CN219428993U - Substrate conveying device and vacuum coating equipment - Google Patents

Abstract

The utility model discloses a substrate conveying device and vacuum coating equipment, wherein the substrate conveying device comprises a conveying mechanism, the conveying mechanism comprises a roller assembly and a first driving assembly, the roller assembly comprises a plurality of roller groups which are distributed at intervals along a first direction, the roller groups comprise a plurality of rollers which are distributed at intervals along a second direction and are all rotationally arranged on a mounting substrate, along the axial direction of the rollers, the wheel shafts of at least two adjacent rollers are connected through a movable structure, a substrate can be placed on the rollers, and the first direction is perpendicular to the second direction; the first driving component is configured to drive rollers of the roller groups to rotate on the mounting base body. The processing precision requirement of gyro wheel and shaft can be reduced, the shaft of gyro wheel is convenient for process and installation, can reduce the torsional moment of transfer to the wheel shaft of gyro wheel group, reduces the shaft of gyro wheel group and is twisted the risk of breaking, reduces the probability that the motor overload reported to the police, promotes base plate conveyor's life and safety in utilization.

Description

Substrate conveying device and vacuum coating equipment

Technical Field

The utility model relates to the technical field of vacuum coating equipment, in particular to a substrate conveying device and vacuum coating equipment.

Background

In recent years, with the development of industries such as automobiles, the market demand for coating large substrates such as vehicle-mounted glass has been increasing. In order to improve the working efficiency of the process such as coating a large substrate, it is becoming imperative to improve the conveying performance of the large substrate conveying device. In the prior art, large substrates are generally transported by means of guide rails or rollers.

For the large-scale base plate of adoption gyro wheel mode transport among the prior art, base plate conveyor usually includes conveying platform, and the interval is provided with a plurality of transfer rollers on the conveying platform, and the conveying axle of every transfer roller is equipped with a plurality of gyro wheels along axial interval, and drive assembly drives a plurality of rotations and sets up in the conveying axle of platform to drive the large-scale base plate that sets up in the conveying axle top and remove, realize large-scale base plate's automated transportation. However, due to processing and installation errors, the existing roller conveying mechanism sometimes has faults such as breakage of a conveying shaft and overload of a motor, and conveying stability needs to be improved. Especially when adopting current gyro wheel mechanism to carry large-scale dysmorphism base plate with erect mode automation, gyro wheel conveying mechanism's fault rate is higher, has influenced conveying mechanism's work efficiency and life.

Disclosure of Invention

The utility model aims to provide a substrate conveying device and vacuum coating equipment so as to solve the defect of conveying stability of the substrate conveying device in the prior art.

To achieve the purpose, the utility model adopts the following technical scheme:

a substrate conveying device for conveying a substrate, comprising a conveying mechanism, the conveying mechanism comprising:

the roller assembly comprises a plurality of roller groups which are distributed at intervals along a first direction, the roller groups comprise a plurality of rollers which are distributed at intervals along a second direction and are all rotationally arranged on a mounting substrate, at least two adjacent roller axles are connected through a movable structure along the axial direction of the rollers, the substrate can be placed on the rollers, and the first direction is perpendicular to the second direction;

the first driving assembly is configured to drive the rollers of the roller groups to rotate on the mounting base body.

Preferably, the movable structure comprises a universal drive structure.

Preferably, the movable structure comprises a synchronizing shaft and two first universal joints, wherein two ends of the synchronizing shaft are fixedly connected with one ends of the two first universal joints respectively, and the other ends of the two first universal joints are fixedly connected with the wheel shafts of the rollers.

Preferably, the roller assembly further comprises a first mounting seat and a second mounting seat, the plurality of roller groups are rotatably arranged on the first mounting seat along the axle of the first end in the axial direction, the plurality of roller groups are rotatably arranged on the second mounting seat along the axle of the second end in the axial direction, the second mounting seat is configured to be capable of adjusting the height of one or more rollers of the roller groups along a third direction, and the third direction is parallel to the height direction of the mounting base body.

Preferably, the second mounting seat comprises a plurality of adjusting seats distributed at intervals along the first direction, the adjusting seats comprise adjusting bases and adjusting plates connected with the adjusting bases, the adjusting bases are used for being detachably connected with the mounting base body, and the adjusting plates are used for being rotationally connected with the wheel shafts at the second ends of the roller groups along the axial direction.

Preferably, the second mounting seat further includes a connection plate for connecting the adjustment seats adjacent in the first direction.

Preferably, the second mounting seat further comprises an adjusting gasket, the adjusting gasket is arranged at the joint of the adjusting base and the mounting base, and the adjusting gasket is located between the adjusting base and the mounting base.

