CN219473680U - Waste gas recovery device for semiconductor production - Google Patents
Waste gas recovery device for semiconductor production Download PDFInfo
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- CN219473680U CN219473680U CN202222717850.6U CN202222717850U CN219473680U CN 219473680 U CN219473680 U CN 219473680U CN 202222717850 U CN202222717850 U CN 202222717850U CN 219473680 U CN219473680 U CN 219473680U
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- waste gas
- bottom cylinder
- exhaust gas
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Abstract
The utility model discloses an exhaust gas recovery device for semiconductor production, which comprises a recovery device bottom cylinder, wherein the recovery device bottom cylinder is arranged on a flat ground, an exhaust gas inlet pipe and an oxygen inlet pipe are arranged on the outer wall of the recovery device bottom cylinder, and one end of the exhaust gas inlet pipe is fixedly connected with an air pump; the connecting ring is clamped at the top of the bottom cylinder of the recovery device, and the inner wall of the connecting ring is attached to the top of the bottom cylinder of the recovery device. This waste gas recovery device for semiconductor production is provided with the burning stick and carries out combustion treatment to waste gas, and organic waste in the waste gas forms vapor and carbon dioxide through burning to upwards through the funnel, through the absorption of silica gel water absorption pearl, the absorption treatment of the active carbon net at upper portion is continued to dry waste gas, this waste gas recovery device is better to waste gas treatment effect, comparatively thoroughly to the treatment of harmful substance in the waste gas, no longer contains a large amount of impurity in the waste gas after the treatment, less to the pollution that the environment caused, is favorable to the going on of waste gas recovery work.
Description
Technical Field
The utility model relates to the technical field of semiconductor production, in particular to an exhaust gas recovery device for semiconductor production.
Background
The statements in this section merely provide background information related to the present disclosure and may not necessarily constitute prior art.
The semiconductor produces a large amount of waste gas easily when producing, causes air pollution, and current waste gas recovery unit is relatively poor to exhaust treatment effect, and is not thorough enough to the treatment of harmful substance in the waste gas, still contains a large amount of impurity in the waste gas after the treatment, and the pollution to the environment is great, in addition, current waste gas recovery unit generally is closed structure, inconvenient dismantlement, when interior component need change, need extravagant a large amount of time dismantle recovery unit, waste time and energy.
Aiming at the problems, innovative design is urgently needed on the basis of the structure of the original waste gas recovery device.
Disclosure of Invention
The utility model aims to provide an exhaust gas recovery device for semiconductor production, which solves the problems that the treatment of the exhaust gas is not thorough and the disassembly is inconvenient in the prior art.
In order to achieve the above purpose, the present utility model provides the following technical solutions: an exhaust gas recovery apparatus for semiconductor production, comprising:
the recycling device bottom cylinder is arranged on a flat ground, an exhaust gas inlet pipe and an oxygen inlet pipe are arranged on the outer wall of the recycling device bottom cylinder, and an air pump is fixedly connected to one end of the exhaust gas inlet pipe;
the connecting ring is clamped at the top of the bottom cylinder of the recovery device, and the inner wall of the connecting ring is attached to the top of the bottom cylinder of the recovery device;
a recovery device middle cylinder which is arranged right above a recovery device bottom cylinder;
and the recovery device top cylinder is erected right above the recovery device middle cylinder.
Preferably, the recovery device bottom cylinder is further provided with:
the bottom of the combustion rod is connected with the inner bottom wall of the bottom cylinder of the recovery device, and the combustion rod is positioned at the middle position of the inner bottom wall of the bottom cylinder of the recovery device;
the left side of the pressure sensor is connected with the bottom cylinder of the recovery device.
Preferably, the connection ring is further provided with:
the sealing ring is fixed on the inner wall of the connecting ring, and the outer surface of the sealing ring is completely attached to the inner surface of the connecting ring.
Preferably, the recovery device middle cylinder is further provided with:
the middle partition plate is fixedly arranged on the inner wall of the middle cylinder of the recovery device;
the rubber clamping seat is arranged at the middle position of the top of the middle partition plate;
the ventilation hopper is vertically arranged at the top of the middle partition plate, and the lower surface of the ventilation hopper is attached to the inner surface of the rubber clamping seat of the middle partition plate.
Preferably, the ventilation hopper is further provided with:
a gauze layer fixedly arranged on the inner wall of the ventilation hopper;
silica gel water absorption beads are arranged at the upper end of the inside of the ventilation hopper in a dispersing mode and are limited in the gauze layer.
Preferably, the recovery device top cylinder is further provided with:
the active carbon nets are equidistantly arranged on the inner wall of the top cylinder of the recovery device, and the active carbon net racks are arranged right above the ventilation hopper;
the welding position of the air outlet pipe is positioned in the middle of the top cylinder of the recovery device.
