CN219475447U - Clamp and X-ray imaging system - Google Patents
Clamp and X-ray imaging system Download PDFInfo
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- CN219475447U CN219475447U CN202320643895.5U CN202320643895U CN219475447U CN 219475447 U CN219475447 U CN 219475447U CN 202320643895 U CN202320643895 U CN 202320643895U CN 219475447 U CN219475447 U CN 219475447U
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Abstract
The utility model discloses a clamp and an X-ray imaging system. Wherein, anchor clamps include base and anchor clamps subassembly, anchor clamps subassembly include with base fixed connection's cavity support column, carry thing lifting support and sample fixing bolt, the cavity support column includes vertical guide way, carry thing lifting support and vertical guide way swing joint, carry thing lifting support to be provided with along horizontal direction open-ended year thing groove on, it is provided with first screw thread through-hole on the lateral wall of cavity support column one side to carry the thing groove to keep away from, sample fixing bolt and first screw thread through-hole swing joint, sample fixing bolt is close to the terminal surface of cavity support column and carry the thing groove to be close to the lateral wall of cavity support column one side and set up relatively. The clamp and the X-ray imaging system provided by the embodiment of the utility model avoid the conditions that the traditional clamp is not firmly adhered to a sample, the sample needs to be repeatedly disassembled and connected and the sample is likely to deviate and fall while avoiding introducing thermal stress and mechanical stress, and improve the working efficiency.
Description
Technical Field
The utility model relates to the technical field of semiconductor analysis, in particular to a clamp and an X-ray imaging system.
Background
The 3D X-Ray (3D X-Ray) is an important analytical instrument and means for nondestructive analysis in semiconductor integrated circuit device and chip failure analysis.
The method comprises the steps of using a traditional 3D X-Ray sample analysis fixture, adhering a sample to the fixture through a glue or adhesive tape method, then taking a plurality of pictures and data of 2D X-rays (2D X-Ray) through the rotation angle of the sample, synthesizing the pictures into a three-dimensional X-Ray picture through software, and carrying out anomaly characterization through a nondestructive slicing mode.
Fig. 1 is a schematic structural diagram of a related art clamp, as shown in fig. 1, a conventional sample connection is to melt glue by a hot-melt gun, and adhere a sample 11' and a clamp 12' together by glue 10', and the following defects and risks exist in the fixing manner of the sample and the clamp:
1. there may be thermal stresses introduced during the bonding of the sample to the clamp, with a certain risk of damage to the sample, in particular to the heat-sensitive sample.
2. If the adhesion of the sample is weak, during the course of the experiment: a. the fixed position of the sample is inconsistent with the focal position of the CCD camera, and the sample needs to be repeatedly disassembled and connected. b. The sample can take place the skew and the condition that drops, will need the adjustment of many times division of storehouse, influences work efficiency greatly.
3. In the process of completing the experiment, there may be mechanical stress introduced during the sample disassembly, and there is a risk of damage to the sample of low stress material.
Disclosure of Invention
The utility model provides a clamp and an X-ray imaging system, which are used for solving the technical problems.
According to one aspect of the present utility model, there is provided a clamp comprising a base and at least one clamp assembly located on the base;
the clamp assembly comprises a hollow support column, a carrying lifting bracket and a sample fixing bolt;
the hollow support column is fixedly connected with the base, the hollow support column comprises a vertical guide groove, one end of the object carrying lifting support is positioned in the vertical guide groove, and the object carrying lifting support is movably connected with the vertical guide groove;
the sample fixing bolt is movably connected with the first threaded through hole, and the end face, close to the hollow support column, of the sample fixing bolt is opposite to the side wall, close to one side of the hollow support column, of the sample carrying groove.
Optionally, the clamp assembly further comprises a lifting fixing bolt;
the side wall of the hollow support column is provided with a second threaded through hole communicated with the vertical guide groove, and the lifting fixing bolt is movably connected with the second threaded through hole.
Optionally, a lifting limit groove is formed in the side wall of the object carrying lifting support, and the end portion, close to the object carrying lifting support, of the lifting fixing bolt is located in the lifting limit groove.
Optionally, a graduated scale is arranged on the side wall of the object carrying lifting bracket.