Preferably, the first mounting seat and the second mounting seat are both provided with guide wheel sets, two guide wheel sets are distributed at intervals along the second direction, and a plurality of roller sets are located between the two guide wheel sets.

Preferably, the conveying mechanism further comprises a plurality of conveying wheel structures arranged at intervals along the first direction, the conveying wheel structures comprise conveying shafts and conveying wheels arranged on the conveying shafts, and two ends of the conveying shafts are respectively connected with the first mounting seat and the second mounting seat.

Preferably, the first driving assembly is configured to drive the rollers of the roller groups to synchronously rotate on the mounting base body.

Preferably, the first driving assembly comprises a first driving part and a transmission assembly, the transmission assembly comprises a plurality of first bevel gears, a transmission shaft rotatably arranged on the first mounting seat, and a plurality of second bevel gears fixedly arranged on the transmission shaft, the plurality of first bevel gears are arranged in one-to-one correspondence with the plurality of roller sets, the first bevel gears are fixedly arranged on the wheel shafts at the first ends, and the plurality of first bevel gears are also arranged in one-to-one correspondence with the plurality of second bevel gears and meshed with the plurality of second bevel gears;

the output shaft of the first driving piece is in transmission connection with the wheel shaft of one of the roller sets; or, the output shaft of the first driving piece is connected with one end of the transmission shaft.

Preferably, the first driving assembly includes a plurality of driving groups sequentially arranged at intervals along the first direction, and the driving groups can drive rollers of at least one roller group to rotate on the mounting base body.

Preferably, the number of the roller assemblies is a plurality, and the plurality of the roller assemblies are distributed at intervals along the first direction.

Preferably, the substrate conveying device further comprises an anti-toppling mechanism, the anti-toppling mechanism is arranged above the conveying mechanism at intervals along a third direction, the substrate is located between the anti-toppling mechanism and the conveying mechanism, the anti-toppling mechanism can limit the position of the substrate, and the third direction is parallel to the height direction of the mounting base body.

Preferably, the anti-toppling mechanism comprises a second driving member arranged on the mounting base body and a first anti-toppling member connected to an output shaft of the second driving member, the second driving member can drive the first anti-toppling member to move along the third direction, and the substrate can be abutted to the first anti-toppling member.

Preferably, the first anti-toppling member includes a first anti-toppling portion and a second anti-toppling portion connected to each other, the first anti-toppling portion being capable of abutting against a top wall of the substrate, and the second anti-toppling portion being capable of abutting against a side wall of the substrate.

Preferably, the anti-toppling mechanism further comprises a second anti-toppling member fixedly arranged on the mounting base body, the second anti-toppling portion and the second anti-toppling member are distributed at intervals along the second direction, and the second anti-toppling member can be abutted to the side wall of the base plate.

Preferably, the number of the anti-toppling mechanisms is a plurality, and the plurality of anti-toppling mechanisms are distributed at intervals along the first direction.

The vacuum coating equipment comprises the substrate conveying device.

The utility model has the beneficial effects that:

the utility model aims to provide a substrate conveying device and vacuum coating equipment, wherein when the substrate is conveyed, a first driving component drives a plurality of roller groups to rotate, and the substrate is arranged on rollers, so that the substrate is driven to move along a first direction, and the substrate is conveyed. For each roller group, the wheel shafts of at least two adjacent rollers on the roller group are connected through a movable structure, and the movable structure movably connects the wheel shafts of the two adjacent rollers, so that the processing precision requirements on the rollers and the wheel shafts can be effectively reduced, the wheel shafts of the rollers can be conveniently processed and installed, and the wheel shaft intervals of the two adjacent rollers can be conveniently adjusted and arranged in parallel in the installation process and/or the later use process; secondly, in the process that the first driving component drives the roller group to rotate, the movable structure can consume part of torsion moment transmitted by the first driving component, so that torsion moment transmitted to a wheel shaft of the roller group is effectively reduced, the risk that a wheel shaft of the roller group is twisted off is reduced, the probability of overload alarm of a motor is also reduced, the conveying stability of the substrate conveying device is improved, and the service life and the use safety of the substrate conveying device are also improved; secondly, in the process that the first driving component drives the roller set to rotate, the movable structure can ensure that the driving force of the first driving component is effectively transmitted to each wheel shaft of the roller set, so that each wheel shaft of the roller set effectively drives the roller to rotate.

