CN219417824U

CN219417824U - Miniature optical bench

Info

Publication number: CN219417824U
Application number: CN202222961021.2U
Authority: CN
Inventors: 杨黎; 杨思嘉
Original assignee: Shaanxi Zhiyuan Kefeng Photoelectric Technology Co ltd
Current assignee: Shaanxi Zhiyuan Kefeng Photoelectric Technology Co ltd
Priority date: 2022-11-08
Filing date: 2022-11-08
Publication date: 2023-07-25
Anticipated expiration: 2032-11-08

Abstract

The utility model discloses a miniature optical bench which comprises a microscope component, an objective table component, a collimator component and a mounting platform component, wherein the objective table component is positioned between the microscope component and the collimator component and is used for placing tested equipment, and the microscope component, the objective table component and the collimator component are sequentially arranged on the mounting platform component. The utility model provides a miniature optical bench for measuring image quality and optical basic quantity of miniature optical parts, components and optical systems, which has the advantages of high accuracy in acquiring data, abundant accessory specifications, multiple measurement items and compact structure.

Description

Miniature optical bench

Technical Field

The utility model belongs to the technical field of optical measurement, and particularly relates to a miniature optical bench.

Background

Image quality study of micro optical parts, components and optical systems and measurement of optical basic elements are important, and when conventional optical bench measurement is used, the measurement range of the conventional optical bench is wider, so that the data accuracy of the micro optical parts, components and optical systems is reduced and measurement resources are wasted.

Disclosure of Invention

Accordingly, a primary object of the present utility model is to provide a micro optical bench.

In order to achieve the above purpose, the technical scheme of the utility model is realized as follows:

the embodiment of the utility model provides a miniature optical bench which comprises a microscope component, an objective table component, a collimator component and a mounting platform component, wherein the objective table component is positioned between the microscope component and the collimator component and is used for placing tested equipment, and the microscope component, the objective table component and the collimator component are sequentially arranged on the mounting platform component.

In the utility model, the installation platform assembly comprises an installation platform, a height table and adjusting bases, wherein four adjusting bases are arranged below the installation platform, and the height table is arranged on one side above the installation platform.

The microscope assembly comprises a microscope, a fixed seat pressing ring, a fixed seat, a butterfly screw, a first manual translation table, a double-shaft inclined translation table, a lifting table and a second manual translation table, wherein the lifting table is arranged on the second manual translation table, the double-shaft inclined translation table is arranged on the lifting table, the first manual translation table is arranged on the double-shaft inclined translation table, the fixed seat is arranged on the first manual translation table, and the microscope is arranged on the fixed seat through the fixed pressing ring.

In the present utility model, the microscope is preferably one of a reading microscope, a measurement microscope, a vision tube or a magnification meter.

Preferably, the objective table assembly comprises an objective table support, a manual translation table, a precision rotary table, a lifting table and a lifting table bottom plate, wherein the lifting table is arranged on the lifting table bottom plate, the precision rotary table is arranged on the lifting table, the manual translation table is arranged on the precision rotary table, and the objective table support is arranged on the manual translation table.

Preferably, the collimator assembly comprises an objective lens, a lens cone, a focusing cylinder, a reticle seat, a reticle, a light source, a support rod and a support seat, wherein the support rod is arranged on the support seat, the focusing cylinder is arranged on the support rod, the reticle seat is arranged on the focusing cylinder, the reticle is arranged on the reticle seat, the lens cone is arranged on the left side of the focusing cylinder, the objective lens is arranged in the lens cone, and the light source is arranged on the right side of the focusing cylinder.

In the utility model, preferably, the second manual translation stage, the lifting stage bottom plate and the supporting seat are sequentially fixed on the mounting platform.

Compared with the prior art, the utility model provides the miniature optical bench for measuring the image quality and the optical basic quantity of miniature optical parts, components and optical systems, and has the advantages of high accuracy in acquiring data, abundant accessory specifications, multiple measurement items and compact structure.