Compared with the prior art, the utility model provides the waste gas recovery device for semiconductor production, which has the following advantages:
1. the waste gas recovery device has good waste gas treatment effect, thoroughly treats harmful substances in the waste gas, does not contain a large amount of impurities, has less pollution to the environment and is beneficial to the waste gas recovery work;
2. be provided with the go-between for the block of recovery unit end section of thick bamboo, recovery unit middle tube and recovery unit top section of thick bamboo is connected, and the sealing washer that the go-between inner wall set up makes recovery unit block inseparable, and this waste gas recovery unit convenient to detach when interior component need change, need not extravagant a large amount of time dismantle recovery unit, labour saving and time saving has reduced recovery unit's design defect, is favorable to recovery unit's use, has brought more facility for waste gas recovery.
Drawings
FIG. 1 is a schematic diagram of the structure of the present utility model in a front cross-section;
FIG. 2 is a schematic view of the structural connection of the bottom cylinder and the connecting ring of the recovery device of the present utility model;
FIG. 3 is an enlarged schematic view of the structure of FIG. 1A according to the present utility model;
FIG. 4 is a schematic cross-sectional view of a connecting ring according to the present utility model.
In the figure: 1. a recovery device bottom cylinder; 2. a combustion rod; 3. an exhaust gas intake pipe; 4. an air pump; 5. an oxygen inlet pipe; 6. a pressure sensor; 7. a connecting ring; 8. a seal ring; 9. a recovery device middle cylinder; 10. a middle partition plate; 11. a rubber clamping seat; 12. a vent bucket; 13. a gauze layer; 14. silica gel water absorption beads; 15. a recovery device top cylinder; 16. an activated carbon net; 17. and an air outlet pipe.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
Referring to fig. 1-4, the present utility model provides a technical solution: an exhaust gas recovery apparatus for semiconductor production, comprising:
the recycling device bottom cylinder 1 is arranged on a flat ground, the outer wall of the recycling device bottom cylinder 1 is provided with an exhaust gas inlet pipe 3 and an oxygen inlet pipe 5, and one end of the exhaust gas inlet pipe 3 is fixedly connected with an air pump 4;
the connecting ring 7 is clamped at the top of the bottom cylinder 1 of the recovery device, and the inner wall of the connecting ring 7 is attached to the top of the bottom cylinder 1 of the recovery device;
a recovery device middle cylinder 9 which is arranged right above the recovery device bottom cylinder 1;
and a recovery device top cylinder 15 installed directly above the recovery device middle cylinder 9.
The recovery device bottom cylinder 1 is also provided with, from a front cross-sectional view:
the bottom of the combustion rod 2 is connected with the inner bottom wall of the bottom cylinder 1 of the recovery device, and the combustion rod 2 is positioned at the center position of the inner bottom wall of the bottom cylinder 1 of the recovery device;
the left side of the pressure sensor 6 is communicated with the bottom cylinder 1 of the recovery device, and the pressure sensor 6 can monitor the air pressure in the bottom cylinder 1 of the recovery device to enhance the combustion safety in the bottom cylinder;
the connection ring 7 is further provided with:
the sealing ring 8 is fixed on the inner wall of the connecting ring 7, the outer surface of the sealing ring 8 is completely attached to the inner surface of the connecting ring 7, and the connecting ring 7 is tightly connected with the bottom cylinder 1 of the recovery device, the middle cylinder 9 of the recovery device and the top cylinder 15 of the recovery device through the arranged sealing ring 8, so that the gap is reduced;
the recovery device cartridge 9 is also provided with, in front cross-section:
a middle partition board 10 fixedly arranged on the inner wall of the middle cylinder 9 of the recovery device, wherein the middle partition board 10 can divide the internal space of the recovery device into two parts;
a rubber clamping seat 11 arranged at the middle position of the top of the middle partition plate 10;
the ventilation hopper 12 is vertically arranged at the top of the middle partition board 10, and the lower surface of the ventilation hopper is attached to the inner surface of the rubber clamping seat 11 of the middle partition board 10;
the breather bucket 12 is also provided with:
a gauze layer 13 fixedly provided on the inner wall of the air funnel 12;
the silica gel water absorption beads 14 are arranged at the upper end of the inside of the ventilation hopper 12 in a dispersing manner and are limited in the gauze layer 13, the gauze layer 13 plays a limiting role on the silica gel water absorption beads 14, and the silica gel water absorption beads 14 can absorb water vapor in waste gas, so that gaps of the activated carbon net 16 cannot be wasted for absorbing the water vapor;
the recovery device top cylinder 15 is also provided with:
the active carbon net 16 is equidistantly arranged on the inner wall of the top cylinder 15 of the recovery device, the active carbon net 16 is erected right above the ventilation hopper 12, and inorganic matters in the waste gas are adsorbed by utilizing the self structural characteristics of the active carbon net 16;
the air outlet pipe 17 is welded at the middle position of the top cylinder 15 of the recovery device.