Drawings

FIG. 1 is a schematic view of a portion of a substrate conveying apparatus according to an embodiment of the present utility model;

fig. 2 is a schematic structural view of a substrate conveying device according to an embodiment of the present utility model;

FIG. 3 is a schematic diagram of a second embodiment of a substrate conveying apparatus according to the present utility model;

FIG. 4 is a partial view of FIG. 3 at A;

fig. 5 is a schematic diagram of a portion of a substrate conveying apparatus according to an embodiment of the present utility model.

In the figure:

100. a substrate;

1. a roller assembly; 11. a roller set; 111. a roller; 112. a movable structure; 1121. a first universal joint; 1122. a synchronizing shaft; 12. a first mount; 13. a second mounting base; 131. an adjusting seat; 1311. adjusting the base; 1312. an adjusting plate; 132. adjusting the gasket; 14. a guide wheel; 15. a second universal joint;

2. a mounting substrate;

3. a first drive assembly; 31. a first driving member; 32. a first helical gear; 33. a second helical gear; 34. a transmission shaft;

4. an anti-toppling mechanism; 41. a second driving member; 42. a first anti-toppling member; 421. a first anti-toppling portion; 422. a second anti-toppling portion; 43. and a second anti-toppling member.

Detailed Description

The utility model is described in further detail below with reference to the drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the utility model and are not limiting thereof. It should be further noted that, for convenience of description, only some, but not all of the structures related to the present utility model are shown in the drawings.

In the description of the present utility model, unless explicitly stated and limited otherwise, the terms "connected," "connected," and "fixed" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communicated with the inside of two elements or the interaction relationship of the two elements. The specific meaning of the above terms in the present utility model will be understood in specific cases by those of ordinary skill in the art.

In the present utility model, unless expressly stated or limited otherwise, a first feature "above" or "below" a second feature may include both the first and second features being in direct contact, as well as the first and second features not being in direct contact but being in contact with each other through additional features therebetween. Moreover, a first feature being "above," "over" and "on" a second feature includes the first feature being directly above and obliquely above the second feature, or simply indicating that the first feature is higher in level than the second feature. The first feature being "under", "below" and "beneath" the second feature includes the first feature being directly under and obliquely below the second feature, or simply means that the first feature is less level than the second feature.

In the description of the present embodiment, the terms "upper", "lower", "right", etc. orientation or positional relationship are based on the orientation or positional relationship shown in the drawings, and are merely for convenience of description and simplicity of operation, and do not indicate or imply that the apparatus or elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the utility model. Furthermore, the terms "first," "second," and the like, are used merely for distinguishing between descriptions and not for distinguishing between them.

The utility model provides a substrate conveying device, as shown in fig. 1-3, which is used for conveying a substrate, and comprises a conveying mechanism, wherein the conveying mechanism comprises a roller assembly 1 and a first driving assembly 3, the roller assembly 1 comprises a plurality of roller groups 11 which are distributed at intervals along a first direction, the roller groups 11 comprise a plurality of rollers 111 which are distributed at intervals along a second direction and are all rotationally arranged on a mounting base body 2, along the axial direction of the rollers 111, the wheel shafts of at least two adjacent rollers 111 are connected through a movable structure 112, the substrate 100 can be placed on the rollers 111, and the first direction is perpendicular to the second direction; the first driving assembly 3 is configured to drive the rollers 111 of the plurality of roller groups 11 to rotate on the mounting base 2.

As shown in fig. 1-3, in the substrate conveying device, when conveying a substrate 100, the first driving assembly 3 drives the plurality of roller groups 11 to rotate, and the substrate 100 is disposed on the rollers 111, so as to drive the substrate 100 to move along the first direction, so as to convey the substrate 100. For each roller group 11, the wheel shafts of at least two adjacent rollers 111 on the roller group 11 are connected through a movable structure 112, and the movable structure 112 movably connects the wheel shafts of the adjacent two rollers 111, so that the processing precision requirements on the rollers 111 and the wheel shafts can be effectively reduced, the wheel shafts of the rollers 111 can be conveniently processed and installed, and the wheel shaft intervals and parallel arrangement of the adjacent two rollers 111 can be conveniently adjusted in the installation process and/or the later use process; secondly, in the process that the first driving component 3 drives the roller group 11 to rotate, the movable structure 112 can consume a part of torsion moment transmitted by the first driving component 3, so that the torsion moment transmitted to the wheel shaft of the roller group 11 is effectively reduced, the risk that the wheel shaft of the roller group 11 is twisted off is reduced, the probability of motor overload alarm is also reduced, the conveying stability of the substrate conveying device is improved, and the service life and the use safety of the substrate conveying device are also improved; secondly, in the process that the first driving component 3 drives the roller set 11 to rotate, the movable structure 112 can ensure that the driving force of the first driving component 3 is effectively transmitted to each wheel shaft of the roller set 11, so that each wheel shaft of the roller set 11 effectively drives the roller 111 to rotate.