Drawings

FIG. 1 is a schematic diagram of a micro optical bench according to an embodiment of the present utility model;

FIG. 2 is a schematic diagram of a microscope assembly in a micro optical bench according to an embodiment of the utility model;

FIG. 3 is a schematic diagram of a stage in a micro optical bench according to an embodiment of the utility model;

FIG. 4 is a schematic diagram of a collimator assembly in a micro-optical bench according to an embodiment of the utility model;

fig. 5 is a schematic structural diagram of a mounting platform assembly in a micro optical bench according to an embodiment of the utility model.

Detailed Description

The present utility model will be described in further detail with reference to the drawings and examples, in order to make the objects, technical solutions and advantages of the present utility model more apparent. It should be understood that the specific embodiments described herein are for purposes of illustration only and are not intended to limit the scope of the utility model.

The embodiment of the utility model provides a miniature optical bench, which comprises a microscope component 1, an objective table component 2, a collimator component 3 and a mounting platform component 4, wherein the objective table component 2 is positioned between the microscope component 1 and the collimator component 3 and is used for placing tested equipment, and the microscope component 1, the objective table component 2 and the collimator component 3 are sequentially arranged on the mounting platform component 4.

In the above-mentioned scheme, the microscope assembly 1 observes the different types of reticles 35 in the collimator assembly 3 through the tested piece placed on the stage assembly 2, so as to obtain the image quality and the optical basic quantity measurement of various micro optical parts, components and optical systems.

As shown in fig. 5, the mounting platform assembly 4 includes a mounting platform 41, a height table 42 and an adjusting base 43, four adjusting bases 43 are disposed below the mounting platform 41, and the height table 42 is disposed on one side above the mounting platform 41.

As shown in fig. 2, the microscope assembly 1 includes a microscope 11, a fixed seat pressing ring 12, a fixed seat 13, a butterfly screw 14, a first manual translation stage 15, a dual-shaft tilting translation stage 16, a lifting stage 17 and a second manual translation stage 18, wherein the lifting stage 17 is arranged on the second manual translation stage 18, the dual-shaft tilting translation stage 16 is arranged on the lifting stage 17, the first manual translation stage 15 is arranged on the dual-shaft tilting translation stage 16, the fixed seat 13 is arranged on the first manual translation stage 15, and the microscope 11 is arranged on the fixed seat 13 through the fixed pressing ring 12.

As shown in fig. 2, the microscope 11 is one of a reading microscope, a measuring microscope, a vision tube, or a magnification meter.

In the above-described scheme, the reading microscope 111, the measurement microscope 112 are used to observe the imaging of the micro optical parts, components and optical systems on the reticle 35 in the collimator assembly 3, and the vision tube 113 and the magnification meter 114 can measure the vision, parallax, magnification, exit pupil diameter and exit pupil distance of the micro optical parts, components and optical systems.

During measurement, the microscope 11 is selected according to detection items, the butterfly screw 14 is loosened, the fixed seat pressing ring 12 is opened, the butterfly screw 14 is screwed after the selected microscope 11 is placed, the center height of the microscope 11 is adjusted through the lifting table 17, the pitching angle and the horizontal rotation angle of the microscope 11 are adjusted through the double-shaft inclined translation table 16, the left-right movement amount of the microscope 11 is adjusted through the first manual translation table 15, the central axis of the microscope 11 coincides with the central axis of a measured piece on the objective table 2 and the central axis of the collimator tube assembly 3, and the distance between the microscope 11 and the measured piece on the objective table 2 is adjusted through the second manual translation table 18.

As shown in fig. 3, the stage assembly 2 includes a stage support 21, a manual translation stage 22, a precision turntable 23, a lift table 24, and a lift table bottom plate 25, wherein the lift table bottom plate 25 is provided with the lift table 24, the lift table 24 is provided with the precision turntable 23, the precision turntable 23 is provided with the manual translation stage 22, and the manual translation stage is provided with the stage support 21.

In the above scheme, the measured piece is placed on the objective table bracket 21 during measurement, the left and right movement amount of the measured piece is adjusted through the manual translation table 22, the horizontal rotation angle of the measured piece is adjusted through the precision rotary table 22, and then the center height of the measured piece is adjusted through the lifting table 24, and the objective table assembly 2 can meet the three-way adjusting function, so that an operator can more quickly adjust the measured piece in place during detection.

