CN219385394U

CN219385394U - Single crystal furnace thermal field heater assembly and single crystal furnace

Info

Publication number: CN219385394U
Application number: CN202223109503.1U
Authority: CN
Inventors: 蔡璋榕; 郑珠兰
Original assignee: Fujian Xinrui Crystal Science And Technology Co ltd
Current assignee: Fujian Xinrui Crystal Science And Technology Co ltd
Priority date: 2022-11-23
Filing date: 2022-11-23
Publication date: 2023-07-21
Anticipated expiration: 2032-11-23

Abstract

The utility model belongs to the technical field of single crystal furnaces, in particular to a single crystal furnace thermal field heater assembly and a single crystal furnace, aiming at the problems that the existing integral structure leads to the integral replacement of a heater, the cost is high and the resource waste is caused, the utility model provides the following scheme which comprises a heating assembly; the heating components are formed by splicing a plurality of annularly distributed U-shaped heating frames; the plurality of groups of connecting mechanisms are arranged between two adjacent U-shaped heating frames and used for splicing the U-shaped heating frames; the lower side of the heating component is provided with a connecting ring, and the plurality of positioning mechanisms are respectively arranged between the plurality of U-shaped heating frames and the connecting ring; the electrode is fixedly connected in the connecting ring, so that the working efficiency is improved, and the cost for maintaining the heating assembly is reduced.

Description

Single crystal furnace thermal field heater assembly and single crystal furnace

Technical Field

The utility model relates to the technical field of single crystal furnaces, in particular to a single crystal furnace thermal field heater assembly and a single crystal furnace.

Background

The single crystal furnace is a device for growing dislocation-free single crystals by using a Czochralski method in an inert gas (nitrogen and helium are mainly) environment, wherein a graphite heater is used for melting polycrystalline materials such as polycrystalline silicon and the like.

In the prior art, the heater structure of the single crystal furnace is mostly as an integrated structure as shown in fig. 8, the volume is larger, when the heater is damaged, the heater needs to be integrally replaced, the heater is inconvenient to disassemble and maintain due to the larger volume, and meanwhile, the heater is not damaged in a large area due to the integrated structure, but the heater needs to be integrally replaced due to the integrated structure, so that the cost is higher, and the resource waste is caused.

In order to solve the problems, the utility model provides a single crystal furnace thermal field heater assembly and a single crystal furnace.

Disclosure of Invention

The utility model provides a single crystal furnace thermal field heater assembly and a single crystal furnace, which solve the defects that in the prior art, the heater needs to be replaced integrally due to an integral structure, the cost is high, and the resource waste is caused.

The utility model provides the following technical scheme:

a single crystal furnace thermal field heater assembly comprises a heating assembly; the heating assemblies are formed by splicing a plurality of annularly distributed U-shaped heating frames; the plurality of groups of connecting mechanisms are arranged between two adjacent U-shaped heating frames and used for splicing the U-shaped heating frames; the lower side of the heating assembly is provided with a connecting ring, and the plurality of positioning mechanisms are respectively arranged between the plurality of U-shaped heating frames and the connecting ring; the electrode is fixedly connected in the connecting ring.

In one possible design, each group of the connecting mechanisms comprises a connecting clamping block fixedly connected to the side end of the U-shaped heating frame, the other side end of the U-shaped heating frame is provided with a connecting clamping plate, and the connecting clamping blocks are clamped with the connecting clamping plates.

In one possible design, every group positioning mechanism all includes the constant head tank of seting up in the go-between top, the bottom fixedly connected with locating piece of U type heating frame, constant head tank and locating piece assorted, first recess has been seted up in the locating piece, sliding connection has two joint boards in the first recess, two fixedly connected with joint spring between the joint board, two equal fixedly connected with joint piece of tip that the joint board kept away from mutually, the joint groove has all been seted up to the both sides inner wall of constant head tank, two the joint piece respectively with two joint groove looks joint.

In one possible design, a second groove communicated with the connecting clamping plate is formed in the U-shaped heating frame, and a baffle plate is connected in the second groove in a sliding mode.

In one possible design, the top end of the baffle is fixedly connected with a poking plate, four positioning clamping grooves are formed in the second groove, two ends of the poking plate are fixedly connected with elastic clamping parts, and the two elastic clamping parts are respectively clamped with the two corresponding positioning clamping grooves.