In this embodiment, as shown in fig. 1-3, for each roller set 11, two rollers 111 are exemplified, and two rollers 111 are connected through a movable structure 112. It is understood that, for each roller set 11, more than two rollers 111 may be provided, and a movable structure 112 may be provided between the axles of at least two adjacent rollers 111 in the plurality of rollers 111, or a movable structure 112 may be provided between the axles of any two adjacent rollers 111. The number of the movable structures 112 and the number of the rollers 111 can be adjusted according to the actual working conditions.

The substrate 100 is not limited to a rectangular plate or a curved substrate. In the present embodiment, the substrate 100 is exemplified as a rectangular substrate.

In this embodiment, the first direction is perpendicular to the second direction and is perpendicular to the height direction of the mounting base 2. It can be appreciated that by providing the movable structure 112, the movable structure 112 can adjust the axle corresponding to the respective rollers 111 of each roller set 11 to be substantially parallel, i.e. the axle corresponding to the respective rollers 111 of each roller set 11 are substantially parallel and spaced apart along the first direction. Wherein the ab direction in fig. 1 and 5 is the first direction; the cd direction in fig. 1-3 and fig. 5 is the second direction; the direction ef in fig. 2, 3 and 5 is the third direction. Wherein the substrate 100 in fig. 2 is not tilted; the substrate 100 in fig. 3 is tilted along the second direction and abuts against the second anti-tilting member 43.

Wherein the movable structure 112 comprises a universal transmission structure. It can be understood that the universal transmission structure movably connects the wheel shafts of the adjacent two rollers 111, so that the wheel shafts of the adjacent two rollers 111 are spaced and arranged in parallel, and the wheel shafts of the adjacent two rollers 111 can be adjusted to form an included angle.

Specifically, as shown in fig. 1-3, the movable structure 112 includes a synchronous shaft 1122 and two first universal joints 1121, two ends of the synchronous shaft 1122 are respectively and fixedly connected with one ends of the two first universal joints 1121, and the other ends of the two first universal joints 1121 are respectively and fixedly connected with the wheel shafts of the rollers 111. So set up, two first universal joints 1121 and the synchronizing shaft 1122 of movable structure 112 can adjust the wheel shaft interval and the parallel distribution of two gyro wheels 111, and in the in-process that first drive assembly 3 drove this gyro wheel group 11 pivoted, two first universal joints 1121 can consume a part torsional moment to effectively reduce the torsional moment that the shaft of gyro wheel group 11 bore, reduce the shaft of gyro wheel group 11 and by the risk of twisting off, also reduced motor overload warning's probability, promoted base plate conveyor's life and safety in utilization. Alternatively, the movable structure 112 may also be composed of two spherical hinge structures and a connecting shaft, wherein two ends of the connecting shaft are respectively and fixedly connected with one ends of the two spherical hinge structures, and the other ends of the two spherical hinge structures are respectively and fixedly connected with the wheel shafts of the rollers 111.

1-3, the roller assembly 1 further includes a first mounting seat 12 and a second mounting seat 13, wherein the first ends of the roller groups 11 along the axial direction are rotatably disposed on the first mounting seat 12, the second ends of the roller groups 11 along the axial direction are rotatably disposed on the second mounting seat 13, and the second mounting seat 13 is configured to be capable of adjusting the height of the rollers 111 of one or more roller groups 11 along a third direction, which is parallel to the height direction of the mounting base 2. It can be appreciated that, for each roller set 11, the first end of each roller set 11 is rotatably disposed on the first mounting seat 12, the setting position of the first end of each roller set 11 is fixed, the height of the second end of each roller set 11 can be adjusted by the second mounting seat 13 and the movable structure 112 according to the requirement, and the setting position of the second mounting seat 13 can be adjusted by moving along the first direction and/or the second direction according to the requirement, so that the bearing surface formed by the rollers 111 of each roller set 11 can be conveniently adjusted to be kept flat. Specifically, in the adjusting process, the two first universal joints 1121 and the wheel shafts of the rollers 111 can generate relative motion, so that the wheel shaft intervals of the two rollers 111 can be conveniently adjusted and arranged in parallel, secondly, the second mounting seat 13 is matched with the movable structure 112, so that the bearing surface formed by the rollers 111 of each roller group 11 can be adjusted to be kept smooth, and when the first driving assembly 3 drives the roller group 11 to rotate, the phenomenon that the substrate 100 falls is not easy to be caused, and the bearing capacity of the roller assembly 1 for bearing the substrate 100 can be effectively improved.