As shown in fig. 4, the collimator assembly 3 includes an objective 31, a lens barrel 33, a focusing cylinder 32, a reticle seat 34, a reticle 35, a light source 36, a support rod 37 and a support seat 38, the support seat 38 is provided with the support rod 37, the support rod 37 is provided with the focusing cylinder 32, the focusing cylinder 32 is provided with the reticle seat 34, the reticle seat 34 is provided with the reticle 35, the left side of the focusing cylinder 32 is provided with the lens barrel 33, the lens barrel 33 is provided with the objective 31, the right side of the focusing cylinder 32 is provided with the light source 36, and the reticle 35 is located on the focal plane of the objective 31 by moving and adjusting the focusing cylinder 32.

Further, the types of the reticles 35 include a cross reticle, a glass Luo Ban, a resolution plate and a star point plate, the cross reticle is used for parallax of the measured object, the glass Luo Ban is matched with the reading microscope 111 and the measuring microscope 112 to measure focal length of the measured object, the resolution plate and the star point plate are used for measuring resolution of the measured object, and the corresponding reticle 35 is selected according to measurement items.

As shown in fig. 1, the second manual translation stage 18, the lifting stage base plate 25, and the support base 38 are sequentially fixed to the mounting platform.

Specifically, the levelness of the mounting platform 41 is adjusted to meet the requirement through the adjusting base 42, and the central axes of the measured piece and the microscope and the central axis of the collimator assembly 3 are adjusted to be on the same optical axis before detection.

The same or similar reference numerals in the drawings of the present embodiment correspond to the same or similar components; in the description of the present utility model, it should be understood that the directions or positional relationships indicated by the terms "upper", "lower", "left", "right", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present utility model and simplifying the description, and are not indicative or implying that the devices or elements being referred to must have specific directions, be constructed and operated in specific directions, so that the terms describing the positional relationships in the drawings are merely for exemplary illustration, are not to be construed as limitations of the present patent, and the specific meanings of the terms described above may be understood by those of ordinary skill in the art according to specific circumstances.

It should be noted that, in this document, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one … …" does not exclude the presence of other like elements in a process, article or apparatus that comprises the element.

The foregoing description is only of the preferred embodiments of the present utility model, and is not intended to limit the scope of the present utility model.

Claims

1. The miniature optical bench is characterized by comprising a microscope component, an objective table component, a collimator component and a mounting platform component, wherein the objective table component is positioned between the microscope component and the collimator component and is used for placing tested equipment, and the microscope component, the objective table component and the collimator component are sequentially arranged on the mounting platform component.

2. The miniature optical bench of claim 1 wherein said mounting platform assembly comprises a mounting platform, a height stage and an adjustment base, four adjustment bases being disposed below said mounting platform, said height stage being disposed on a side above said mounting platform.

3. The micro optical bench of claim 1 or 2, wherein the microscope assembly comprises a microscope, a fixed base clamping ring, a fixed base, a butterfly screw, a first manual translation stage, a dual-axis tilt translation stage, a lifting stage, and a second manual translation stage, wherein the lifting stage is provided with the lifting stage, the dual-axis tilt translation stage is provided with the first manual translation stage, the fixed base is provided with the first manual translation stage, and the microscope is provided with the fixed base through the fixed clamping ring.

4. A micro optical bench according to claim 3 wherein said microscope is one of a reading microscope, a measuring microscope, a vision tube or a magnification meter.

5. The micro optical bench of claim 4 wherein the stage assembly comprises a stage support, a manual translation stage, a precision turret, a lift table and a lift table base plate, the lift table base plate having a lift table with the precision turret thereon, the precision turret having a manual translation stage thereon, the manual translation stage having a stage support thereon.

6. The micro optical bench of claim 5 wherein the collimator assembly comprises an objective lens, a lens barrel, a focusing barrel, a reticle holder, a reticle, a light source, a support bar and a support base, wherein the support base is provided with the support bar, the support bar is provided with the focusing barrel, the focusing barrel is provided with the reticle holder, the reticle holder is provided with the reticle, the lens barrel is arranged on the left side of the focusing barrel, the objective lens is arranged in the lens barrel, and the light source is arranged on the right side of the focusing barrel.

7. The miniature optical bench of claim 6 wherein said second manual translation stage, lift stage base plate and support stage are sequentially secured to a mounting platform.