CN219416583U - Vacuum coating cavity leak detection equipment - Google Patents
Vacuum coating cavity leak detection equipment Download PDFInfo
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- CN219416583U CN219416583U CN202320556841.5U CN202320556841U CN219416583U CN 219416583 U CN219416583 U CN 219416583U CN 202320556841 U CN202320556841 U CN 202320556841U CN 219416583 U CN219416583 U CN 219416583U
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
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- Y02E60/10—Energy storage using batteries
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Abstract
The utility model discloses a vacuum coating cavity leakage detection device, which relates to the field of vacuum cavity leakage detection, and aims to solve the technical problems that a vacuum cavity pressurization leakage detection probe is easy to miss and fatigue in a manual holding mode, and comprises a bottom beam and a vertical frame fixedly connected to the left end of the bottom beam, wherein a longitudinal guide rail is arranged at the right end of the vertical frame, a vacuum leakage detector is arranged below the bottom beam, a first linear motor is arranged at the right end of the longitudinal guide rail, a transverse beam is arranged at the right end of a shell of the first linear motor, transverse guide rails are arranged at the front end and the rear end of the transverse beam, a second linear motor is arranged on the surface of the transverse guide rail, an assembly frame is fixedly connected between the lower ends of the shells of the second linear motor, and a vacuum leakage detection probe electrically connected with the vacuum leakage detector is arranged on the inner side of the assembly frame.
Description
Technical Field
The utility model belongs to the field of vacuum cavity leakage detection, and particularly relates to vacuum coating cavity leakage detection equipment.
Background
The vacuum equipment of the coated glass production line is one of key equipment in the coated glass production line, the low leak rate of the vacuum and cavity of the coated section Gao Bende is the premise and the guarantee of producing high-quality coated glass, in order to guarantee background vacuum and leak rate, the vacuum cavity is required to adopt an airtight welding mode, the requirements on weld quality are extremely strict, the uniformity and stability of a coated glass film layer can be finally guaranteed only by reaching the key process technology, the traditional leak detection method mainly comprises a pressurizing leak detection method and a vacuum leak detection method, the pressurizing leak detection method is used for filling halogen gas with certain pressure into a detected container, when a leak exists on the container, the gas escapes from the leak, and when the leak is detected, the leak is searched outside by using a probe, but the current pressurizing leak detection probe is realized by manually holding the probe, the leak area is easy to exist when the probe is searched, and the fatigue degree of an operator is also increased when the probe is held for a long time.
The present Chinese patent publication No. CN206609571U discloses a vacuum coating cavity leak detection system, comprising: the device comprises a vacuum cavity to be detected, a leak detection device and an electric control system, wherein the leak detection device is connected to the lower side of the vacuum cavity to be detected, the electric control system is connected to control the leak detection device, a vacuum breaking device I and a vacuum detection element I are arranged on the side wall of the vacuum cavity to be detected, the leak detection device comprises a high vacuum pump, a forepump group I, a forepump group II, a vacuum detection element, a vacuum breaking device, a helium mass spectrum leak detector and a helium spraying system, the high vacuum pump is directly arranged on the side wall of the vacuum cavity to be detected through a flange plate, the forepump group I and the forepump group II are connected in series through a vacuum pipeline, and then are connected in series with the high vacuum pump through a high vacuum butterfly valve I; the utility model adopts an automatic control system and has a one-key operation function for the electric components; the utility model has the advantages of high leakage detection sensitivity, accurate positioning of the position of the leakage hole, quantitative judgment of the size of the leakage point and the like, and simultaneously has the advantages of simple structure and easy operation.
Therefore, the leakage and fatigue conditions are easy to occur by manually holding the leakage point searching mode aiming at the vacuum cavity pressurizing leakage detecting probe, the novel leakage detecting equipment is developed, the leakage detecting probe is driven to migrate on the surface of the vacuum cavity by utilizing the linear motor, the manual holding of the probe is avoided, and the leakage detecting is finer.
Disclosure of Invention
(1) Technical problem to be solved
Aiming at the defects of the prior art, the utility model aims to provide vacuum coating cavity leakage detection equipment, which aims to solve the technical problems that a vacuum cavity pressurization leakage detection probe is easy to miss and fatigue in a mode of manually holding to find leakage points.
