CN219456364U

CN219456364U - Quartz wafer frequency automatic testing machine after film coating

Info

Publication number: CN219456364U
Application number: CN202223435290.1U
Authority: CN
Inventors: 李正善; 项建辉; 宿华伟; 王雨豪; 陈仲方; 支方东; 赵麒麟; 宋卫华; 沈亮
Original assignee: TXC (NINGBO) CORP
Current assignee: TXC (NINGBO) CORP
Priority date: 2022-12-22
Filing date: 2022-12-22
Publication date: 2023-08-01
Anticipated expiration: 2032-12-22

Abstract

The utility model relates to an automatic quartz wafer frequency testing machine after film coating, which comprises a workbench, wherein a positioning platform is arranged at the middle part of the upper end of the workbench, a barrier strip is arranged at the front side and the right side of the upper end of the positioning platform, a support is arranged at the left side of the upper end of the workbench and at the rear Fang Junan of the positioning platform, a positioning cylinder is arranged at the upper end of the support, a piston rod of the positioning cylinder is connected with a push plate, positioning columns are respectively arranged at the two ends of the push plate, a longitudinal sliding table and a longitudinal guide rail are respectively arranged at the left side and the right side of the upper end of the workbench, a sliding seat is arranged at the upper end of the longitudinal sliding table and the upper end of the longitudinal guide rail, a transverse sliding table is arranged at the upper end of the sliding seat, a base is arranged at the upper end of the transverse sliding table, a CCD camera and an upper and lower driving mechanism are arranged at the front end of the upper and lower driving mechanism. The utility model is provided with the CCD camera, records the quartz wafer in real time, and greatly improves the measurement accuracy of the product.

Description

Quartz wafer frequency automatic testing machine after film coating

Technical Field

The utility model relates to the technical field of quartz chip frequency measurement equipment, in particular to a coated quartz wafer frequency automatic tester.

Background

Patent (bulletin number: CN 110813773A) discloses an automatic frequency measuring device for a coated quartz chip, which comprises a Y-direction sliding table, an X-direction sliding table and a X, Y-direction manual sliding table; the Y-direction sliding table is used for moving and supplying the coated product in the Y direction; the X-direction sliding table is positioned above the Y-direction sliding table, an upper transmission mechanism and a lower transmission mechanism are arranged on the X-direction sliding table, and a correction measuring mechanism and a suction nozzle mechanism are arranged at the lower part of the upper transmission mechanism and the lower transmission mechanism; x, Y-direction manual sliding table is arranged on one side of the Y-direction sliding table. The jig is fixed on the Y-direction sliding table, a supporting positioning structure is not arranged, the jig is controlled to slide back and forth by the Y-direction sliding table, an upper transmission mechanism and a lower transmission mechanism are arranged on the X-direction sliding table, a correction measuring mechanism and a suction nozzle mechanism are arranged on the lower portion of the upper transmission mechanism and the lower transmission mechanism, the X-direction sliding table is controlled to correct the left and right sliding of the measuring mechanism and the suction nozzle mechanism, the whole equipment is not provided with a photographing recording device, and the measuring precision is general.

Disclosure of Invention

The utility model aims to solve the technical problem of providing an automatic quartz wafer frequency tester after film coating, which is provided with a CCD camera and records quartz wafers in real time, thereby greatly improving the measurement accuracy of products; the two positioning cylinders respectively compress the carrier plates in the X direction and the Y direction, the carrier plates are positioned by matching with the barrier strips, and the structure can realize the installation and positioning of the carrier plates with multiple specifications.

