens adjusting seat 2 are arranged from inside to outside in each installation cavity 62, the pressing blocks 3 are fixedly connected with the flow cell body 6 through bolts, the pressing blocks 3 are used for abutting the sapphire lenses 4 in the installation cavities 62, two end covers 7 are fixed on the outer walls of the two sides of the flow cell body 6 through bolts, the end covers 7 are used for axially positioning the lens adjusting seat 2 in the installation cavities 62, an adjusting gap 20 used for radially displacing the lens adjusting seat 2 is formed between the lens adjusting seat 2 and the end covers 7, and the radial displacement is along the radial direction of the installation cavities 62. The lens housing of the lens element 1 is screwed to the lens adjustment holder 2.

The mounting cavity 62 is internally provided with a step surface for axially positioning the sapphire lens 4 and a step surface for axially positioning the pressing block 3, and a sealing ring 5 is arranged at the step surface for axially positioning the sapphire lens 4.

The sapphire lens 4 has two main functions, namely, the sealing liquid is used for sealing the sealing ring, the transmittance of the sapphire lens is high, and the light intensity is reduced slightly.

The pressing block 3 plays a role in sealing, mainly compresses the sapphire lens 4, and prevents the liquid medicine of the flow cell from leaking.

The sealing ring 5 is made of perfluorinated materials, and can resist various liquid medicine corrosion. The flow cell body 6 is made of FPA material, and can test various corrosive liquid medicines.

The lens adjusting seat 2 is a T-shaped seat, after the end cover 7 is fixed with the flow cell body 6, the T-shaped table of the lens adjusting seat 2 is pressed between the end cover 7 and the pressing block 3, and the adjusting gap 20 is formed between the outer wall surface of the T-shaped table of the lens adjusting seat 2 and the hole surface in the end cover 7.

When the position of the lens adjusting seat 2 is adjusted, the bolts on the end cover 7 are loosened, then the position of the lens adjusting seat 2 is adjusted, the lenses at two ends are adjusted to be uniform straight lines, and then the bolts on the end cover 7 are fixed. The lens piece 1 gathers the light spots of the near infrared laser, so that the light spot size is smaller, and the light intensity is improved.

The flow cell body 6 is provided with a measurement hole 60 (for example, a temperature sensor) for mounting a sensor, and the measurement hole 60 is not in communication with the chemical flow passage 61, so that the temperature of the chemical in the chemical flow passage 61 is measured by a heat transfer method.

The utility model achieves the effect of accurately and rapidly detecting the concentration of the liquid medicine by adopting the means that different liquid medicines have different absorbance of near infrared light.

When the device is used, near infrared spectrum is used as a light source, a focusing lens is used for converging laser spots, so that the light intensity is improved, and the detection sensitivity is increased. Adopt full seal structure to use corrosion resistance material, can test various corrosion resistance materials. By adopting the non-contact test method, the liquid medicine can be reused without losing the liquid medicine.

The foregoing is merely a preferred embodiment of the utility model, and it should be noted that modifications could be made by those skilled in the art without departing from the principles of the utility model, which modifications would also be considered to be within the scope of the utility model.

Claims

1. A flow cell structure for concentration measurement, characterized in that: including lens adjustment seat (2), sapphire lens (4), flow cell body (6) and lens spare (1), be equipped with on flow cell body (6) and run through in flow cell body's liquid medicine runner (61), be equipped with symmetrical arrangement in liquid medicine runner (61) both sides and with liquid medicine runner (61) be linked together install installation cavity (62) by interior to outer installation sapphire lens (4) and lens adjustment seat (2) in every installation cavity (62), and lens adjustment seat (2) can carry out displacement adjustment along the radial direction of installation cavity (62) on flow cell body (6), lens spare (1) and lens adjustment seat (2) fixed connection.

2. The flow cell structure for concentration measurement according to claim 1, wherein: a pressing block (3) is arranged in each mounting cavity (62), the pressing blocks (3) are fixedly connected with the flow cell body (6), and the pressing blocks (3) are used for abutting the sapphire lenses (4) in the mounting cavities (62).

3. A flow cell structure for concentration measurement according to claim 2, characterized in that: an end cover (7) is respectively fixed on the outer wall of the flow cell body (6) and positioned on two sides of the liquid medicine flow channel (61), and the end cover (7) axially positions the lens adjusting seat (2) in the mounting cavity (62).

4. A flow cell structure for concentration measurement according to claim 3, characterized in that: an adjustment gap (20) for the radial direction displacement of the lens adjustment seat (2) is formed between the lens adjustment seat (2) and the end cover (7).

5. A flow cell structure for concentration measurement according to claim 4, wherein: the lens adjusting seat (2) is a T-shaped seat, after the end cover (7) is fixed with the flow cell body (6), the T-shaped table of the lens adjusting seat (2) is pressed between the end cover (7) and the pressing block (3), and the adjusting gap (20) is formed between the outer wall surface of the T-shaped table of the lens adjusting seat (2) and the hole surface in the end cover (7).

6. The flow cell structure for concentration measurement according to claim 1, wherein: the mounting cavity (62) is internally provided with a step surface for axially positioning the sapphire lens (4), and a sealing ring (5) is arranged between the sapphire lens (4) and the step surface.

7. The flow cell structure for concentration measurement according to claim 6, wherein: the sealing ring (5) is made of perfluorinated materials.

8. The flow cell structure for concentration measurement according to claim 1, wherein: the flow cell body (6) is provided with a measuring hole (60) for installing a sensor.

9. The flow cell structure for concentration measurement according to claim 1, wherein: the flow cell body (6) is made of FPA material.