(2) Technical proposal
In order to solve the technical problems, the utility model provides vacuum coating cavity leakage detection equipment which comprises a bottom beam and a vertical frame fixedly connected to the left end of the bottom beam, wherein a longitudinal guide rail is arranged at the right end of the vertical frame, a vacuum leakage detector is arranged below the bottom beam, a first linear motor is arranged at the right end of the longitudinal guide rail, a cross beam is arranged at the right end of a shell of the first linear motor, transverse guide rails are arranged at the front end and the rear end of the cross beam, a second linear motor is arranged on the surface of the transverse guide rails, an assembly frame is fixedly connected between the lower ends of the shells of the second linear motor, and a vacuum leakage detection probe electrically connected with the vacuum leakage detector is arranged at the inner side of the assembly frame.
When the vacuum coating cavity leak detection equipment adopting the technical scheme is used, a user places a vacuum coating glass material on the rotary table, enables the movable support to move towards the fixed support through the elastic thrust of the spring, clamps and locks the bottom end of the vacuum coating glass material, pumps halogen gas into the vacuum coating glass material through the pumping equipment, simultaneously starts the first linear motor and the second linear motor to control the vacuum leak detection probe to continuously transversely and longitudinally move in a rectangular plane space formed by the bottom beam and the vertical frame, detects the surface of the vacuum coating glass material, searches for a leak point of escaping gas, drives the rotary table to horizontally rotate 180 degrees after the detection of the side of the vacuum coating glass material is finished, drives the vacuum coating glass material to turn over a plane, and inspects the other side through the vacuum leak detection probe.
Further, the upper end of the bottom beam is provided with a buffer pad, the lower end of the bottom beam is connected with a support in a bilateral symmetry manner, the vacuum leak detector is arranged between the supports, the buffer pad is made of flexible foam materials and is used for protecting the vacuum leak detection probe above and preventing the vacuum leak detection probe from being damaged by longitudinal movement and extrusion on the bottom beam.
Further, the back end of the bottom beam is fixedly connected with a platform plate, the upper end of the platform plate is provided with a rotary table, the lower end of the rotary table is provided with a driving motor, the rotary table is fixedly connected with the upper end of a power output element of the driving motor, the driving motor controls the platform plate to horizontally rotate, and the rotation angle of each time is 180 degrees.
Further, the front side of the upper end of the rotary table is fixedly connected with an end plate, the upper end of the rotary table is fixedly connected with a fixed support, the fixed support is arranged on the rear side of the end plate, and the front end and the rear end of the fixed support are of planar structures and are integrally attached to the surface of the vacuum coating material.
Further, a movable support with the same structure as the fixed support is arranged between the end plate and the fixed support, gaskets are arranged on one opposite sides of the movable support and the fixed support, and the movable support is matched with the fixed support to clamp and lock the movable support on the front side and the rear side of the bottom end of the vacuum coating material in an opposite mode, so that the vacuum coating material is prevented from toppling.
Further, the end plate rear end fixedly connected with slide rail, the movable support inboard offered with the jack of slide rail adaptation, the slide rail set up in the jack is inboard, the movable support plays the guide effect through the horizontal grafting of slide rail and jack when moving on the revolving platform.
Further, a spring is fixedly connected between the end plate and the movable support, the spring is arranged on the outer side of the sliding rail, and the spring has elastic elongation performance and generates horizontal pushing acting force on the movable support to enable the movable support to be close to the fixed support.
(3) Advantageous effects
Compared with the prior art, the utility model has the beneficial effects that: according to the vacuum coating cavity leak detection equipment, the vacuum leak detection probes driven by the horizontal and vertical linear motors are adopted to carry out continuous sliding detection on the surface of the vacuum coating cavity, the detection range is complete and fine, manual handheld operation is avoided, and fatigue is relieved; the fixing piece of the rotary table and the vacuum cavity is used for fixing the vacuum coating cavity material, and meanwhile, the direction of the vacuum coating cavity material relative to the vacuum leak detection probe can be controlled to horizontally rotate, so that the two sides of the vacuum cavity can be automatically and sequentially detected, and the detection efficiency is high.
Drawings
FIG. 1 is a schematic diagram of an assembly structure of an embodiment of a vacuum coating cavity leak detection apparatus according to the present utility model;
FIG. 2 is a schematic diagram of a connection structure between a bottom beam and a vertical frame of an embodiment of a vacuum coating cavity leak detection device according to the present utility model;
FIG. 3 is a schematic view of a mounting structure of a cross beam and an assembly frame of an embodiment of a vacuum coating cavity leak detection device of the present utility model;
fig. 4 is a schematic structural view of a turntable in an embodiment of a leak detection apparatus for a vacuum coating cavity according to the present utility model.
