CN219403777U - Cutter non-contact height measurement mechanism of dicing saw - Google Patents

Abstract

The utility model discloses a cutter non-contact height measurement mechanism of a dicing saw, which comprises an NCS sensor, a supporting block, an NCS air jet pipe, an NCS water jet pipe and an NCS rotary cover plate, wherein one side of the top end of the supporting block is fixedly connected with a mounting plate, the back surface of the mounting plate is provided with a rotary air cylinder, an output shaft of the rotary air cylinder is fixedly connected with a fixing block through a fixing screw, the NCS rotary cover plate is fixedly connected with the fixing block, and the front surface of the rotary air cylinder is provided with a water jet pipe mounting block and an NCS mounting block. The NCS sensor is cleaned by the NCS jet pipe and the NCS water jet pipe, and after the height measurement is finished, the NCS jet pipe and the NCS water jet pipe are started to jet water and jet air to the NCS sensor, so that the cleanliness of the NCS sensor is improved, the detection precision of the NCS sensor is improved, and the measurement error is reduced.

Description

Cutter non-contact height measurement mechanism of dicing saw

Technical Field

The utility model relates to the technical field of dicing saw, in particular to a non-contact height measurement mechanism for a dicing saw cutter.

Background

Dicing presses are critical devices for post-semiconductor packaging that function to divide devices into individual circuit units or to separate large-size materials into smaller-size materials. In the cutting process, the Z bearing-carried aerostatic spindle drives the grinding wheel blade to scribe, and the blade is worn continuously along with the processing. In order to ensure that the relative position of the Z axis and the processed material is unchanged, height measurement is required to be carried out on the grinding wheel blade in the cutting process.

In the prior art, a Non-Contact height measuring device is adopted to meet the height measuring function of the dicing saw in the cutting process, the Non-Contact height measuring (namely NCS, english is fully called as Non-Contact Setup), and the working principle of the Non-Contact height measuring device is as follows: the height measurement is carried out by installing two opposite-type optical fiber sensors on the fixed block, and in the cutting process, the sensor is polluted by chips and cooling water generated during cutting and is adhered to the surface of the sensor, so that the height measurement precision is affected.

Therefore, how to provide a cutter non-contact height measurement mechanism of a dicing saw so as to solve the problems existing in the prior art, and has important significance for application.

Disclosure of Invention

In view of this, the purpose of this application provides a cutter non-contact height measurement mechanism of dicing saw to adopt non-contact height measurement device to be used for satisfying the height measurement function of dicing saw in the cutting process among the solution prior art, non-contact height measurement device's theory of operation is: the height measurement is carried out by installing two opposite-type optical fiber sensors on the fixed block, and in the cutting process, the sensor is polluted by chips and cooling water generated during cutting and is adhered to the surface of the sensor, so that the height measurement precision problem is influenced.

In order to achieve the above purpose, the present utility model provides the following technical solutions:

the utility model provides a cutter non-contact height finding mechanism of scribing machine, includes NCS sensor, supporting shoe, NCS fumarole, NCS spray pipe and NCS rotary cover plate, supporting shoe top one side fixedly connected with mounting panel, the back-mounted of mounting panel has rotary cylinder, rotary cylinder's output shaft passes through fixed screw fixedly connected with fixed block, NCS rotary cover plate and fixed block fixed connection, spray pipe installation piece and NCS installation piece are installed in rotary cylinder's front, NCS fumarole and NCS spray pipe are all installed in the top of spray pipe installation piece, air pipe joint and water pipe joint are installed to the bottom of spray pipe installation piece, air pipe joint and NCS spray pipe intercommunication, water pipe joint and NCS spray pipe intercommunication, NCS sensor is installed in one side on spray pipe installation piece top, NCS sensor is located the top of NCS installation piece.

Preferably, the number of the NCS air spraying pipes and the NCS water spraying pipes is two, the top ends of the NCS air spraying pipes and the NCS water spraying pipes are bent towards the direction where the NCS sensor is located, and the output ends of the NCS air spraying pipes and the NCS water spraying pipes face to the detection port of the NCS sensor.

Preferably, the NCS rotary cover plate is positioned on the front surface of the mounting plate, and the inner cavity of the mounting plate is larger than the sum of the space occupied by the NCS sensor, the NCS air spraying pipe and the NCS water spraying pipe.

Preferably, the rotation center of the air pipe joint is positioned at one side of the bottom end of the water spraying pipe installation block.

Compared with the prior art, the utility model has the beneficial effects that:

1. the NCS sensor is cleaned by arranging the NCS jet pipe and the NCS water jet pipe, and after the height measurement is finished, the NCS jet pipe and the NCS water jet pipe are started to jet water and jet air to the NCS sensor, so that the cleanliness of the NCS sensor is improved, and the detection precision of the NCS sensor is improved.

