CN219468315U

CN219468315U - Silicon carbide tray and cleaning device

Info

Publication number: CN219468315U
Application number: CN202320080906.3U
Authority: CN
Inventors: 严政先; 孙希凯; 石明; 董建斌; 东士博; 谭永麟; 孙晨光; 王彦君
Original assignee: Tianjin Zhonghuan Advanced Material Technology Co Ltd; Zhonghuan Advanced Semiconductor Materials Co Ltd
Current assignee: Zhonghuan Leading Semiconductor Technology Co ltd; Tianjin Zhonghuan Advanced Material Technology Co Ltd
Priority date: 2023-01-12
Filing date: 2023-01-12
Publication date: 2023-08-04
Anticipated expiration: 2033-01-12

Abstract

The utility model provides a silicon carbide tray, which is an integrated structure and comprises a bottom plate, a first ear plate and a second ear plate, wherein the first ear plate is vertically arranged at one end of the bottom plate, the second ear plate is vertically arranged at the other end of the bottom plate to form a U-shaped structure, a first side wall a and a first side wall b are respectively arranged at two sides of the bottom plate, a second side wall a and a second side wall b are respectively arranged at two sides of the first ear plate, a third side wall a and a third side wall b are respectively arranged at two sides of the second ear plate, the first side wall a, the second side wall a and the third side wall a are sequentially connected end to form a first side rail, and the second side wall b, the first side wall b and the third side wall b are sequentially connected end to form a second side rail, so that the whole silicon carbide tray forms a groove body. The utility model ensures that the tray has the capability of stably bearing and transporting silicon dioxide through cleaning.

Description

Silicon carbide tray and cleaning device

Technical Field

The utility model belongs to the field of silicon carbide cleaning, and particularly relates to a silicon carbide tray.

Background

When the silicon dioxide is processed, the silicon dioxide can be accumulated on the silicon carbide tray at the same time in the processing, so that a silicon carbide tray cleaning device is needed, and the silicon carbide tray can be cleaned of silicon dioxide powder accumulated on the surface of the silicon carbide tray through corrosive chemicals, so that a certain potential safety hazard exists when the silicon dioxide is cleaned manually.

Disclosure of Invention

In view of the above, the present utility model is directed to a silicon carbide tray and a cleaning device, which can recycle the tray by cleaning to meet the requirement of the process capability.

In order to achieve the above purpose, the technical scheme of the utility model is realized as follows:

the utility model provides a carborundum tray, is integrated into one piece structure, includes the bottom plate, an otic placode and No. two otic placodes, an otic placode installs perpendicularly to the one end of bottom plate, no. two otic placodes install perpendicularly to the other end of bottom plate and form U style of calligraphy structure, the both sides of bottom plate are equipped with No. one lateral wall a and No. one lateral wall b respectively, no. one both sides of otic placode are equipped with No. two lateral walls a and No. two lateral walls b respectively, no. two both sides of otic placode are equipped with No. three lateral walls a and No. three lateral walls b respectively, no. two lateral walls a, no. one lateral wall a and No. three lateral walls a end to end in proper order form a side rail, no. two lateral walls b, no. one lateral wall b and No. three lateral walls b end to end in proper order form No. two lateral rails, make carborundum tray wholly form the cell body.

Further, the junction of otic placode and bottom plate is equipped with the set-square, no. two otic placode and bottom plate's junction also are equipped with the set-square, the set-square is used for reinforcing tray wholeness.

Further, the surface of bottom plate is equipped with a plurality of parallel arrangement's strengthening rib, the strengthening rib is connected No. one lateral wall a and No. one lateral wall b.

Further, the number of the reinforcing ribs is 2, and the reinforcing ribs are respectively arranged at 2/4 and 3/4 of the bottom plate.

Further, the structures of the first ear plate and the second ear plate are the same, and the surfaces of the first ear plate and the second ear plate are provided with the hollow-out shaped like a Chinese character 'tian'.

Further, a plurality of strip holes which are uniformly distributed are formed in the surface of the bottom plate.

Furthermore, the first side wall and the second side wall have the same structure, and the upper surface of the first side wall gradually rises from two sides to the middle to form a middle pointed structure; and a plurality of evenly distributed round holes are formed in the first side wall a and the first side wall b.