Optionally, the object carrying lifting bracket is an aluminum alloy bracket.
Optionally, the clamp assembly further comprises a spring, wherein the spring is located between the bottom of the vertical guide groove and the carrying lifting bracket.
Optionally, the cross section of the object carrying lifting bracket is polygonal.
Optionally, the clamp comprises at least two of the clamp assemblies.
Optionally, the base is a micro-magnetic base.
According to another aspect of the present utility model there is provided an X-ray imaging system comprising an X-ray imaging device and any of the clamps of the first aspect.
The clamp and the X-ray imaging system provided by the embodiment of the utility model have the following advantages:
1. the introduction of thermal stress is avoided, and thermal damage to the heat-sensitive sample can be prevented.
2. The conditions that the traditional clamp is not firm in adhesion to the sample, the sample needs to be repeatedly disassembled and connected, and the sample can deviate and fall are avoided.
3. After the sample is fixed on the clamp, the height of the sample can be adjusted by moving the object carrying lifting bracket up and down along the vertical guide groove in the X-ray imaging device, so that the height of the sample can be adjusted under the condition that the sample is not disassembled, the position of the sample is consistent with the focal position of a CCD (charge coupled device) camera in the X-ray imaging device, and the working efficiency and the accuracy are greatly improved.
4. In the process of sample disassembly, the damage of mechanical stress change to the low-stress material sample is avoided, and the success rate and accuracy of the analysis result are greatly improved.
It should be understood that the description in this section is not intended to identify key or critical features of the embodiments of the utility model or to delineate the scope of the utility model. Other features of the present utility model will become apparent from the description that follows.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings required for the description of the embodiments will be briefly described below, and it is apparent that the drawings in the following description are only some embodiments of the present utility model, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic view of a related art clamp;
fig. 2 is a schematic structural diagram of a fixture according to an embodiment of the present utility model;
FIG. 3 is a schematic structural view of another clamp according to an embodiment of the present utility model;
fig. 4 is a schematic diagram of a partial structure of an X-ray imaging system according to an embodiment of the present utility model.
Detailed Description
In order that those skilled in the art will better understand the present utility model, a technical solution in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in which it is apparent that the described embodiments are only some embodiments of the present utility model, not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the present utility model without making any inventive effort, shall fall within the scope of the present utility model.
It should be noted that the terms "first," "second," and the like in the description and the claims of the present utility model and the above figures are used for distinguishing between similar objects and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used may be interchanged where appropriate such that the embodiments of the utility model described herein may be implemented in sequences other than those illustrated or otherwise described herein. Furthermore, the terms "comprises," "comprising," and "having," and any variations thereof, are intended to cover a non-exclusive inclusion, such that a process, method, system, article, or apparatus that comprises a list of steps or elements is not necessarily limited to those steps or elements expressly listed but may include other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.
Fig. 2 is a schematic structural diagram of a fixture according to an embodiment of the present utility model, and as shown in fig. 2, the fixture according to an embodiment of the present utility model includes a base 20 and at least one fixture assembly 21 located on the base 20, where the fixture assembly 21 includes a hollow support column 22, a load lifting support 23, and a sample fixing bolt 24. The hollow support column 22 is fixedly connected with the base 20, the hollow support column 22 comprises a vertical guide groove 221, one end of the object carrying lifting support 23 is positioned in the vertical guide groove 221, and the object carrying lifting support 23 is movably connected with the vertical guide groove 221. The carrying lifting support 23 is provided with a carrying groove 231 which is opened along the horizontal direction, a first threaded through hole 232 is formed in the side wall of the carrying groove 231, which is far away from the side of the hollow support column 22, the sample fixing bolt 24 is movably connected with the first threaded through hole 232, and the end face of the sample fixing bolt 24, which is close to the hollow support column 22, is arranged opposite to the side wall of the carrying groove 231, which is close to the side of the hollow support column 22.
The clamp provided by the embodiment of the utility model is used for a sample fixing link when the 3D X-ray imaging device performs nondestructive analysis on a sample.
Wherein, the 3D X-ray imaging device can be a Chua driver desk or a GE machine desk, etc.