It is to be understood that both the foregoing general description and the following detailed description are exemplary and explanatory only and are not restrictive of the utility model as claimed.

According to the utility model, the purpose of connecting two U-shaped heating frames is achieved by inserting the connecting clamping blocks into the connecting clamping plates; the connecting clamping blocks are inserted into the connecting clamping plates, the connecting clamping plates are not fully filled with the connecting clamping plates, the baffle plates are pushed into the connecting clamping plates by pushing the baffle plates to slide in the second grooves, and the baffle plates are positioned on the upper sides of the connecting clamping blocks to limit the connecting clamping blocks, so that the two U-shaped heating frames are connected stably;

in the utility model, the two elastic clamping parts keep the baffle stable when the baffle is positioned in the second groove, and can also keep the baffle stable when the baffle is positioned on the upper side of the connecting clamping block, so that the connection stability of a plurality of U-shaped heating frames can be ensured under the condition of no external force interference;

according to the utility model, the plurality of U-shaped heating frames are spliced through the connecting mechanism and are connected with the connecting ring through the positioning mechanism, when the U-shaped heating frames are required to be replaced, the connection of the connecting mechanism between the two U-shaped heating frames is only required to be released, the U-shaped heating frames are convenient to detach when the heating assembly breaks down, local quick detachment and replacement can be performed, the working efficiency is improved, and the cost for maintaining the heating assembly is reduced.

Drawings

FIG. 1 is a front perspective view of a single crystal furnace thermal field heater assembly and a single crystal furnace provided by an embodiment of the present utility model;

FIG. 2 is a first partial cross-sectional view of a single crystal furnace thermal field heater assembly and a single crystal furnace according to an embodiment of the present utility model;

FIG. 3 is a first partial exploded view of a single crystal furnace thermal field heater assembly and a single crystal furnace according to an embodiment of the present utility model;

FIG. 4 is a diagram of a second partial explosion diagram of a single crystal furnace and a thermal field heater assembly for the single crystal furnace according to an embodiment of the present utility model;

FIG. 5 is an enlarged view of a portion of the single crystal furnace at A in FIG. 4 and a single crystal furnace thermal field heater assembly according to an embodiment of the present utility model;

FIG. 6 is a bottom view of a single crystal furnace thermal field heater assembly and a single crystal furnace according to an embodiment of the present utility model;

FIG. 7 is an enlarged view of a single crystal furnace thermal field heater assembly and a portion of the single crystal furnace at B in FIG. 6 according to an embodiment of the present utility model;

FIG. 8 is a schematic diagram of a heating assembly of a single crystal furnace according to the prior art.

Reference numerals:

1. a heating assembly; 101. a U-shaped heating frame; 102. a connecting ring; 2. an electrode; 3. a positioning groove; 4. a positioning block; 5. a clamping groove; 6. a clamping block; 7. a clamping plate; 8. a first groove; 9. a clamping spring; 10. connecting a clamping block; 11. the connecting clamping plate; 12. a second groove; 13. a baffle; 14. a pulling piece; 15. an elastic clamping part; 16. and positioning the clamping groove.

Detailed Description

Embodiments of the present utility model will be described below with reference to the accompanying drawings in the embodiments of the present utility model.

In describing embodiments of the present utility model, it should be noted that, unless explicitly stated and limited otherwise, the terms "coupled" and "mounted" should be interpreted broadly, and for example, "coupled" may or may not be detachably coupled; may be directly connected or indirectly connected through an intermediate medium. In addition, "communication" may be direct communication or may be indirect communication through an intermediary. Wherein, "fixed" means that the relative positional relationship is not changed after being connected to each other. References to orientation terms, such as "inner", "outer", "top", "bottom", etc., in the embodiments of the present utility model are merely to refer to the orientation of the drawings and, therefore, the use of orientation terms is intended to better and more clearly illustrate and understand the embodiments of the present utility model, rather than to indicate or imply that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and are therefore not to be construed as limiting the embodiments of the present utility model.

In embodiments of the present utility model, the terms "first," "second," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include one or more such feature.

In the embodiment of the present utility model, "and/or" is merely an association relationship describing an association object, and indicates that three relationships may exist, for example, a and/or B may indicate: a exists alone, A and B exist together, and B exists alone. In addition, the character "/" herein generally indicates that the front and rear associated objects are an "or" relationship.

