CN219490151U - Cover body positioning device - Google Patents

Abstract

The utility model provides a cover body positioning device which comprises a positioning bracket and a positioning pin which are arranged outside a cover body, wherein positioning holes are formed in the outer surface of the side wall of the cover body; after the cover body is opened, the locating pin is supported on the locating support and penetrates into the locating hole. The utility model is positioned outside the cover body, is convenient to operate and improves the working efficiency.

Description

Cover body positioning device

Technical Field

The utility model relates to the technical field of semiconductor equipment, in particular to a cover body positioning device.

Background

In a semiconductor CVD (Chemical Vapor Deposition) apparatus, when a matcher above a process chamber lid needs to be inspected or repaired, the matcher lid is opened and kept in an open state of less than 90 degrees. However, the cover body is an inverted square box body, the weight of equipment above the cover body reaches 20kg, a positioning component for maintaining the open state of the cover body is positioned in the cover body, if one person operates and positions the cover, the other hand stretches into the cover body to operate, the positioning component cannot be observed, the operation is slow and laborious, the positioning component cannot be ensured to be installed in place at one time, the cover lifting is unstable, and the risk of clamping the hand exists; if two people operate and position, one person lifts the cover, and the other person stretches into the cover body to operate and position the part, not only the observation is inconvenient, but also the risk of clamping and hurting arms exists if the two people are not well matched.

Disclosure of Invention

In view of the above problems, an object of the present utility model is to provide a positioning device for a cover, which is located outside the cover, and is convenient to operate, and improves working efficiency.

The utility model provides a cover body positioning device which comprises a positioning bracket and a positioning pin which are arranged outside a cover body, wherein positioning holes are formed in the outer surface of the side wall of the cover body; after the cover body is opened, the locating pin is supported on the locating support and penetrates into the locating hole.

The side wall is parallel to the opening angle of the cover body, the positioning support comprises a positioning plate which is parallel to and close to the side wall, and the positioning plate is provided with a perforation.

The locating plate is fixed on the equipment support at the rear half of the side wall.

The locating hole sets up the lower limb at the latter half of lateral wall, the locating pin passes the perforation and inserts behind the locating hole, the opening angle of the cover body is greater than 45 degrees and is less than 90 degrees.

The perforation sets up the one end of locating plate the other end of locating plate is provided with the mounting panel perpendicularly, the mounting panel passes through the bolt to be installed on the equipment support.

The positioning plate comprises a trapezoid plate, a first right-angle trapezoid plate and a second right-angle trapezoid plate which are arranged on the same plane, wherein the inclined waists of the first right-angle trapezoid plate and the second right-angle trapezoid plate are respectively connected with the two waists of the trapezoid plate, and the straight waists of the first right-angle trapezoid plate and the straight waists of the second right-angle trapezoid plate are mutually perpendicular; the perforation sets up on the first right angle trapezoidal plate, the mounting panel with the straight waist of second right angle trapezoidal plate is connected, the mounting panel is vertical to be installed on the equipment support.

The first right-angle trapezoidal plate, the trapezoidal plate and the second right-angle trapezoidal plate form a concave positioning plate.

The locating pin comprises a pin column and a pin cap arranged at one end of the pin column.

And a through hole is formed at the connecting end of the pin column and the pin cap.

The depth of the positioning hole is not less than half of the thickness of the side wall.

As can be seen from the above description, the cover positioning device provided by the utility model is arranged outside the cover, the outer surface of the side wall of the cover is provided with the positioning hole, and the positioning pin is inserted into the positioning hole through the positioning bracket to open and fix the cover. The utility model changes the position of the cover body positioning device into the position outside the cover body, can intuitively observe the cover body positioning device, has clear and rapid operation, avoids the risk of clamping injury, can completely work by one person, and improves the working efficiency.

Drawings

Other objects and results of the present utility model will become more apparent and readily appreciated by reference to the following description and claims in conjunction with the accompanying drawings and a more complete understanding of the utility model.

In the drawings:

FIG. 1 is a schematic view of a prior art positioning member for a housing;

FIG. 2 is a schematic view of a cover positioning device according to an embodiment of the utility model;

FIG. 3 is a front view of a cover positioning device according to an embodiment of the present utility model;

FIG. 4 is an enlarged view of A in FIG. 3;

FIG. 5 is a side view of a cover positioning device according to an embodiment of the present utility model;

FIG. 6 is a schematic view of a positioning bracket according to an embodiment of the present utility model;

the device comprises a 1-positioning bracket, a 11-positioning plate, a 111-trapezoidal plate, a 112-first right-angle trapezoidal plate, a 113-second right-angle trapezoidal plate, a 12-perforation and a 13-mounting plate;

2-locating pins, 21-pin columns and 22-pin caps;

3-positioning holes, 4-cover bodies, 5-equipment brackets and 6-positioning components;

the same reference numerals will be used throughout the drawings to refer to similar or corresponding features or functions.

