CN219409987U - Crystal growth furnace for silicon carbide - Google Patents
Crystal growth furnace for silicon carbide Download PDFInfo
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- CN219409987U CN219409987U CN202320340172.8U CN202320340172U CN219409987U CN 219409987 U CN219409987 U CN 219409987U CN 202320340172 U CN202320340172 U CN 202320340172U CN 219409987 U CN219409987 U CN 219409987U
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- upper cover
- silicon carbide
- guide
- guide post
- gear
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P20/00—Technologies relating to chemical industry
- Y02P20/10—Process efficiency
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Abstract
The application discloses a crystal growth furnace for silicon carbide, which comprises an upper cover, a furnace body and an upper cover opening and closing mechanism, wherein the upper cover is arranged on the furnace body; the upper cover opening and closing mechanism is used for opening or closing the upper cover and comprises a first drive, a guide post and a rotating mechanism, wherein the first drive is fixedly arranged on the furnace body, and the drive end of the first drive is connected with the first end of the guide post and used for driving the guide post to lift so as to enable the upper cover to lift relative to the furnace body; the rotating mechanism is arranged at the second end of the guide post, and the driving end of the rotating mechanism is connected with the upper cover and used for driving the upper cover to rotate relative to the furnace body. The upper cover is opened and closed by arranging the upper cover opening and closing mechanism, so that labor is saved, safety is realized, and batch production is facilitated.
Description
Technical Field
The application belongs to the field of silicon carbide crystal growth, and particularly relates to a crystal growth furnace for silicon carbide.
Background
The crystal growth furnace is an apparatus for producing silicon carbide single crystals, in which high-purity silicon carbide fine powder and seed crystals are placed in a crucible in the crystal growth furnace, respectively, and the temperature in the crucible is controlled to produce silicon carbide single crystals.
The upper cover of the existing crystal growth furnace is opened and closed mostly by manual work, which is laborious and unsafe.
Disclosure of Invention
Aiming at the problem that the current crystal growth furnace is laborious to open and close and unsafe, the application provides a crystal growth furnace for silicon carbide.
A crystal growth furnace for silicon carbide comprises an upper cover, a furnace body and an upper cover opening and closing mechanism, wherein the upper cover is arranged on the furnace body; the upper cover opening and closing mechanism is used for opening or closing the upper cover and comprises a first drive, a guide post and a rotating mechanism, wherein the first drive is fixedly arranged on the furnace body, and the drive end of the first drive is connected with the first end of the guide post and used for driving the guide post to lift so as to enable the upper cover to lift relative to the furnace body; the rotating mechanism is arranged at the second end of the guide post, and the driving end of the rotating mechanism is connected with the upper cover and used for driving the upper cover to rotate relative to the furnace body.
The upper cover is opened and closed by arranging the upper cover opening and closing mechanism, so that labor is saved, safety is realized, and batch production is facilitated.
Optionally, the rotating mechanism comprises a second drive, a first gear, a second gear, a rotating shaft and a connecting block, the driving end of the second drive is connected with the first gear, the second gear is meshed with the first gear for transmission, the second gear is sleeved on the rotating shaft, and the rotating shaft is arranged at the second end of the guide post and can rotate relative to the guide post; the rotating shaft is fixedly connected with the upper cover through a connecting block.
The gear drive is adopted to drive the upper cover to rotate and open and close, the structure is simple and reliable, and the transmission efficiency is high.
Optionally, the rotating mechanism further comprises a mounting seat, and the rotating shaft is mounted at the second end of the guide post through the mounting seat; the connecting block is fixedly connected with the mounting seat.
Optionally, the upper cover opening and closing mechanism further comprises a limiting piece, a first limiting switch and a second limiting switch, wherein the limiting piece is fixedly arranged on the rotating shaft or the second gear; the first limit switch and the second limit switch are arranged on the mounting seat at intervals and used for limiting the rotation angle of the upper cover.