The marks in the drawings are: 1. a bottom beam; 2. a vertical frame; 3. a longitudinal guide rail; 4. a vacuum leak detector; 5. a first linear motor; 6. a cross beam; 7. a transverse guide rail; 8. a second linear motor; 9. an assembly frame; 10. a vacuum leak detection probe; 11. a cushion pad; 12. a bracket; 13. a platform plate; 14. a rotary table; 15. a driving motor; 16. an end plate; 17. a fixed support; 18. a movable support; 19. a gasket; 20. a slide rail; 21. a jack; 22. and (3) a spring.
Detailed Description
The embodiment is used for vacuum coating cavity leak detection equipment, the assembly structure schematic diagram of the equipment is shown in fig. 1, the connection structure schematic diagram of a bottom beam 1 and a vertical frame 2 is shown in fig. 2, the installation structure schematic diagram of a cross beam 6 and an assembly frame 9 is shown in fig. 3, the structure schematic diagram of a rotary table 14 is shown in fig. 4, the leak detection equipment comprises the bottom beam 1 and the vertical frame 2 fixedly connected to the left end of the bottom beam 1, a longitudinal guide rail 3 is installed at the right end of the vertical frame 2, a vacuum leak detector 4 is arranged below the bottom beam 1, a first linear motor 5 is installed at the right end of the longitudinal guide rail 3, a cross beam 6 is installed at the right end of a shell of the first linear motor 5, a transverse guide rail 7 is installed at the front end and the rear end of the cross beam 6, a second linear motor 8 is installed on the surface of the transverse guide rail 7, an assembly frame 9 is fixedly connected between the lower ends of the shells of the second linear motor 8, and a vacuum leak detector 10 electrically connected with the vacuum leak detector 4 is installed at the inner side of the assembly frame 9.
For the specific embodiment, the vacuum leak detector 4 and the vacuum leak detector probe 10 in the scheme are complete equipment matched with each other, and are digital display type negative pressure vacuum leak detectors controlled by a microcomputer, and the vacuum leak detector is specifically referred to a model LJD-4000 leak detector commonly used in the market at present, the vacuum leak detector probe 10 is made of platinum, halogen gas is continuously filled into a vacuum coating cavity, if a leak point exists, the halogen gas escapes from the leak point to be contacted with the heated vacuum leak detector probe 10, positive ion emission rapidly grows, and the microcomputer receives the signal change to complete detection.
The vacuum leak detector 4 is arranged between the brackets 12, the rear end of the bottom beam 1 is fixedly connected with a platform plate 13, the upper end of the platform plate 13 is provided with a rotary table 14, the lower end of the rotary table 14 is provided with a driving motor 15, the rotary table 14 is fixedly connected with the upper end of a power output element of the driving motor 15, the front side of the upper end of the rotary table 14 is fixedly connected with a head plate 16, the upper end of the rotary table 14 is fixedly connected with a fixed support 17, the fixed support 17 is arranged at the rear side of the head plate 16, the buffer 11 is made of flexible foam materials and used for protecting the vacuum leak detector 10 above and preventing the vacuum leak detector from being longitudinally moved and extruded on the bottom beam 1 from being damaged, the driving motor 15 controls the platform plate 13 to horizontally rotate, the rotation angle of each time is 180 degrees, and the front end and the rear end of the fixed support 17 are of the flat structure and are integrally attached to the surface of a vacuum coating material.
Meanwhile, a movable support 18 with the same structure as the fixed support 17 is arranged between the end plate 16 and the fixed support 17, a gasket 19 is arranged on one side, opposite to the fixed support 17, of the movable support 18, a sliding rail 20 is fixedly connected to the rear end of the end plate 16, a jack 21 matched with the sliding rail 20 is formed in the inner side of the movable support 18, a spring 22 is fixedly connected between the end plate 16 and the movable support 18, the spring 22 is arranged on the outer side of the sliding rail 20, the movable support 18 is matched with the fixed support 17 to clamp and lock the movable support 18 on the front side and the rear side of the bottom end of a vacuum coating material, the vacuum coating material is prevented from toppling, the movable support 18 plays a guiding role through horizontal insertion of the sliding rail 20 and the jack 21 when moving on the rotary table 14, the spring 22 has elastic elongation performance, and horizontal pushing acting force is generated on the movable support 18 to enable the movable support 18 to be close to the fixed support 17.