The cleaning device is used for cleaning a silicon carbide tray and comprises a moving platform, a moving mechanism, a corrosion groove, a rinsing groove, a circulating mechanism and a mechanical arm, wherein the corrosion groove and the rinsing groove are respectively arranged on one side of the moving platform, the circulating mechanism, a first liquid inlet pipe and a second liquid inlet pipe are arranged in the corrosion groove, and a third liquid inlet pipe is arranged in the rinsing groove; the movable platform is provided with a moving mechanism, the moving plate of the moving mechanism is provided with a mechanical arm, the mechanical arm is used for cleaning the tray in the corrosion tank and the rinsing tank respectively, and the moving mechanism, the circulating mechanism and the mechanical arm are all connected to the controller.

Furthermore, the first liquid inlet pipe, the second liquid inlet pipe and the third liquid inlet pipe are respectively provided with a flowmeter, each flowmeter is connected to the controller, and the first liquid inlet pipe is used for inputting hydrofluoric acid and the second liquid inlet pipe is used for outputting water; the third liquid inlet pipe is also used for inputting water, and the water in the rinsing tank is in a continuous flowing state.

Further, the moving mechanism comprises a moving slide rail, a moving screw rod, a moving plate and a moving motor, wherein the moving slide rail is arranged on the moving platform, one end of the moving screw rod is connected to the output end of the moving motor, and the moving plate is connected with the moving screw rod through a nut seat and is in sliding connection with the moving slide rail so as to drive the sliding plate;

the circulating mechanism comprises a circulating pipe and a circulating pump, one end of the circulating pipe is communicated to the bottom end of the corrosion groove, the other end of the circulating pipe is arranged on the upper portion of the corrosion groove, and the circulating pump is arranged on the circulating pipe and is used for circulating and treating liquid in the corrosion groove.

Compared with the prior art, the silicon carbide tray and the cleaning device have the following advantages:

(1) According to the silicon carbide tray and the cleaning device, the tray is cleaned through automatic operation, so that the efficiency is high, and the damage to people is avoided.

(2) According to the silicon carbide tray and the cleaning device, the tray is cleaned twice through overlooking the corrosion groove and the rinsing groove, so that the purpose of use is achieved.

Drawings

The accompanying drawings, which are included to provide a further understanding of the utility model and are incorporated in and constitute a part of this specification, illustrate embodiments of the utility model and together with the description serve to explain the utility model. In the drawings:

FIG. 1 is a schematic view of a silicon carbide tray according to an embodiment of the present utility model;

fig. 2 is a schematic view of a cleaning device according to an embodiment of the utility model.

Reference numerals illustrate:

1. a bottom plate; 11. a first side wall a; 12. a first side wall b; 13. reinforcing ribs; 2. a first ear plate; 21. a second side wall a; 22. a second side wall b; 3. a second ear plate; 31. a third side wall a; 32. a third side wall b; 4. a triangle; 5. a mobile platform; 6. a moving mechanism; 61. moving the slide rail; 62. moving the lead screw; 63. a moving plate; 64. a moving motor; 7. a corrosion groove; 71. a first liquid inlet pipe; 72. a second liquid inlet pipe; 8. a rinse tank; 81. a third liquid inlet pipe; 9. a circulation mechanism; 91. a circulation pipe; 92. a circulation pump; 10. and (5) a mechanical arm.

Detailed Description

It should be noted that, without conflict, the embodiments of the present utility model and features of the embodiments may be combined with each other.

In the description of the present utility model, it should be understood that the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are merely for convenience in describing the present utility model and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present utility model. Furthermore, the terms "first," "second," and the like, are used for descriptive purposes only and are not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first", "a second", etc. may explicitly or implicitly include one or more such feature. In the description of the present utility model, unless otherwise indicated, the meaning of "a plurality" is two or more.

In the description of the present utility model, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present utility model can be understood by those of ordinary skill in the art in a specific case.

The utility model will be described in detail below with reference to the drawings in connection with embodiments.