Detailed Description

The utility model is capable of various modifications and embodiments, and particular embodiments are illustrated in the drawings and described herein. However, the present utility model is not limited to the specific embodiments, but includes all modifications, equivalents, and alternatives falling within the spirit and technical scope of the present utility model.

Specific embodiments of the present utility model will be described in detail below with reference to the accompanying drawings.

FIG. 1 is a schematic view of a prior art positioning member for a housing;

as shown in fig. 1, in the semiconductor CVD apparatus, when the matcher above the process chamber cover needs to be checked or maintained, the cover 4 of the matcher is opened upward and kept in an open state of less than 90 degrees, and the cover 4 is an inverted rectangular box having a weight of up to 20 kg. In the prior art, the positioning component 6 for maintaining the opening state of the cover body 4 is positioned in the cover body 4 and is close to the inner surface of the side wall of the cover body 4, so that the operation cannot be clearly observed, the operation can only be fumbly, the working efficiency is low, and the risk of clamping the hand is also provided.

FIG. 2 is a schematic view of a cover positioning device according to an embodiment of the utility model; FIG. 3 is a front view of a cover positioning device according to an embodiment of the present utility model; FIG. 4 is an enlarged view of A in FIG. 3; FIG. 5 is a side view of a cover positioning device according to an embodiment of the present utility model; FIG. 6 is a schematic view of a positioning bracket according to an embodiment of the present utility model;

as shown in fig. 2-6 together, the cover positioning device provided in this embodiment can be used for opening and positioning the cover of the matcher of the semiconductor CVD apparatus, and also can be used for opening and positioning the cover of other boxes.

The cover body positioning device is arranged outside the cover body 4, can be operated while being observed during operation, and has a wide operating space.

The cover body positioning device comprises a positioning bracket 1 and a positioning pin 2 which are arranged outside a cover body 4, wherein a positioning hole 3 is formed in the outer surface of the side wall of the cover body 4, and after the cover body 4 is opened, the positioning pin 2 is supported on the positioning bracket 1 and penetrates into the positioning hole 3. The locating bracket 1 is fixed on an equipment part or a support outside the cover body 4 and is used for supporting the locating pin 2, the locating hole 3 on the outer surface of the side wall of the cover body 4 is used for penetrating the head of the locating pin 2, and the locating pin 2 limits the position of the cover body 4 after opening, so that the cover body 4 is opened at a certain angle.

The cover 4 is a box body similar to a cuboid in shape, in order to facilitate mounting of the positioning bracket 1, a suitable cover 4 side wall is selected to be provided with the positioning hole 3 according to the actual condition of the cover 4 and the condition of the outer part of the cover 4, and the side wall can be selected to be parallel to one of the left side wall and the right side wall of the opening angle of the cover 4, in this embodiment, the right side wall is selected to be provided with the positioning hole 3, and the positioning bracket 1 is arranged near the side wall.

The positioning bracket 1 can comprise a positioning plate 11 parallel to and close to the side wall, a perforation 12 is arranged on the positioning plate 11, the inner diameter of the perforation 12 is matched with the outer diameter of the positioning pin 2, and the positioning pin 2 is horizontally inserted into the perforation 12 and the positioning hole 3. The distance between the positioning plate 11 and the side wall can be within 1cm, and the distance between the positioning plate 11 and the side wall is as close as possible under the condition that the opening and closing of the cover body 4 are not influenced, so that the insertion of the positioning pin 2 is facilitated.

The positions of the positioning plate 11 and the positioning hole 3 can be set according to the angle to be opened of the cover 4 and the condition of the external equipment of the cover 4, in this embodiment, the upward opening angle of the cover 4 can be greater than 45 degrees and smaller than 90 degrees, the positioning plate 11 can be fixed on the equipment bracket 5 at the rear half of the side wall, the positioning hole 3 can be arranged at the lower edge of the rear half of the side wall, the positioning pin 2 passes through the perforation 12 and is inserted into the positioning hole 3, the perforation 12 is the same as the inner diameter of the positioning hole 3, and the positioning pin 2 is mutually matched and inserted.

The positioning plate 11 may be a flat plate, the through hole 12 may be provided at one end of the positioning plate 11, and the mounting plate 13 may be vertically provided at the other end of the positioning plate 11, and the mounting plate 13 is mounted on the equipment bracket 5 by bolts. Two through holes can be formed in the mounting plate 13, and the mounting plate 13 is fixed to the equipment support 5 by two bolts, so that the mounting plate is firm.