Specifically, as shown in fig. 1 to 4, the second mounting base 13 includes a plurality of adjustment bases 131 spaced apart in the first direction, the adjustment bases 131 include an adjustment base 1311 and an adjustment plate 1312 connected to the adjustment base 1311, the adjustment base 1311 is detachably connected to the mounting base 2, and the adjustment plate 1312 is rotatably connected to an axle of the second end of the roller set 11 in the axial direction. The adjusting base 1311 provided with the adjusting base 131 is detachably connected to the mounting base 2, so that the height position of the rollers 111 can be conveniently adjusted through the adjusting base 1311, the wheel shafts of the rollers 111 of the roller group 11 can be arranged in parallel, the bearing surface formed by the rollers 111 can be ensured to be kept flat, and the setting position of the adjusting base 131 can be moved and adjusted along the first direction and/or the second direction according to requirements.

Optionally, each adjustment plate 1312 corresponds to one adjustment seat 1311. Each adjusting plate 1312 is correspondingly rotatably connected with an axle. So arranged, the height of the second end of each roller set 11 can be adjusted individually according to the requirement, and the setting position of the adjusting seat 131 can be moved along the first direction and/or the second direction according to the requirement. As an alternative, each adjustment plate 1312 corresponds to two adjustment bases 1311. Each of the adjustment plates 1312 is rotatably coupled to a plurality of wheel shafts in a first direction in sequence. So arranged, it is convenient to synchronously adjust the wheel shafts of the plurality of roller groups 11 which are sequentially arranged at intervals along the first direction. Specifically, in the present embodiment, as shown in fig. 1, two wheel shafts are exemplified as being rotatably connected to each of the adjustment plates 1312 in the first direction in sequence; and, three axles are illustratively rotatably coupled to each of the adjustment plates 1312 in sequence in a first direction.

Further specifically, the second mounting seat 13 further includes a connection plate for connecting the adjustment seats 131 adjacent in the first direction. When each adjusting plate 1312 corresponds to one adjusting base 1311, and each adjusting plate 1312 is correspondingly rotatably connected to one axle, if a plurality of roller sets 11 sequentially spaced along the first direction are required to be synchronously adjusted, a plurality of adjusting seats 131 sequentially spaced along the first direction are connected through a connecting plate to form a whole, and then the positions of the plurality of roller sets 11 are synchronously adjusted along the first direction and/or the second direction and/or the third direction according to the requirement. When each of the adjustment plates 1312 corresponds to two of the adjustment bases 1311 and a plurality of wheel shafts are rotatably connected to each of the adjustment plates 1312 in sequence in the first direction, the connection plates can also connect two adjustment plates 1312 adjacent in the first direction.

Further specifically, as shown in fig. 4, the second mounting seat 13 further includes an adjusting pad 132, where the adjusting pad 132 is disposed at a connection between the adjusting base 1311 and the mounting base 2, and the adjusting pad 132 is located between the adjusting base 1311 and the mounting base 2. The height of the adjusting seats 131 is adjusted by increasing or decreasing the number of the adjusting shims 132, thereby adjusting the height of the corresponding rollers 111.

The first mounting seat 12 and the second mounting seat 13 are respectively provided with a guide wheel set, the two guide wheel sets are distributed at intervals along the second direction, and the plurality of roller sets 11 are respectively positioned between the two guide wheel sets. Specifically, as shown in fig. 1, each guide wheel set includes a plurality of guide wheels 14 spaced apart along the first direction, and is capable of guiding the substrate 100 to move only along the first direction.

The conveying mechanism further comprises a plurality of conveying wheel structures which are arranged at intervals along the first direction, each conveying wheel structure comprises a conveying shaft and a conveying wheel arranged on the conveying shaft, and two ends of the conveying shaft are respectively connected with the first mounting seat 12 and the second mounting seat 13. Specifically, two ends of the conveying shaft are respectively connected with the first mounting seat 12 and the second mounting seat 13 in a rotating way; the conveying wheel is fixedly arranged on the conveying shaft, or the conveying wheel is rotatably arranged on the conveying shaft. As an alternative, both ends of the transmission shaft are fixedly connected with the first mount 12 and the second mount 13, respectively, and the transmission wheel is rotatably provided to the transmission shaft.

Further specifically, one or more transfer wheel structures may be disposed between any adjacent two roller sets 11. One or more transfer wheel structures may also be provided spaced apart from the plurality of roller sets 11. It will be appreciated that the number and placement of the transport structures may be adjusted as desired.