Working principle: when the waste gas recovery device for semiconductor production is used, one end of a waste gas inlet pipe 3 is connected with semiconductor production equipment according to fig. 1, 2, 3 and 4, waste gas is introduced into a bottom cylinder 1 of the recovery device by an air pump 4, oxygen is introduced into the bottom cylinder 1 of the recovery device by an oxygen inlet pipe 5, a combustion rod 2 is ignited to burn the waste gas in the bottom cylinder 1 of the recovery device, organic matters in the waste gas are combusted to form carbon dioxide and water vapor, the carbon dioxide and the water vapor move upwards along a ventilation hopper 12, the water vapor is adsorbed by silica gel water adsorption beads 14 in a gauze layer 13, the dried waste gas continues upwards, inorganic matters in the waste gas are adsorbed by an activated carbon net 16, and finally the waste gas subjected to incineration and adsorption treatment is discharged from an air outlet pipe 17 at the top of a top cylinder 15 of the recovery device;
according to fig. 1, the waste gas recovery device is divided into a recovery device bottom cylinder 1, a recovery device middle cylinder 9 and a recovery device top cylinder 15, wherein the three parts are connected in a clamping way through a connecting ring 7, and a sealing ring 8 is arranged on the inner wall of the connecting ring 7, so that the clamping between the parts is tight, and the waste gas recovery device is convenient to disassemble and assemble due to the clamping design.
What is not described in detail in this specification is prior art known to those skilled in the art.
Although embodiments of the present utility model have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the utility model, the scope of which is defined in the appended claims and their equivalents.
Claims (6)
1. An exhaust gas recovery apparatus for semiconductor production, comprising:
the recycling device bottom cylinder is arranged on a flat ground, an exhaust gas inlet pipe and an oxygen inlet pipe are arranged on the outer wall of the recycling device bottom cylinder, and an air pump is fixedly connected to one end of the exhaust gas inlet pipe;
the connecting ring is clamped at the top of the bottom cylinder of the recovery device, and the inner wall of the connecting ring is attached to the top of the bottom cylinder of the recovery device;
a recovery device middle cylinder which is arranged right above a recovery device bottom cylinder;
and the recovery device top cylinder is erected right above the recovery device middle cylinder.
2. The exhaust gas recovery apparatus for semiconductor production according to claim 1, wherein the recovery apparatus bottom cylinder is further provided with, as viewed in front cross-section:
the bottom of the combustion rod is connected with the inner bottom wall of the bottom cylinder of the recovery device, and the combustion rod is positioned at the middle position of the inner bottom wall of the bottom cylinder of the recovery device;
the left side of the pressure sensor is connected with the bottom cylinder of the recovery device.
3. The exhaust gas recovery apparatus for semiconductor production according to claim 1, wherein the connection ring is further provided with:
the sealing ring is fixed on the inner wall of the connecting ring, and the outer surface of the sealing ring is completely attached to the inner surface of the connecting ring.
4. The exhaust gas recovery apparatus for semiconductor production according to claim 1, wherein the recovery apparatus middle cylinder is further provided with, in a front cross-sectional view:
the middle partition plate is fixedly arranged on the inner wall of the middle cylinder of the recovery device;
the rubber clamping seat is arranged at the middle position of the top of the middle partition plate;
the ventilation hopper is vertically arranged at the top of the middle partition plate, and the lower surface of the ventilation hopper is attached to the inner surface of the rubber clamping seat of the middle partition plate.
5. The exhaust gas recovery apparatus for semiconductor production according to claim 4, wherein the breather bucket is further provided with:
a gauze layer fixedly arranged on the inner wall of the ventilation hopper;
silica gel water absorption beads are arranged at the upper end of the inside of the ventilation hopper in a dispersing mode and are limited in the gauze layer.
6. The exhaust gas recovery apparatus for semiconductor production according to claim 1, wherein the recovery apparatus top cylinder is further provided with, as viewed in front cross-section:
the active carbon nets are equidistantly arranged on the inner wall of the top cylinder of the recovery device, and the active carbon net racks are arranged right above the ventilation hopper;
the welding position of the air outlet pipe is positioned in the middle of the top cylinder of the recovery device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222717850.6U CN219473680U (en) | 2022-10-17 | 2022-10-17 | Waste gas recovery device for semiconductor production |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222717850.6U CN219473680U (en) | 2022-10-17 | 2022-10-17 | Waste gas recovery device for semiconductor production |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219473680U true CN219473680U (en) | 2023-08-04 |
Family
ID=87459022
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202222717850.6U Active CN219473680U (en) | 2022-10-17 | 2022-10-17 | Waste gas recovery device for semiconductor production |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219473680U (en) |
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2022
- 2022-10-17 CN CN202222717850.6U patent/CN219473680U/en active Active
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