The shape of locating plate 11 is determined according to the outside condition of cover 4, simultaneously in order to make locating plate 11 firm stable, can bear the heavier cover 4 of weight, locating plate 11 can include the trapezoidal plate 111 that sets up on the coplanar, first right angle trapezoidal plate 112 and second right angle trapezoidal plate 113, the sloping waist of first right angle trapezoidal plate 112 and second right angle trapezoidal plate 113 is connected with the waist of trapezoidal plate 111 respectively, the straight waist mutually perpendicular of first right angle trapezoidal plate 1121 and second right angle trapezoidal plate 113, perforation 12 sets up on first right angle trapezoidal plate 112, mounting panel 13 is connected with the straight waist of second right angle trapezoidal plate 113, mounting panel 13 is vertical to be installed at equipment support 5.

The first right-angle trapezoidal plate 112, the trapezoidal plate 111 and the second right-angle trapezoidal plate 113 form a concave positioning plate 11, after the mounting plate 13 is mounted on the equipment support 5, the second right-angle trapezoidal plate 113 horizontally extends to the rear of the cover 4 close to the side wall of the cover 4, the first right-angle trapezoidal plate 112 vertically extends to the upper side of the cover 4 through the oblique upward transition of the trapezoidal plate 111, and the through holes 12 are formed at the edge of the first right-angle trapezoidal plate 112 facing the upper side.

In order to facilitate the insertion and extraction of the positioning pin 2, the positioning pin 2 includes a pin 21 and a pin cap 22 provided at one end of the pin 21, and the positioning pin 2 can be easily extracted by holding the pin cap 22. The end of the pin 21 connected with the pin cap 22 is provided with a through hole penetrating through the pin 21, after the pin 21 is connected with the pin cap 22, a rope ring can be arranged in the through hole, and the rope ring can be connected with the positioning plate 11 to prevent the positioning pin 2 from being lost.

The locating hole 3 is not a through hole, the depth of the locating hole 3 can be about half of the thickness of the side wall, and the locating hole 3 has enough contact length with the locating pin 2 to prevent the locating pin 2 from falling off from the locating hole 3.

The cover positioning device according to the present utility model is described above by way of example with reference to the accompanying drawings. However, it will be appreciated by those skilled in the art that various modifications may be made to the cover positioning device set forth above without departing from the teachings of the present utility model. Accordingly, the scope of the utility model should be determined from the following claims.

Claims (10)

1. The cover body positioning device is characterized by comprising a positioning bracket and a positioning pin which are arranged outside the cover body, wherein a positioning hole is formed in the outer surface of the side wall of the cover body;

after the cover body is opened, the locating pin is supported on the locating support and penetrates into the locating hole.

2. The cover positioning device of claim 1, wherein the side wall is parallel to the opening angle of the cover, and the positioning bracket includes a positioning plate parallel to and proximate to the side wall, and perforations are provided in the positioning plate.

3. The mask body positioning device of claim 2 wherein said positioning plate is secured to the equipment support at the rear half of said sidewall.

4. A cover positioning device as set forth in claim 3, wherein said positioning hole is provided at a lower edge of a rear half of said side wall, and said cover is opened at an angle of more than 45 degrees and less than 90 degrees after said positioning pin is inserted through said through hole and into said positioning hole.

5. A cover positioning device as claimed in claim 3, wherein the aperture is provided at one end of the positioning plate, and a mounting plate is provided vertically at the other end of the positioning plate, the mounting plate being mounted on the equipment support by means of a bolt.

6. The cover positioning device as set forth in claim 5, wherein said positioning plate comprises a trapezoidal plate, a first right-angle trapezoidal plate and a second right-angle trapezoidal plate disposed on the same plane, the sloping waists of said first right-angle trapezoidal plate and said second right-angle trapezoidal plate being respectively connected to the two waists of said trapezoidal plate, the straight waists of said first right-angle trapezoidal plate and said second right-angle trapezoidal plate being mutually perpendicular;

the perforation sets up on the first right angle trapezoidal plate, the mounting panel with the straight waist of second right angle trapezoidal plate is connected, the mounting panel is vertical to be installed on the equipment support.

7. The mask body positioning device of claim 6 wherein said first right angle trapezoidal plate, said trapezoidal plate and said second right angle trapezoidal plate form a concave positioning plate.

8. The mask body positioning device of claim 1 wherein the positioning pin comprises a pin post and a pin cap disposed at one end of the pin post.

9. The mask body positioning device according to claim 8, wherein a through hole is provided at an end portion of the pin connected to the pin cap.

10. The mask body positioning device of claim 1 wherein the depth of the positioning hole is not less than half the thickness of the sidewall.