The technical scheme adopted for solving the technical problems is as follows: the utility model provides a quartz wafer frequency automatic testing machine after coating film, which comprises a workbench, workstation upper end mid-mounting have a location platform, a blend stop is all installed to the front side and the right side of this location platform upper end, workstation upper end be located the left side of location platform and back Fang Junan has a support, the support upper end install the location cylinder, the piston rod of this location cylinder is connected with the push pedal of arranging towards location platform direction, the both ends of push pedal respectively install a reference column, workstation upper end be located the left and right sides of location platform and install longitudinal slipway and longitudinal rail respectively, the upper end of longitudinal slipway and the upper end of longitudinal rail install the slide of fore-and-aft sliding, the horizontal slip way is installed to this slide upper end, horizontal upper end install the base of side-and-side sliding, this base front end install CCD camera and upper and lower actuating mechanism, upper and lower actuating mechanism front end install absorption mechanism and testing mechanism, workstation upper end be located between location platform and the longitudinal rail and install a testing seat, the workstation upper end is located the place the test box side by side in place in the place of two places in front of this workstation.

As a supplement to the technical scheme of the utility model, the upper end of the workbench is provided with a frame, and the upper end of the frame is provided with a display screen and an alarm lamp.

As a supplement to the technical scheme of the utility model, the lower part of the front end of the workbench is provided with a drawer, a keyboard and a mouse are arranged in the drawer, and the keyboard and the mouse are connected with a display screen.

As a supplement to the technical scheme of the utility model, the lower end of the CCD camera is provided with an annular illuminating lamp.

As a supplement to the technical scheme of the utility model, the upper and lower driving mechanism comprises a driving motor and a vertical plate, the front end of the base is vertically provided with the vertical plate, the front end of the vertical plate is provided with two transmission blocks capable of sliding up and down, the two transmission blocks are symmetrically arranged, opposite ends of the two transmission blocks are transversely provided with a straight notch, the upper end of the base is provided with the driving motor, an output shaft of the driving motor penetrates through the vertical plate and is provided with a turntable, the front end of the turntable is eccentrically provided with a transmission bearing, the transmission bearing is positioned in the two straight notches, the lower part of one transmission block is provided with a suction mechanism, the lower part of the other transmission block is provided with a testing mechanism, the upper end of the vertical plate is provided with a top plate, and both sides of the top plate are provided with a reset mechanism which is connected with the transmission blocks on the same side.

As a supplement to the technical scheme of the utility model, the reset mechanism is a spring.

As a supplement to the technical scheme of the utility model, a connecting frame connected with a spring is arranged on the side edge of the transmission block, and the connecting frame is in an inverted L shape.

The beneficial effects are that: the utility model relates to an automatic testing machine for the frequency of a quartz wafer after film coating, which can finish the measurement of the frequency of a product and realize automation and mass production; in addition, the device is provided with a CCD camera, and quartz wafers are recorded in real time, so that the measurement accuracy of products is greatly improved; the two positioning cylinders respectively compress the carrier plates in the X direction and the Y direction, the carrier plates are positioned by matching with the barrier strips, and the structure can realize the installation and positioning of the carrier plates with multiple specifications.

Drawings

FIG. 1 is a schematic diagram of the structure of the present utility model;

FIG. 2 is a schematic view of the upper end of the table according to the present utility model;

FIG. 3 is a schematic view of a positioning platform according to the present utility model;

fig. 4 is a schematic structural view of the up-down driving mechanism according to the present utility model.

The diagram is: 1. the device comprises a workbench, 2, a positioning platform, 3, a longitudinal sliding table, 4, a longitudinal guide rail, 5, a sliding seat, 6, a transverse sliding table, 7, a frame, 8, a display screen, 9, an alarm lamp, 10, a drawer, 11, a keyboard, 12, a mouse, 13, a base, 14, a CCD camera, 15, an upper and lower driving mechanism, 16, a suction mechanism, 17, a testing mechanism, 18, an illuminating lamp, 19, a testing seat, 20, a placing box, 21, a carrying disc, 22, a support, 23, a barrier strip, 24, a positioning column, 25, a push plate, 26, a positioning cylinder, 27, a driving motor, 28, a vertical plate, 29, a driving block, 30, a straight notch, 31, a driving bearing, 32, a top plate, 33, a connecting frame, 34 and a turntable.