The sample is a semiconductor sample, and specifically can be a semiconductor device or a chip, for example, the sample can be a chip packaged by adopting a chip packaging technology, wherein the chip packaging technology is to package a die meeting a specific function together with a plurality of module chips and a bottom base chip through a die-to-die internal interconnection technology to form a system chip.
In the nondestructive analysis of the sample using the 3D X-ray imaging device, the sample was fixed on the jig provided by the embodiment of the present utility model.
The embodiment of the utility model provides a fixture comprising a base 20 and at least one fixture component 21 fixed on the base 20, as shown in fig. 2, taking the base 20 provided with the fixture component 21 as an example for explanation, a hollow support column 22 of the fixture component 21 is fixed on the base 20, a vertical guide groove 221 is arranged in the middle of the hollow support column 22, and the horizontal cross section dimension of the vertical guide groove 221 is matched with the horizontal cross section dimension of a carrying lifting support 23, so that the lower part of the carrying lifting support 23 can be inserted in the vertical guide groove 221, and meanwhile, the carrying lifting support 23 can vertically move or be locked along the vertical guide groove 221, thereby adjusting the height of the carrying lifting support 23.
With continued reference to fig. 2, a part of the carrying lifting support 23 exposed to the vertical guide groove 221 is provided with a carrying groove 231, an opening direction of the carrying groove 231 is a horizontal direction, a first threaded through hole 232 matched with the size of the sample fixing bolt 24 is formed in the side wall of the upper end of the carrying groove 231, one end of the sample fixing bolt 24 penetrates through the first threaded through hole 232 and stretches into the carrying groove 231, and a clamping space is formed between the end face of the side, close to the hollow support column 22, of the sample fixing bolt 24 and the side wall of the bottom of the carrying groove 231. Meanwhile, screw thread matching is formed between the sample fixing bolt 24 and the first screw thread through hole 232, a knob can be arranged at the end part of the sample fixing bolt 24 far away from the base 20, and the sample fixing bolt 24 can be rotated in the first screw thread through hole 232 by rotating the knob, so that the sample fixing bolt 24 can move up and down along the axial direction of the sample fixing bolt 24, and the distance between the bottom end surface of the sample fixing bolt 24 and the bottom side wall of the carrying groove 231 can be adjusted.
When the clamp is used, a sample is placed between the bottom end face of the sample fixing bolt 24 and the bottom side wall of the carrying groove 231, and the sample fixing bolt 24 is driven to move towards the bottom side wall of the carrying groove 231 by rotating the sample fixing bolt 24 until the bottom end face of the sample fixing bolt 24 abuts against and presses the sample, so that the bottom end face of the sample fixing bolt 24 and the bottom side wall of the carrying groove 231 clamp the sample, and the aim of stabilizing the sample without sliding can be achieved within 10 minutes.
Further, the height of the carrier lifting frame 23 can be adjusted by moving the carrier lifting frame 23 up and down along the vertical guide groove 221, thereby adjusting the measurable range of the sample.
It should be noted that, the dimensions of the structures such as the carrying groove 231, the sample fixing bolt 24, the hollow support column 22, and the vertical guide groove 221 in the fixture may be set according to the size of the sample, in practical application, the fixtures with various dimensions may be designed, and when the 3D X-ray imaging system images the sample, the fixture with a suitable dimension may be selected according to the size of the sample, which is not particularly limited in the embodiment of the present utility model.
The clamp provided by the embodiment of the utility model has the following advantages:
1. the introduction of thermal stress is avoided, and thermal damage to the heat-sensitive sample can be prevented.
2. The conditions that the traditional clamp is not firm in adhesion to the sample, the sample needs to be repeatedly disassembled and connected, and the sample can deviate and fall are avoided.
3. After the sample is fixed on the clamp, the height of the sample can be adjusted by moving the object carrying lifting bracket up and down along the vertical guide groove in the X-ray imaging device, so that the height of the sample can be adjusted under the condition that the sample is not disassembled, the position of the sample is consistent with the focal position of a CCD (charge coupled device) camera in the X-ray imaging device, and the working efficiency and the accuracy are greatly improved.