2. When the NCS sensor is not used for measuring, the rotary cylinder is started, and the rotary cylinder drives the NCS rotary cover plate to rotate through the fixed block, so that the NCS rotary cover plate covers the NCS sensor, chips generated during processing are prevented from adhering to the NCS sensor, the detection precision of the NCS sensor is improved, and the measurement error is reduced.

The foregoing description is only a summary of the technical solutions of the present application, so that the technical means of the present application may be implemented according to the content of the specification, and so that the foregoing and other objects, features and advantages of the present application may be more clearly understood, the following detailed description of the preferred embodiments of the present application is given in conjunction with the accompanying drawings.

The above and other objects, advantages and features of the present application will become more apparent to those skilled in the art from the following detailed description of the specific embodiments thereof, taken in conjunction with the accompanying drawings.

Drawings

In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, and it is obvious that the drawings in the following description are some embodiments of the present application, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art. Like elements or portions are generally identified by like reference numerals throughout the several figures. In the drawings, elements or portions thereof are not necessarily drawn to scale.

FIG. 1 is a schematic diagram of the structure of the present utility model;

FIG. 2 is a schematic diagram of the structure at the time of detection;

FIG. 3 is an enlarged view at A in FIG. 2;

fig. 4 is a schematic diagram of the structure when not detected.

In the figure: 1. a rotary cylinder; 2. a mounting plate; 3. a spray pipe mounting block; 4. NCS sensor; 5. NCS gas lance; 6. NCS spray pipe; 7. a support block; 8. a set screw; 9. an air pipe joint; 10. a water pipe joint; 11. NCS mounting blocks; 12. NCS rotates the cover plate; 13. a fixed block; 14. a shielding plate; 15. a slide bar; 16. a limiting plate; 17. a limit rod; 18. a spring; 19. and a water leakage hole.

Detailed Description

For the purposes of making the objects, technical solutions and advantages of the embodiments of the present application more clear, the technical solutions of the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is apparent that the described embodiments are some embodiments of the present application, but not all embodiments. In the following description, specific details such as specific configurations and components are provided merely to facilitate a thorough understanding of embodiments of the present application. It will therefore be apparent to those skilled in the art that various changes and modifications can be made to the embodiments described herein without departing from the scope and spirit of the application. In addition, descriptions of well-known functions and constructions are omitted in the embodiments for clarity and conciseness.

Furthermore, the present application may repeat reference numerals and/or letters in the various examples. This repetition is for the purpose of simplicity and clarity and does not in itself dictate a relationship between the various embodiments and/or configurations discussed.

The term "and/or" is herein merely an association relationship describing an associated object, meaning that there may be three relationships, e.g., a and/or B, may represent: the terms "/and" herein describe another associative object relationship, indicating that there may be two relationships, e.g., a/and B, may indicate that: the character "/" herein generally indicates that the associated object is an "or" relationship.

It is further noted that relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprise," "include," or any other variation thereof, are intended to cover a non-exclusive inclusion.

Referring to fig. 1-4, the utility model provides a technical scheme of a cutter non-contact height measurement mechanism of a dicing saw, which comprises the following steps: including NCS sensor 4, supporting shoe 7, NCS jet pipe 5, NCS spray pipe 6 and NCS rotatory apron 12, supporting shoe 7 top one side fixedly connected with mounting panel 2, the back-mounted of mounting panel 2 has rotatory cylinder 1, the output shaft of rotatory cylinder 1 passes through fixed screw 8 fixedly connected with fixed block 13, NCS rotatory apron 12 and fixed block 13 fixed connection, spray pipe installation piece 3 and NCS installation piece 11 are installed in the front of rotatory cylinder 1, NCS jet pipe 5 and NCS spray pipe 6 are all installed on the top of spray pipe installation piece 3, air pipe joint 9 and water pipe joint 10 are installed to the bottom of spray pipe installation piece 3, air pipe joint 9 and NCS jet pipe 5 intercommunication, water pipe joint 10 and NCS spray pipe 6 intercommunication, NCS sensor 4 is installed in one side on spray pipe installation piece 3 top, NCS sensor 4 is located the top of NCS installation piece 11.

The number of the NCS air spraying pipes 5 and the NCS water spraying pipes 6 is two, the top ends of the NCS air spraying pipes 5 and the NCS water spraying pipes 6 are bent towards the direction of the NCS sensor 4, and the output ends of the NCS air spraying pipes 5 and the NCS water spraying pipes 6 face to the detection port of the NCS sensor 4.

After height measurement is completed, water stains and dust can adhere to the NCS sensor 4 due to rotation of the spindle blade during height measurement, and water and air are sprayed and blown by the NCS air spraying pipe 5 and the NCS water spraying pipe 6, so that the NCS sensor 4 is cleaned, the service life is prolonged, the precision is improved, and errors are reduced.