Detailed Description

The utility model will be further illustrated with reference to specific examples. It is to be understood that these examples are illustrative of the present utility model and are not intended to limit the scope of the present utility model. Further, it is understood that various changes and modifications may be made by those skilled in the art after reading the teachings of the present utility model, and such equivalents are intended to fall within the scope of the claims appended hereto.

The embodiment of the utility model relates to an automatic quartz wafer frequency testing machine after film plating, which is shown in figures 1-4 and comprises a workbench 1, wherein a positioning platform 2 is arranged in the middle of the upper end of the workbench 1, a barrier strip 23 is arranged on the front side and the right side of the upper end of the positioning platform 2, a support 22 is arranged on the left side and the rear Fang Junan of the upper end of the workbench 1 positioned on the positioning platform 2, a positioning cylinder 26 is arranged on the upper end of the support 22, a piston rod of the positioning cylinder 26 is connected with a push plate 25 arranged towards the positioning platform 2, positioning columns 24 are respectively arranged at two ends of the push plate 25, a longitudinal sliding table 3 and a longitudinal guide rail 4 are respectively arranged on the left side and the right side of the upper end of the workbench 1 positioned on the positioning platform 2, a sliding seat 5 sliding back and forth is arranged on the upper end of the longitudinal sliding table 3 and the upper end of the longitudinal guide rail 4, the upper end of the sliding seat 5 is provided with a transverse sliding table 6, the upper end of the transverse sliding table 6 is provided with a base 13 which slides left and right, the front end of the base 13 is provided with a CCD camera 14 and an upper and lower driving mechanism 15, the lower end of the CCD camera 14 is provided with an annular illuminating lamp 18, the illuminating lamp 18 is used for providing a bright environment for the CCD camera 14, a camera at the lower end of the CCD camera 14 is aligned with a through hole in the middle of the illuminating lamp 18, the front end of the upper and lower driving mechanism 15 is provided with a sucking mechanism 16 and a testing mechanism 17, a testing seat 19 is arranged between the positioning platform 2 and the longitudinal guide rail 4 at the upper end of the workbench 1, two placing boxes 20 are arranged in parallel in front of the testing seat 19, one placing box 20 is used for placing qualified products, and the other placing box 20 is used for placing unqualified products.

The two positioning cylinders 26 respectively compress the carrier plate 21 in the X direction and the Y direction, and the carrier plate 21 is positioned by matching with the barrier strips 23; this structure enables the mounting and positioning of the plurality of specification carrier trays 21.

The upper end of the workbench 1 is provided with a frame 7, and the upper end of the frame 7 is provided with a display screen 8 and an alarm lamp 9; the upper end of the frame 7 is also provided with a control button.

The lower part of the front end of the workbench 1 is provided with a drawer 10, a keyboard 11 and a mouse 12 are arranged in the drawer 10, and the keyboard 11 and the mouse 12 are connected with a display screen 8; the keyboard 11 and the mouse 12 can operate the display screen 8.

The testing machine is connected with an external power supply through an electric wire and a plug, so that the power supply of the whole equipment is realized.

The upper and lower actuating mechanism 15 include driving motor 27 and riser 28, the vertical riser 28 of installing of base 13 front end, two transmission piece 29 that can slide from top to bottom are installed side by side to the front end of riser 28, two transmission piece 29 symmetrical arrangement, two transmission piece 29 opposite one end all transversely open a word breach 30, base 13 upper end install driving motor 27, the output shaft of this driving motor 27 passes riser 28 and installs carousel 34, carousel 34 front end eccentric be provided with drive bearing 31, this drive bearing 31 is located two word breach 30, the suction mechanism 16 is installed to the lower part of one transmission piece 29, the testing machine 17 is installed to the lower part of another transmission piece 29, riser 28 upper end install roof 32, the both sides of this roof 32 all are provided with a spring, this spring links to each other with the transmission piece 29 of homonymy.