As shown in fig. 1-3, the first driving assembly 3 is configured to drive the rollers 111 of the plurality of roller groups 11 to synchronously rotate on the mounting base 2. Specifically, in this embodiment, the first driving assembly 3 includes a first driving member 31 and a transmission assembly, an output shaft of the first driving member 31 is in transmission connection with an axle of one of the roller sets 11, the transmission assembly includes a plurality of first bevel gears 32, a transmission shaft 34 rotatably disposed on the first mounting seat 12, and a plurality of second bevel gears 33 fixedly disposed on the transmission shaft 34, the plurality of first bevel gears 32 are disposed in one-to-one correspondence with the plurality of roller sets 11, the first bevel gears 32 are fixedly disposed on an axle of the first end, and the plurality of first bevel gears 32 are further disposed in one-to-one correspondence with and meshed with the plurality of second bevel gears 33. The first driving member 31 drives the wheel shaft of the roller 111 at the first end of the roller set 11 connected with the first driving member to rotate, so as to drive the first helical gear 32 arranged on the wheel shaft to rotate, the first helical gear 32 is meshed with the second helical gear 33, so as to drive the transmission shaft 34 to rotate, and thus, the plurality of second helical gears 33 arranged on the transmission wheel are driven to synchronously rotate, the plurality of first helical gears 32 are driven to synchronously rotate, and thus, the roller 111 of the roller set 11 is driven to synchronously rotate, so that the substrate 100 is conveyed along the first direction. As an alternative, the output shaft of the first driving member 31 is connected to one end of the transmission shaft 34, so as to drive the plurality of second bevel gears 33 on the transmission shaft 34 to rotate synchronously, and drive the plurality of first bevel gears 32 to rotate synchronously, so as to drive the rollers 111 of the plurality of roller groups 11 to rotate synchronously, so as to convey the substrate 100 along the first direction. As an alternative, the transmission assembly may also be replaced with a worm gear assembly.

As an alternative, the first driving assembly 3 includes a plurality of driving groups sequentially arranged at intervals along the first direction, and the driving groups can drive the rollers 111 of the at least one roller group 11 to rotate on the mounting base 2. It will be appreciated that the plurality of roller sets 11 may be divided into a plurality of roller sets, each roller set including at least one roller set 11, the plurality of roller sets being disposed in one-to-one correspondence with the plurality of drive sets. Thus, the number of roller groups 11 for conveying the substrate 100 is conveniently controlled. Specifically, when the number of the roller groups 11 in the roller group set is one, the driving group drives the wheel shaft at the first end of the roller group 11 to rotate, so as to drive the roller group 11 to rotate; when the number of the roller groups 11 of the roller group set is two or more, the third driving piece of each driving group drives each roller group 11 of the corresponding roller group set to rotate through the bevel gear transmission assembly or the worm gear transmission assembly.

The number of the roller assemblies 1 is plural, and the roller assemblies 1 are distributed at intervals along the first direction. Specifically, in this embodiment, as shown in fig. 1, only one first driving member 31 is provided, and the transmission shafts 34 of any two adjacent roller assemblies 1 are in transmission connection through the second universal joint 15, so that the first driving member 31 synchronously drives the roller assemblies 11 of the plurality of roller assemblies 1 to synchronously rotate.

As shown in fig. 2, 3 and 5, the substrate conveying device further includes an anti-toppling mechanism 4, the anti-toppling mechanism 4 is disposed above the conveying mechanism at intervals along a third direction, the substrate 100 is located between the anti-toppling mechanism 4 and the conveying mechanism, the anti-toppling mechanism 4 can define a position of the substrate 100, and the third direction is parallel to a height direction of the mounting base 2. Thus, the risk of damage to the substrate 100 and/or the substrate transfer apparatus can be reduced.

Specifically, as shown in fig. 2, 3 and 5, the anti-toppling mechanism 4 includes a second driving member 41 disposed on the mounting base 2, and a first anti-toppling member 42 connected to an output shaft of the second driving member 41, where the second driving member 41 can drive the first anti-toppling member 42 to move along a third direction, and the substrate 100 can abut against the first anti-toppling member 42. Specifically, the second driving member 41 drives the first anti-toppling member 42 to move above the substrate 100 along the third direction, but not contact with the substrate 100, when the substrate 100 topples, the substrate 100 is abutted against the first anti-toppling member 42, and the first anti-toppling member 42 can prevent the substrate 100 and/or the substrate conveying device from being damaged due to continuous toppling of the substrate 100, and can facilitate rapid and efficient conveying of the substrate 100 by the conveying mechanism.

