CN219430102U

CN219430102U - Rotary target high-temperature operation clamp

Info

Publication number: CN219430102U
Application number: CN202221949659.8U
Authority: CN
Inventors: 王英洁; 郭庆生; 余芳; 胡智向
Original assignee: Vital Thin Film Materials Guangdong Co Ltd
Current assignee: Vital Thin Film Materials Guangdong Co Ltd
Priority date: 2022-07-26
Filing date: 2022-07-26
Publication date: 2023-07-28
Anticipated expiration: 2032-07-26

Abstract

The utility model discloses a high-temperature operation clamp for a rotary target, which comprises a clamping plate; one end of the clamping plate is provided with an opening so that the clamping plate is in an open-loop structure; the two ends of the clamping plate are respectively connected with a first rod-shaped handle, and the first rod-shaped handle extends outwards from the radial direction of the clamping plate from the inside to the outside; the clamping plate is also connected with a second rod-shaped handle, and the second rod-shaped handle and the first rod-shaped handle are oppositely arranged at two opposite sides of the axis of the clamping plate. Which can clamp a high temperature target to adjust or transfer the target.

Description

Rotary target high-temperature operation clamp

Technical Field

The utility model relates to the technical field of clamps, in particular to a high-temperature operating clamp for a rotary target.

Background

The rotary target used in the sputtering coating industry is usually manufactured by adopting an indium bonding binding mode, on one hand, the rotary target is used for avoiding cracking of fragile materials such as metals, alloys or oxides with poor toughness in the use process, and the rotary target is bound on a stainless steel back pipe or a titanium back pipe; on the other hand, the problems of insufficient mechanical strength of the target material can be improved, good cooling and electric contact performance of the target material can be ensured, and the problems of uneven sputtering, cracking of the target material and the like of the target material in sputtering can be prevented.

However, the target material needs to be heated to the high temperature of indium melting in the binding process, and if the target material moves in position or is abnormal in the binding process, the target material cannot be directly contacted by hands; in addition, when the backing tube binds a plurality of sections of targets, the targets are required to be scrapped or reprocessed after being unbinding when the binding rate is low or the targets are cracked and the like, and a tool is required to move the targets in a high-temperature state or take the high-temperature targets off the backing tube.

Disclosure of Invention

In order to overcome the defects in the prior art, the utility model aims to provide a rotary target high-temperature operating clamp which can clamp a high-temperature target so as to adjust or transfer the target.

The utility model adopts the following technical scheme:

a high-temperature operation clamp for a rotary target comprises a clamping plate; one end of the clamping plate is provided with an opening so that the clamping plate is in an open-loop structure; the two ends of the clamping plate are respectively connected with a first rod-shaped handle, and the first rod-shaped handle extends outwards from the radial direction of the clamping plate from the inside to the outside; the clamping plate is also connected with a second rod-shaped handle, and the second rod-shaped handle and the first rod-shaped handle are oppositely arranged at two opposite sides of the axis of the clamping plate.

Further, the clamping plate is made of a metal material.

Further, the clamping plate is made of 304 stainless steel materials.

Further, the thickness of the clamping plate is 2mm-5mm.

Further, the inner curved surface of the clamping plate is provided with a flexible buffer layer.

Further, the flexible buffer layer is a silica gel layer.

Further, the thickness of the flexible buffer layer is 4mm-7mm.

Further, the first rod-shaped handle and the second rod-shaped handle are both hollow tube structures.

Further, the first rod-shaped handle and the second rod-shaped handle are both in round tube structures.

Further, the extending track of the clamping plate is of an arc-shaped structure.

Compared with the prior art, the utility model has the beneficial effects that:

1. the clamping plate is in an open-loop structure, so that the opening of the clamping plate can be expanded to radially sleeve the rotary target. The two ends of the clamping plate are respectively connected with the first rod-shaped handles, so that a worker can conveniently pull the first opening large, and the worker can conveniently press the first opening tightly to clamp the rotary target stably.

2. By disposing the second bar handle and the first bar handle oppositely on opposite sides of the axis of the holding plate, a worker can smoothly hold up the rotary target.

3. In particular, since the rotary target is minutely manipulated based on the necessity, the first and second bar-shaped handles are provided in the vicinity of the clamping plate, which is advantageous in improving tactile sensation of a worker to avoid an operation error phenomenon.

Drawings

FIG. 1 is a schematic diagram of a rotary target high temperature operating clamp according to the present utility model;

fig. 2 is a side view of fig. 1.

In the figure: 1. a clamping plate; 11. an opening; 2. a first lever handle; 3. a second lever handle; 4. a flexible buffer layer.

Detailed Description

The present utility model will be further described with reference to the accompanying drawings and detailed description, wherein it is to be understood that, on the premise of no conflict, the following embodiments or technical features may be arbitrarily combined to form new embodiments.

It will be understood that when an element is referred to as being "fixed to" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may be present. The use of "vertical," "horizontal," "left," "right," and similar expressions are for illustrative purposes only and are not meant to be the only embodiment.

Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this utility model belongs. The terminology used in the description of the utility model herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the utility model. The term "and/or" as used herein includes any and all combinations of one or more of the associated listed items.