The NCS rotating cover plate 12 is positioned on the front surface of the mounting plate 2, and the inner cavity of the mounting plate 2 is larger than the sum of the space occupied by the NCS sensor 4, the NCS air spraying pipe 5 and the NCS water spraying pipe 6.

The center of rotation of the air pipe joint 9 and one side that is located the spray pipe installation piece 3 bottom, the bottom sliding connection of fixed block 13 has slide bar 15, the both ends of slide bar 15 are fixedly connected with limiting plate 16 and shielding plate 14 respectively, the water leakage hole 19 has been seted up to the bottom of NCS rotatory apron 12, pass through spring 18 elastic connection between limiting plate 16 and the fixed block 13, the front fixedly connected with gag lever post 17 of mounting panel 2, when NCS rotatory apron 12 is not used, the opening of NCS rotatory apron 12 up at this moment, the inside of NCS rotatory apron 12 can accumulate a large amount of cooling water, if directly rotate NCS rotatory apron 12 for the cooling water splashes, pollutes NCS sensor 4 once more, in this embodiment, when the opening of NCS rotatory apron 12 up, gag lever post 17 extrudees limiting plate 16, and limiting plate 16 drives shielding plate 14 through slide bar 15 this moment, makes shielding plate 14 remove from the top of water leakage hole 19, makes the cooling water flow through water leakage hole 19, rotate NCS rotatory apron 12, make NCS rotatory apron 12 carry out under the effect of spring 18 under the shielding plate 18, prevent that the effect of shielding plate 14 from polluting NCS sensor 4 again.

When the NCS sensor 4 is not used, the rotary cylinder 1 is started, and the rotary cylinder 1 drives the NCS rotary cover plate 12 to rotate through the fixed block 13, so that the NCS rotary cover plate 12 covers the NCS sensor 4, and therefore chips generated during processing are prevented from adhering to the NCS sensor 4, the detection precision of the NCS sensor 4 is improved, and the measurement error is reduced.

The above description is only of the preferred embodiments of the present utility model and it is not intended to limit the scope of the present utility model, but various modifications and variations can be made by those skilled in the art. Variations, modifications, substitutions, integration and parameter changes may be made to these embodiments by conventional means or may be made to achieve the same functionality within the spirit and principles of the present utility model without departing from such principles and spirit of the utility model.

Claims (5)

1. The utility model provides a cutter non-contact height finding mechanism of dicing saw which characterized in that: including NCS sensor (4), supporting shoe (7), NCS jet pipe (5), NCS spray pipe (6) and NCS rotary cover plate (12), supporting shoe (7) top one side fixedly connected with mounting panel (2), the back-mounted of mounting panel (2) has revolving cylinder (1), the output shaft of revolving cylinder (1) passes through fixed screw (8) fixedly connected with fixed block (13), NCS rotary cover plate (12) and fixed block (13) fixed connection, spray pipe installation piece (3) and NCS installation piece (11) are installed in the front of revolving cylinder (1), the top in spray pipe installation piece (3) is all installed in NCS jet pipe (5) and NCS spray pipe (6), air pipe joint (9) and water pipe joint (10) are installed to the bottom of spray pipe installation piece (3), air pipe joint (9) and NCS jet pipe (5) communicate, water pipe joint (10) and spray pipe (6) intercommunication, NCS sensor (4) install in NCS installation piece (3) top one side that NCS sensor (4) is located.

2. A dicing saw cutter non-contact height finding mechanism according to claim 1, wherein: the number of the NCS air spraying pipes (5) and the NCS water spraying pipes (6) is two, the top ends of the NCS air spraying pipes (5) and the NCS water spraying pipes (6) are bent towards the direction where the NCS sensor (4) is located, and the output ends of the NCS air spraying pipes (5) and the NCS water spraying pipes (6) face the detection port of the NCS sensor (4).

3. A dicing saw cutter non-contact height finding mechanism according to claim 2, wherein: the NCS rotary cover plate (12) is positioned on the front surface of the mounting plate (2), and the inner cavity of the mounting plate (2) is larger than the sum of the space occupied by the NCS sensor (4), the NCS air spraying pipe (5) and the NCS water spraying pipe (6).

4. A dicing saw cutter non-contact height measurement mechanism according to claim 3, wherein: the rotation center of the air pipe joint (9) is positioned at one side of the bottom end of the water spray pipe installation block (3).

5. A dicing saw cutter non-contact height finding mechanism according to claim 4, wherein: the novel water leakage protection device is characterized in that a sliding rod (15) is slidably connected to the bottom end of the fixed block (13), a limiting plate (16) and a shielding plate (14) are fixedly connected to the two ends of the sliding rod (15) respectively, a water leakage hole (19) is formed in the bottom end of the NCS rotary cover plate (12), the limiting plate (16) is elastically connected with the fixed block (13) through a spring (18), and a limiting rod (17) is fixedly connected to the front face of the mounting plate (2).