More specifically, as shown in fig. 2, 3 and 5, the first anti-toppling member 42 includes a first anti-toppling portion 421 and a second anti-toppling portion 422 connected to each other, the first anti-toppling portion 421 being capable of abutting against the top wall of the substrate 100, and the second anti-toppling portion 422 being capable of abutting against the side wall of the substrate 100. Specifically, in the present embodiment, the first anti-toppling portion 421 and the second anti-toppling portion 422 are perpendicular to each other.

More specifically, as shown in fig. 2, 3 and 5, the anti-toppling mechanism 4 further includes a second anti-toppling member 43 fixedly disposed on the mounting base 2, the second anti-toppling portion 422 and the second anti-toppling member 43 are distributed at intervals along the second direction, and the second anti-toppling member 43 can abut against the side wall of the substrate 100. By such arrangement, the first anti-toppling member 42 and the second anti-toppling member 43 cooperate, and the substrate 100 and/or the substrate conveying device can be prevented from being damaged due to toppling of the substrate 100 in various directions.

More specifically, the distance between the top wall of the substrate 100 and the first anti-toppling portion 421 in the third direction ranges from 3mm to 10mm. The distance between the second anti-toppling portion 422 and the sidewall of the substrate 100 in the second direction ranges from 3mm to 10mm. In the second direction, the distance between the second anti-toppling member 43 and the side wall of the substrate 100 ranges from 3mm to 10mm.

More specifically, as shown in fig. 5, the number of the anti-toppling mechanisms 4 is plural, and the plurality of anti-toppling mechanisms 4 are spaced apart in the first direction. Thereby preventing the substrate 100 and/or the substrate transfer apparatus from being damaged due to the substrate 100 being tilted in various directions throughout the process of transferring the substrate 100 in the first direction.

More specifically, the first anti-toppling portion 421 is provided with an elastic cushion at least at a portion that can be in contact with the substrate 100. At least a portion of the second anti-toppling portion 422 that can contact the substrate 100 is provided with an elastic cushion. At least a portion of the second anti-toppling member 43 that can contact the substrate 100 is provided with an elastic cushion. Damage to the substrate 100 can be further avoided.

The utility model also provides vacuum coating equipment which comprises the substrate conveying device.

In this embodiment, the mounting substrate 2 is a housing of a vacuum coating apparatus.

It is to be understood that the above examples of the present utility model are provided for clarity of illustration only and are not limiting of the embodiments of the present utility model. Various obvious changes, rearrangements and substitutions can be made by those skilled in the art without departing from the scope of the utility model. It is not necessary here nor is it exhaustive of all embodiments. Any modification, equivalent replacement, improvement, etc. which come within the spirit and principles of the utility model are desired to be protected by the following claims.

Claims (19)

1. Substrate conveying device for conveying a substrate (100), characterized by comprising a conveying mechanism comprising:

the roller assembly (1), the roller assembly (1) comprises a plurality of roller groups (11) which are distributed at intervals along a first direction, the roller groups (11) comprise a plurality of rollers (111) which are distributed at intervals along a second direction and are all rotatably arranged on the installation base body (2), at least two adjacent roller (111) wheel shafts are connected through a movable structure (112) along the axial direction of the rollers (111), the substrate (100) can be placed on the rollers (111), and the first direction is perpendicular to the second direction;

-a first drive assembly (3), the first drive assembly (3) being configured to rotate the rollers (111) of a plurality of roller sets (11) to the mounting base (2).

2. The substrate transport apparatus of claim 1, wherein the movable structure (112) comprises a universal drive structure.

3. The substrate conveying device according to claim 2, wherein the movable structure (112) comprises a synchronizing shaft (1122) and two first universal joints (1121), two ends of the synchronizing shaft (1122) are fixedly connected with one ends of the two first universal joints (1121), and the other ends of the two first universal joints (1121) are fixedly connected with the wheel shafts of the rollers (111).

4. The substrate conveying device according to claim 1, wherein the roller assembly (1) further comprises a first mounting seat (12) and a second mounting seat (13), a plurality of wheel shafts at first ends of the roller groups (11) along the axial direction are rotatably arranged on the first mounting seat (12), a plurality of wheel shafts at second ends of the roller groups (11) along the axial direction are rotatably arranged on the second mounting seat (13), and the second mounting seat (13) is configured to be capable of adjusting the height of the rollers (111) of one or more roller groups (11) along a third direction, and the third direction is parallel to the height direction of the mounting base body (2).