4. In the process of sample disassembly, the damage of mechanical stress change to the low-stress material sample is avoided, and the success rate and accuracy of the analysis result are greatly improved.
With continued reference to fig. 2, optionally, the fixture assembly 21 further includes a lifting fixing bolt 25, and a second threaded through hole 222 communicating with the vertical guide groove 221 is provided on a sidewall of the hollow support column 22, and the lifting fixing bolt 25 is movably connected with the second threaded through hole 222.
Specifically, as shown in fig. 2, a second threaded through hole 222 matching with the size of the lifting fixing bolt 25 is formed in the side wall of the hollow support column 22, the lifting fixing bolt 25 is in threaded connection with the second threaded through hole 222, the lifting fixing bolt 25 rotates in the second threaded through hole 222 by rotating the lifting fixing bolt 25, so that the lifting fixing bolt 25 can horizontally move along the axial direction of the lifting fixing bolt 25, and further the end, close to the carrying lifting support 23, of the lifting fixing bolt 25 is abutted against the side wall of the carrying lifting support 23, so that the height of the carrying lifting support 23 can be locked.
Wherein, by rotating the lifting fixing bolt 25, the carrying lifting support 23 can vertically move along the vertical guide groove 221 when the lifting fixing bolt 25 is loosened, thereby adjusting the height of the sample fixed on the carrying lifting support 23; when the lifting fixing bolt 25 is screwed down, the end part of the lifting fixing bolt 25 extending into the vertical guide groove 221 abuts against the side wall of the carrying lifting support 23, so that the carrying lifting support 23 cannot vertically move along the vertical guide groove 221, and the deviation of the height of a sample can be avoided.
With continued reference to fig. 2, optionally, a hexagonal knob may be disposed at an end of the lifting fixing bolt 25 away from the load lifting support 23, so that the lifting fixing bolt 25 may be fastened by means of a hexagonal wrench, so as to lock the load lifting support 23 with the vertical guide groove 221, and prevent the load lifting support 23 from falling back to cause the sample height to deviate.
With continued reference to fig. 2, optionally, a lifting limiting groove 233 is provided on a side wall of the load lifting support 23, and an end portion of the lifting fixing bolt 25, which is close to the load lifting support 23, is located in the lifting limiting groove 233.
Specifically, as shown in fig. 2, a lifting limit groove 233 is formed in a side wall of the carrying lifting support 23, the width of the lifting limit groove 233 is matched with the diameter of a screw of the lifting fixing bolt 25, the screw of the lifting fixing bolt 25 extends into the vertical guide groove 221 through the second threaded through hole 222, and the end of the screw abuts against the side wall of the carrying lifting support 23 in the lifting limit groove 233.
When the lifting fixing bolt 25 is loosened, the carrying lifting support 23 moves up and down along the vertical guide groove 221 to adjust the height of the sample, at this time, the lifting limiting groove 233 moves up and down along with the carrying lifting support 23, and the lifting limiting groove 233 can be made to be unable to deviate from the setting position of the lifting fixing bolt 25 by making the lifting fixing bolt 25 close to the end of the carrying lifting support 23 in the lifting limiting groove 233, so that the up-and-down moving range of the carrying lifting support 23 can be limited, and further separation of the carrying lifting support 23 from the vertical guide groove 221 can be avoided.
The length of the lifting limiting groove 233 along the vertical direction may be set according to the adjustment range required by the actual sample height, which is not particularly limited in the embodiment of the present utility model.
With continued reference to fig. 2, optionally, a graduated scale (not shown) is provided on the side wall of the load lifting support 23.
Wherein, through setting up the scale on the lateral wall surface of carrying lifting support 23, after the sample is fixed, can control the scale in X-ray imaging device and adjust the height of sample, promptly under the condition of not disassembling the sample, can adjust the height of sample according to the scale to can reduce the number of times of sample adjustment, reduce the debugging time before the experiment (debugging time can reduce from 30 minutes to 10 minutes), promote experimental efficiency and improve X-ray imaging device's utilization ratio greatly.
Optionally, the carrying lifting support 23 is an aluminum alloy support.
Wherein, the object carrying lifting support 23 adopts an aluminum alloy support, has the advantages of firmness and light weight, and does not have adverse effect on the X-ray imaging effect.