Through setting up spacing piece, first limit switch and second limit switch, carry out spacingly to the rotation angle of upper cover to prevent the upper cover excessive rotation.
Optionally, the limiting piece is fan-shaped.
The shape of the limit piece is designed into a fan shape, and the first limit switch and the second limit switch can be matched better in the rotating process.
Optionally, the upper cover opening and closing mechanism further comprises a guide mounting seat, and the guide column is slidably arranged in the guide mounting seat.
Through setting up guide mount pad installation guide post, simple structure has better guidance quality to the guide post.
Optionally, the upper cover opening and closing mechanism further comprises an auxiliary guiding unit and/or a buffer unit;
the auxiliary guide unit comprises a guide rod, and the guide rod is arranged parallel to the guide column and is used for guiding the lifting of the guide column;
the buffer unit comprises a buffer piece, the extension direction of the buffer piece is parallel to the extension direction of the guide post, and the buffer piece is used for buffering the lifting of the guide post.
By arranging the auxiliary guide unit, the guide column is more stable when lifting; through setting up buffer unit for there is the buffering after the guide post is in the time of going up and down, makes the lid of upper cover and furnace body close no impact, and is more steady.
Optionally, the upper cover opening and closing mechanism further comprises a locking mechanism, the locking mechanism comprises a first caliper, a second caliper and a pull rod, the first caliper is fixedly connected to the side wall of the furnace body, and the pull rod is hinged to the first caliper and the second caliper respectively and used for driving the second caliper to lock or unlock the upper cover.
Through setting up locking mechanism, lock upper cover and furnace body, simple structure is reliable.
Optionally, the rotary mechanism includes a rotary cylinder, the rotary cylinder is fixedly arranged at the second end of the guide post, and the driving end of the rotary cylinder is fixedly connected with the upper cover.
The rotary cylinder is adopted to drive the upper cover to rotate and open and close, the installation is convenient, and the structure is simple and reliable.
Alternatively, the first drive is any one of a cylinder, an electric cylinder, or a motor.
Optionally, the crystal growth furnace for silicon carbide further comprises at least one vacuum gauge arranged on the upper cover and used for measuring the vacuum degree in the crystal growth furnace for silicon carbide.
Through setting up the vacuum gauge, can in time monitor the vacuum degree in the long brilliant stove for the carborundum as required.
Drawings
FIG. 1 is a schematic diagram of one embodiment of a crystal growth furnace for silicon carbide;
FIG. 2 is a schematic view of an embodiment of an upper cover opening and closing mechanism;
FIG. 3 is a schematic view of another embodiment of an upper cover opening and closing mechanism;
in the figure: the upper cover 1, the furnace body 2, the upper cover opening and closing mechanism 3, the first drive 31, the guide post 32, the rotating mechanism 33, the second drive 331, the first gear 332, the second gear 333, the rotating shaft 334, the connecting block 335, the mounting base 336, the limiting piece 337, the first limiting switch 338, the second limiting switch 339, the guide mounting base 34, the locking mechanism 35, the first caliper 351, the second caliper 352, the pull rod 353, the auxiliary guide unit 36, the guide rod 361, the first mounting plate 362, the linear bearing 363, the buffer unit 37, the buffer 371, the second mounting plate 372, and the vacuum gauge 4.
Detailed Description
For the purposes, technical solutions and advantages of the embodiments of the present application, the technical solutions in the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. Wherein the described embodiments are some, but not all, of the embodiments of the present application. Thus, the following detailed description of the embodiments of the present application, as provided in the accompanying drawings, is not intended to limit the scope of the application, as claimed, but is merely representative of selected embodiments of the application.
The present application will be described in detail hereinafter with reference to the accompanying drawings in conjunction with embodiments. It should be noted that, in the case of no conflict, the embodiments and features in the embodiments may be combined with each other.
Aiming at the problem that the current crystal growth furnace is laborious to open and close and unsafe, the application provides a crystal growth furnace for silicon carbide.