Fig. 1-2 show a high temperature operation clamp for a rotary target according to a preferred embodiment of the present utility model, wherein one end of a clamping plate 1 has an opening 11, so that the clamping plate 1 has an open loop structure, and thus the clamping plate 1 can be sleeved outside the rotary target in a radial direction of the rotary target to clamp the rotary target. In general, the length of the rotary target is between 40mm and 70mm, and the rotary target needs to be heated to about 200 ℃ to perform the binding work of the back tube, so that the rotary target cannot be directly touched by a human hand. Further, two ends of the clamping plate 1 are respectively connected with a first rod-shaped handle 2, and the first rod-shaped handle 2 extends outwards from the radial direction of the clamping plate 1 from the inside; the clamping plate 1 is also connected with a second rod-shaped handle 3, and the second rod-shaped handle 3 and the first rod-shaped handle 2 are oppositely arranged at two opposite sides of the axis of the clamping plate 1.

In use, referring to fig. 1, the first rod-shaped handles 2 are respectively held by two hands, then the opening 11 is pulled to be larger so as to radially sleeve the cylindrical rotary target from the cylindrical rotary target, so that the clamping plate 1 wraps the periphery of the cylindrical rotary target, then the two first rod-shaped handles 2 are simultaneously held by one hand, and the second rod-shaped handles 3 are held by the other hand, so that the cylindrical target can be adjusted or transferred. In particular, as an improved prime mover, in order to avoid scratching the rotary target, the extended track of the clamping plate 1 is in an arc-shaped structure, and the clamping plate 1 is only suitable for cylindrical rotary targets.

Obviously, the clamping plate 1 is in an open loop structure, so that the opening 11 thereof can be expanded to radially socket the rotating target. By connecting a first rod-shaped handle 2 to each of the two ends of the holding plate 1, it is possible to facilitate the worker to enlarge the first opening 11 and to compress the first opening 11 to clamp the rotary target securely. By disposing the second bar handle 3 and the first bar handle 2 oppositely on opposite sides of the axis of the chucking plate 1, a worker can smoothly hold up the rotary target. In particular, since the rotary target is minutely manipulated on the basis of necessity, the first and second bar handles 2 and 3 are provided in the vicinity of the chucking plate 1, it is advantageous to improve tactile sensation of a worker to avoid an operation error phenomenon.

Preferably, in order to improve the durability of the clamping plate 1, the clamping plate 1 is made of a metal material. More preferably, the clamping plate 1 is made of 304 stainless steel material. It will be appreciated that, as an alternative arrangement, the clamping plate 1 may be made of a plastic material or a polymer material. Among them, in order to secure the strength of the clamping plate 1 and to satisfy both the rigidity and the light weight thereof, the thickness of the clamping plate 1 is preferably 2mm to 5mm, and preferably 3mm.

Preferably, in order to avoid the clamping plate 1 from crushing the rotating target, the inner curved surface of the clamping plate 1 is provided with a flexible buffer layer 4. More preferably, the flexible buffer layer 4 is a silicone layer. It will be appreciated that the flexible buffer layer 4 may also be a sponge layer or a soft plastic layer. More preferably, the thickness of the flexible buffer layer 4 is 4mm-7mm. Preferably 5mm.

Preferably, in order to make the rotary target high temperature operating clamp lighter, the first rod handle 2 and the second rod handle 3 are both hollow tube structures.

Preferably, in order to hold the first and second bar handles 2 and 3 more comfortably, the first and second bar handles 2 and 3 are each of a circular tube structure.

The above embodiments are only preferred embodiments of the present utility model, and the scope of the present utility model is not limited thereto, but any insubstantial changes and substitutions made by those skilled in the art on the basis of the present utility model are intended to be within the scope of the present utility model as claimed.

Claims

1. The utility model provides a rotatory target high temperature operation presss from both sides which characterized in that: comprises a clamping plate (1); one end of the clamping plate (1) is provided with an opening (11) so that the clamping plate (1) is in an open-loop structure; the two ends of the clamping plate (1) are respectively connected with a first rod-shaped handle (2), and the first rod-shaped handle (2) extends outwards from the radial direction of the clamping plate (1) from the inside to the outside; the clamping plate (1) is also connected with a second rod-shaped handle (3), and the second rod-shaped handle (3) and the first rod-shaped handle (2) are oppositely arranged at two opposite sides of the axis of the clamping plate (1).

2. A rotary target high temperature operating clamp as defined in claim 1, wherein: the clamping plate (1) is made of a metal material.

3. A rotary target high temperature operating clamp as defined in claim 2, wherein: the clamping plate (1) is made of 304 stainless steel materials.

4. A rotary target high temperature operating clamp as defined in claim 2, wherein: the thickness of the clamping plate (1) is 2mm-5mm.

5. A rotary target high temperature operating clamp as defined in claim 1, wherein: the inner side curved surface of the clamping plate (1) is provided with a flexible buffer layer (4).

6. The rotary target high temperature operating clamp as claimed in claim 5, wherein: the flexible buffer layer (4) is a silica gel layer.

7. The rotary target high temperature operating clamp as claimed in claim 5, wherein: the thickness of the flexible buffer layer (4) is 4mm-7mm.

8. A rotary target high temperature operating clamp as defined in claim 1, wherein: the first rod-shaped handle (2) and the second rod-shaped handle (3) are both hollow pipe structures.

9. A rotary target high temperature operating clamp as defined in claim 1, wherein: the first rod-shaped handle (2) and the second rod-shaped handle (3) are of circular tube structures.

10. A rotary target high temperature operating clamp as defined in claim 1, wherein: the extending track of the clamping plate (1) is of an arc-shaped structure.