When the vacuum coating cavity leak detection equipment adopting the technical scheme is used, a user puts vacuum coating glass material on the rotary table 14, the movable support 18 moves towards the fixed support 17 through the elastic thrust of the spring 22, the bottom end of the vacuum coating glass material is clamped and locked, then halogen gas is pumped into the vacuum coating glass material through the pumping equipment, the first linear motor 5 and the second linear motor 8 are started simultaneously to control the vacuum leak detection probe 10 to continuously move transversely and longitudinally in a rectangular plane space formed by the bottom beam 1 and the vertical frame 2, the surface of the vacuum coating glass material is detected, a leak point of escaping gas is found, after the detection of the side of the vacuum coating glass material is finished, the rotary table 14 is controlled by the driving motor 15 to rotate 180 degrees horizontally, the vacuum coating glass material overturning plane is driven, and the vacuum leak detection probe 10 is used for detecting the other side.
Claims (7)
1. The vacuum coating cavity leak detection equipment comprises a bottom beam (1) and a vertical frame (2) fixedly connected to the left end of the bottom beam (1); the vacuum leak detector is characterized in that a longitudinal guide rail (3) is arranged at the right end of the vertical frame (2), a vacuum leak detector (4) is arranged below the bottom beam (1), a first linear motor (5) is arranged at the right end of the longitudinal guide rail (3), a cross beam (6) is arranged at the right end of a shell of the first linear motor (5), transverse guide rails (7) are arranged at the front end and the rear end of the cross beam (6), a second linear motor (8) is arranged on the surface of the transverse guide rails (7), an assembly frame (9) is fixedly connected between the lower ends of the shells of the second linear motor (8), and a vacuum leak detector (10) electrically connected with the vacuum leak detector (4) is arranged on the inner side of the assembly frame (9).
2. The vacuum coating cavity leak detection device according to claim 1, wherein a buffer pad (11) is arranged at the upper end of the bottom beam (1), supports (12) are symmetrically connected at the lower end of the bottom beam (1), and the vacuum leak detector (4) is arranged between the supports (12).
3. The vacuum coating cavity leakage detection device according to claim 1, wherein a platform plate (13) is fixedly connected to the rear end of the bottom beam (1), a rotary table (14) is arranged at the upper end of the platform plate (13), a driving motor (15) is arranged at the lower end of the rotary table (14), and the rotary table (14) is fixedly connected to the upper end of a power output element of the driving motor (15).
4. A vacuum coating cavity leakage detection device according to claim 3, wherein a tip plate (16) is fixedly connected to the front side of the upper end of the rotary table (14), a fixing support (17) is fixedly connected to the upper end of the rotary table (14), and the fixing support (17) is arranged on the rear side of the tip plate (16).
5. The vacuum coating cavity leakage detection device according to claim 4, wherein a movable support (18) with the same structure as the fixed support (17) is arranged between the end plate (16) and the fixed support (17), and a gasket (19) is arranged on one side of the movable support (18) opposite to the fixed support (17).
6. The vacuum coating cavity leakage detection device according to claim 5, wherein a sliding rail (20) is fixedly connected to the rear end of the end plate (16), a jack (21) adapted to the sliding rail (20) is formed in the inner side of the movable support (18), and the sliding rail (20) is arranged in the inner side of the jack (21).
7. The vacuum coating cavity leakage detection device according to claim 6, wherein a spring (22) is fixedly connected between the end plate (16) and the movable support (18), and the spring (22) is arranged outside the sliding rail (20).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320556841.5U CN219416583U (en) | 2023-03-15 | 2023-03-15 | Vacuum coating cavity leak detection equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320556841.5U CN219416583U (en) | 2023-03-15 | 2023-03-15 | Vacuum coating cavity leak detection equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219416583U true CN219416583U (en) | 2023-07-25 |
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ID=87208141
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202320556841.5U Active CN219416583U (en) | 2023-03-15 | 2023-03-15 | Vacuum coating cavity leak detection equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219416583U (en) |
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2023
- 2023-03-15 CN CN202320556841.5U patent/CN219416583U/en active Active
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