The driving motor 27 drives the turntable 34 to rotate, so that the transmission bearing 31 eccentrically rotates, and the transmission bearing 31 presses the transmission block 29 to slide up and down. The forward and reverse rotation of the driving motor 27 is utilized, so that one driving motor 27 can respectively control the suction mechanism 16 and the testing mechanism 17 to independently move up and down. The driving motor 27 is at the original point position, when the driving motor rotates anticlockwise, the sucking mechanism 16 sucking the chip moves downwards, and the testing mechanism 17 is pulled by a spring to be fixed; the driving motor 27 is at the origin position, and when rotating clockwise, the testing mechanism 17 moves downward, and the sucking mechanism 16 sucking the chip is held by the reset stretching mechanism.

The side of the transmission block 29 is provided with a connecting frame 33 connected with a spring, and the connecting frame 33 is in an inverted L shape.

The specific structure of the suction means 16, the test means 17 and the test seat 19 can be found in the previous CN110813773a patent.

The base 13 of the transverse sliding table 6 and the longitudinal sliding table 3 controls the free movement of the X/Y directions

The application steps of the utility model are as follows:

the first step: the coated quartz chips are arranged on the carrying disc 21, an operator places the carrying disc 21 on the positioning platform 2, presses a start button, the testing machine automatically operates, the positioning cylinder 26 in the X direction and the positioning cylinder 26 in the Y direction respectively act, and the four positioning columns 24 push the carrying disc 21 to move so as to match with the barrier strips 23 on the positioning platform 2 to position the carrying disc 21.

And a second step of: the transverse sliding table 6 and the longitudinal sliding table 3 are respectively and freely moved in the X/Y directions by the base 13, the sucking mechanism 16, the testing mechanism 17 and the CCD camera 14 which are fixed on the base 13 are also moved together and move above the quartz chip to be measured, the driving motor 27 is rotated anticlockwise, the sucking mechanism 16 is driven to move downwards by the driving block 29, the quartz chip on the carrying disc 21 is sucked up by the sucking mechanism 16, then the driving motor 27 is rotated clockwise, the sucking mechanism 1 is driven to return to the upper position by the driving block 29, then the sucking mechanism 16 is moved above the testing seat 19 by the movement in the X/Y direction, the driving motor 27 is rotated anticlockwise, the sucking mechanism 16 is moved downwards, and the quartz chip to be measured is placed on the testing seat 19 to wait for measurement.

And a third step of: the CCD camera 14 is moved to the upper part of the test seat 19, the current position of the quartz chip placed in front is read and recorded through shooting of the camera, then the test mechanism 17 is moved to the upper part of the quartz chip placed in front, the test mechanism 17 moves downwards, the test mechanism 17 cooperates with the test seat 19 to measure the characteristics of the quartz chip, after the data test is completed, the test mechanism 17 moves upwards to return to the standby position, then the quartz chip after the measurement is sucked up through the suction mechanism 1, and finally the quartz chip is placed in the corresponding placement box 20, and the whole action flow is completed.

In the description of the present utility model, it should be understood that the azimuth or positional relationships indicated by the azimuth terms such as "front, rear, upper, lower, left, right", "lateral, vertical, horizontal", and "top, bottom", etc., are generally based on the azimuth or positional relationships shown in the drawings, merely to facilitate description of the present utility model and simplify the description, and these azimuth terms do not indicate and imply that the apparatus or elements referred to must have a specific azimuth or be constructed and operated in a specific azimuth, and thus should not be construed as limiting the scope of protection of the present utility model; the orientation word "inner and outer" refers to inner and outer relative to the contour of the respective component itself.

Spatially relative terms, such as "above … …," "above … …," "upper surface at … …," "above," and the like, may be used herein for ease of description to describe one device or feature's spatial location relative to another device or feature as illustrated in the figures. It will be understood that the spatially relative terms are intended to encompass different orientations in use or operation in addition to the orientation depicted in the figures. For example, if the device in the figures is turned over, elements described as "above" or "over" other devices or structures would then be oriented "below" or "beneath" the other devices or structures. Thus, the exemplary term "above … …" may include both orientations of "above … …" and "below … …". The device may also be positioned in other different ways (rotated 90 degrees or at other orientations) and the spatially relative descriptors used herein interpreted accordingly.