As shown in fig. 1-2, the crystal growth furnace for silicon carbide comprises an upper cover 1, a furnace body 2 and an upper cover opening and closing mechanism 3, wherein the upper cover 1 is arranged on the furnace body 2; the upper cover opening and closing mechanism 3 is used for opening or closing the upper cover 1, the upper cover opening and closing mechanism 3 comprises a first drive 31, a guide column 32 and a rotating mechanism 33, the first drive 31 is fixedly arranged on the furnace body 2, and the driving end of the first drive 31 is connected with the first end of the guide column 32 and is used for driving the guide column 32 to lift so as to enable the upper cover 1 to lift relative to the furnace body 2; the rotating mechanism 33 is disposed at the second end of the guide post 32, and the driving end of the rotating mechanism 33 is connected to the upper cover 1, so as to drive the upper cover 1 to rotate relative to the furnace body 2.
The upper cover 1 is opened and closed by arranging the upper cover opening and closing mechanism 3, so that labor is saved, safety is realized, and batch production is facilitated.
Optionally, as shown in fig. 2, the rotation mechanism 33 includes a second driving 331, a first gear 332, a second gear 333, a rotating shaft 334 and a connecting block 335, where the driving end of the second driving 331 is connected with the first gear 332, the second gear 333 is meshed with the first gear 332 to drive, the second gear 333 is sleeved on the rotating shaft 334, the rotating shaft 334 is arranged at the second end of the guide post 32 and can rotate relative to the guide post 32, and a thrust roller bearing can be used to connect the rotating shaft 334 and the guide post 32; the rotating shaft 334 is fixedly connected with the upper cover 1 through a connecting block 335.
Specifically, the second driving device 331 drives the first gear 332 to rotate, the first gear 332 drives the second gear 333 to rotate, the second gear 333 drives the rotating shaft 334 to rotate, and the rotating shaft 334 drives the connecting block 335 to rotate, thereby opening and closing the upper cover 1.
The upper cover 1 is driven to rotate and open by adopting gear transmission, and the structure is simple and reliable and the transmission efficiency is high.
Optionally, the rotating mechanism 33 further includes a mounting base 336, and the rotating shaft 334 is mounted on the second end of the guide post 32 through the mounting base 336; the connection block 335 is fixedly connected to the mounting block 336.
Optionally, the upper cover opening and closing mechanism 3 further includes a limiting piece 337, a first limiting switch 338 and a second limiting switch 339, where the limiting piece 337 is fixedly disposed on the rotating shaft 334 or the second gear 333; the first limit switch 338 and the second limit switch 339 are disposed on the mounting seat 336 at intervals, and are used for limiting the rotation angle of the upper cover 1.
By providing the limiting piece 337, the first limiting switch 338 and the second limiting switch 339, the rotation angle of the upper cover 1 is limited, thereby preventing the upper cover 1 from excessively rotating.
Alternatively, the limiting piece 337 has a fan shape.
The shape of the limiting piece 337 is designed to be fan-shaped, so that the first limiting switch 338 and the second limiting switch 339 can be matched better in the rotating process.
Optionally, the upper cover opening and closing mechanism 3 further includes a guide mounting seat 34, and the guide post 32 is slidably disposed in the guide mounting seat 34.
By arranging the guide mounting seat 34 to mount the guide post 32, the structure is simple, and the guide post 32 has better guidance quality.
Optionally, the upper cover opening and closing mechanism 3 further includes an auxiliary guide unit 36 and/or a buffer unit 37. By providing the auxiliary guide unit 36, the guide post 32 is more stable in lifting; by arranging the buffer units 37, the guide posts 32 are buffered after lifting, so that the cover of the upper cover 1 and the furnace body 2 is free from impact and stable.