With continued reference to fig. 2, the clamp assembly 21 may optionally further include a spring (not shown) positioned between the bottom of the vertical guide slot 221 and the load lifting bracket 23.
Wherein, can put into the spring in vertical guide slot 221 bottom, when lifting fixing bolt 25 loosen, the spring can upwards pop up carrying lifting support 23, only need carry out the action of pushing down to carrying lifting support 23 and adjust carrying lifting support 23's height this moment. By the arrangement, when the height of the sample is adjusted in the X-ray imaging device, the upward lifting action can be reduced, so that the whole clamp can be prevented from being disassembled from the X-ray imaging device.
With continued reference to fig. 2, the cross section of the carrier lifting support 23 is optionally polygonal.
Specifically, as shown in fig. 2, the horizontal cross section of the carrier lifting support 23 is polygonal, and correspondingly, the horizontal cross section of the vertical guide groove 221 is polygonal matched with the carrier lifting support 23, that is, the shape of the horizontal cross section of the vertical guide groove 221 is the same as the shape and the size of the horizontal cross section of the carrier lifting support 23 are matched, so that the carrier lifting support 23 can be prevented from horizontally rotating in the vertical guide groove 221, a sample fixed on the carrier lifting support 23 is ensured to be opposite to the CCD camera, no horizontal offset occurs, and the success rate and accuracy of analysis results are improved.
The cross section of the carrier lifting support 23 may be square as shown in fig. 2, that is, the carrier lifting support 23 is a square column, so that the sample fixed on the carrier lifting support 23 faces the CCD camera, but the utility model is not limited thereto, and in other embodiments, the cross section of the carrier lifting support 23 may be triangular, hexagonal, etc., which is not particularly limited thereto.
Fig. 3 is a schematic structural diagram of another clamp according to an embodiment of the present utility model, and as shown in fig. 3, optionally, the clamp according to an embodiment of the present utility model includes at least two clamp assemblies 21.
For example, as shown in fig. 3, the fixture includes two fixture assemblies 21, and when the sample size is larger, the fixture provided in this embodiment may be used to fix the sample through the two fixture assemblies 21, so as to ensure the stability of fixing the sample and avoid the sample from shifting or falling.
Further, through the graduated scales on the two clamp assemblies 21, the heights of the object carrying lifting brackets 23 in the two clamp assemblies 21 can be guaranteed to be the same, so that the sample can be leveled, and the success rate and the accuracy of analysis results are improved.
With continued reference to fig. 2 and 3, the base 20 is optionally a micro-magnetic base.
The base 20 is a micro-magnetic base, and can be matched with X-ray imaging devices such as a Chua driver desk or a GE machine, and the clamp can be rapidly positioned and placed more stably when being placed in the X-ray imaging devices such as the Chua driver desk or the GE machine through micro-magnetism on the micro-magnetic base.
Based on the same inventive concept, the embodiment of the present utility model further provides an X-ray imaging system, and fig. 4 is a schematic diagram of a partial structure of the X-ray imaging system provided by the embodiment of the present utility model, as shown in fig. 4, where the X-ray imaging system includes an X-ray imaging device 30 and a fixture 12 according to any embodiment of the present utility model, so that the X-ray imaging system provided by the embodiment of the present utility model has the technical effects of the technical solutions in any embodiment, and the same or corresponding structures and terms as those of the embodiment are not repeated herein.
For example, as shown in fig. 4, when the sample 11 is imaged by the X-ray imaging device 30, a jig 12 of an appropriate size and weight may be selected according to the size and weight of the sample 11, the sample 11 may be fixed to the jig 12 by a sample fixing bolt of the jig 12, and then the measurable range of the sample 11 may be adjusted according to a scale on the jig 12.
The X-ray imaging device 30 may be any X-ray imaging device such as a Chua driver's desk or a GE machine, which is not particularly limited in the embodiment of the present utility model.
The sample is a semiconductor sample, and may specifically be a semiconductor device or a chip, for example, the sample may be a chip packaged by using a chip packaging technology.