In addition, the terms "first", "second", etc. are used to define the components, and are only for convenience of distinguishing the corresponding components, and the terms have no special meaning unless otherwise stated, and therefore should not be construed as limiting the scope of the present utility model.

The foregoing has described in detail the coated quartz wafer frequency automatic tester provided herein, and specific examples have been used herein to illustrate the principles and embodiments of the present application, the above examples being provided only to assist in understanding the method and core ideas of the present application; meanwhile, as those skilled in the art will have modifications in the specific embodiments and application scope in accordance with the ideas of the present application, the present description should not be construed as limiting the present application in view of the above.

Claims

1. The utility model provides a quartz wafer frequency automatic test machine after coating film, includes workstation (1), its characterized in that: the utility model provides a camera, including workstation (1), locating platform (2) are installed to workstation (1) upper end mid-mounting, a blend stop (23) are all installed on the front side and the right side of this locating platform (2) upper end, workstation (1) upper end be located locating platform (2) left side and back Fang Junan and be equipped with a support (22), support (22) upper end install location cylinder (26), the piston rod of this location cylinder (26) is connected with push pedal (25) that are arranged towards locating platform (2) direction, push pedal (25) both ends each install a reference column (24), workstation (1) upper end be located locating platform (2) left and right sides and install longitudinal slipway (3) and longitudinal rail (4) respectively, longitudinal slipway (3) upper end and longitudinal slipway (4) upper end install slide (5) that slide, slide (6) upper end install horizontal slipway (6), horizontal slipway (6) upper end install base (13) that slide left and right sides, base (13) that slide towards locating platform (2) direction is arranged, CCD (14) upper end and lower drive mechanism (16) are installed and are equipped with front end (15) and are equipped with testing mechanism (15), a test seat (19) is arranged between the positioning platform (2) and the longitudinal guide rail (4) at the upper end of the workbench (1), and two placing boxes (20) are arranged in parallel in front of the test seat (19) at the upper end of the workbench (1).

2. The automatic tester for frequency of coated quartz wafers according to claim 1, wherein: the upper end of the workbench (1) is provided with a frame (7), and the upper end of the frame (7) is provided with a display screen (8) and an alarm lamp (9).

3. The automatic tester for frequency of coated quartz wafers according to claim 2, wherein: the lower part of workstation (1) front end be provided with drawer (10), keyboard (11) and mouse (12) have been placed in this drawer (10), keyboard (11) and mouse (12) link to each other with display screen (8).

4. The automatic tester for frequency of coated quartz wafers according to claim 1, wherein: an annular illuminating lamp (18) is arranged at the lower end of the CCD camera (14).

5. The automatic tester for frequency of coated quartz wafers according to claim 1, wherein: the upper and lower actuating mechanism (15) include driving motor (27) and riser (28), base (13) front end vertically install riser (28), but two upper and lower gliding transmission piece (29) are installed side by side to the front end of this riser (28), two transmission piece (29) symmetrical arrangement, the opposite one end of two transmission pieces (29) all transversely opens has a word breach (30), base (13) upper end install driving motor (27), the output shaft of this driving motor (27) pass riser (28) and install carousel (34), carousel (34) front end eccentric be provided with drive bearing (31), this drive bearing (31) are located two word breachs (30), the suction mechanism (16) are installed to the lower part of one transmission piece (29), the lower part of another transmission piece (29) is installed test mechanism (17), riser (28) upper end install roof (32), the both sides of this roof (32) all are provided with a canceling release mechanical system, this canceling release mechanical system links to each other with transmission piece (29) with the side.

6. The automatic tester for frequency of coated quartz wafers according to claim 5, wherein: the reset mechanism is a spring.

7. The automatic tester for frequency of coated quartz wafers according to claim 6, wherein: the side of the transmission block (29) is provided with a connecting frame (33) connected with a spring, and the connecting frame (33) is in an inverted L shape.