Reference in the specification to "one embodiment" or "some embodiments" or the like means that a particular feature, structure, or characteristic described in connection with the embodiment is included in one or more embodiments of the utility model. Thus, appearances of the phrases "in one embodiment," "in some embodiments," "in other embodiments," and the like in the specification are not necessarily all referring to the same embodiment, but mean "one or more but not all embodiments" unless expressly specified otherwise. The terms "comprising," "including," "having," and variations thereof mean "including but not limited to," unless expressly specified otherwise.

Example 1

Referring to fig. 1-7, a single crystal furnace thermal field heater assembly comprises a heating assembly 1; the heating assembly 1 is formed by splicing a plurality of U-shaped heating frames 101 distributed in an annular mode; the plurality of groups of connecting mechanisms are arranged between two adjacent U-shaped heating frames 101 and used for splicing the U-shaped heating frames 101; the lower side of the heating assembly 1 is provided with a connecting ring 102, and the plurality of positioning mechanisms are respectively arranged between the plurality of U-shaped heating frames 101 and the connecting ring 102; electrode 2, electrode 2 is fixedly connected within connecting ring 102.

Through splice a plurality of U type heating framves 101 through coupling mechanism to be connected it through positioning mechanism and go with go-between 102, when needs change, only need remove coupling mechanism's connection between two U type heating framves 101, be convenient for dismantle when heating element 1 breaks down, can carry out local quick dismantlement and change.

Referring to fig. 3-6, each group of connecting mechanisms comprises a connecting clamping block 10 fixedly connected to the side end of the U-shaped heating frame 101, and a connecting clamping plate 11 is arranged at the other side end of the U-shaped heating frame 101, and the connecting clamping blocks 10 are clamped with the connecting clamping plates 11.

The purpose of connecting the two U-shaped heating frames 101 is achieved by inserting the connecting clamping blocks 10 into the connecting clamping plates 11.

Referring to fig. 4, 5 and 7, each set of positioning mechanism includes a positioning groove 3 formed in the top end of the connecting ring 102, a positioning block 4 is fixedly connected to the bottom end of the u-shaped heating frame 101, the positioning groove 3 is matched with the positioning block 4, a first groove 8 is formed in the positioning block 4, two clamping plates 7 are slidably connected in the first groove 8, a clamping spring 9 is fixedly connected between the two clamping plates 7, clamping blocks 6 are fixedly connected to the ends, away from each other, of the two clamping plates 7, clamping grooves 5 are formed in the inner walls of two sides of the positioning groove 3, and the two clamping blocks 6 are respectively clamped with the two clamping grooves 5.

The U-shaped heating frames 101 are arranged on the upper sides of the electrodes 2 by means of the clamping connection of the clamping blocks 6 and the clamping grooves 5, and a base is provided for the splicing of the plurality of U-shaped heating frames 101 through the electrodes 2.

Example 2

Referring to fig. 5 and 7, a second groove 12 communicated with the connection clamping plate 11 is formed in the u-shaped heating frame 101, and a baffle 13 is slidably connected in the second groove 12.

Referring to fig. 5 and 7, the top end of the baffle 13 is fixedly connected with a pulling plate 14, four positioning clamping grooves 16 are formed in the second groove 12, two ends of the pulling plate 14 are fixedly connected with elastic clamping portions 15, and the two elastic clamping portions 15 are respectively clamped with the two corresponding positioning clamping grooves 16.

The purpose of connecting two U-shaped heating frames 101 is achieved by inserting the connecting clamping blocks 10 into the connecting clamping plates 11;

further, the connecting clamping block 10 is inserted into the connecting clamping plate 11, the connecting clamping block 10 is not fully filled with the connecting clamping plate 11, the baffle 13 is pushed into the connecting clamping plate 11 by pushing the baffle 13 to slide in the second groove 12, and the baffle 13 is positioned on the upper side of the connecting clamping block 10 to limit the connecting clamping block 10, so that the two U-shaped heating frames 101 are connected stably;

further, in order to facilitate moving the baffle 13, the top of the baffle 13 is provided with a poking piece 14 to facilitate pushing the baffle 13 to slide in the second groove 12, both ends of the poking piece 14 are provided with elastic clamping portions 15, the two elastic clamping portions 15 keep the baffle 13 stable when the baffle 13 is positioned in the second groove 12, the baffle 13 can be kept stable when the baffle 13 is positioned on the upper side of the connecting fixture block 10, and the connection stability of a plurality of U-shaped heating frames 101 can be ensured under the condition of no external force interference.