Illustratively, taking the X-ray imaging device 30 as an example of zeiss 620 model, experimental parameters and conditions may be selected to adjust the voltage, power, and transmittance of the zeiss driver's desk to achieve the best imaging effect on the sample.
For example, voltage: 40KV-160KV.
Power: 3W-25W.
Penetration rate: 30%.
Furthermore, data processing can be performed through Dragonfly software, and clear imaging can be realized for micro holes, micro defects, micro cracks, encapsulation structure offset and the like on tin balls in samples, even local oxidation and other phenomena of devices.
According to the X-ray imaging system provided by the embodiment of the utility model, the clamp provided by the embodiment is adopted, so that the introduction of thermal stress can be avoided, and the damage to a thermosensitive sample can be prevented; the conditions that the traditional clamp is not firm in adhesion to the sample, the sample needs to be disassembled and connected repeatedly, and the sample is likely to deviate and fall are avoided, and the working efficiency is greatly improved; in the process of sample disassembly, the damage of mechanical stress change to the low-stress material sample is avoided, and the success rate and accuracy of the analysis result are greatly improved. In addition, the debugging time of the sample before the experiment can be reduced from 30 minutes to 10 minutes, the overall efficiency is greatly improved, and the utilization rate of an X-ray imaging system is improved.
The above embodiments do not limit the scope of the present utility model. It will be apparent to those skilled in the art that various modifications, combinations, sub-combinations and alternatives are possible, depending on design requirements and other factors. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present utility model should be included in the scope of the present utility model.
Claims (10)
1. A clamp comprising a base and at least one clamp assembly located on the base;
the clamp assembly comprises a hollow support column, a carrying lifting bracket and a sample fixing bolt;
the hollow support column is fixedly connected with the base, the hollow support column comprises a vertical guide groove, one end of the object carrying lifting support is positioned in the vertical guide groove, and the object carrying lifting support is movably connected with the vertical guide groove;
the sample fixing bolt is movably connected with the first threaded through hole, and the end face, close to the hollow support column, of the sample fixing bolt is opposite to the side wall, close to one side of the hollow support column, of the sample carrying groove.
2. The fixture of claim 1, wherein the fixture comprises a plurality of clamping plates,
the clamp assembly further comprises a lifting fixing bolt;
the side wall of the hollow support column is provided with a second threaded through hole communicated with the vertical guide groove, and the lifting fixing bolt is movably connected with the second threaded through hole.
3. A jig according to claim 2, wherein,
the side wall of the object carrying lifting support is provided with a lifting limiting groove, and the end part, close to the object carrying lifting support, of the lifting fixing bolt is located in the lifting limiting groove.
4. The fixture of claim 1, wherein the fixture comprises a plurality of clamping plates,
the side wall of the object carrying lifting bracket is provided with a graduated scale.
5. The fixture of claim 1, wherein the fixture comprises a plurality of clamping plates,
the object carrying lifting support is an aluminum alloy support.
6. The fixture of claim 1, wherein the fixture comprises a plurality of clamping plates,
the clamp assembly further comprises a spring, and the spring is located between the bottom of the vertical guide groove and the carrying lifting support.
7. The fixture of claim 1, wherein the fixture comprises a plurality of clamping plates,
the cross section of the object carrying lifting bracket is polygonal.
8. The fixture of claim 1, wherein the fixture comprises a plurality of clamping plates,
the clamp includes at least two of the clamp assemblies.
9. The fixture of claim 1, wherein the fixture comprises a plurality of clamping plates,
the base is a micro-magnetic base.
10. An X-ray imaging system comprising an X-ray imaging device and the clamp of any one of claims 1-9.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320643895.5U CN219475447U (en) | 2023-03-28 | 2023-03-28 | Clamp and X-ray imaging system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320643895.5U CN219475447U (en) | 2023-03-28 | 2023-03-28 | Clamp and X-ray imaging system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219475447U true CN219475447U (en) | 2023-08-04 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202320643895.5U Active CN219475447U (en) | 2023-03-28 | 2023-03-28 | Clamp and X-ray imaging system |
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| Country | Link |
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| CN (1) | CN219475447U (en) |
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- 2023-03-28 CN CN202320643895.5U patent/CN219475447U/en active Active
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