The utility model provides a carborundum tray, as shown in fig. 1 and 2, includes bottom plate 1, no. one otic placode 2 and No. two otic placodes 3, no. one otic placode 2 installs perpendicularly to the one end of bottom plate 1, no. two otic placodes 3 install perpendicularly to the other end of bottom plate 1 and form U style of calligraphy structure, the both sides of bottom plate 1 are equipped with No. one lateral wall a11 and No. one lateral wall b12 respectively, no. one both sides of otic placode 2 are equipped with No. two lateral walls a21 and No. two lateral walls b22 respectively, no. two lateral walls 3 are equipped with No. three lateral walls a31 and No. three lateral walls b32 respectively, no. two lateral walls a21, no. one lateral wall a11 and No. three lateral walls a31 meet in proper order end to end and form No. one lateral wall, no. two lateral walls b22, no. one lateral wall b12 and No. three lateral walls b32 meet in proper order end to end and form No. two lateral walls, make carborundum tray wholly form the cell body.

Preferably, the joint of the first lug plate 2 and the bottom plate 1 is provided with a triangle 4, the joint of the second lug plate 3 and the bottom plate 1 is also provided with a triangle 4, and the triangle 4 is used for enhancing the integrity of the tray.

Preferably, the surface of the bottom plate 1 is provided with a plurality of parallel reinforcing ribs 13, and the reinforcing ribs 13 are connected with the first side wall a11 and the first side wall b12.

Preferably, the number of the reinforcing ribs 13 is 2, and the reinforcing ribs are respectively arranged at 2/4 and 3/4 of the bottom plate 1.

Preferably, the structures of the first ear plate 2 and the second ear plate 3 are the same, and the surfaces of the first ear plate 2 and the second ear plate 3 are provided with the hollow-out shaped like a Chinese character 'tian'.

Preferably, a plurality of elongated holes are uniformly distributed on the surface of the bottom plate 1.

Preferably, the first side wall and the second side wall have the same structure, and the upper surface of the first side wall gradually rises from two sides to the middle to form a middle pointed structure; a plurality of evenly distributed round holes are formed in the first side wall a11 and the first side wall b12.

The cleaning device is used for cleaning a silicon carbide tray and comprises a moving platform 5, a moving mechanism 6, a corrosion groove 7, a rinsing groove 8, a circulating mechanism 9 and a mechanical arm 10, wherein one side of the moving platform 5 is respectively provided with the corrosion groove 7 and the rinsing groove 8, the corrosion groove 7 is provided with the circulating mechanism 9, a first liquid inlet pipe 71 and a second liquid inlet pipe 72, and the rinsing groove 8 is provided with a third liquid inlet pipe 81; the moving platform 5 is provided with a moving mechanism 6, a mechanical arm 10 is arranged on a moving plate 63 of the moving mechanism 6, the mechanical arm 10 is used for cleaning the tray in the corrosion tank 7 and the rinsing tank 8 respectively, and the moving mechanism 6, the circulating mechanism 9 and the mechanical arm 10 are all connected to a controller.

Preferably, the first liquid inlet pipe 71, the second liquid inlet pipe 72 and the third liquid inlet pipe 81 are respectively provided with a flowmeter, each flowmeter is connected to the controller, and the first liquid inlet pipe 71 is used for inputting hydrofluoric acid and the second liquid inlet pipe 72 is used for outputting water; the third inlet pipe 81 is also used for water input, and the water in the rinse tank 8 is in a continuous flow.

Preferably, the moving mechanism 6 includes a moving slide rail 61, a moving screw 62, a moving plate 63, and a moving motor 64, the moving slide rail 61 is disposed on the moving platform 5, one end of the moving screw 62 is connected to the output end of the moving motor 64, and the moving plate 63 is connected to the moving screw 62 through a nut seat and is slidably connected to the moving slide rail 61, so as to realize driving of the sliding plate;

a heating and drying device is also arranged on the side of the movable platform 5 or the rinsing tank 8 and is used for rapidly drying the tray taken out of the rinsing tank 8;

the circulation mechanism 9 comprises a circulation pipe 91 and a circulation pump 92, one end of the circulation pipe 91 is communicated to the bottom end of the corrosion tank 7, the other end of the circulation pipe is arranged on the upper portion of the corrosion tank 7, the circulation pump 92 is arranged on the circulation pipe 91 and used for circularly treating liquid in the corrosion tank 7, and liquid in the corrosion tank 7 can be more quickly mixed by arranging the circulation mechanism 9, so that precipitation is avoided.