5. The substrate transport apparatus of claim 4, wherein the second mount (13) includes a plurality of adjustment seats (131) spaced apart along the first direction, the adjustment seats (131) including an adjustment base (1311) and an adjustment plate (1312) connected to the adjustment base (1311), the adjustment base (1311) being configured to be detachably connected to the mount base (2), the adjustment plate (1312) being configured to be rotatably connected to an axle of the second end of the roller set (11) in the axial direction.

6. The substrate transport apparatus of claim 5, wherein the second mount (13) further comprises a connection plate for connecting the adjustment seats (131) adjacent in the first direction.

7. The substrate transport apparatus of claim 5, wherein the second mount (13) further comprises an adjustment shim (132), the adjustment shim (132) is configured to be disposed at a junction of the adjustment base (1311) and the mounting base (2), and the adjustment shim (132) is located between the adjustment base (1311) and the mounting base (2).

8. The substrate conveying device according to claim 4, wherein the first mounting seat (12) and the second mounting seat (13) are provided with guide wheel sets, two guide wheel sets are distributed at intervals along the second direction, and a plurality of roller sets (11) are located between the two guide wheel sets.

9. The substrate conveying device according to claim 4, wherein the conveying mechanism further comprises a plurality of conveying wheel structures arranged at intervals along the first direction, the conveying wheel structures comprise a conveying shaft and conveying wheels arranged on the conveying shaft, and two ends of the conveying shaft are respectively connected with the first mounting seat (12) and the second mounting seat (13).

10. The substrate transport apparatus of any of claims 4-9, wherein the first drive assembly (3) is configured to drive rollers (111) of a plurality of the roller sets (11) to rotate synchronously with the mounting base (2).

11. The substrate conveying device according to claim 10, wherein the first driving assembly (3) comprises a first driving member (31) and a transmission assembly, the transmission assembly comprises a plurality of first bevel gears (32), a transmission shaft (34) rotatably arranged on the first mounting seat (12), and a plurality of second bevel gears (33) fixedly arranged on the transmission shaft (34), the plurality of first bevel gears (32) are arranged in one-to-one correspondence with the plurality of roller groups (11), the first bevel gears (32) are fixedly arranged on a wheel shaft at the first end, and the plurality of first bevel gears (32) are also arranged in one-to-one correspondence with the plurality of second bevel gears (33) and meshed;

the output shaft of the first driving piece (31) is in transmission connection with the wheel shaft of one of the roller groups (11); or, the output shaft of the first driving piece (31) is connected with one end of the transmission shaft (34).

12. The substrate transport apparatus of any one of claims 1 to 9, wherein the first drive assembly (3) comprises a plurality of drive groups sequentially spaced apart along the first direction, the drive groups being capable of rotating the rollers (111) of at least one of the roller groups (11) on the mounting substrate (2).

13. The substrate transport apparatus according to any one of claims 1 to 9, wherein the number of the roller assemblies (1) is plural, and the plurality of the roller assemblies (1) are spaced apart along the first direction.

14. The substrate transport apparatus according to any one of claims 1 to 9, further comprising an anti-toppling mechanism (4), the anti-toppling mechanism (4) being disposed above the transport mechanism at intervals along a third direction, the substrate (100) being located between the anti-toppling mechanism (4) and the transport mechanism, the anti-toppling mechanism (4) being capable of defining a position of the substrate (100), the third direction being parallel to a height direction of the mounting base (2).

15. The substrate conveying device according to claim 14, wherein the anti-toppling mechanism (4) comprises a second driving member (41) arranged on the mounting base body (2), and a first anti-toppling member (42) connected to an output shaft of the second driving member (41), the second driving member (41) can drive the first anti-toppling member (42) to move along the third direction, and the substrate (100) can be abutted with the first anti-toppling member (42).

16. The substrate transfer apparatus of claim 15, wherein the first anti-toppling member (42) includes a first anti-toppling portion (421) and a second anti-toppling portion (422) connected, the first anti-toppling portion (421) being abuttable against a top wall of the substrate (100), the second anti-toppling portion (422) being abuttable against a side wall of the substrate (100).

17. The substrate conveying device according to claim 16, wherein the anti-toppling mechanism (4) further comprises a second anti-toppling member (43) fixedly arranged on the mounting base body (2), the second anti-toppling portion (422) and the second anti-toppling member (43) are distributed at intervals along the second direction, and the second anti-toppling member (43) can be abutted against a side wall of the substrate (100).

18. The substrate transport apparatus of claim 14, wherein the number of the anti-toppling mechanisms (4) is plural, and the plurality of anti-toppling mechanisms (4) are spaced apart along the first direction.

19. Vacuum coating apparatus comprising a substrate conveying device according to any one of claims 1 to 18.