Specifically, the structure of the auxiliary guiding unit 36 may adopt the structure shown in fig. 3, where the auxiliary guiding unit 36 includes a guiding rod 361, a first mounting plate 362 and a linear bearing 363, the first mounting plate 362 is fixedly disposed on the guiding post 32, the linear bearing 363 is fixedly disposed on the first mounting plate 362, and the guiding rod 361 is disposed parallel to the guiding post 32 and is used for guiding the lifting of the guiding post 32; one end of the guide rod 361 is fixedly connected to the mounting seat 336, the other end of the guide rod 361 is movably arranged in the linear bearing 363 in a penetrating manner, when the guide column 32 descends, the guide rod 361 descends relative to the first mounting plate 362, and when the guide column 32 ascends, the guide rod 361 ascends relative to the first mounting plate 362.
Specifically, the structure of the buffer unit 37 may be as shown in fig. 3, where the buffer unit 37 includes a buffer member 371 and a second mounting plate 372, and the second mounting plate 372 is fixedly disposed on the guide post 32 and above the first mounting plate 362. The first mounting plate 362 and the second mounting plate 372 are connected respectively at the both ends of buffer 371, and the flexible direction of buffer 371 is parallel with the extending direction of guide post 32 for the lift of guide post 32 is buffered. As shown in fig. 3, the buffer members 371 may be provided with one, two, three, etc. different numbers, and the buffer members 371 may be selected from springs, elastic sheets, silica gel mats with a certain elasticity, etc.
Optionally, the upper cover opening and closing mechanism 3 further includes a locking mechanism 35, where the locking mechanism 35 includes a first caliper 351, a second caliper 352, and a pull rod 353, where the first caliper 351 is fixedly connected to a side wall of the furnace body 2, and the pull rod 353 is hinged to the first caliper 351 and the second caliper 352, respectively, and is used to drive the second caliper 352 to lock or unlock the upper cover 1.
By arranging the locking mechanism 35, the upper cover 1 and the furnace body 2 are locked, and the structure is simple and reliable.
The working principle of the lower upper cover opening and closing mechanism 3 is specifically described below:
when the upper cover 1 needs to be unscrewed, the locking mechanism 35 is firstly opened, and the fixed connection relationship between the upper cover 1 and the furnace body 2 is released; the first drive 31 drives the guide post 32 to ascend, so that the upper cover 1 moves upwards for a certain distance along the vertical direction, and a gap exists between the upper cover and the furnace body 2; the second drive 331 drives the first gear 332 and the second gear 333 to rotate the upper cover 1 to the limit piece 337 to trigger the first limit switch 338;
when the upper cover 1 needs to be screwed back, the second drive 331 drives the first gear 332 and the second gear 333 to rotate the upper cover 1 to the limit piece 337 to trigger the second limit switch 339, i.e. the upper cover 1 is located right above the furnace body 2; the first drive 31 drives the guide post 32 to descend so that the upper cover 1 moves downwards for a certain distance along the vertical direction until contacting the furnace body 2; the upper cover 1 and the furnace body 2 are locked by a locking mechanism 35.
Optionally, the rotating mechanism 33 includes a rotating cylinder fixedly disposed at the second end of the guide post 32, and the driving end of the rotating cylinder is fixedly connected with the upper cover 1.
The rotary cylinder is adopted to drive the upper cover 1 to rotate and open and close, the installation is convenient, and the structure is simple and reliable.
Alternatively, the first drive 31 is any one of a cylinder, an electric cylinder, or a motor.
Optionally, the crystal growth furnace for silicon carbide further comprises at least one vacuum gauge 4, wherein the vacuum gauge 4 is arranged on the upper cover 1 and is used for measuring the vacuum degree in the crystal growth furnace for silicon carbide.
By arranging the vacuum gauge 4, the vacuum degree in the crystal growth furnace for silicon carbide can be timely monitored according to the requirement.
The present utility model and its embodiments have been described above schematically, without limitation, and the actual structure is not limited to this, but is shown in the drawings as one of the embodiments of the present utility model. Therefore, if one of ordinary skill in the art is informed by this disclosure, a structural manner and an embodiment similar to the technical scheme are not creatively designed without departing from the gist of the present utility model, and all the structural manners and the embodiment are considered to be within the protection scope of the present patent.