The working principle and the using flow of the technical scheme are as follows: the U-shaped heating frames 101 are arranged on the upper side of the electrode 2 by means of the clamping connection of the clamping blocks 6 and the clamping grooves 5 through the positioning blocks 4 in the positioning grooves 3 in a plugging manner, a base is provided for the splicing of the plurality of U-shaped heating frames 101 through the electrode 2, and the purpose of connecting the two U-shaped heating frames 101 is achieved by plugging the connecting clamping blocks 10 into the connecting clamping plates 11; the connecting clamping block 10 is inserted into the connecting clamping plate 11, the connecting clamping block 10 is not fully filled with the connecting clamping plate 11, the baffle 13 is pushed into the connecting clamping plate 11 by pushing the baffle 13 to slide in the second groove 12, and the baffle 13 is positioned on the upper side of the connecting clamping block 10 to limit the connecting clamping block 10, so that the two U-shaped heating frames 101 are connected stably; in order to facilitate moving the baffle 13, a pulling piece 14 is arranged at the top of the baffle 13 to facilitate pushing the baffle 13 to slide in the second groove 12, two ends of the pulling piece 14 are respectively provided with an elastic clamping portion 15, the two elastic clamping portions 15 keep the baffle 13 stable when the baffle 13 is positioned in the second groove 12, the baffle 13 can be kept stable when the baffle 13 is positioned at the upper side of the connecting clamping block 10, and the connection stability of a plurality of U-shaped heating frames 101 can be ensured under the condition of no external force interference.

The present utility model is not limited to the above embodiments, and any person skilled in the art can easily think about the changes or substitutions within the technical scope of the present utility model, and the changes or substitutions are intended to be covered by the scope of the present utility model; embodiments of the utility model and features of the embodiments may be combined with each other without conflict. Therefore, the protection scope of the utility model is subject to the protection scope of the claims.

Claims

1. A single crystal furnace thermal field heater assembly, comprising:

a heating assembly (1);

the heating assembly (1) is formed by splicing a plurality of U-shaped heating frames (101) distributed in an annular mode;

the connecting mechanisms are arranged between two adjacent U-shaped heating frames (101) and used for splicing the U-shaped heating frames (101);

the lower side of the heating assembly (1) is provided with a connecting ring (102), and the plurality of positioning mechanisms are respectively arranged between the plurality of U-shaped heating frames (101) and the connecting ring (102);

the electrode (2), electrode (2) fixed connection is in go-between (102).

2. The single crystal furnace thermal field heater assembly according to claim 1, wherein each group of the connecting mechanisms comprises a connecting clamping block (10) fixedly connected to the side end of the U-shaped heating frame (101), the other side end of the U-shaped heating frame (101) is provided with a connecting clamping plate (11), and the connecting clamping blocks (10) are clamped with the connecting clamping plates (11).

3. The single crystal furnace thermal field heater assembly according to claim 2, wherein a second groove (12) communicated with the connecting clamping plate (11) is formed in the U-shaped heating frame (101), and a baffle plate (13) is slidably connected in the second groove (12).

4. The single crystal furnace thermal field heater assembly according to claim 3, wherein each group of positioning mechanisms comprises a positioning groove (3) formed in the top end of a connecting ring (102), a positioning block (4) is fixedly connected to the bottom end of a U-shaped heating frame (101), the positioning groove (3) is matched with the positioning block (4), a first groove (8) is formed in the positioning block (4), two clamping plates (7) are connected in the first groove (8) in a sliding manner, clamping springs (9) are fixedly connected between the two clamping plates (7), clamping blocks (6) are fixedly connected to the end portions, away from each other, of the two clamping plates (7), clamping grooves (5) are formed in the inner walls of two sides of the positioning groove (3), and the two clamping blocks (6) are respectively clamped with the two clamping grooves (5).

5. The single crystal furnace thermal field heater assembly according to claim 4, wherein a pulling sheet (14) is fixedly connected to the top end of the baffle plate (13), four positioning clamping grooves (16) are formed in the second groove (12), elastic clamping portions (15) are fixedly connected to two ends of the pulling sheet (14), and the two elastic clamping portions (15) are respectively clamped with the two corresponding positioning clamping grooves (16).

6. A single crystal furnace comprising a single crystal furnace thermal field heater assembly according to any one of claims 1-5.