The moving mechanism 6 is used for moving the mechanical arm 10, the mechanical arm 10 grabs the tray and firstly enters the corrosion tank 7 for cleaning, reacts with the solution in the corrosion tank 7, and then is taken out and put into the rinsing tank 8 for cleaning, so that preparation is made for carrying silicon dioxide subsequently.

The foregoing description of the preferred embodiments of the utility model is not intended to be limiting, but rather is intended to cover all modifications, equivalents, alternatives, and improvements that fall within the spirit and scope of the utility model.

Claims

1. A silicon carbide tray, characterized in that: the utility model provides an integrated into one piece structure, includes the bottom plate, an otic placode and No. two otic placodes, an otic placode installs perpendicularly to the one end of bottom plate, no. two otic placodes install perpendicularly to the other end of bottom plate and form U style of calligraphy structure, the both sides of bottom plate are equipped with No. one lateral wall a and No. one lateral wall b respectively, no. two both sides of an otic placode are equipped with No. two lateral walls a and No. two lateral walls b respectively, no. two both sides of No. two otic placodes are equipped with No. three lateral walls a and No. three lateral walls b respectively, no. two lateral walls a, no. one lateral wall a and No. three lateral walls a meet in proper order end to end and form No. two lateral walls, no. two lateral walls b, no. one lateral wall b and No. three lateral walls b meet in proper order end to end and form No. two lateral walls, make the silicon carbide tray wholly form the cell body.

2. A silicon carbide tray according to claim 1, wherein: the junction of otic placode and bottom plate is equipped with the set square, no. two otic placode and bottom plate's junction also are equipped with the set square, the set square is used for reinforcing tray wholeness.

3. A silicon carbide tray according to claim 1, wherein: the surface of bottom plate is equipped with a plurality of parallel arrangement's strengthening rib, the strengthening rib is connected No. one lateral wall a and No. one lateral wall b.

4. A silicon carbide tray according to claim 3, wherein: the number of the reinforcing ribs is 2, and the reinforcing ribs are respectively arranged at 2/4 and 3/4 of the bottom plate.

5. A silicon carbide tray according to claim 1, wherein: the structure of the first ear plate is the same as that of the second ear plate, and the surfaces of the first ear plate and the second ear plate are provided with the hollow-out shaped like a Chinese character 'tian'.

6. A silicon carbide tray according to claim 1, wherein: the surface of the bottom plate is provided with a plurality of strip holes which are uniformly distributed.

7. A silicon carbide tray according to claim 1, wherein: the first side wall and the second side wall have the same structure, and the upper surface of the first side wall gradually rises from two sides to the middle to form a middle pointed structure; and a plurality of evenly distributed round holes are formed in the first side wall a and the first side wall b.

8. A cleaning device for cleaning a silicon carbide tray according to any one of claims 1 to 7, characterized in that: the device comprises a moving platform, a moving mechanism, a corrosion groove, a rinsing groove, a circulating mechanism and a mechanical arm, wherein one side of the moving platform is provided with the corrosion groove and the rinsing groove respectively, the corrosion groove is provided with the circulating mechanism, a first liquid inlet pipe and a second liquid inlet pipe, and the rinsing groove is provided with a third liquid inlet pipe; the movable platform is provided with a moving mechanism, the moving plate of the moving mechanism is provided with a mechanical arm, the mechanical arm is used for cleaning the tray in the corrosion tank and the rinsing tank respectively, and the moving mechanism, the circulating mechanism and the mechanical arm are all connected to the controller.

9. The cleaning apparatus of claim 8, wherein: the first liquid inlet pipe, the second liquid inlet pipe and the third liquid inlet pipe are respectively provided with a flowmeter, each flowmeter is connected to the controller, and the first liquid inlet pipe is used for inputting hydrofluoric acid and the second liquid inlet pipe is used for outputting water; the third liquid inlet pipe is also used for inputting water, and the water in the rinsing tank is in a continuous flowing state.

10. The cleaning apparatus of claim 8, wherein: the moving mechanism comprises a moving slide rail, a moving screw rod, a moving plate and a moving motor, wherein the moving slide rail is arranged on the moving platform, one end of the moving screw rod is connected to the output end of the moving motor, and the moving plate is connected with the moving screw rod through a nut seat and is in sliding connection with the moving slide rail to drive the sliding plate;