Claims (10)
1. The crystal growth furnace for the silicon carbide is characterized by comprising an upper cover, a furnace body and an upper cover opening and closing mechanism, wherein the upper cover is arranged on the furnace body; the upper cover opening and closing mechanism is used for opening or closing the upper cover and comprises a first drive, a guide column and a rotating mechanism, wherein the first drive is fixedly arranged on the furnace body, and the driving end of the first drive is connected with the first end of the guide column and used for driving the guide column to lift so as to enable the upper cover to lift relative to the furnace body; the rotating mechanism is arranged at the second end of the guide post, and the driving end of the rotating mechanism is connected with the upper cover and used for driving the upper cover to rotate relative to the furnace body.
2. The crystal growth furnace for silicon carbide according to claim 1, wherein the rotating mechanism comprises a second drive, a first gear, a second gear, a rotating shaft and a connecting block, the driving end of the second drive is connected with the first gear, the second gear is meshed with the first gear for transmission, the second gear is sleeved on the rotating shaft, and the rotating shaft is arranged at the second end of the guide post and can rotate relative to the guide post; the rotating shaft is fixedly connected with the upper cover through the connecting block.
3. The growth reactor for silicon carbide according to claim 2, wherein the rotating mechanism further comprises a mounting seat, and the rotating shaft is mounted at the second end of the guide post through the mounting seat; the connecting block is fixedly connected with the mounting seat.
4. The crystal growth furnace for silicon carbide according to claim 3, wherein the upper cover opening and closing mechanism further comprises a limit piece, a first limit switch and a second limit switch, wherein the limit piece is fixedly arranged on the rotating shaft or the second gear; the first limit switch and the second limit switch are arranged on the mounting seat at intervals and used for limiting the rotation angle of the upper cover.
5. The crystal growth furnace for silicon carbide according to claim 4, wherein the limiting plate has a fan shape.
6. The growth reactor for silicon carbide according to claim 1, wherein the upper cover opening and closing mechanism further comprises a guide mount, and the guide post is slidably disposed in the guide mount.
7. The crystal growth furnace for silicon carbide according to claim 1, wherein the upper cover opening and closing mechanism further comprises an auxiliary guiding unit and/or a buffer unit;
the auxiliary guide unit comprises a guide rod, and the guide rod is arranged parallel to the guide column and is used for guiding the lifting of the guide column;
the buffer unit comprises a buffer piece, and the extension direction of the buffer piece is parallel to the extension direction of the guide post and is used for buffering the lifting of the guide post.
8. The crystal growth furnace for silicon carbide according to claim 1, wherein the upper cover opening and closing mechanism further comprises a locking mechanism, the locking mechanism comprises a first caliper, a second caliper and a pull rod, the first caliper is fixedly connected to the side wall of the furnace body, and the pull rod is hinged with the first caliper and the second caliper respectively and is used for driving the second caliper to lock or unlock the upper cover.
9. The crystal growth furnace for silicon carbide according to claim 1, wherein the rotating mechanism comprises a rotating cylinder fixedly arranged at the second end of the guide post, and the driving end of the rotating cylinder is fixedly connected with the upper cover.
10. The growth reactor for silicon carbide as claimed in claim 1, further comprising at least one vacuum gauge provided on the upper cover for measuring a degree of vacuum in the growth reactor for silicon carbide.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320340172.8U CN219409987U (en) | 2023-02-28 | 2023-02-28 | Crystal growth furnace for silicon carbide |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320340172.8U CN219409987U (en) | 2023-02-28 | 2023-02-28 | Crystal growth furnace for silicon carbide |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219409987U true CN219409987U (en) | 2023-07-25 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202320340172.8U Active CN219409987U (en) | 2023-02-28 | 2023-02-28 | Crystal growth furnace for silicon carbide |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219409987U (en) |
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2023
- 2023-02-28 CN CN202320340172.8U patent/CN219409987U/en active Active
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